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公开(公告)号：US07875193B2
公开(公告)日：2011-01-25
申请号：US11760032
申请日：2007-06-08
Applicant: Bong Hwan Kim , Jong Bok Kim , Bum Jin Park
Inventor： Bong Hwan Kim , Jong Bok Kim , Bum Jin Park
IPC: C23F1/00
CPC classification number: G01R3/00 , G01R1/06727
Abstract: A method for manufacturing a probe structure of a probe card is disclosed. In accordance with the present invention, a portion of a substrate exposed through a crossing region of one more probe beam regions defined by a first mask layer pattern and a windows defined by a second mask layer pattern are etched to form one or more self-aligning probe tip regions, thereby preventing a misalignment of the one or more probe tip regions.
Abstract translation: 公开了一种用于制造探针卡的探针结构的方法。 根据本发明，蚀刻通过由第一掩模层图案限定的多于一个探针光束区域和由第二掩模层图案限定的窗口的交叉区域暴露的衬底的一部分，以形成一个或多个自对准 探针尖端区域，从而防止一个或多个探针尖端区域的未对准。
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公开(公告)号：US20100109263A1
公开(公告)日：2010-05-06
申请号：US12270187
申请日：2008-11-13
Applicant: Seok Yul Jun , Bum Jin Park , Sun Il Kim , Hyong Seok Oh , Sung Chul Cho , Young Sam Na , Yeon Sang Cho , Ha Sung Song , Seong Ju Kim , Hee Sang Chae , Talex Sajoto
Inventor： Seok Yul Jun , Bum Jin Park , Sun Il Kim , Hyong Seok Oh , Sung Chul Cho , Young Sam Na , Yeon Sang Cho , Ha Sung Song , Seong Ju Kim , Hee Sang Chae , Talex Sajoto
CPC classification number: H01L21/6831 , H01L21/67103 , H02N13/00 , Y10T29/49986 , Y10T279/23
Abstract: Electrostatic chucks and methods of manufacturing the same are provided herein. In some embodiments, an electrostatic chuck comprises an electrically conductive body having one or more channels formed in an upper surface thereof; a plate positioned within the one or more channels to define one or more plenums between the body and the plate, wherein the surfaces of the plenum are anodized; one or more fluid passages disposed in the plate and fluidly coupling the one or more plenums to the upper surface of the body, wherein the surfaces of the fluid passages are electrically insulated; and a dielectric layer disposed over the upper surface of the body and the plate, wherein the dielectric layer forms a support surface for a substrate to be disposed thereon.
Abstract translation: 本文提供了静电卡盘及其制造方法。 在一些实施例中，静电卡盘包括导电体，其具有形成在其上表面中的一个或多个通道; 定位在所述一个或多个通道内的板，以在所述主体和所述板之间限定一个或多个气室，其中所述气室的表面被阳极氧化; 一个或多个流体通道设置在板中并将一个或多个通风室流体地联接到主体的上表面，其中流体通道的表面是电绝缘的; 以及设置在所述主体和所述板的上表面上方的电介质层，其中所述电介质层形成用于要置于其上的衬底的支撑表面。
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公开(公告)号：US09218997B2
公开(公告)日：2015-12-22
申请号：US12270187
申请日：2008-11-13
Applicant: Seok Yul Jun , Bum Jin Park , Sun Il Kim , Hyong Seok Oh , Sung Chul Cho , Young Sam Na , Yeon Sang Cho , Ha Sung Song , Seong Ju Kim , Hee Sang Chae , Talex Sajoto
Inventor： Seok Yul Jun , Bum Jin Park , Sun Il Kim , Hyong Seok Oh , Sung Chul Cho , Young Sam Na , Yeon Sang Cho , Ha Sung Song , Seong Ju Kim , Hee Sang Chae , Talex Sajoto
IPC: C23C16/50 , C23C16/00 , C23F1/00 , H01L21/306 , H01L21/683 , H01L21/67 , H02N13/00
CPC classification number: H01L21/6831 , H01L21/67103 , H02N13/00 , Y10T29/49986 , Y10T279/23
Abstract: Electrostatic chucks and methods of manufacturing the same are provided herein. In some embodiments, an electrostatic chuck comprises an electrically conductive body having one or more channels formed in an upper surface thereof; a plate positioned within the one or more channels to define one or more plenums between the body and the plate, wherein the surfaces of the plenum are anodized; one or more fluid passages disposed in the plate and fluidly coupling the one or more plenums to the upper surface of the body, wherein the surfaces of the fluid passages are electrically insulated; and a dielectric layer disposed over the upper surface of the body and the plate, wherein the dielectric layer forms a support surface for a substrate to be disposed thereon.
Abstract translation: 本文提供了静电卡盘及其制造方法。 在一些实施例中，静电卡盘包括导电体，其具有形成在其上表面中的一个或多个通道; 定位在所述一个或多个通道内的板，以在所述主体和所述板之间限定一个或多个气室，其中所述气室的表面被阳极氧化; 一个或多个流体通道设置在板中并将一个或多个通风室流体地联接到主体的上表面，其中流体通道的表面是电绝缘的; 以及设置在所述主体和所述板的上表面上方的电介质层，其中所述电介质层形成用于要置于其上的衬底的支撑表面。
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公开(公告)号：US07824561B2
公开(公告)日：2010-11-02
申请号：US11782949
申请日：2007-07-25
Applicant: Bong Hwan Kim , Bum Jin Park , Jong Bok Kim , Chi Woo Lee
Inventor： Bong Hwan Kim , Bum Jin Park , Jong Bok Kim , Chi Woo Lee
IPC: B44C1/22
CPC classification number: G01R3/00 , G01R1/06727
Abstract: A method for manufacturing a probe structure is disclosed. In accordance with the method, two semiconductor substrates having different crystal directions are bonded and selectively etched utilizing an etch selectivity due to the different crystal directions to form a probe tip region and a probe beam region. A cantilever structure for a probe card is formed by filling the probe tip region and the probe beam region with a conductive material.
Abstract translation: 公开了一种用于制造探针结构的方法。 根据该方法，由于不同的晶体方向，使用具有不同晶体方向的两个半导体衬底被结合并选择性蚀刻，以形成探针尖端区域和探针光束区域。 通过用导电材料填充探针尖端区域和探针束区域来形成用于探针卡的悬臂结构。
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Patent Agency Ranking
公开(公告)号：US20080190891A1
公开(公告)日：2008-08-14
申请号：US11760032
申请日：2007-06-08
Applicant: Bong Hwan KIM , Jong Bok Kim , Bum Jin Park
Inventor： Bong Hwan KIM , Jong Bok Kim , Bum Jin Park
IPC: B44C1/22
CPC classification number: G01R3/00 , G01R1/06727
Abstract: A method for manufacturing a probe structure of a probe card is disclosed. In accordance with the present invention, a portion of a substrate exposed through a crossing region of one more probe beam regions defined by a first mask layer pattern and a windows defined by a second mask layer pattern are etched to form one or more self-aligning probe tip regions, thereby preventing a misalignment of the one or more probe tip regions.
Abstract translation: 公开了一种用于制造探针卡的探针结构的方法。 根据本发明，蚀刻通过由第一掩模层图案限定的多于一个探针光束区域和由第二掩模层图案限定的窗口的交叉区域暴露的衬底的一部分，以形成一个或多个自对准 探针尖端区域，从而防止一个或多个探针尖端区域的未对准。
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公开(公告)号：US20120191342A1
公开(公告)日：2012-07-26
申请号：US13093747
申请日：2011-04-25
Applicant: Weon Eui Kang , Byeong Sup Moon , Bum Jin Park , Hyuk Kyu Lim , Seok Jae Choi
Inventor： Weon Eui Kang , Byeong Sup Moon , Bum Jin Park , Hyuk Kyu Lim , Seok Jae Choi
CPC classification number: G01C21/365 , G09G3/002 , G09G2380/10
Abstract: An information-displaying system is provided for use with a vehicle head-up display including a liquid crystal panel for displaying drive information image, a backlight unit for irradiating light toward the liquid crystal panel, an optical system for enlarging or reducing the drive information image displayed on the liquid crystal panel, and a reflection mirror for reflecting the drive information image projected by the optical system toward a windshield of a motor vehicle. The information-displaying system includes a navigation information providing unit for providing navigation information on a current vehicle position, a road map and an optimum route to destination, a traffic information providing unit for providing traffic information on a real time basis, and a control unit for controlling the liquid crystal panel to display the navigation information and the traffic information provided by the navigation information providing unit and the traffic information providing unit.
Abstract translation: 提供一种信息显示系统，用于与包括用于显示驱动信息图像的液晶面板的车辆平视显示器，用于向液晶面板照射光的背光单元，用于放大或缩小驱动信息图像的光学系统 显示在液晶面板上的反射镜，以及用于将由光学系统投影的驱动信息图像反射到机动车辆的挡风玻璃的反射镜。 信息显示系统包括导航信息提供单元，用于提供关于当前车辆位置的导航信息，路线图和到达目的地的最佳路线，用于实时提供交通信息的交通信息提供单元，以及控制单元 用于控制液晶面板显示由导航信息提供单元和交通信息提供单元提供的导航信息和交通信息。
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公开(公告)号：US20120188652A1
公开(公告)日：2012-07-26
申请号：US13093768
申请日：2011-04-25
Applicant: Weon Eui Kang , Byeong Sup Moon , Bum Jin Park , Hyuk Kyu Lim , Seok Jae Choi
Inventor： Weon Eui Kang , Byeong Sup Moon , Bum Jin Park , Hyuk Kyu Lim , Seok Jae Choi
IPC: G02B27/01
CPC classification number: G02B27/0101 , G02B2027/0127
Abstract: An optical system is provided for use in a vehicle head-up display including a display panel for displaying drive information image, a backlight unit for irradiating light toward the display panel and an optical system for adjusting the size and focal distance of the drive information image projected from the display panel toward a windshield of a motor vehicle. The optical system includes a pre-lens reflection mirror array for reflecting the drive information image projected from the display panel to travel along a first roundabout path, a lens array for adjusting the size and focal distance of the drive information image reflected by the pre-lens reflection mirror array, and a post-lens reflection mirror array for reflecting the drive information image coming from the display panel toward the windshield to travel along a second roundabout path.
Abstract translation: 提供了一种用于车辆平视显示器的光学系统，其包括用于显示驱动信息图像的显示面板，用于向显示面板照射光的背光单元和用于调整驱动信息图像的尺寸和焦距的光学系统 从显示面板朝向机动车辆的挡风玻璃投影。 光学系统包括用于反射从显示面板投影的驱动信息图像沿着第一回旋道行进的前透镜反射镜阵列，用于调整由预处理器反射的驱动信息图像的尺寸和焦距的透镜阵列， 透镜反射镜阵列和后透镜反射镜阵列，用于将来自显示面板的驱动信息图像朝向挡风玻璃反射，以沿着第二环形路径行进。
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公开(公告)号：US08724225B2
公开(公告)日：2014-05-13
申请号：US13093768
申请日：2011-04-25
Applicant: Weon Eui Kang , Byeong Sup Moon , Bum Jin Park , Hyuk Kyu Lim , Seok Jae Choi
Inventor： Weon Eui Kang , Byeong Sup Moon , Bum Jin Park , Hyuk Kyu Lim , Seok Jae Choi
CPC classification number: G02B27/0101 , G02B2027/0127
Abstract: An optical system is provided for use in a vehicle head-up display including a display panel for displaying drive information image, a backlight unit for irradiating light toward the display panel and an optical system for adjusting the size and focal distance of the drive information image projected from the display panel toward a windshield of a motor vehicle. The optical system includes a pre-lens reflection mirror array for reflecting the drive information image projected from the display panel to travel along a first roundabout path, a lens array for adjusting the size and focal distance of the drive information image reflected by the pre-lens reflection mirror array, and a post-lens reflection mirror array for reflecting the drive information image coming from the display panel toward the windshield to travel along a second roundabout path.
Abstract translation: 提供了一种用于车辆平视显示器的光学系统，其包括用于显示驱动信息图像的显示面板，用于向显示面板照射光的背光单元和用于调整驱动信息图像的尺寸和焦距的光学系统 从显示面板朝向机动车辆的挡风玻璃投影。 光学系统包括用于反射从显示面板投影的驱动信息图像沿着第一回旋道行进的前透镜反射镜阵列，用于调整由预处理器反射的驱动信息图像的尺寸和焦距的透镜阵列， 透镜反射镜阵列和后透镜反射镜阵列，用于将来自显示面板的驱动信息图像朝向挡风玻璃反射，以沿着第二环形路径行进。
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公开(公告)号：US20080029479A1
公开(公告)日：2008-02-07
申请号：US11782949
申请日：2007-07-25
Applicant: Bong Hwan Kim , Bum Jin Park , Jong Bok Kim , Chi Woo Lee
Inventor： Bong Hwan Kim , Bum Jin Park , Jong Bok Kim , Chi Woo Lee
IPC: B44C1/22
CPC classification number: G01R3/00 , G01R1/06727
Abstract: A method for manufacturing a probe structure is wherein a disclosed. In accordance with method, two semiconductor substrates having different crystal directions are bonded and selectively etched utilizing an etch selectivity due to the different crystal directions to form a probe tip region and a probe beam region. A cantilever structure for a probe card is formed by filling the probe tip region and the probe beam region with a conductive material.
Abstract translation: 一种探针结构的制造方法，其中公开的。 根据方法，由于不同的晶体方向，使用具有不同晶体方向的两个半导体衬底被结合并选择性地蚀刻，以形成探针尖端区域和探针光束区域。 通过用导电材料填充探针尖端区域和探针束区域来形成用于探针卡的悬臂结构。
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