公开(公告)号：US20080124463A1

公开(公告)日：2008-05-29

申请号：US11564198

申请日：2006-11-28

申请人： David Bour ,  Lori Washington ,  Sandeep Nijhawan ,  Ronald Stevens ,  Jacob Smith ,  Alexander Tam ,  Nyi O. Myo ,  Steve Park ,  Rosemary Twist ,  Garry Kwong ,  Jie Su

发明人： David Bour ,  Lori Washington ,  Sandeep Nijhawan ,  Ronald Stevens ,  Jacob Smith ,  Alexander Tam ,  Nyi O. Myo ,  Steve Park ,  Rosemary Twist ,  Garry Kwong ,  Jie Su

IPC分类号： C23C16/00

CPC分类号： C23C16/45565 ,  C23C16/45514 ,  C23C16/45572 ,  C23C16/45574

摘要： A gaseous mixture is deposited onto a substrate surface using a showerhead. A first plenum of the showerhead has a plurality of channels fluidicly coupled with an interior of a processing chamber. A second plenum gas flows through a plurality of tubes extending from a second plenum of the showerhead through the channels into the interior of the processing chamber. The diameter of the tubes is smaller than the diameter of the channels such that a first plenum gas flows into the interior of the processing chamber through a space defined between the outer surface of the tubes and the surface of the channels. The length and diameter of the tubes determine the level of distribution and the molar ratio of the first gas and the second gas in the gaseous mixture that is deposited on the surface of the substrate.

摘要翻译： 使用喷头将气体混合物沉积到基底表面上。 喷头的第一增压室具有与处理室的内部流体耦合的多个通道。 第二增压气体流过从喷头的第二增压室通过通道延伸到处理室内部的多个管。 管的直径小于通道的直径，使得第一增压气体通过限定在管的外表面和通道表面之间的空间流入处理室的内部。 管的长度和直径确定沉积在基底表面上的气态混合物中的分布水平和第一气体与第二气体的摩尔比。

公开(公告)号：US07674352B2

公开(公告)日：2010-03-09

申请号：US11564198

申请日：2006-11-28

申请人： David Bour ,  Lori Washington ,  Sandeep Nijhawan ,  Ronald Stevens ,  Jacob Smith ,  Alexander Tam ,  Nyi Oo Myo ,  Steve Park ,  Rosemary Twist ,  Garry Kwong ,  Jie Su

发明人： David Bour ,  Lori Washington ,  Sandeep Nijhawan ,  Ronald Stevens ,  Jacob Smith ,  Alexander Tam ,  Nyi Oo Myo ,  Steve Park ,  Rosemary Twist ,  Garry Kwong ,  Jie Su

IPC分类号： C23F1/00 ,  H01L21/306

CPC分类号： C23C16/45565 ,  C23C16/45514 ,  C23C16/45572 ,  C23C16/45574

摘要： A gaseous mixture is deposited onto a substrate surface using a showerhead. A first plenum of the showerhead has a plurality of channels fluidicly coupled with an interior of a processing chamber. A second plenum gas flows through a plurality of tubes extending from a second plenum of the showerhead through the channels into the interior of the processing chamber. The diameter of the tubes is smaller than the diameter of the channels such that a first plenum gas flows into the interior of the processing chamber through a space defined between the outer surface of the tubes and the surface of the channels. The length and diameter of the tubes determine the level of distribution and the molar ratio of the first gas and the second gas in the gaseous mixture that is deposited on the surface of the substrate.

摘要翻译： 使用喷头将气体混合物沉积到基底表面上。 喷头的第一增压室具有与处理室的内部流体耦合的多个通道。 第二增压气体流过从喷头的第二增压室通过通道延伸到处理室内部的多个管。 管的直径小于通道的直径，使得第一增压气体通过限定在管的外表面和通道表面之间的空间流入处理室的内部。 管的长度和直径确定沉积在基底表面上的气态混合物中的分布水平和第一气体与第二气体的摩尔比。

公开(公告)号：US07781016B2

公开(公告)日：2010-08-24

申请号：US11508375

申请日：2006-08-23

申请人： Ronald Stevens ,  Brendan McDougall ,  Jacob W. Smith ,  Garry Kwong ,  Sandeep Nijhawan ,  Lori D. Washington

发明人： Ronald Stevens ,  Brendan McDougall ,  Jacob W. Smith ,  Garry Kwong ,  Sandeep Nijhawan ,  Lori D. Washington

IPC分类号： C23C16/00

CPC分类号： C23C16/4482

摘要： Methods are disclosed of determining a fill level of a precursor in a bubbler. The bubbler is fluidicly coupled with a substrate processing chamber through a vapor-delivery system. The bubbler and vapor-delivery system are backfilled with a known dose of a backfill gas. A pressure and temperature of the backfill gas are determined, permitting a total volume for the backfill gas in the bubbler and vapor-delivery system to be determined by application of a gas law. The fill level of the precursor in the bubbler is determined as a difference between (1) a total volume of the bubbler and vapor-delivery system and (2) the determined total volume for the backfill gas.

摘要翻译： 公开了确定起泡器中前体的填充水平的方法。 起泡器通过蒸气输送系统与基底处理室流体耦合。 起泡器和蒸气输送系统用已知剂量的回填气体回填。 确定回填气体的压力和温度，允许通过应用气体定律确定起泡器和蒸气输送系统中回填气体的总体积。 起泡器中前体的填充水平被确定为（1）起泡器和蒸气输送系统的总体积和（2）确定的回填气体的总体积之间的差。

公开(公告)号：US20090277006A1

公开(公告)日：2009-11-12

申请号：US12430807

申请日：2009-04-27

申请人： Zhiyong Li ,  Chuck Luu ,  Gopalakrishna B. Prabhu ,  Danny Cam Toan Lu ,  Garry Kwong ,  David Tanner

发明人： Zhiyong Li ,  Chuck Luu ,  Gopalakrishna B. Prabhu ,  Danny Cam Toan Lu ,  Garry Kwong ,  David Tanner

IPC分类号： H05K3/10

CPC分类号： H05K3/321 ,  H01L21/67138 ,  H01L21/67712 ,  H01L21/67727 ,  H01L21/67754 ,  H01L21/6776 ,  H01L31/0201 ,  H01L31/046 ,  H01L31/048 ,  H01L31/0512 ,  H01L31/188 ,  H05K2203/0278 ,  Y02E10/50 ,  Y10T29/49117 ,  Y10T29/49126 ,  Y10T29/4913 ,  Y10T29/49155

摘要： Embodiments of the present invention provide a method of forming an electrical connection on a device. In one embodiment, the electrical connection is attached to the device via an adhesive having electrically conductive particles disposed therein. In one embodiment, the adhesive is cured while applying pressure such that the conductive particles align, have a reduced particle-to-particle spacing, or come into contact with each other to provide a more directly conductive (less resistive) path between the electrical connection and the device. In one embodiment of the present invention, a method for forming an electrical lead on a partially formed solar cell during formation of the solar cell device is provided. The method comprises placing a side-buss wire onto a pattern of electrically conductive adhesive disposed on a back contact layer of a solar cell device substrate, laminating the side-buss wire and electrically conductive adhesive between the solar cell device substrate and a back glass substrate to form a composite solar cell structure, and curing the electrically conductive adhesive while applying pressure and heat to the composite solar cell structure

摘要翻译： 本发明的实施例提供了一种在设备上形成电连接的方法。 在一个实施例中，电连接通过其中布置有导电颗粒的粘合剂附接到装置。 在一个实施方案中，粘合剂在施加压力下固化，使得导电颗粒对准，具有减小的颗粒间距或彼此接触以在电连接之间提供更直接的导电（较小电阻）的路径 和设备。 在本发明的一个实施例中，提供了在形成太阳能电池器件期间在部分形成的太阳能电池上形成电引线的方法。 该方法包括将侧面布线布置在设置在太阳能电池器件基板的背接触层上的导电粘合剂图案上，在侧太阳能电池器件基板和背玻璃基板之间层叠侧母线和导电粘合剂 以形成复合太阳能电池结构，并且在对复合太阳能电池结构施加压力和加热的同时固化导电粘合剂

公开(公告)号：US20080050510A1

公开(公告)日：2008-02-28

申请号：US11508375

申请日：2006-08-23

申请人： Ronald Stevens ,  Brendan McDougall ,  Jacob W. Smith ,  Garry Kwong ,  Sandeep Nijhawan ,  Lori D. Washington

发明人： Ronald Stevens ,  Brendan McDougall ,  Jacob W. Smith ,  Garry Kwong ,  Sandeep Nijhawan ,  Lori D. Washington

IPC分类号： C23C16/52 ,  C23C16/00

CPC分类号： C23C16/4482

摘要： Methods are disclosed of determining a fill level of a precursor in a bubbler. The bubbler is fluidicly coupled with a substrate processing chamber through a vapor-delivery system. The bubbler and vapor-delivery system are backfilled with a known dose of a backfill gas. A pressure and temperature of the backfill gas are determined, permitting a total volume for the backfill gas in the bubbler and vapor-delivery system to be determined by application of a gas law. The fill level of the precursor in the bubbler is determined as a difference between (1) a total volume of the bubbler and vapor-delivery system and (2) the determined total volume for the backfill gas.

摘要翻译： 公开了确定起泡器中前体的填充水平的方法。 起泡器通过蒸气输送系统与基底处理室流体耦合。 起泡器和蒸气输送系统用已知剂量的回填气体回填。 确定回填气体的压力和温度，允许通过应用气体定律确定起泡器和蒸气输送系统中回填气体的总体积。 起泡器中前体的填充水平被确定为（1）起泡器和蒸气输送系统的总体积和（2）确定的回填气体的总体积之间的差。

公开(公告)号：US07908743B2

公开(公告)日：2011-03-22

申请号：US12430807

申请日：2009-04-27

申请人： Zhiyong Li ,  Chuck Luu ,  Gopalakrishna B. Prabhu ,  Danny Cam Toan Lu ,  Garry Kwong ,  David Tanner

发明人： Zhiyong Li ,  Chuck Luu ,  Gopalakrishna B. Prabhu ,  Danny Cam Toan Lu ,  Garry Kwong ,  David Tanner

IPC分类号： H05K3/36

CPC分类号： H05K3/321 ,  H01L21/67138 ,  H01L21/67712 ,  H01L21/67727 ,  H01L21/67754 ,  H01L21/6776 ,  H01L31/0201 ,  H01L31/046 ,  H01L31/048 ,  H01L31/0512 ,  H01L31/188 ,  H05K2203/0278 ,  Y02E10/50 ,  Y10T29/49117 ,  Y10T29/49126 ,  Y10T29/4913 ,  Y10T29/49155

摘要： Embodiments of the present invention provide a method of forming an electrical connection on a device. In one embodiment, the electrical connection is attached to the device via an adhesive having electrically conductive particles disposed therein. In one embodiment, the adhesive is cured while applying pressure such that the conductive particles align, have a reduced particle-to-particle spacing, or come into contact with each other to provide a more directly conductive (less resistive) path between the electrical connection and the device. In one embodiment of the present invention, a method for forming an electrical lead on a partially formed solar cell during formation of the solar cell device is provided. The method comprises placing a side-buss wire onto a pattern of electrically conductive adhesive disposed on a back contact layer of a solar cell device substrate, laminating the side-buss wire and electrically conductive adhesive between the solar cell device substrate and a back glass substrate to form a composite solar cell structure, and curing the electrically conductive adhesive while applying pressure and heat to the composite solar cell structure.

摘要翻译： 本发明的实施例提供了一种在设备上形成电连接的方法。 在一个实施例中，电连接通过其中布置有导电颗粒的粘合剂附接到装置。 在一个实施方案中，粘合剂在施加压力下固化，使得导电颗粒对准，具有减小的颗粒间距或彼此接触以在电连接之间提供更直接的导电（较小电阻）的路径 和设备。 在本发明的一个实施例中，提供了在形成太阳能电池器件期间在部分形成的太阳能电池上形成电引线的方法。 该方法包括将侧面布线布置在设置在太阳能电池器件基板的背接触层上的导电粘合剂图案上，在侧太阳能电池器件基板和背玻璃基板之间层叠侧母线和导电粘合剂 以形成复合太阳能电池结构，并且在对复合太阳能电池结构施加压力和加热的同时固化导电粘合剂。

公开(公告)号：US20100071752A1

公开(公告)日：2010-03-25

申请号：US12604939

申请日：2009-10-23

申请人： Kim Vellore ,  Danny C. Lu ,  Garry Kwong

发明人： Kim Vellore ,  Danny C. Lu ,  Garry Kwong

IPC分类号： H01L31/042 ,  H01L31/18

CPC分类号： H01L31/02008 ,  H01L31/046 ,  Y02E10/50

摘要： Solar cell modules and methods for making solar cell modules are disclosed. In one or more embodiments of the invention, a buss is adhered to the solar cell modules using a plurality of conductive adhesive drops.

摘要翻译： 公开了用于制造太阳能电池模块的太阳能电池模块和方法。 在本发明的一个或多个实施例中，使用多个导电粘合剂滴将母线粘附到太阳能电池模块。

公开(公告)号：US20070254093A1

公开(公告)日：2007-11-01

申请号：US11411667

申请日：2006-04-26

申请人： Sandeep Nijhawan ,  Lori Washington ,  Jacob Smith ,  Garry Kwong ,  David Bour ,  David Eaglesham

发明人： Sandeep Nijhawan ,  Lori Washington ,  Jacob Smith ,  Garry Kwong ,  David Bour ,  David Eaglesham

IPC分类号： C23C16/52 ,  C23C16/00 ,  B05C11/00

CPC分类号： C23C16/52 ,  C23C16/4482

摘要： Methods and systems permit fabricating structures using liquid sources without active temperature control. A liquid or solid source of the precursor is provided in a bubbler. A carrier gas source is flowed into the source to generate a flow of precursor vapor carried by the carrier gas. A relative concentration of the precursor vapor to the carrier gas of the flow is measured. A mass flow rate of the precursor in the flow is determined from the measured relative concentration. A flow rate of the carrier gas into the source is changed to maintain the mass flow rate at a defined value or within a defined range.

摘要翻译： 方法和系统允许使用没有主动温度控制的液体源制造结构。 将前体的液体或固体源提供在起泡器中。 载气源流入源中以产生由载气承载的前体蒸气流。 测量前体蒸汽相对于流动载气的相对浓度。 根据测量的相对浓度确定流体中前体的质量流率。 将进入源的载气的流量改变为将质量流量保持在规定值或者在规定范围内。

公开(公告)号：US6000997A

公开(公告)日：1999-12-14

申请号：US113450

申请日：1998-07-10

申请人： Shu-Hsin Kao ,  Shou-sung Chang ,  Huey M. Tzeng ,  Gregory C. Lee ,  Greg Simon ,  Harry Lee ,  David E. Weldon ,  Garry Kwong ,  William F. Lapson ,  Gregory A. Appel ,  Peter Mok

发明人： Shu-Hsin Kao ,  Shou-sung Chang ,  Huey M. Tzeng ,  Gregory C. Lee ,  Greg Simon ,  Harry Lee ,  David E. Weldon ,  Garry Kwong ,  William F. Lapson ,  Gregory A. Appel ,  Peter Mok

IPC分类号： B24B21/04 ,  B24B37/015 ,  B24B49/14

CPC分类号： B24B37/015 ,  B24B21/04

摘要： Heat is transferred between a linear CMP belt and an adjacent heat transfer source, providing a predetermined lateral temperature distribution across the belt. Temperature sensors generate feedback signals to control the heat transfer sources. Alternatively, process monitoring sensors provide feedback signals. The heat transfer source can include multiple selectively controllable individual heat transfer sources having differing temperatures, which can be above or below ambient temperature. The mechanism of heat transfer can include one or more of convection, conduction, and radiation. The configuration provides substantial flexibility to establish and maintain selective non-uniform temperature distributions across the polishing belt. This in turn permits precise control and stability of the polishing process. Heat transfer sources can include pulleys, slurry dispensers, polishing pad conditioners or conditioner back supports, fluid nozzles, and sealed fluid cavity belt supports.

摘要翻译： 热量在线性CMP带和相邻的传热源之间传递，从而提供穿过带的预定横向温度分布。 温度传感器产生反馈信号来控制传热源。 或者，过程监控传感器提供反馈信号。 传热源可以包括具有不同温度的多个选择性可控的单个热传递源，其可以高于或低于环境温度。 传热的机理可以包括一个或多个对流，传导和辐射。 该配置提供了大量灵活性，以建立和保持穿过抛光带的选择性不均匀的温度分布。 这又允许精确的控制和抛光过程的稳定性。 传热源可以包括滑轮，浆液分配器，抛光垫调节器或调节器背部支撑件，流体喷嘴和密封的流体腔体带支撑件。