公开(公告)号：US20050092953A1

公开(公告)日：2005-05-05

申请号：US10796211

申请日：2004-03-10

Applicant: Yuzo Hayashi ,  Tatsuo Saito ,  Manabu Yabe ,  Masaharu Nakagawa

Inventor： Yuzo Hayashi ,  Tatsuo Saito ,  Manabu Yabe ,  Masaharu Nakagawa

IPC: F16K3/18 ,  F16K3/02 ,  F16K3/16 ,  F16K31/163 ,  F16K31/524 ,  F16K51/02 ,  F16K25/00

CPC classification number: F16K3/16 ,  F16K51/02 ,  Y10T137/87997

Abstract: A gate valve has a valve rod equipped with a valve plate having a pair of valve plate surfaces, wherein the valve rod is tilted by an actuator to thereby effect highly reliable valve opening/closing operation with a simple construction. In the gate valve, the valve rod, which is equipped with the valve plate with the pair of valve plate surfaces, is rotatably supported, and raised and lowered by a raising/lowering cylinder, the valve rod being tilted by an actuator, a combination of a cam member and a cam raising/lowering cylinder, a combination of a driving block and a cylinder, or a combination of a connection member and a driving device (not shown) to thereby effect valve opening/closing with the pair of valve plate surfaces.

Abstract translation: 闸阀具有装备有具有一对阀板表面的阀板的阀杆，其中阀杆由致动器倾斜，从而以简单的结构实现高度可靠的阀打开/关闭操作。 在闸阀中，配备有具有一对阀板面的阀板的阀杆由升降缸可旋转地支撑并升降，阀杆由致动器倾斜，组合 凸轮构件和凸轮升降缸，驱动块和气缸的组合，或连接构件和驱动装置（未示出）的组合，从而通过一对阀板来实现阀打开/关闭 表面。

公开(公告)号：US06877715B2

公开(公告)日：2005-04-12

申请号：US10418067

申请日：2003-04-18

Applicant: Masao Kajitani

Inventor： Masao Kajitani

IPC: F16K1/52 ,  F16K41/10 ,  F16K51/02 ,  F16K47/00

CPC classification number: F16K51/02 ,  F16K41/10

Abstract: A chamber port to which a vacuum chamber is connected and a pump port to which a vacuum pump is connected are formed on a valve body of a vacuum regulating valve. A valve plug includes a plate and a nose which is connected to the plate by screw members, and closes the chamber port by a pressure fluid. The maximum outer diameter of the nose is smaller than the inner circumferential diameter of the chamber port. The nose is detached through the chamber port.

Abstract translation: 在真空调节阀的阀体上形成连接有真空室的室口和连接有真空泵的泵口。 阀塞包括板和鼻，其通过螺钉构件连接到板，并且通过压力流体封闭室端口。 鼻部的最大外径小于腔室口的内周径。 鼻子通过腔室口分离。

公开(公告)号：US6135416A

公开(公告)日：2000-10-24

申请号：US253620

申请日：1999-02-18

Applicant: Christopher Keene

Inventor： Christopher Keene

IPC: F16K1/22 ,  F16K1/24 ,  F16K1/32 ,  F16K1/48 ,  F16K51/02 ,  F16K25/00

CPC classification number: F16K1/24

Abstract: A butterfly valve includes a valve housing having a fluid conduit, a seal plate assembly including a seal plate, and a closure assembly. The closure assembly includes a main shaft mounted in the valve housing and rotatable about a longitudinal axis between an open position and an intermediate position, a crank shaft rotatable about the longitudinal axis between the open position and a closed position, a hub affixed to the main shaft and movably coupled to the seal plate assembly to permit translation of the seal plate assembly with respect to the hub, a roller engaging the seal plate assembly and mounted to the crank shaft for eccentric rotation about the longitudinal axis, and one or more springs coupled between the seal plate assembly and the hub for biasing the seal plate toward the intermediate position. The valve may include a valve actuator which rotates the crank shaft about the longitudinal axis between the open position and the closed position.

Abstract translation: 蝶阀包括具有流体导管的阀壳体，包括密封板的密封板组件和封闭组件。 所述封闭组件包括安装在所述阀壳体中的主轴并围绕纵向轴线在打开位置和中间位置之间旋转;曲柄轴可围绕所述纵向轴线在所述打开位置和关闭位置之间旋转;固定到所述主体 并且可移动地联接到所述密封板组件以允许所述密封板组件相对于所述轮毂平移;接合所述密封板组件并且安装到所述曲轴的辊，用于围绕所述纵向轴线偏心旋转;以及一个或多个弹簧 在密封板组件和毂之间，用于将密封板朝向中间位置偏压。 阀可以包括阀致动器，该致动器使曲轴围绕纵向轴线在打开位置和关闭位置之间旋转。

公开(公告)号：US6041817A

公开(公告)日：2000-03-28

申请号：US138174

申请日：1998-08-21

Applicant: Ronald R. Guertin

Inventor： Ronald R. Guertin

IPC: B01J3/02 ,  B01J3/00 ,  F16K51/02 ,  G05D16/20 ,  G05D16/00

CPC classification number: G05D16/208 ,  F16K51/02 ,  Y10T137/86083 ,  Y10T137/87925

Abstract: An additional isolation valve is incorporated into a vacuum processing system to increase the life of the system's mechanical pump, reduce maintenance costs and downtime, prevent particle back streaming and reduce safety risks to maintenance technicians. The system has a process chamber with at least one port, a foreline valve connected to the port, and a vacuum manifold in fluid communication with the foreline valve. The mechanical pump is connected to the vacuum manifold for evacuating the contents of the process chamber. The isolation valve is connected between the foreline valve and the vacuum manifold and is operated in unison, or primarily in unison, with the foreline valve.

Abstract translation: 一个额外的隔离阀并入真空处理系统，以增加系统机械泵的使用寿命，降低维护成本和停机时间，防止颗粒反流，降低维护技术人员的安全隐患。 该系统具有处理室，其具有至少一个端口，连接到端口的前级管线阀以及与前级管路流体连通的真空歧管。 机械泵连接到真空歧管以排出处理室的内容物。 隔离阀连接在前级阀和真空歧管之间，并与前级阀一致或主要一致地运行。

公开(公告)号：US06019118A

公开(公告)日：2000-02-01

申请号：US23760

申请日：1998-02-13

Applicant: Heinz Voggenreiter ,  Albert Seidel

Inventor： Heinz Voggenreiter ,  Albert Seidel

IPC: F16K1/34 ,  C22C19/03 ,  F16K1/36 ,  F16K1/42 ,  F16K25/00 ,  F16K31/64 ,  F16K51/00 ,  F16K51/02

CPC classification number: F16K51/00 ,  F16K25/005 ,  Y10T137/0491

Abstract: Cryogenic valve with at least one pair of sealing elements, preferably one with a seat and a tappet, whose seat surfaces are in sealing contact with one another in the shutoff position. At least one sealing element of the pair is formed of a linearly superelastic shape memory alloy, which is stabilized by plastic cold working in the martensitic textural state, i.e., no longer displays a shape memory effect.

Abstract translation: 具有至少一对密封元件的低温阀，优选地具有座椅和挺杆的座椅表面在关闭位置处彼此密封接触的一对密封元件。 该对的至少一个密封元件由线性超弹性形状记忆合金形成，其通过在马氏体织构状态下的塑性冷加工而被稳定，即不再显示形状记忆效应。

公开(公告)号：US5967486A

公开(公告)日：1999-10-19

申请号：US858630

申请日：1997-05-20

Applicant: Gene A. McCrory ,  David L. Rehder

Inventor： Gene A. McCrory ,  David L. Rehder

IPC: F16K31/163 ,  F16K51/02 ,  F16K31/122 ,  F16K31/44

CPC classification number: F16K51/02 ,  F16K31/163 ,  Y10T74/18992 ,  Y10T74/20558 ,  Y10T74/20588 ,  Y10T74/206

Abstract: A valve actuator having a pivotal cam-lever driven push-pull mechanical linkage system. A power mechanism moves a cam-lever member which then moves a connecting rod to move a push-pull member to lift out or push in a conventional valve stem. This then opens or closes the valve. In an alternative embodiment, the actuator includes an adjustable block member to which the cam-lever is pivotally attached. This provides a separate adjustability for the ultimate maximum movement of the push-pull member and thereby also of the valve stem in order to ensure a proper closing force is imparted to the valve. Also in this embodiment, it is preferred that the push-pull member includes at least one spring washer disposed therein. This provides a desirable compressibility in the system during the imposition of the force that the push-pull member exerts on the valve stem during the opening and/or closing process.

Abstract translation: 具有枢转的凸轮杆驱动的推挽机械联动系统的阀致动器。 动力机构移动凸轮杆构件，然后移动连杆以移动推拉构件以提升或推动常规的阀杆。 然后打开或关闭阀门。 在替代实施例中，致动器包括可调节的块构件，凸轮杆枢转地附接到该可调节构件。 这为推拉构件和阀杆的最大最大运动提供了单独的可调节性，以便确保向阀施加适当的闭合力。 同样在该实施例中，优选地，推拉构件包括设置在其中的至少一个弹簧垫圈。 这在打开和/或关闭过程期间施加推力构件在阀杆上施加的力时在系统中提供期望的压缩性。

公开(公告)号：US5934856A

公开(公告)日：1999-08-10

申请号：US837948

申请日：1997-04-28

Applicant: Teruo Asakawa ,  Hiroaki Saeki

Inventor： Teruo Asakawa ,  Hiroaki Saeki

IPC: B65G49/07 ,  C23C16/54 ,  F16K51/02 ,  H01L21/00 ,  H01L21/677

CPC classification number: H01L21/67161 ,  C23C16/54 ,  F16K51/02 ,  H01L21/67126 ,  H01L21/67167 ,  H01L21/67184 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67742 ,  H01L21/67745 ,  Y10S414/139

Abstract: Vacuum process chambers are increased or decreased in number when the kind or order of processes is changed, and the shape and size of the transfer chamber are changed with the increase or decrease of the number of the vacuum process chambers, without entailing any change in a load-lock chamber and a transfer arm. The transfer arm has a minimum radius of rotation such that the arm can rotate in a transfer chamber of a minimum size corresponding to a minimum number of vacuum process chambers and a maximum arm reach such that the arm can deliver an object to-be-treated between each vacuum process chamber and a transfer chamber of a maximum size corresponding to a maximum number of vacuum process chambers. Thus, even though the number of the vacuum process chambers are increased or decreased with the change of the processes, it is necessary only that the shape and size of the transfer chamber be changed, and the other components, such as the load-lock chamber, transfer arm, etc., can be used in common, so that the manufacture and assembling of the system are very easy, ensuring a reduction in cost. Also, reduced-pressure treatment apparatus and a normal-pressure treatment apparatus are connected to each other by means of the load-lock chamber for replacement between the atmosphere and vacuum.

Abstract translation: 当处理的种类或顺序改变时，真空处理室的数量增加或减少，并且传送室的形状和尺寸随着真空处理室的数量的增加或减少而改变，而不会导致任何变化 负载锁定室和传送臂。 传送臂具有最小的旋转半径，使得臂可以在传送室中旋转，其最小尺寸对应于最小数量的真空处理室，并且最大臂达到，使得臂可以传递被处理物体 在每个真空处理室和对应于最大数量的真空处理室的最大尺寸的传送室之间。 因此，尽管随着工艺的变化，真空处理室的数量增加或减少，但只需要改变传送室的形状和尺寸，并且其它部件如负载锁定室 ，传送臂等，可以共同使用，使系统的制造和组装非常容易，确保降低成本。 此外，减压处理装置和常压处理装置通过用于更换大气和真空的装载锁定室彼此连接。

公开(公告)号：US5906688A

公开(公告)日：1999-05-25

申请号：US213079

申请日：1994-03-15

Applicant: Tadahiro Ohmi

Inventor： Tadahiro Ohmi

IPC: C23C8/14 ,  C23C14/35 ,  C23C14/56 ,  C23C16/44 ,  F16K31/02 ,  F16K51/02 ,  H01J37/32 ,  C22C38/44 ,  C23C8/18

CPC classification number: C23C8/14 ,  C23C14/35 ,  C23C14/564 ,  C23C16/4402 ,  C23C16/4404 ,  F16K31/02 ,  F16K51/02 ,  H01J37/32082 ,  H01J37/32174 ,  H01J2237/186

Abstract: A reduced pressure device the reduced pressure chamber of which is constructed of stainless steel, and includes a passivation film formed on the exposed interior surface thereof. The film has a thickness of more than 50 .ANG. and is composed of two or more layers. One layer contains mainly chrome oxide formed in the vicinity of the interface of the stainless steel and the passivation film. The other layer contains mainly iron oxide formed in the vicinity of the surface of the passivation film. A passivation film may also be used with a thickness of more than 50 .ANG. and containing mainly a mixture of chrome oxide and iron oxide. Lastly a passivation film may also be used with thickness of more than 50 .ANG. and containing mainly chrome oxide.

Abstract translation: 一种减压装置，其减压室由不锈钢构成，并包括在其暴露的内表面上形成的钝化膜。 该膜的厚度大于50，由两层或多层组成。 一层主要含有形成在不锈钢和钝化膜界面附近的氧化铬。 另一层主要在钝化膜的表面附近形成氧化铁。 还可以使用钝化膜，其厚度大于50埃，并主要含有氧化铬和氧化铁的混合物。 最后，钝化膜也可以使用，其厚度大于50，主要含有氧化铬。

公开(公告)号：US5836568A

公开(公告)日：1998-11-17

申请号：US870795

申请日：1997-06-06

Applicant: Tsuneo Ishigaki ,  Keiichi Shibuya

Inventor： Tsuneo Ishigaki ,  Keiichi Shibuya

IPC: F16L23/16 ,  C25D11/10 ,  F16J15/08 ,  F16K27/00 ,  F16K51/02 ,  F16K17/36

CPC classification number: F16K51/02

Abstract: A high-vacuum valve in which a seal portion of the inner wall of an annular space for interposing a metallic annular gasket is subjected to an anodic oxidation coating treatment other than the sulfuric acid anodic oxidation coating treatment to enhance the compression strength of the seal portion and to prevent the seal portion from being damaged, deformed and sticking to the metallic annular gasket. The high-vacuum valve has a plurality of ports communicated with a valve chamber in a valve body through respective tubular portions. A valve seat is formed in a flow path connecting the valve chamber and one of the tubular portions. The flow path is closed by bringing a valve element into contact with the valve seat, and the flow path is opened by separating the valve element from the valve seat. An annular space for interposing a metallic annular gasket is formed at an end portion of a tubular portion of an aluminum alloy that forms a port, and a seal portion is formed on an inner wall that forms the annular space. The seal portion or the whole of the valve body is subjected to an oxalic acid anodic oxidation coating treatment, thereby enhancing the compression strength of the seal portion and preventing the seal portion from being damaged, deformed and sticking to the metallic annular gasket.

Abstract translation: 一种高真空阀，其中用于插入金属环形垫圈的环形空间的内壁的密封部分经受除了硫酸阳极氧化涂层处理之外的阳极氧化涂覆处理，以提高密封部分的压缩强度 并且防止密封部被损坏，变形并粘附到金属环形垫圈上。 高真空阀具有多个端口，其通过相应的管状部分与阀体中的阀室连通。 阀座形成在连接阀室和其中一个管状部分的流路中。 通过使阀元件与阀座接触来关闭流路，并且通过将阀元件与阀座分离来打开流路。 用于插入金属环形垫圈的环形空间形成在形成端口的铝合金的管状部分的端部处，并且密封部分形成在形成环形空间的内壁上。 对密封部分或整个阀体进行草酸阳极氧化涂覆处理，从而提高密封部分的压缩强度，防止密封部分损坏，变形并粘附在金属环形垫片上。

公开(公告)号：US5753795A

公开(公告)日：1998-05-19

申请号：US644387

申请日：1996-05-10

Applicant: Ned R. Kuypers

Inventor： Ned R. Kuypers

IPC: B01J3/00 ,  B01J3/03 ,  F16K51/02 ,  H01J49/04 ,  G01N31/08 ,  G01N3/08

CPC classification number: F16K51/02 ,  B01J3/006 ,  B01J3/03 ,  H01J49/00

Abstract: A detachable, vacuum-sealing plate assembly is provided for vacuum chamber access. The assembly has a demountable hinge, thereby permitting the plate to be swung open or closed, or completely removed from the chamber. The swung-closed plate is automatically pressure-sealed to the chamber during vacuum pump-down by the pressure differential between the interior of the chamber and the outside atmosphere. The plate is released upon vacuum venting, thereby providing swing-open access to the chamber. Functional components may be mounted to the plate. The plate may also have associated high-vacuum electrical fluid flowpath transfer or physical component feed-throughs.

Abstract translation: 提供可拆卸的真空密封板组件用于真空室进入。 组件具有可拆卸铰链，从而允许板被打开或关闭，或者完全从腔室移除。 通过室内和室外气氛之间的压力差，在真空泵送期间，摆动封闭的板被自动压力密封到室。 在真空排气时释放板，从而提供对室的摆动开放通路。 功能部件可以安装在板上。 该板还可以具有相关联的高真空电流体流路传输或物理部件馈通。