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    Piezoelectric print-head and method of manufacture
    1.
    发明授权
    Piezoelectric print-head and method of manufacture 失效
    压电印刷头和制造方法

    公开(公告)号：US06592210B2

    公开(公告)日：2003-07-15

    申请号：US10064716

    申请日：2002-08-09

    申请人： Chen-Hua Lin ,  Wen-Chung Lu ,  Ming-Hsun Yang ,  Guey-Chyuan Chen ,  Chih-Chieh Hsu

    发明人： Chen-Hua Lin ,  Wen-Chung Lu ,  Ming-Hsun Yang ,  Guey-Chyuan Chen ,  Chih-Chieh Hsu

    IPC分类号： B41J2045

    CPC分类号： B41J2/1631 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1626 ,  B41J2/1632 ,  B41J2/1643 ,  B41J2202/03 ,  Y10T29/42 ,  Y10T29/49126 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49401

    摘要： A piezoelectric ink-jet printhead that uses a metallic layer and a thick film layer with a slot hole therein instead of a ceramic vibration plate and an ink layer. The piezoelectric layer and the upper electrode layer are formed inside the ink cavity so that overall thickness of the print head is reduced. To form the ink-jet print head, a metallic layer and a lower electrode layer are sequentially formed over a substrate. A patterned piezoelectric layer and an upper electrode layer are sequentially formed over the lower electrode layer. A patterned thick film layer with a slot hole therein is formed over the metallic layer. The thick film layer and the metallic layer together form a cavity that encloses the piezoelectric layer and the upper electrode layer. A nozzle plate having a nozzle thereon is attached to the thick film layer. The nozzle plate, the thick film layer and the metallic layer together form an ink cavity. The hole in the nozzle is continuous with the ink cavity.

    摘要翻译： 一种压电喷墨打印头，其使用金属层和具有槽孔的厚膜层而不是陶瓷振动板和油墨层。 压电层和上电极层形成在墨腔内部，使得打印头的总体厚度减小。 为了形成喷墨打印头，在衬底上顺序形成金属层和下电极层。 在下电极层上依次形成图案化的压电层和上电极层。 在金属层上形成有在其中具有槽孔的图案化的厚膜层。 厚膜层和金属层一起形成包围压电层和上电极层的空腔。 其上具有喷嘴的喷嘴板附接到厚膜层。 喷嘴板，厚膜层和金属层一起形成油墨腔。 喷嘴中的孔与油墨腔连续。

    Method of manufacturing a piezoelectric print-head
    2.
    发明授权
    Method of manufacturing a piezoelectric print-head 失效
    压电打印头的制造方法

    公开(公告)号：US06857186B2

    公开(公告)日：2005-02-22

    申请号：US10249939

    申请日：2003-05-21

    申请人： Chen-Hua Lin ,  Wen-Chung Lu ,  Ming-Hsun Yang ,  Guey-Chyuan Chen ,  Chih-Chieh Hsu

    发明人： Chen-Hua Lin ,  Wen-Chung Lu ,  Ming-Hsun Yang ,  Guey-Chyuan Chen ,  Chih-Chieh Hsu

    IPC分类号： B41J2/045 ,  B41J2/055 ,  B41J2/14 ,  B41J2/16 ,  B23P17/00 ,  B21D53/76

    CPC分类号： B41J2/1631 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1626 ,  B41J2/1632 ,  B41J2/1643 ,  B41J2202/03 ,  Y10T29/42 ,  Y10T29/49126 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49401

    摘要： A method of manufacturing a piezoelectric ink-jet print-head uses a metallic layer and a thick film layer with a slot hole therein instead of a ceramic vibration plate and an ink layer. The piezoelectric layer and the upper electrode layer are formed inside the ink cavity so that overall thickness of the print head is reduced. To form the ink-jet print head, a metallic layer and a lower electrode layer are sequentially formed over a substrate. A patterned piezoelectric layer and an upper electrode layer are sequentially formed over the lower electrode layer. A patterned thick film layer with a slot hole therein is formed over the metallic layer. The thick film layer and the metallic layer together form a cavity that encloses the piezoelectric layer and the upper electrode layer. A nozzle plate having a nozzle thereon is attached to the thick film layer. The nozzle plate, the thick film layer and the metallic layer together form an ink cavity. The hole in the nozzle is continuous with the ink cavity.

    摘要翻译： 压电喷墨打印头的制造方法使用金属层和具有槽孔的厚膜层而不是陶瓷振动板和油墨层。 压电层和上电极层形成在墨腔内部，使得打印头的总体厚度减小。 为了形成喷墨打印头，在衬底上顺序形成金属层和下电极层。 在下电极层上依次形成图案化的压电层和上电极层。 在金属层上形成有在其中具有槽孔的图案化的厚膜层。 厚膜层和金属层一起形成包围压电层和上电极层的空腔。 其上具有喷嘴的喷嘴板附接到厚膜层。 喷嘴板，厚膜层和金属层一起形成油墨腔。 喷嘴中的孔与油墨腔连续。

    Method of using photolithography and etching for forming a nozzle plate of an inkjet print head
    3.
    发明授权
    Method of using photolithography and etching for forming a nozzle plate of an inkjet print head 失效
    使用光刻和蚀刻来形成喷墨打印头的喷嘴板的方法

    公开(公告)号：US06773094B2

    公开(公告)日：2004-08-10

    申请号：US10348630

    申请日：2003-01-22

    申请人： Kung Linliu ,  Ming-Hsun Yang ,  Arnold Chang-mou Yang ,  Guey-Chyuan Chen ,  Chih-Chieh Hsu

    发明人： Kung Linliu ,  Ming-Hsun Yang ,  Arnold Chang-mou Yang ,  Guey-Chyuan Chen ,  Chih-Chieh Hsu

    IPC分类号： B41J204

    CPC分类号： B41J2/1628 ,  B41J2/162 ,  B41J2/1631 ,  Y10T29/49401

    摘要： A method of forming a nozzle plate of an inkjet print head. A silicon chip is provided with an activated device and a first film is formed on the silicon chip, with a first opening corresponding to the activated device. Then, a second film is formed on the first film. Next, a photoresist layer is formed on the second film, such that the photoresist layer has a second opening corresponding to the first opening. Next, the second film under the second opening of the photoresist layer is etched to form a via in the second film passing through the first opening.

    摘要翻译： 一种形成喷墨打印头的喷嘴板的方法。 硅芯片设置有激活的器件，并且第一膜形成在硅芯片上，具有对应于激活器件的第一开口。 然后，在第一膜上形成第二膜。 接下来，在第二膜上形成光致抗蚀剂层，使得光致抗蚀剂层具有对应于第一开口的第二开口。 接下来，蚀刻在光致抗蚀剂层的第二开口下方的第二膜，以在通过第一开口的第二膜中形成通孔。