公开(公告)号：US20010030288A1

公开(公告)日：2001-10-18

申请号：US09790755

申请日：2001-02-22

Applicant: Wilks Enterprise, Inc.

Inventor： Paul A. Wilks JR. ,  Kenneth R. Mateer

IPC: G01N021/35 ,  G01J005/02

CPC classification number: G01N21/35 ,  G01J3/02 ,  G01J3/2803 ,  G01N21/3504 ,  G01N21/552

Abstract: An apparatus for analyzing a spectrum includes an elongated source of light, a device for producing a spectrum of the light, a sample stage, and an array of photosensitive elements for detecting the spectrum and providing an output representative of an intensity of the spectrum as a function of wavelength. The sample stage is interposed between the elongated source and the spectrum-producing device. The light propagates along a length of the sample stage from the elongated source to the spectrum-producing device. The elongated source has a length greater than or equal to a length of the array.

Abstract translation: 用于分析光谱的装置包括细长光源，用于产生光谱的装置，样品台和用于检测光谱的光敏元件阵列，并将代表光谱强度的输出表示为 波长的功能。 样品台介于细长的光源和光谱产生装置之间。 光沿着样品台的长度从细长的光源传播到光谱产生装置。 细长的源具有大于或等于阵列长度的长度。

公开(公告)号：US20010017879A1

公开(公告)日：2001-08-30

申请号：US09801037

申请日：2001-03-06

Inventor： Ulrich Kienitz ,  Volker Schmidt ,  Uwe Klonowski

IPC: G01J005/02 ,  G01K001/00 ,  G01B011/00 ,  F21V021/30 ,  F21V008/00

CPC classification number: G01J5/08 ,  G01J5/0803 ,  G01J5/0809 ,  G01J5/0831 ,  G01J5/089 ,  G01J5/0893 ,  G01J5/0896 ,  Y10S33/21

Abstract: Device for contactless temperature measurement of an object with an optical system which images into the finite and a detector, wherein an image of the detector is imaged by the optical system along an optical axis onto a measurement spot on the object in such a way that the image of the detector reduces from the optical system to a sharp point measurement spot and then enlarges, and also with a sighting arrangement which identifies the outer limit of the measurement spot by means of visible sighting rays. Each sighting ray is aligned obliquely with respect to the optical axis in such a way that each sighting ray can be used both before and also after the sharp point measurement spot to identify the measurement spot.

公开(公告)号：US20010015409A1

公开(公告)日：2001-08-23

申请号：US09735732

申请日：2000-12-13

Applicant: SIEMENS BUILDING TECHNOLOGIES LTD.

Inventor： Hansjurg Mahler ,  Martin Rechsteiner ,  Rolf Abrach

IPC: G01J005/02

CPC classification number: G08B13/19697

Abstract: The presence detector has a passive infrared sensor for detecting the presence of persons in a room, an image sensor operating in the visible spectral range and an electronic evaluator for the evaluation of signals from these sensors. The signal from the passive infrared sensor is used to actuate the image sensor and, if necessary, to switch on the room lighting. Once activated, the image sensor is used to detect both movement and occupancy of a space being monitored. Application of the presence detector for the nullon-demandnull activation and/or control of conditioning facilities of a room, wherein the signals of both sensors are used for the control of the conditioning facility.

Abstract translation: 存在检测器具有被动红外传感器，用于检测房间中人员的存在，以可见光谱范围工作的图像传感器以及用于评估来自这些传感器的信号的电子评估器。 来自被动红外传感器的信号用于启动图像传感器，如果需要，可以打开房间照明。 一旦激活，图像传感器用于检测被监视的空间的移动和占用。 应用存在检测器用于房间的调节设施的“按需”激活和/或控制，其中两个传感器的信号用于调节设施的控制。

公开(公告)号：US20040262522A1

公开(公告)日：2004-12-30

申请号：US10859850

申请日：2004-06-03

Applicant: OLYMPUS CORPORATION

Inventor： Akihiro Kitahara ,  Shigeru Kanegae ,  Yasuo Nishiyama ,  Yukinaga Shitamichi

IPC: G01J005/02

CPC classification number: G02B21/0048 ,  G02B21/0064

Abstract: An infrared confocal scanning microscope includes a light source unit, which emits a beam of infrared light, an objective lens, which converges the beam of infrared light from the light source unit to form a light spot inside the sample, a scanning mechanism, which two-dimensionally scans the light spot in a plane perpendicular to an optical axis, and a photodetector. The photodetector includes a micro light receiving region, which is in a confocal positional relation with respect to the light spot, and constitutes a substantial micro opening.

Abstract translation: 红外共焦扫描显微镜包括发射红外光的光源单元，会聚来自光源单元的红外光束以在样品内形成光点的物镜，扫描机构，其中两个 在垂直于光轴的平面中扫描光斑，以及光电检测器。 光电检测器包括相对于光斑处于共焦位置关系的微光接收区域，并且构成微小的开口。

公开(公告)号：US20040256563A1

公开(公告)日：2004-12-23

申请号：US10480036

申请日：2004-08-12

Inventor： Shinji Uchida ,  Kiyoko Ooshima

IPC: G01J005/02 ,  A61B005/00

CPC classification number: A61B5/1455 ,  A61B5/14532 ,  A61B5/14546 ,  A61B5/1495 ,  A61B2560/0223 ,  G01N21/21 ,  G01N21/552

Abstract: To provide a measuring method which enables a highly accurate measurement of concentrations of specific components in subjects of measurement even when the concentration measuring contact of a concentration measuring instrument is contaminated with drinks or the like. The concentration measuring instrument includes: a main body that has a concentration measuring contact, a light source and a photodetector; and judging means that calculates the difference between a non-contact-measured value, a value, measured by the photodetector while keeping a subject of measurement out of contact with the concentration measuring contact, of the quantity of light that is emitted and entered by the light source into the concentration measuring contact and returned to the concentration measuring contact and a predetermined reference value obtained in advance by making measurement while keeping the concentration measuring contact clean and judges whether the calculation of the concentration of the specific component in the subject of measurement is effective or not by comparing the calculated difference with a predetermined threshold.

Abstract translation: 为了提供一种测量方法，即使当浓度测量仪器的浓度测量接触被饮料等污染时，也能够高精度地测量测量对象中的特定组分的浓度。 该浓度测定装置具备：具有浓度测定接点的主体，光源和光检测器; 以及判断装置，其计算由所述光检测器测量的与所述浓度测量接触不接触的测量对象的非接触测量值，由所述测量对象测量的值与由所述测量接触点发射和进入的光量之间的差异， 光源进入浓度测量接触并返回到浓度测量接触，并且通过在保持浓度测量接触点清洁的同时进行测量而预先获得的预定参考值，并且判断测量对象中特定组分的浓度的计算是否为 通过将计算的差与预定阈值进行比较来有效。

公开(公告)号：US20040232335A1

公开(公告)日：2004-11-25

申请号：US10441507

申请日：2003-05-19

Inventor： William A. Terre ,  James T. Woolaway ,  Hubert Jerominek ,  Christine Alain

IPC: G01J005/02

CPC classification number: G01J5/20

Abstract: In a microbolometer detector the individual transducers in the focal plane array are support by leg members that are attached to the underlying readout integrated circuit (ROIC) chip at locations underneath transducers other than transducer which they support. A variety of configurations are possible. For example, the leg members may be attached to the ROIC chip at locations under adjacent transducers on opposite sides or on the same side of the supported transducer, or at locations underneath transducers that are not immediately adjacent to the supported transducer. In this way the effective length of the leg members and therefore the thermal isolation of the transducer they support can be increased.

Abstract translation: 在微辐射热计检测器中，焦平面阵列中的各个换能器由腿部构件支撑，腿部构件在它们支撑的换能器之外的位置处附接到底层读出集成电路（ROIC）芯片。 各种配置是可能的。 例如，腿部构件可以在相邻的换能器的相邻侧面上的位置处或者在所支撑的换能器的相同侧上的位置附接到ROIC芯片，或者在不直接邻近所支持的换能器的换能器下面的位置附接到ROIC芯片。 以这种方式，腿部构件的有效长度以及因此支撑的换能器的热隔离可以增加。

公开(公告)号：US20040227085A1

公开(公告)日：2004-11-18

申请号：US10867631

申请日：2004-06-14

Applicant: Nikon Corporation

Inventor： Takayuki Akiyama

IPC: G01T001/36 ,  G01N023/223 ,  G01J005/02

CPC classification number: C23C14/547 ,  G01B11/0625 ,  G01B11/0683

Abstract: The optical member used in an actual-use wavelength region in the infrared region has a substrate 11 and an optical thin film consisting of a plurality of layers that are formed on the substrate 11. The film forming apparatus comprises an optical monitor 4 which measures the spectroscopic characteristics in a specified wavelength region in the visible region, an optical monitor 5 which measures the spectroscopic characteristics in a specified region in the infrared region, and an actual-use wavelength region optical monitor which measures the spectroscopic characteristics in the actual-use wavelength region. The film thicknesses of the respective layers that are formed are determined on the basis of the spectroscopic characteristics measured by either the monitor 4 or monitor 5, and the set film thickness values of layers that have not yet been formed are adjusted on the basis of these film thicknesses. The spectroscopic characteristics of the optical thin film during film formation and following the completion of film formation that are measured by the actual-use wavelength region optical monitor are reflected when the next optical thin film is formed on the next substrate 11.

Abstract translation: 在红外区域的实际使用波长区域中使用的光学构件具有基板11和由形成在基板11上的多个层构成的光学薄膜。成膜装置包括光学监视器4，其测量 在可见光区域中的特定波长区域中的光谱特性，测量红外区域中的特定区域中的光谱特性的光学监视器5和测量实际使用波长中的光谱特性的实际使用波长区域光学监视器 地区。 基于由监视器4或监视器5测量的分光特性来确定形成的各个层的膜厚度，并且基于这些调整调整尚未形成的层的设定膜厚度值 膜厚度。 当在下一个基板11上形成下一个光学薄膜时，在实际使用的波长区域光学监视器中测量的成膜期间和成膜完成后的光学薄膜的光谱特性被反射。

公开(公告)号：US20040183019A1

公开(公告)日：2004-09-23

申请号：US10797607

申请日：2004-03-11

Inventor： Andreas Mandelis ,  Derrick Shaughnessy ,  Jerias Alves Batista ,  Jose A. Garcia

IPC: G01J005/02

CPC classification number: G01N21/17

Abstract: The present invention relates to metrologic methodologies and instrumentation, in particular laser-frequency domain infrared photocarrier radiometry (PCR), for contamination and defect mapping and measuring electronic properties in industrial Si wafers, devices and other semiconducting materials. In particular the invention relates to the measurement of carrier recombination lifetime, null, carrier diffusivity, D, surface recombination velocities, S, carrier diffusion lengths, L, and carrier mobility, null, as well as heavy metal contamination mapping, ion implantation mapping over a wide range of dose and energy, and determination of the concentration of mobile impurities in SiO2 layers on semiconductor substrates. The present invention provides a method and complete photocarrier radiometric apparatus comprising novel signal generation and analysis techniques (carrier-wave interferometry) as well as novel instrumental hardware configurations based on the physical principle of photocarrier radiometry. The method comprises (a) optical excitation of the sample with a modulated optical excitation source and (b) detection of the recombination-induced infrared emission while filtering any Planck-mediated emissions. The present invention provides an instrumental method for detecting weak inhomogeneities among semiconducting materials that are not possible to detect with conventional single-ended photocarrier radiometry. The method comprises (a) irradiating both sides of the sample with modulated optical excitation sources that are 180 degrees out of phase with respect to one another and (b) monitoring the diffusion of the interfering, separately generated carrier waves through the corresponding recombination-induced IR emissions for PCR detection, or the use of an alternative detection scheme that monitors a sample property dependent on the carrier wave transport in the sample.

Abstract translation: 本发明涉及计量学方法和仪器，特别是激光 - 频域红外光载流子辐射测量（PCR），用于工业Si晶片，器件和其他半导体材料中的污染和缺陷映射和测量电子性质。 特别地，本发明涉及载流子复合寿命，τ，载流子扩散系数，D，表面复合速度，S，载流子扩散长度，L和载流子迁移率μ以及重金属污染物映射，离子注入映射 广泛的剂量和能量，以及半导体衬底上SiO2层中移动杂质浓度的测定。 本发明提供一种包括新型信号产生和分析技术（载波干涉测量）以及基于光载流子辐射测量的物理原理的新型仪器硬件配置的方法和完整的光载波辐射测量装置。 该方法包括：（a）用调制的光激发源对样品进行光学激发，和（b）在过滤任何普朗克介导的排放物时检测复合诱发的红外发射。 本发明提供用于检测不可能用常规单端光载流子辐射测量法检测的半导体材料之间的弱不均匀性的仪器方法。 该方法包括（a）用相对于彼此相差180度的调制光激发源照射样品的两侧，以及（b）通过相应的重组诱导监测干扰的单独产生的载波的扩散 用于PCR检测的IR发射，或使用根据样品中的载波传输监测样品性质的替代检测方案。

公开(公告)号：US20040165244A1

公开(公告)日：2004-08-26

申请号：US10705434

申请日：2003-11-10

Inventor： Timothy D. Seeley

IPC: G01J005/02

CPC classification number: G01D5/28

Abstract: A device reader having a multiplex illuminator, the illuminator, and methods for reading deflection of a large number of microcantilevers are provided. The illuminator includes a micro-optical subassembly for illuminating cantilevers (illuminator) that uses a plurality of VCSELs for generating an array of electromagnetic beams, and focuses the beams on the cantilevers. Deflection of the cantilevers causes a change in angle of the beams reflected from the cantilevers, which is recorded by a plurality of position sensitive devices.

Abstract translation: 提供了一种具有多路照明器，照明器以及用于读取大量微悬臂梁偏转的方法的设备读取器。 照明器包括用于照射悬臂（照明器）的微光学子组件，其使用多个VCSEL来产生电磁束阵列，并将光束聚焦在悬臂上。 悬臂的偏转导致由多个位置敏感装置记录的从悬臂反射的梁的角度的变化。

公开(公告)号：US20040155195A1

公开(公告)日：2004-08-12

申请号：US10464660

申请日：2003-06-19

Applicant: ALCATEL

Inventor： Gilles Maurel

IPC: G01J005/02

CPC classification number: H04N5/33 ,  H04N5/2254 ,  H04N5/361

Abstract: Optical sensors, more particularly infrared sensors, use an array of MEM micromirrors to chop a light beam impinging on an array of sensors of an imaging device to minimize the influence of thermal noise. The array of micromirrors preferably switches the beam impinging on the array of sensors between an image to be analyzed and an image of a reference black body at a clearly defined temperature. These sensors are not cooled and require no cryogenic devices.

Abstract translation: 光学传感器，更具体地说，红外传感器使用MEM微镜阵列来切割入射到成像装置的传感器阵列上的光束，以最小化热噪声的影响。 微镜阵列优选地将在待分析的图像和参考黑体的图像之间以明确的温度切换入射在传感器阵列上的光束。 这些传感器不被冷却，不需要低温装置。