SUBSTRATE PROCESSING APPARATUS AND METHOD
    1.
    发明申请
    SUBSTRATE PROCESSING APPARATUS AND METHOD 审中-公开
    基板加工装置和方法

    公开(公告)号:US20090047433A1

    公开(公告)日:2009-02-19

    申请号:US12146730

    申请日:2008-06-26

    IPC分类号: B05D3/00 C23C14/00

    摘要: A substrate processing apparatus includes a first chamber, a second chamber provided adjacent the first chamber to form a process space therebetween, a support unit supporting the second chamber with a gap between the first and second chambers, and a vacuum unit to place the process space in a vacuum state, the process spaced sealed in the vacuum state.

    摘要翻译: 基板处理装置包括第一室,邻近第一室设置的第二室,以在它们之间形成处理空间;支撑单元,其在第一和第二室之间具有间隙地支撑第二室;以及真空单元,用于将处理空间 在真空状态下,该工艺在真空状态下间隔密封。

    Plasma treatment apparatus
    2.
    发明申请
    Plasma treatment apparatus 失效
    等离子体处理装置

    公开(公告)号:US20070227660A1

    公开(公告)日:2007-10-04

    申请号:US11730595

    申请日:2007-04-03

    申请人: Chun-Sik Kim

    发明人: Chun-Sik Kim

    IPC分类号: C23F1/00

    CPC分类号: H01J37/3244 H01J2237/022

    摘要: The present invention relates to a plasma treatment apparatus, and more particularly, to a plasma treatment apparatus capable of supplying pressure gas while preventing flying of particles accumulated on the bottom of a chamber. The plasma treatment apparatus of the present invention comprises a chamber; an intake/exhaust portion provided to the bottom of the chamber to supply the chamber with pressure gas, the intake/exhaust portion being configured such that an inner diameter thereof is increased upwardly; and a pressure gas source connected to the intake/exhaust portion to supply the pressure gas thereto. The apparatus may further comprise a vacuum source connected to the intake/exhaust portion to exhaust the chamber.

    摘要翻译: 等离子体处理装置技术领域本发明涉及等离子体处理装置,更具体地,涉及一种能够在防止积聚在室底部的颗粒飞散的同时供给压力气体的等离子体处理装置。 本发明的等离子体处理装置包括:室; 所述进气/排气部分设置在所述室的底部以向所述室供应压力气体,所述进气/排气部分构造成使其内径向上增加; 以及连接到进气/排气部分以将压力气体供应到其上的压力气体源。 该装置还可以包括连接到进气/排气部分以排出室的真空源。

    Flat panel display manufacturing apparatus
    3.
    发明授权
    Flat panel display manufacturing apparatus 有权
    平板显示器制造装置

    公开(公告)号:US08273211B2

    公开(公告)日:2012-09-25

    申请号:US12246563

    申请日:2008-10-07

    IPC分类号: H01L21/3065

    CPC分类号: H01J37/3244

    摘要: Disclosed herein is a flat panel display manufacturing apparatus in a predetermined process is performed using plasma generated therein. In such a flat panel display manufacturing apparatus, a process gas is supplied into a chamber in an evenly diffused state to generate even plasma inside a symmetrical interior space of the chamber. Consequently, the flat panel display manufacturing apparatus can appropriately control flow rate of the plasma, thereby being capable of performing even processing on a large-scale substrate. In the flat panel display manufacturing apparatus, a substrate pedestal thereof is provided with a combination of vertical and horizontal shielding members, thereby being entirely protected from attack of the plasma, resulting in an increased life-span.

    摘要翻译: 这里公开了使用其中产生的等离子体进行预定处理的平板显示器制造装置。 在这种平板显示器制造装置中,处理气体以均匀扩散的状态供应到室中,以在室的对称内部空间内产生均匀的等离子体。 因此,平板显示器制造装置可以适当地控制等离子体的流量,从而能够对大规模基板进行均匀的处理。 在平板显示器制造装置中,其基板基座设置有垂直和水平屏蔽构件的组合,从而完全防止等离子体的侵蚀,从而延长使用寿命。

    Plasma treatment apparatus
    4.
    发明授权
    Plasma treatment apparatus 失效
    等离子体处理装置

    公开(公告)号:US07517429B2

    公开(公告)日:2009-04-14

    申请号:US11730595

    申请日:2007-04-03

    申请人: Chun-Sik Kim

    发明人: Chun-Sik Kim

    IPC分类号: C23F1/00 H01L21/306

    CPC分类号: H01J37/3244 H01J2237/022

    摘要: The present invention relates to a plasma treatment apparatus, and more particularly, to a plasma treatment apparatus capable of supplying pressure gas while preventing flying of particles accumulated on the bottom of a chamber. The plasma treatment apparatus of the present invention comprises a chamber; an intake/exhaust portion provided to the bottom of the chamber to supply the chamber with pressure gas, the intake/exhaust portion being configured such that an inner diameter thereof is increased upwardly; and a pressure gas source connected to the intake/exhaust portion to supply the pressure gas thereto. The apparatus may further comprise a vacuum source connected to the intake/exhaust portion to exhaust the chamber.

    摘要翻译: 等离子体处理装置技术领域本发明涉及等离子体处理装置,更具体地,涉及一种能够在防止积聚在室底部的颗粒飞散的同时供给压力气体的等离子体处理装置。 本发明的等离子体处理装置包括:室; 所述进气/排气部分设置在所述室的底部以向所述室供应压力气体,所述进气/排气部分构造成使其内径向上增加; 以及连接到进气/排气部分以将压力气体供应到其上的压力气体源。 该装置还可以包括连接到进气/排气部分以排出室的真空源。

    FLAT PANEL DISPLAY MANUFACTURING APPARATUS
    5.
    发明申请
    FLAT PANEL DISPLAY MANUFACTURING APPARATUS 有权
    平板显示器制造设备

    公开(公告)号:US20090025877A1

    公开(公告)日:2009-01-29

    申请号:US12246563

    申请日:2008-10-07

    IPC分类号: H01L21/3065

    CPC分类号: H01J37/3244

    摘要: Disclosed herein is a flat panel display manufacturing apparatus in a predetermined process is performed using plasma generated therein. In such a flat panel display manufacturing apparatus, a process gas is supplied into a chamber in an evenly diffused state to generate even plasma inside a symmetrical interior space of the chamber. Consequently, the flat panel display manufacturing apparatus can appropriately control flow rate of the plasma, thereby being capable of performing even processing on a large-scale substrate. In the flat panel display manufacturing apparatus, a substrate pedestal thereof is provided with a combination of vertical and horizontal shielding members, thereby being entirely protected from attack of the plasma, resulting in an increased life-span.

    摘要翻译: 这里公开了使用其中产生的等离子体进行预定处理的平板显示器制造装置。 在这种平板显示器制造装置中,处理气体以均匀扩散的状态供应到室中,以在室的对称内部空间内产生均匀的等离子体。 因此,平板显示器制造装置可以适当地控制等离子体的流量,从而能够对大规模基板进行均匀的处理。 在平板显示器制造装置中,其基板基座设置有垂直和水平屏蔽构件的组合,从而完全防止等离子体的侵蚀,从而延长使用寿命。

    Tire molder shoulder bladder
    7.
    发明授权
    Tire molder shoulder bladder 失效
    轮胎模子肩膀膀胱

    公开(公告)号:US5468328A

    公开(公告)日:1995-11-21

    申请号:US266086

    申请日:1994-06-24

    摘要: A shoulder bladder used to make green tires has an inflatable portion including an inner-rubber member encased in body-ply and cover-rubber layers. Steel cords fixedly mounted relative to and projecting away from the cover-rubber layer have a first edge close to a lower corner of the uninflated bladder and approximately aligned with aligned ends of the cover-rubber and body ply layers. A cord-rubber composition extends (a) from and is adhered to a bottom portion of the cover-rubber layer, (b) around and adhered to the steel cords, (c) around two aligned corners on lower and upper surfaces of the bladder, and (d) along a top surface of the cover-rubber layer. The cord-rubber composition is adhered to the cover-rubber layer where the cord-rubber composition extends from the steel cord to the top surface of the cover-rubber layer.

    摘要翻译: 用于制造生胎的肩膀用气囊具有包括内层橡胶构件的充气部分,该内橡胶构件包封在主体层和覆盖橡胶层中。 相对于覆盖橡胶层固定地安装并远离盖橡胶层的钢丝绳具有靠近未膨胀的气囊的下角的第一边缘,并且与盖 - 橡胶和主体帘布层的对准的端部大致对齐。 帘线橡胶组合物从覆盖橡胶层的底部延伸(a)并粘附到覆盖橡胶层的底部,(b)围绕并粘附到钢丝帘线,(c)在膀胱的下表面和上表面上的两个对准的角部 ,和(d)沿着覆盖橡胶层的顶表面。 帘线橡胶组合物粘附到帘线橡胶组合物从帘线橡胶层延伸到覆盖橡胶层的顶表面的覆盖橡胶层上。

    Method for molding a tire tread by injection
    8.
    发明授权
    Method for molding a tire tread by injection 失效
    通过注射成型轮胎胎面的方法

    公开(公告)号:US5298216A

    公开(公告)日:1994-03-29

    申请号:US899680

    申请日:1992-06-17

    摘要: A method for molding a tire tread element by injecting a rubber mixture through injection holes of an injection mold formed by moving two cooperating mold elements toward a cylindrical drum disposed therebetween. The mold elements sealingly match to an outer surface of the inflatable drum to define a mold cavity of a cross-section and length selected to form a tread element of precisely defined shape and size. A breaker layer may be integrated with an injected rubber mixture and the tread element may be made to be completely circular or linear with matchingly formed end surfaces enabling secure adherence thereat.

    摘要翻译: 通过将注射模具的注射孔注入橡胶混合物来模制轮胎胎面元件的方法,所述注塑模具通过将两个配合的模具元件朝向设置在其间的圆柱形鼓形成而形成。 模具元件密封地匹配到可膨胀滚筒的外表面,以限定一个模具腔,其具有横截面和长度,该模腔选择成形成精确限定的形状和尺寸的胎面元件。 断路器层可以与注入的橡胶混合物一体化,并且胎面元件可以制成为完全圆形或线性的,具有匹配形成的端面,从而能够在其上保持粘附。

    Golf ball
    9.
    发明授权
    Golf ball 失效
    高尔夫球

    公开(公告)号:US5332226A

    公开(公告)日:1994-07-26

    申请号:US990258

    申请日:1992-12-14

    申请人: Chun-Sik Kim

    发明人: Chun-Sik Kim

    IPC分类号: A63B37/00 A63B37/14

    摘要: A golf ball has a spherical body having a mold parting line at the equator thereof by which the body is divided into a top half sphere and a bottom half sphere of equal dimensions, the molded partition line having no dimples thereon; an axis passing through the center of the plane which is defined by the mold parting line, the axis defining two poles at the intersection thereof with each of the half spheres, and being perpendicular to the plane; a first set of four identical spherical regular triangles and six identical spherical right triangles distributed over the surface of the top half-sphere, and serving as a constraining pattern for dimple distribution; a second set of four identical spherical regular triangles and six identical spherical right triangles distributed over the surface of the bottom half sphere and serving as a constraining pattern for dimple distribution, said second set of spherical triangles being a mirror image of the first set of spherical triangles but rotated by 60 degrees centering around said axis; and a series of dimples whose configuration being determined so as to fit in said constraining patterns, at least one of said configurations being determined to exhibit optimum performance with a tailwind, one being determined to exhibit optimum performance into a headwind, one being determined to exhibit optimum performance under no wind and other configurations being determined to exhibit optimum performance under low altitude, high altitude, low temperature, and high temperature conditions, respectively.

    摘要翻译: 高尔夫球具有在赤道处具有分模线的球体,通过该球体,主体被分成具有相等尺寸的上半球和下半球,模制分隔线在其上没有凹坑; 通过由分模线限定的平面中心的轴线,该轴线在与每个半球的交叉处限定两个极,并垂直于该平面; 分布在上半球的表面上的第一组四个相同的球形正三角形和六个相同的球形直角三角形,并且用作凹坑分布的约束图案; 第二组四个相同的球形正三角形和六个相同的球形直角三角形分布在下半球的表面上并用作凹坑分布的约束图案,所述第二组球形三角形是第一组球面的镜像 三角形,但围绕所述轴旋转60度; 以及一系列凹坑,其构造被确定为适合于所述约束图案,所述构造中的至少一个被确定为以顺风呈现最佳性能,一个被确定为呈现最佳性能成为逆风,一个被确定为展现 无风和其他配置下的最佳性能分别被确定为在低海拔,高海拔,低温和高温条件下表现出最佳性能。