发明授权
- 专利标题： Method of using photolithography and etching for forming a nozzle plate of an inkjet print head
- 专利标题（中）： 使用光刻和蚀刻来形成喷墨打印头的喷嘴板的方法
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申请号： US10348630申请日： 2003-01-22
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公开(公告)号： US06773094B2公开(公告)日： 2004-08-10
- 发明人: Kung Linliu , Ming-Hsun Yang , Arnold Chang-mou Yang , Guey-Chyuan Chen , Chih-Chieh Hsu
- 申请人： Kung Linliu , Ming-Hsun Yang , Arnold Chang-mou Yang , Guey-Chyuan Chen , Chih-Chieh Hsu
- 优先权： TW91101783A 20020201
- 主分类号： B41J204
- IPC分类号： B41J204
摘要：
A method of forming a nozzle plate of an inkjet print head. A silicon chip is provided with an activated device and a first film is formed on the silicon chip, with a first opening corresponding to the activated device. Then, a second film is formed on the first film. Next, a photoresist layer is formed on the second film, such that the photoresist layer has a second opening corresponding to the first opening. Next, the second film under the second opening of the photoresist layer is etched to form a via in the second film passing through the first opening.
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