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公开(公告)号：US20240230714A1
公开(公告)日：2024-07-11
申请号：US18602925
申请日：2024-03-12
申请人： AEHR TEST SYSTEMS
CPC分类号： G01R1/0441 , G01R1/0416 , G01R1/0491 , G01R1/06705 , G01R1/07307 , G01R31/2601 , G01R31/2855 , G01R31/2863 , G01R31/2886 , G01R31/2887
摘要： A method of testing an integrated circuit of a device is described. Air is allowed through a fluid line to modify a size of a volume defined between the first and second components of an actuator to move a contactor support structure relative to the apparatus and urge terminals on the contactor support structure against contacts on the device. Air is automatically released from the fluid line through a pressure relief valve when a pressure of the air in the fluid line reaches a predetermined value. The holder is moved relative to the apparatus frame to disengage the terminals from the contacts while maintaining the first and second components of the actuator in a substantially stationary relationship with one another. A connecting arrangement is provided including first and second connecting pieces with complementary interengaging formations that restricts movement of the contactor substrate relative to the distribution board substrate in a tangential direction.
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公开(公告)号：US12007451B2
公开(公告)日：2024-06-11
申请号：US17532298
申请日：2021-11-22
申请人： AEHR TEST SYSTEMS
IPC分类号： G01R31/50 , G01R31/00 , G01R31/28 , H01L21/324 , H01L21/66 , H01L21/67 , H01L21/687 , G01R1/04
CPC分类号： G01R31/50 , G01R31/003 , G01R31/2831 , G01R31/2875 , H01L21/324 , H01L21/67103 , H01L21/67109 , H01L21/67248 , H01L21/68785 , H01L22/26 , G01R1/0491
摘要： A tester apparatus is provided. Slot assemblies are removably mounted to a frame. Each slot assembly allows for individual heating and temperature control of a respective cartridge that is inserted into the slot assembly. A closed loop air path is defined by the frame and a heater and cooler are located in the closed loop air path to cool or heat the cartridge with air. Individual cartridges can be inserted or be removed while other cartridges are in various stages of being tested or in various stages of temperature ramps.
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公开(公告)号：US20230168277A1
公开(公告)日：2023-06-01
申请号：US18159794
申请日：2023-01-26
申请人： AEHR TEST SYSTEMS
CPC分类号： G01R1/0441 , G01R31/2886 , G01R31/2863 , G01R31/2887 , G01R1/0491 , G01R1/06705 , G01R31/2601 , G01R31/2855 , G01R1/0416 , G01R1/07307
摘要： A method of testing an integrated circuit of a device is described. Air is allowed through a fluid line to modify a size of a volume defined between the first and second components of an actuator to move a contactor support structure relative to the apparatus and urge terminals on the contactor support structure against contacts on the device. Air is automatically released from the fluid line through a pressure relief valve when a pressure of the air in the fluid line reaches a predetermined value. The holder is moved relative to the apparatus frame to disengage the terminals from the contacts while maintaining the first and second components of the actuator in a substantially stationary relationship with one another. A connecting arrangement is provided including first and second connecting pieces with complementary interengaging formations that restricts movement of the contactor substrate relative to the distribution board substrate in a tangential direction.
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公开(公告)号：US11635459B2
公开(公告)日：2023-04-25
申请号：US17523646
申请日：2021-11-10
申请人： AEHR TEST SYSTEMS
IPC分类号： G01R31/20 , G01R31/28 , H01L21/687 , H05K7/14
摘要： A tester apparatus is described. Various components contribute to the functionality of the tester apparatus, including an insertion and removal apparatus, thermal posts, independent gimbaling, the inclusion of a photo detector, a combination of thermal control methods, a detect circuitry in a socket lid, through posts with stand-offs, and a voltage retargeting.
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公开(公告)号：US11448695B2
公开(公告)日：2022-09-20
申请号：US16856990
申请日：2020-04-23
申请人： Aehr Test Systems
IPC分类号： G01R31/28 , G01R31/319
摘要： A cartridge, including a cartridge frame, formations on the cartridge frame for mounting the cartridge frame in a fixed position to an apparatus frame, a contactor support structure, a contactor interface on the contactor support structure, a plurality of terminals, held by the contactor support structure, for contacting contacts on a device, and a plurality of conductors, held by the contactor support structure, connecting the interface to the terminals.
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公开(公告)号：US11209497B2
公开(公告)日：2021-12-28
申请号：US16576555
申请日：2019-09-19
申请人： Aehr Test Systems
IPC分类号： G01R31/00 , G01R31/28 , H01L21/67 , G01R31/50 , H01L21/66 , H01L21/324 , H01L21/687 , G01R1/04
摘要： A tester apparatus is provided. Slot assemblies are removably mounted to a frame. Each slot assembly allows for individual heating and temperature control of a respective cartridge that is inserted into the slot assembly. A closed loop air path is defined by the frame and a heater and cooler are located in the closed loop air path to cool or heat the cartridge with air. Individual cartridges can be inserted or be removed while other cartridges are in various stages of being tested or in various stages of temperature ramps.
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公开(公告)号：US20200256917A1
公开(公告)日：2020-08-13
申请号：US16856990
申请日：2020-04-23
申请人： Aehr Test Systems
IPC分类号： G01R31/28 , G01R31/319
摘要： A cartridge, including a cartridge frame, formations on the cartridge frame for mounting the cartridge frame in a fixed position to an apparatus frame, a contactor support structure, a contactor interface on the contactor support structure, a plurality of terminals, held by the contactor support structure, for contacting contacts on a device, and a plurality of conductors, held by the contactor support structure, connecting the interface to the terminals.
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公开(公告)号：US20170176492A1
公开(公告)日：2017-06-22
申请号：US15453819
申请日：2017-03-08
申请人： Aehr Test Systems
CPC分类号： G01R1/0441 , G01R1/0416 , G01R1/0491 , G01R1/06705 , G01R1/07307 , G01R31/2601 , G01R31/2855 , G01R31/2863 , G01R31/2886 , G01R31/2887
摘要： A method of testing an integrated circuit of a device is described. Air is allowed through a fluid line to modify a size of a volume defined between the first and second components of an actuator to move a contactor support structure relative to the apparatus and urge terminals on the contactor support structure against contacts on the device. Air is automatically released from the fluid line through a pressure relief valve when a pressure of the air in the fluid line reaches a predetermined value. The holder is moved relative to the apparatus frame to disengage the terminals from the contacts while maintaining the first and second components of the actuator in a substantially stationary relationship with one another. A connecting arrangement is provided including first and second connecting pieces with complementary interengaging formations that restricts movement of the contactor substrate relative to the distribution board substrate in a tangential direction.
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公开(公告)号：US20160187416A1
公开(公告)日：2016-06-30
申请号：US15060443
申请日：2016-03-03
申请人： Aehr Test Systems
发明人： Donald P. Richmond, II , Kenneth W. Deboe , Frank O. Uher , Jovan Jovanovic , Scott E. Lindsey , Thomas T. Maenner , Patrick M. Shepherd , Jeffrey L. Tyson , Mark C. Carbone , Paul W. Burke , Doan D. Cao , James F. Tomic , Long V. Vu
CPC分类号： G01R31/287 , G01R31/003 , G01R31/26 , G01R31/2642 , G01R31/2851 , G01R31/2855 , G01R31/2863 , G01R31/2868 , G01R31/2872 , G01R31/2877 , G01R31/2886 , G01R31/2889 , G01R31/2891 , G01R31/31924 , G06F8/30
摘要： An apparatus is described for burn-in and/or functional testing of microelectronic circuits of unsingulated wafers. A large number of power, ground, and signal connections can be made to a large number of contacts on a wafer. The apparatus has a cartridge that allows for fanning-in of electric paths. A distribution board has a plurality of interfaces that are strategically positioned to provide a dense configuration. The interfaces are connected through flexible attachments to an array of first connector modules. Each one of the first connector modules can be independently connected to a respective one of a plurality of second connector modules, thereby reducing stresses on a frame of the apparatus. Further features include for example a piston that allows for tight control of forces exerted by terminals onto contacts of a wafer.
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