SEMICONDUCTOR DEVICE, OR CRYSTAL
    73.
    发明申请
    SEMICONDUCTOR DEVICE, OR CRYSTAL 有权
    半导体器件,或晶体

    公开(公告)号:US20150194479A1

    公开(公告)日:2015-07-09

    申请号:US14233699

    申请日:2013-09-24

    申请人: FLOSFIA INC.

    IPC分类号: H01L29/04 H01L21/02 H01L29/24

    摘要: There is provided a semiconductor device including corundum crystal films of good quality. There is provided a semiconductor device including a base substrate, a semiconductor layer, and an insulating film each having a corundum crystal structure. Materials having a corundum crystal structure include many types of oxide films capable of functioning as an insulating film. Since all the base substrate, the semiconductor layer, and the insulating film have a corundum crystal structure, it is possible to achieve a semiconductor layer and an insulating film of good quality on the base substrate.

    摘要翻译: 提供了包括质量好的刚玉水晶膜的半导体器件。 提供了一种半导体器件,其包括各自具有刚玉晶体结构的基底基板,半导体层和绝缘膜。 具有刚玉晶体结构的材料包括能够用作绝缘膜的许多类型的氧化膜。 由于所有的基底,半导体层和绝缘膜都具有刚玉晶体结构,所以可以在基底基板上实现质量好的半导体层和绝缘膜。

    Epitaxial structure including carbon nanotube layer in grooves
    79.
    发明授权
    Epitaxial structure including carbon nanotube layer in grooves 有权
    外延结构包括碳纳米管层在凹槽中

    公开(公告)号:US09048347B2

    公开(公告)日:2015-06-02

    申请号:US13647445

    申请日:2012-10-09

    摘要: An epitaxial structure is provided. The epitaxial structure comprises a substrate, a carbon nanotube layer and an epitaxial layer stacked in that order. The substrate has an epitaxial growth surface and defines a plurality of first grooves and first bulges on the epitaxial growth surface. The carbon nanotube layer covers the epitaxial growth surface, wherein a first part of the carbon nanotube layer is attached on top surface of the first bulges, and a second part of the carbon nanotube layer is attached on bottom surface and side surface of the first grooves. The epitaxial layer is formed on the epitaxial growth surface, and the carbon nanotube layer is sandwiched between the epitaxial layer and the substrate.

    摘要翻译: 提供外延结构。 外延结构包括依次层叠的基板,碳纳米管层和外延层。 衬底具有外延生长表面并且在外延生长表面上限定多个第一凹槽和第一凸起。 所述碳纳米管层覆盖所述外延生长面,其中,所述碳纳米管层的第一部分附着在所述第一凸起的顶面上,所述碳纳米管层的第二部分附着在所述第一凹槽的底面和侧面 。 在外延生长面上形成外延层,将碳纳米管层夹在外延层和基板之间。