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公开(公告)号：US08609238B2
公开(公告)日：2013-12-17
申请号：US13156669
申请日：2011-06-09
申请人： Matthew E. Colburn , Gregory Breyta
发明人： Matthew E. Colburn , Gregory Breyta
CPC分类号： C09D153/00 , C08F255/00 , C08F293/005 , C08L51/06 , C08L53/00 , Y10T428/24612 , Y10T428/261 , Y10T428/269 , Y10T428/31855 , Y10T428/31938 , C08L2666/02
摘要： A structure that comprises a substrate; a cross-linked random free radical copolymer on the substrate; and a self-assembled patterned diblock copolymer film on the random copolymer; wherein the random copolymer is energy neutral with respect to each block of the diblock copolymer film. A method of making the structure is provided.
摘要翻译： 一种包括基底的结构; 基底上交联的无规自由基共聚物; 和无规共聚物上自组装图案化的二嵌段共聚物膜; 其中所述无规共聚物相对于所述二嵌段共聚物膜的每个嵌段是能量中和的。 提供了制作该结构的方法。
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2.发明申请公开(公告)号：US20090177017A1
公开(公告)日：2009-07-09
申请号：US12402680
申请日：2009-03-12
CPC分类号： C07C69/653 , C07C31/42 , C07C35/48 , C07C35/52 , C07C69/65 , C07C2601/04 , C07C2601/08 , C07C2602/42
摘要： The invention provides alkene fluoroalkanol and fluorinated polyol precursors to fluoroalkanol-substituted α,β-unsaturated esters. The fluoroalkanol-substituted α,β-unsaturated esters are olefins that can be readily polymerized to provide fluoroalkanol-substituted polymers useful in lithographic photoresist compositions. Also provided are methods for synthesizing the alkene fluoroalkanol and fluorinated polyol precursors.
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3.发明申请公开(公告)号：US20090036717A1
公开(公告)日：2009-02-05
申请号：US12253039
申请日：2008-10-16
IPC分类号： C07C33/42
CPC分类号： C07C33/44 , C07C33/423 , C07C69/653 , C07C69/753 , C07C2601/10 , C07C2601/16 , C07C2602/42
摘要： The invention provides alkene fluoroalkanol and fluorinated polyol precursors to fluoroalkanol-substituted α,β-unsaturated esters. The fluoroalkanol-substituted α,β-unsaturated esters are olefins that can be readily polymerized to provide fluoroalkanol-substituted polymers useful in lithographic photoresist compositions. Also provided are methods for synthesizing the alkene fluoroalkanol and fluorinated polyol precursors.
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4.发明授权Precursors to fluoroalkanol-containing olefin monomers, and associated methods of synthesis and use 失效含氟链烷醇的烯烃单体的前体，以及相关的合成和使用方法公开(公告)号：US07442828B2
公开(公告)日：2008-10-28
申请号：US11844806
申请日：2007-08-24
IPC分类号： C07C69/013 , C07C35/14
CPC分类号： C07C69/653 , C07C31/42 , C07C35/48 , C07C35/52 , C07C69/65 , C07C2601/04 , C07C2601/08 , C07C2602/42
摘要： The invention provides alkene fluoroalkanol and fluorinated polyol precursors to fluoroalkanol-substituted α,β-unsaturated esters. The fluoroalkanol-substituted α,β-unsaturated esters are olefins that can be readily polymerized to provide fluoroalkanol-substituted polymers useful in lithographic photoresist compositions. Also provided are methods for synthesizing the alkene fluoroalkanol and fluorinated polyol precursors.
摘要翻译： 本发明提供氟链烷醇取代的α，β-不饱和酯的烯烃氟烷醇和氟化多元醇前体。 氟烷醇取代的α，β-不饱和酯是可以容易地聚合以提供用于平版印刷光刻胶组合物的氟代烷醇取代的聚合物的烯烃。 还提供了用于合成烯烃氟烷醇和氟化多元醇前体的方法。
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5.发明申请公开(公告)号：US20080033198A1
公开(公告)日：2008-02-07
申请号：US11844831
申请日：2007-08-24
申请人： Gregory Breyta , Richard Dipietro , Daniel Dawson
发明人： Gregory Breyta , Richard Dipietro , Daniel Dawson
IPC分类号： C07C69/612 , C07C35/14
CPC分类号： C07C69/653 , C07C31/42 , C07C35/48 , C07C35/52 , C07C69/65 , C07C2601/04 , C07C2601/08 , C07C2602/42
摘要： The invention provides alkene fluoroalkanol and fluorinated polyol precursors to fluoroalkanol-substituted α,β-unsaturated esters. The fluoroalkanol-substituted α,β-unsaturated esters are olefins that can be readily polymerized to provide fluoroalkanol-substituted polymers useful in lithographic photoresist compositions. Also provided are methods for synthesizing the alkene fluoroalkanol and fluorinated polyol precursors.
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公开(公告)号：US07014980B2
公开(公告)日：2006-03-21
申请号：US10916934
申请日：2004-08-12
申请人： Robert David Allen , Gregory Breyta , Phillip Brock , Richard A. DiPietro , Debra Fenzel-Alexander , Carl Larson , David R. Medeiros , Dirk Pfeiffer , Ratnam Sooriyakumaran , Hoa D. Truong , Gregory M. Wallraff
发明人： Robert David Allen , Gregory Breyta , Phillip Brock , Richard A. DiPietro , Debra Fenzel-Alexander , Carl Larson , David R. Medeiros , Dirk Pfeiffer , Ratnam Sooriyakumaran , Hoa D. Truong , Gregory M. Wallraff
CPC分类号： C08F220/22 , C08F220/28 , G03F7/0046 , G03F7/0382 , Y10S430/108
摘要： A photoresist composition is provided that includes a polymer having at least one acrylate or methacrylate monomer having a formula where R1 represents hydrogen (H), a linear or branched alkyl group of 1 to 20 carbons, or a semi- or perfluorinated linear or branched alkyl group of 1 to 20 carbons; and where R2 represents an unsubstituted aliphatic group or a substituted aliphatic group having zero or one trifluoromethyl (CF3) group attached to each carbon of the substituted aliphatic group, or a substituted or unsubstituted aromatic group; and where R3 represents hydrogen (H), methyl (CH3), trifluoromethyl (CF3), difluoromethyl(CHF2), fluoromethyl (CH2F), or a semi- or perfluorinated aliphatic chain; and where R4 represents trifluoromethyl (CF3), difluoromethyl (CHF2), fluoromethyl (CH2F), or a semi- or perfluorinated substituted or unsubstituted aliphatic group. A method of patterning a substrate using the photoresist composition is also provided herein.
摘要翻译： 提供了一种光致抗蚀剂组合物，其包括具有至少一个具有下式的丙烯酸酯或甲基丙烯酸酯单体的聚合物，其中R 1表示氢（H），1至20个碳的直链或支链烷基或 1至20个碳的半或全氟化直链或支链烷基; 其中R 2表示未取代的脂族基团或具有与取代的脂族基团的每个碳上连接的具有0或1个三氟甲基（CF 3 N 3）基团的取代的脂族基团，或 取代或未取代的芳基; 其中R 3表示氢（H），甲基（CH 3），三氟甲基（CF 3），二氟甲基（CHF 2） （CH 2 CO 2），或半或全氟化脂族链; 并且其中R 4表示三氟甲基（CF 3 S），二氟甲基（CH 2）2，氟甲基（CH 2 CH 2） ）或半或全氟取代或未取代的脂族基团。 本文还提供了使用光致抗蚀剂组合物图案化衬底的方法。
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公开(公告)号：US20050130078A1
公开(公告)日：2005-06-16
申请号：US10733097
申请日：2003-12-10
申请人： Daniel Bedell , Gregory Breyta , Tom Harris , April Hixson-Goldsmith , Murali Ramasubramanian , Alfred Renaldo , Benjamin Wang
发明人： Daniel Bedell , Gregory Breyta , Tom Harris , April Hixson-Goldsmith , Murali Ramasubramanian , Alfred Renaldo , Benjamin Wang
CPC分类号： C09D125/18 , G03F7/085 , G03F7/094 , G03F7/11
摘要： Method of plating using a polymeric barrier layer including a polyphenolic polymer which has a repeating unit of the formula: wherein R1, R2, R3, R4, and R5 are individually hydrogen, a hydroxy group or an azo dye.
摘要翻译： 使用包含具有下式重复单元的多酚聚合物的聚合物阻挡层的电镀方法：其中R 1，R 2，R 3， R 4，R 5和R 5分别是氢，羟基或偶氮染料。
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8.发明申请Precursors to fluoroalkanol-containing olefin monomers and associated methods of synthesis and use 有权含氟链烷醇的烯烃单体的前体和相关的合成和使用方法公开(公告)号：US20050124827A1
公开(公告)日：2005-06-09
申请号：US10729453
申请日：2003-12-04
申请人： Gregory Breyta , Richard DiPietro , Daniel Dawson
发明人： Gregory Breyta , Richard DiPietro , Daniel Dawson
IPC分类号： C07C31/42 , C07C35/48 , C07C35/52 , C07C69/65 , C07C69/653 , C07C69/62 , C07C31/34 , C07C35/08
CPC分类号： C07C69/653 , C07C31/42 , C07C35/48 , C07C35/52 , C07C69/65 , C07C2601/04 , C07C2601/08 , C07C2602/42
摘要： The invention provides alkene fluoroalkanol and fluorinated polyol precursors to fluoroalkanol-substituted α,β-unsaturated esters. The fluoroalkanol-substituted α,β-unsaturated esters are olefins that can be readily polymerized to provide fluoroalkanol-substituted polymers useful in lithographic photoresist compositions. Also provided are methods for synthesizing the alkene fluoroalkanol and fluorinated polyol precursors.
摘要翻译： 本发明提供氟链烷醇取代的α，β-不饱和酯的烯烃氟烷醇和氟化多元醇前体。 氟烷醇取代的α，β-不饱和酯是可以容易地聚合以提供用于平版印刷光刻胶组合物的氟代烷醇取代的聚合物的烯烃。 还提供了用于合成烯烃氟烷醇和氟化多元醇前体的方法。
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公开(公告)号：US06277546B1
公开(公告)日：2001-08-21
申请号：US08345290
申请日：1994-11-28
申请人： Gregory Breyta , Nicholas Jeffries Clecak , William Dinan Hinsberg, III , Donald Clifford Hofer , Hiroshi Ito , Scott Arthur MacDonald , Ratnam Sooriyakumaran
发明人： Gregory Breyta , Nicholas Jeffries Clecak , William Dinan Hinsberg, III , Donald Clifford Hofer , Hiroshi Ito , Scott Arthur MacDonald , Ratnam Sooriyakumaran
IPC分类号： G03F726
CPC分类号： G03F7/168 , G03F7/0045 , G03F7/38
摘要： The present invention relates to an improved lithographic imaging process for use in the manufacture of integrated circuits. The process provides protection to the photoresist film from airborne chemical contaminants.
摘要翻译： 本发明涉及用于制造集成电路的改进的光刻成像方法。 该工艺为光致抗蚀剂膜提供了防止空气传播的化学污染物的保护。
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10.发明授权Precursors to fluoroalkanol-containing olefin monomers, and associated methods of synthesis and use 失效含氟链烷醇的烯烃单体的前体，以及相关的合成和使用方法公开(公告)号：US08716534B2
公开(公告)日：2014-05-06
申请号：US12253039
申请日：2008-10-16
CPC分类号： C07C33/44 , C07C33/423 , C07C69/653 , C07C69/753 , C07C2601/10 , C07C2601/16 , C07C2602/42
摘要： The invention provides alkene fluoroalkanol and fluorinated polyol precursors to fluoroalkanol-substituted α,β-unsaturated esters. The fluoroalkanol-substituted α,β-unsaturated esters are olefins that can be readily polymerized to provide fluoroalkanol-substituted polymers useful in lithographic photoresist compositions. Also provided are methods for synthesizing the alkene fluoroalkanol and fluorinated polyol precursors.
摘要翻译： 本发明提供了烯烃氟烷醇和含氟烷醇取代的α，β-不饱和酯的氟化多元醇前体。 氟烷醇取代的α，β-不饱和酯是可以容易地聚合以提供可用于平版光刻胶组合物中的氟烷醇取代的聚合物的烯烃。 还提供了用于合成烯烃氟烷醇和氟化多元醇前体的方法。
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