Controlling alignment during a thermal cycle

    公开(公告)号:US09880197B2

    公开(公告)日:2018-01-30

    申请号:US15453819

    申请日:2017-03-08

    申请人: Aehr Test Systems

    IPC分类号: G01R1/04 G01R1/073

    摘要: A method of testing an integrated circuit of a device is described. Air is allowed through a fluid line to modify a size of a volume defined between the first and second components of an actuator to move a contactor support structure relative to the apparatus and urge terminals on the contactor support structure against contacts on the device. Air is automatically released from the fluid line through a pressure relief valve when a pressure of the air in the fluid line reaches a predetermined value. The holder is moved relative to the apparatus frame to disengage the terminals from the contacts while maintaining the first and second components of the actuator in a substantially stationary relationship with one another. A connecting arrangement is provided including first and second connecting pieces with complementary interengaging formations that restricts movement of the contactor substrate relative to the distribution board substrate in a tangential direction.

    CONTROLLING ALIGNMENT DURING A THERMAL CYCLE

    公开(公告)号:US20170176492A1

    公开(公告)日:2017-06-22

    申请号:US15453819

    申请日:2017-03-08

    申请人: Aehr Test Systems

    IPC分类号: G01R1/04 G01R1/073

    摘要: A method of testing an integrated circuit of a device is described. Air is allowed through a fluid line to modify a size of a volume defined between the first and second components of an actuator to move a contactor support structure relative to the apparatus and urge terminals on the contactor support structure against contacts on the device. Air is automatically released from the fluid line through a pressure relief valve when a pressure of the air in the fluid line reaches a predetermined value. The holder is moved relative to the apparatus frame to disengage the terminals from the contacts while maintaining the first and second components of the actuator in a substantially stationary relationship with one another. A connecting arrangement is provided including first and second connecting pieces with complementary interengaging formations that restricts movement of the contactor substrate relative to the distribution board substrate in a tangential direction.