公开(公告)号：US20130327147A1

公开(公告)日：2013-12-12

申请号：US13880388

申请日：2011-09-19

申请人： Ando Feyh ,  Christina Leinenbach ,  Axel Franke ,  Gary O'Brien

发明人： Ando Feyh ,  Christina Leinenbach ,  Axel Franke ,  Gary O'Brien

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/0831

摘要： A micromechanical device measures an acceleration, a pressure or the like. It comprises a substrate having at least one fixed electrode, a seismic mass moveably arranged on the substrate, at least one ground electrode, which is arranged on the seismic mass, and resetting means for returning the seismic mass into an initial position, wherein the fixed electrode and the ground electrode are configured in one measurement plane for measuring an acceleration, a pressure or the like in the measurement plane, and wherein the fixed electrode and the ground electrode are configured for measuring an acceleration, pressure or the like acting on the seismic mass perpendicular to the measurement plane. The disclosure likewise relates to a corresponding method and a corresponding use.

摘要翻译： 微机械装置测量加速度，压力等。 它包括具有至少一个固定电极的基板，可移动地布置在基板上的地震块，布置在地震块上的至少一个接地电极，以及用于使地震块返回初始位置的复位装置，其中固定 电极和接地电极被配置在一个测量平面中，用于测量测量平面中的加速度，压力等，并且其中固定电极和接地电极被配置为测量作用在地震上的加速度，压力等 质量垂直于测量平面。 本公开同样涉及相应的方法和相应的用途。

公开(公告)号：US08566057B2

公开(公告)日：2013-10-22

申请号：US12806316

申请日：2010-08-09

申请人： Axel Franke ,  Alexander Buhmann

发明人： Axel Franke ,  Alexander Buhmann

IPC分类号： G01P21/00

CPC分类号： G01P21/00

摘要： A method for self-adjustment of a triaxial acceleration sensor during operation includes: calibrating the sensor; checking the self-adjustment for an interfering acceleration, with the aid of a measurement equation and estimated values for sensitivity and offset; repeating the adjustment if an interfering acceleration is recognized; and accepting the estimated values for sensitivity and offset as calibration values if an interfering acceleration is not recognized. The step of checking the self-adjustment includes: estimating sensitivity and/or offset and the variance thereof; determining an innovation as the difference between a measured value of the measurement equation and an estimated value of the measurement equation; testing the innovation for a normal distribution; and recognizing the interfering acceleration in the event of a deviation from the normal distribution.

摘要翻译： 在运行过程中三轴加速度传感器的自调节方法包括：校准传感器; 通过测量方程和灵敏度和偏移的估计值来检查干扰加速度的自调整; 如果识别到干扰加速度则重复该调整; 并且如果不识别到干扰加速度，则接受灵敏度和偏移的估计值作为校准值。 检查自我调整的步骤包括：估计灵敏度和/或偏移及其方差; 将创新确定为测量方程的测量值与测量方程式的估计值之差; 测试创新正常分配; 并且在偏离正态分布的情况下识别干扰加速度。

公开(公告)号：US08429971B2

公开(公告)日：2013-04-30

申请号：US12308632

申请日：2007-11-14

申请人： Johannes Classen ,  Axel Franke ,  Dietrich Schubert ,  Kersten Kehr ,  Ralf Reichenbach

发明人： Johannes Classen ,  Axel Franke ,  Dietrich Schubert ,  Kersten Kehr ,  Ralf Reichenbach

IPC分类号： G01P15/125

CPC分类号： G01P15/18 ,  G01P15/125 ,  G01P2015/084

摘要： A micromechanical acceleration sensor includes a substrate, an elastic diaphragm which extends parallel to the substrate plane and which is partially connected to the substrate, and which has a surface region which may be deflected perpendicular to the substrate plane, and a seismic mass whose center of gravity is situated outside the plane of the elastic diaphragm. The seismic mass extends at a distance over substrate regions which are situated outside the region of the elastic diaphragm and which include a system composed of multiple electrodes, each of which together with oppositely situated regions of the seismic mass forms a capacitor in a circuit. In its central region the seismic mass is attached to the elastic diaphragm in the surface region of the elastic diaphragm which may be deflected perpendicular to the substrate plane.

摘要翻译： 微机械加速度传感器包括基板，平行于基板平面延伸并且部分地连接到基板的弹性隔膜，并且具有可以垂直于基板平面偏转的表面区域，以及地震块的中心 重力位于弹性隔膜的平面之外。 地震质量在位于弹性膜片的区域之外的衬底区域上延伸一段距离，其包括由多个电极组成的系统，每个电极与地震质量体的相对定位的区域在电路中形成电容器。 在其中心区域，抗震块附着在弹性隔膜的表面区域中的弹性隔膜，弹性隔膜可能垂直于基板平面偏转。

公开(公告)号：US20120187509A1

公开(公告)日：2012-07-26

申请号：US13120994

申请日：2009-09-15

申请人： Knut Gottfried ,  Maik Wiemer ,  Axel Franke ,  Achim Trautmann ,  Ando Feyh ,  Sonja Knies ,  Joerg Froemel

发明人： Knut Gottfried ,  Maik Wiemer ,  Axel Franke ,  Achim Trautmann ,  Ando Feyh ,  Sonja Knies ,  Joerg Froemel

IPC分类号： H01L29/84 ,  H01L21/768 ,  H01L23/48

CPC分类号： B81C1/00238 ,  B81B2207/012 ,  B81C2203/0118 ,  B81C2203/019 ,  B81C2203/038 ,  H01L24/94 ,  H01L2224/81801 ,  H01L2924/00013 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01024 ,  H01L2924/01029 ,  H01L2924/01032 ,  H01L2924/01033 ,  H01L2924/01049 ,  H01L2924/01058 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01322 ,  H01L2924/01327 ,  H01L2924/14 ,  H01L2924/1433 ,  H01L2924/1461 ,  H01L2224/13099 ,  H01L2224/13599 ,  H01L2224/05599 ,  H01L2224/05099 ,  H01L2224/29099 ,  H01L2224/29599 ,  H01L2924/00

摘要： A contact arrangement for establishing a spaced, electrically conducting connection between a first wafer and a second wafer includes an electrical connection contact, a passivation layer on the electrical connection contact, and a dielectric spacer layer arranged on the passivation layer, wherein the contact arrangement is arranged at least on one of the first wafer and the second wafer, wherein the contact arrangement comprises trenches at least partly filled with a first material capable of forming a metal-metal connection, wherein the trenches are continuous trenches from the dielectric spacer layer through the passivation layer as far as the electrical connection contact, and wherein the first material is arranged in the trenches from the electrical connection contact as far as the upper edge of the trenches.

摘要翻译： 用于在第一晶片和第二晶片之间建立间隔的导电连接的接触装置包括电连接触点，电连接触点上的钝化层以及布置在钝化层上的电介质间隔层，其中触点布置是 布置在所述第一晶片和所述第二晶片中的至少一个上，其中所述接触装置包括至少部分地填充有能够形成金属 - 金属连接的第一材料的沟槽，其中所述沟槽是来自所述电介质间隔层的连续沟槽， 钝化层直到电连接接触，并且其中第一材料从电连接触点设置在沟槽中，直到沟槽的上边缘。

公开(公告)号：US20120060604A1

公开(公告)日：2012-03-15

申请号：US12734228

申请日：2008-10-02

申请人： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

发明人： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

IPC分类号： G01P3/44 ,  F16F3/00

CPC分类号： G01C19/574 ,  F16F1/025 ,  G01C19/5747 ,  G01P3/44

摘要： A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

摘要翻译： 具有基板和多个可移动子结构的偏转速率传感器，其安装在所述基板的表面上，所述可移动子结构联接到共享的，特别是中心的弹簧元件，所述装置用于将所述可移动子结构激励为 在平行于衬底表面延伸的平面中的耦合振荡，具有科里奥利元件的可移动子结构被提供用于检测由科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕 第一轴线，第二科里奥利元件被提供用于检测围绕第二轴线的横摆率，所述第二轴线垂直于所述第一轴线定向。

公开(公告)号：US20120036915A1

公开(公告)日：2012-02-16

申请号：US13197084

申请日：2011-08-03

申请人： Axel FRANKE ,  Mirko Hattass ,  Alexander Buhmann ,  Marian Keck

发明人： Axel FRANKE ,  Mirko Hattass ,  Alexander Buhmann ,  Marian Keck

IPC分类号： G01P21/00 ,  G01P15/125

CPC分类号： G01P15/125 ,  G01P2015/0814

摘要： A sensor system having a substrate and a mass which is movably suspended relative to the substrate is described, the sensor system including detection arrangement for detecting a deflection of the seismic mass relative to the substrate along a deflection direction, the detection arrangement including a first measuring electrode affixed to the substrate and a second measuring electrode affixed to the substrate, and a first overlap, which is perpendicular to the deflection direction, between the first measuring electrode and the seismic mass along the deflection direction is greater than a second overlap, which is perpendicular to the deflection direction, between the second measuring electrode and the seismic mass.

摘要翻译： 描述了具有基板和相对于基板可移动地悬挂的质量块的传感器系统，该传感器系统包括用于沿着偏转方向检测地震质体相对于基底的偏转的检测装置，该检测装置包括第一测量 固定在基板上的电极和固定在基板上的第二测量电极，以及沿偏转方向在第一测量电极和地震块之间垂直于偏转方向的第一重叠大于第二重叠， 垂直于偏转方向，在第二测量电极和地震质量之间。

公开(公告)号：US20110140692A1

公开(公告)日：2011-06-16

申请号：US12927259

申请日：2010-11-09

申请人： Johannes Classen ,  Arnd Kaelberer ,  Hans-Joerg Faisst ,  Axel Franke ,  Mirko Hattass ,  Holger Rank ,  Robert Sattler ,  Alexander Buhmann ,  Ramona Maas ,  Marian Keck

发明人： Johannes Classen ,  Arnd Kaelberer ,  Hans-Joerg Faisst ,  Axel Franke ,  Mirko Hattass ,  Holger Rank ,  Robert Sattler ,  Alexander Buhmann ,  Ramona Maas ,  Marian Keck

IPC分类号： G01R33/02 ,  G01P15/105

CPC分类号： G01R33/0286 ,  B81C99/003 ,  G01P15/125 ,  G01P15/18 ,  G01P21/00

摘要： A method for determining the sensitivity of a sensor provides the following steps: a) first and second deflection voltages are applied to first and second electrode systems of the sensor, respectively, and first and second electrostatic forces are exerted on an elastically suspended seismic mass of the sensor by the first and second electrode systems, respectively, and a restoring force is exerted on the mass as a result of the elasticity of the mass, and a force equilibrium is established among the first and second electrostatic forces and the restoring force, and the mass assumes a deflection position characteristic of the force equilibrium, and an output signal characteristic of the force equilibrium and of the deflection position is measured; and b) the sensitivity of the sensor is computed on the basis of the first and second deflection voltages.

摘要翻译： 用于确定传感器的灵敏度的方法提供以下步骤：a）分别将第一和第二偏转电压施加到传感器的第一和第二电极系统，并且第一和第二静电力施加在弹性悬浮的地震块 分别由第一和第二电极系统的传感器和由于质量的弹性而对质量施加回复力，并且在第一和第二静电力和恢复力之间建立力平衡，并且 质量呈现力平衡特性的偏转位置，并且测量力平衡和偏转位置的特征的输出信号; 以及b）基于第一和第二偏转电压来计算传感器的灵敏度。

公开(公告)号：US20110120208A1

公开(公告)日：2011-05-26

申请号：US12927345

申请日：2010-11-12

申请人： Torsten Ohms ,  Axel Franke

发明人： Torsten Ohms ,  Axel Franke

IPC分类号： G01P21/00 ,  G01P15/125

CPC分类号： G01P15/125 ,  G01P15/18 ,  G01P21/00 ,  G01P2015/082

摘要： A method for adjusting an acceleration sensor which includes a substrate and a seismic mass, the acceleration sensor having first and further first electrodes attached to the substrate on a first side, counter-electrodes of the seismic mass being situated between the first and further first electrodes, the acceleration sensor having further second electrodes on a second side and further fourth electrodes on a fourth side opposite the second side, an essentially equal first excitation voltage being applied to the first and further first electrodes in a first step for exciting a first deflection of the seismic mass along a first direction, the first deflection being compensated in a second step by applying a first compensation voltage to the further second and further fourth electrodes.

摘要翻译： 一种用于调整加速度传感器的方法，所述加速度传感器包括基板和地震块，所述加速度传感器具有在第一侧上附接到所述基板的第一和另外的第一电极，所述地震质量块的对电极位于所述第一和第二电极之间 加速度传感器在第二侧具有另外的第二电极，在与第二侧相反的第四侧具有另外的第四电极，在第一步骤中将基本上相等的第一激励电压施加到第一和第二电极，用于激发第一偏转 所述地震质量沿着第一方向，所述第一偏转在第二步骤中通过向所述另外的第二和第四电极施加第一补偿电压来补偿。

公开(公告)号：US20110060543A1

公开(公告)日：2011-03-10

申请号：US12806316

申请日：2010-08-09

申请人： Axel Franke ,  Alexander Buhmann

发明人： Axel Franke ,  Alexander Buhmann

IPC分类号： G01P21/00

CPC分类号： G01P21/00

摘要： A method for self-adjustment of a triaxial acceleration sensor during operation includes: calibrating the sensor; checking the self-adjustment for an interfering acceleration, with the aid of a measurement equation and estimated values for sensitivity and offset; repeating the adjustment if an interfering acceleration is recognized; and accepting the estimated values for sensitivity and offset as calibration values if an interfering acceleration is not recognized. The step of checking the self-adjustment includes: estimating sensitivity and/or offset and the variance thereof; determining an innovation as the difference between a measured value of the measurement equation and an estimated value of the measurement equation; testing the innovation for a normal distribution; and recognizing the interfering acceleration in the event of a deviation from the normal distribution.

摘要翻译： 在运行过程中三轴加速度传感器的自调节方法包括：校准传感器; 通过测量方程和灵敏度和偏移的估计值来检查干扰加速度的自调整; 如果识别到干扰加速度则重复该调整; 并且如果不识别到干扰加速度，则接受灵敏度和偏移的估计值作为校准值。 检查自我调整的步骤包括：估计灵敏度和/或偏移及其方差; 将创新确定为测量方程的测量值与测量方程式的估计值之差; 测试创新正常分配; 并且在偏离正态分布的情况下识别干扰加速度。

公开(公告)号：US20110048132A1

公开(公告)日：2011-03-03

申请号：US12806135

申请日：2010-08-06

申请人： Christian Rettig ,  Axel Franke ,  Ando Feyh

发明人： Christian Rettig ,  Axel Franke ,  Ando Feyh

IPC分类号： G01P15/08 ,  B81C3/00

CPC分类号： G01C19/56 ,  B81B7/0041 ,  B81B7/02 ,  B81C2203/0109 ,  G01P15/0802 ,  Y10T29/49144 ,  Y10T29/49146 ,  Y10T428/13

摘要： A microsystem, e.g., a micromechanical sensor, has a first cavity which is sealed off from the surroundings and a second cavity which is sealed off from the surroundings. The first cavity is bounded by a first bond joint and the second cavity is bounded by a second bond joint. Either the first bond joint or the second bond joint is a eutectic bond joint or a diffusion-soldered joint.

摘要翻译： 微系统，例如微机械传感器，具有与周围环境密封的第一空腔和与周围环境密封的第二空腔。 第一腔体由第一接合接头限定，第二腔体由第二接合接头限定。 第一接合接头或第二接合接头是共晶接合接头或扩散焊接接头。