Pressure sensor with testing device and related methods

    公开(公告)号:US10788389B2

    公开(公告)日:2020-09-29

    申请号:US15797773

    申请日:2017-10-30

    Inventor: Alberto Pagani

    Abstract: A pressure sensor is for positioning within a structure. The pressure sensor may include a pressure sensor integrated circuit (IC) having a pressure sensor circuit responsive to bending, and a transceiver circuit coupled to the pressure sensor circuit. The pressure sensor may include a support body having a recess therein coupled to the pressure sensor IC so that the pressure sensor IC bends into the recess when the pressure sensor IC is subjected to external pressure.

    Testing architecture of circuits integrated on a wafer

    公开(公告)号:US10746787B2

    公开(公告)日:2020-08-18

    申请号:US16211882

    申请日:2018-12-06

    Inventor: Alberto Pagani

    Abstract: A testing architecture for integrated circuits on a wafer includes at least one first circuit of a structure test element group (TEG) realized in a scribe line providing separation between first and second integrated circuits. At least one pad is shared by a second circuit inside at least one of the first and second integrated circuits and the first circuit. Switching circuitry is coupled to the at least one pad and to the first and second circuits.

    Tensile stress measurement device with attachment plates and related methods

    公开(公告)号:US10598578B2

    公开(公告)日:2020-03-24

    申请号:US15650380

    申请日:2017-07-14

    Abstract: A tensile stress measurement device is to be attached to an object to be measured. The tensile stress measurement device may include an IC having a semiconductor substrate and tensile stress detection circuitry, the semiconductor substrate having opposing first and second attachment areas. The tensile stress measurement device may include a first attachment plate coupled to the first attachment area and extending outwardly to be attached to the object to be measured, and a second attachment plate coupled to the second attachment area and extending outwardly to be attached to the object to be measured. The tensile stress detection circuitry may be configured to detect a tensile stress imparted on the first and second attachment plates when attached to the object to be measured.

    Integrated Micro-Electromechanical Device of Semiconductor Material Having a Diaphragm

    公开(公告)号:US20190292045A1

    公开(公告)日:2019-09-26

    申请号:US16442199

    申请日:2019-06-14

    Abstract: A method for making an integrated micro-electromechanical device includes forming a first body of semiconductor material having a first face and a second face opposite the first face. The first body includes a buried cavity forming a diaphragm delimited between the buried cavity and the first face. The diaphragm is monolithic with the first body. The method further includes forming at least one first magnetic via extending between the second face and the buried cavity of the first body, forming a first magnetic region extending over the first face of the first body, and forming a first coil extending over the second face of the first body and being magnetically coupled to the first magnetic via.

    MAGNETIC INERTIAL SENSOR ENERGY HARVESTING AND SCAVENGING METHODS, CIRCUITS AND SYSTEMS

    公开(公告)号:US20190218092A1

    公开(公告)日:2019-07-18

    申请号:US16361739

    申请日:2019-03-22

    Inventor: Alberto Pagani

    CPC classification number: B81B3/0021 G01C19/5776 H02K35/02

    Abstract: A magnetic energy harvesting and scavenging circuit includes a first substrate having first and second surfaces and at least one energy harvesting and scavenging coil formed adjacent the first surface. An electromechanical systems device includes a moveable mass extending over the first surface and is displaced relative to the first substrate in three dimensions responsive to an external force applied to the moveable mass. The movable mass includes a magnet support layer and a number of permanent magnet segments attached to the magnet support layer. The permanent magnet segments are magnetically coupled to the at least one energy harvesting and scavenging coil. Energy harvesting and scavenging circuitry is electrically coupled to the at least one energy harvesting and scavenging coil and generates electrical energy due to magnetic flux variation through the at least one energy harvesting and scavenging coil responsive to movement of the moveable mass.

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