公开(公告)号：US09269520B2

公开(公告)日：2016-02-23

申请号：US14621526

申请日：2015-02-13

Applicant: JEOL Ltd.

Inventor： Takashi Satoh

IPC: H01J29/58 ,  H01J3/08 ,  H01J3/02 ,  H01J37/063 ,  H01J37/305 ,  B23K15/00 ,  B23K15/06 ,  B33Y30/00

CPC classification number: H01J3/08 ,  B22F3/1055 ,  B23K15/002 ,  B23K15/0026 ,  B23K15/0086 ,  B23K15/06 ,  B33Y30/00 ,  H01J3/02 ,  H01J3/024 ,  H01J3/027 ,  H01J37/063 ,  H01J37/305 ,  H01J2237/06308 ,  H01J2237/065 ,  H01J2237/3128 ,  Y02P10/295

Abstract: There is disclosed a method of controlling an electron gun without causing decreases in brightness of the electron beam if a current-limiting aperture cannot be used. The electron gun (10) has a cathode (11), a Wehnelt electrode (12), a control electrode (13), an anode (14), and a controller (22). The Wehnelt electrode (12) has a first opening (12c) in which the tip of the cathode is inserted, and focuses thermal electrons emitted from the tip of the cathode (11). The thermal electrons emitted from the tip of the cathode (11) are caused to pass into a second opening (13c) by the control electrode (13). The anode (14) accelerates the thermal electrons emitted from the cathode (11) such that the thermal electrons passed through the second opening (13c) pass through a third opening (14b) and impinge as an electron beam (B1) on a powdered sample (8). The controller (22) sets the bias voltage and the control voltage based on combination conditions of the bias voltage and control voltage to maintain the brightness of the beam constant.

Abstract translation: 如果不能使用限流孔，则公开了一种控制电子枪而不引起电子束亮度降低的方法。 电子枪（10）具有阴极（11），Wehnelt电极（12），控制电极（13），阳极（14）和控制器（22）。 Wehnelt电极（12）具有插入阴极顶端的第一开口（12c），并聚焦从阴极（11）的尖端发射的热电子。 从阴极（11）的顶端发射的热电子被控制电极（13）通入第二开口（13c）。 阳极（14）加速从阴极（11）发射的热电子，使得穿过第二开口（13c）的热电子通过第三开口（14b）并作为电子束（B1）撞击在粉末样品上 （8）。 控制器（22）基于偏置电压和控制电压的组合条件设置偏置电压和控制电压，以保持光束的亮度恒定。

公开(公告)号：US08890444B2

公开(公告)日：2014-11-18

申请号：US12653549

申请日：2009-12-15

Applicant: Armin Heinz Hayn ,  Mohamed El-Gomati

Inventor： Armin Heinz Hayn ,  Mohamed El-Gomati

IPC: H01J29/51 ,  H01J37/063

CPC classification number: H01J37/063 ,  H01J2237/06308 ,  H01J2237/06341 ,  H01J2237/06375

Abstract: An electron gun used in a particle beam device, for example in an electron microscope, has a relatively good brightness and may be operated under vacuum conditions which can be easily achieved (i.e., for example, at a residual pressure of about 10−6 or 10−7 mbar). The electron gun comprises an electron source having an electron emission surface. Furthermore, the electron gun comprises a first electrode configured to control a path of electrons emitted from the electron emission surface, a second electrode which is configured to suppress emissions of electrons from a side surface of the electron source and a third electrode configured to accelerate electrons emitted from the electron source to a final energy. A first voltage, a second voltage and a third voltage are adjusted to avoid any crossover of electrons emitted from the electron emission surface.

Abstract translation: 用于粒子束装置的电子枪例如在电子显微镜中具有相对较好的亮度，并且可以在容易实现的真空条件下操作（例如，在约10-6的残留压力或 10-7毫巴）。 电子枪包括具有电子发射表面的电子源。 此外，电子枪包括被配置为控制从电子发射表面发射的电子的路径的第一电极，被配置为抑制来自电子源的侧表面的电子的发射的第二电极和被构造成加速电子的第三电极 从电子源发射到最终能量。 调整第一电压，第二电压和第三电压以避免从电子发射表面发射的电子的任何交叉。

公开(公告)号：US08748819B2

公开(公告)日：2014-06-10

申请号：US13864600

申请日：2013-04-17

Applicant: Carl Zeiss Microscopy GmbH

Inventor： Gerd Benner

IPC: H01J37/26 ,  H01J37/063 ,  H01J37/12

CPC classification number: H01J37/244 ,  H01J37/04 ,  H01J37/26 ,  H01J2237/0492

Abstract: A transmission electron microscopy system has an illumination system and an objective lens system. A first projection system images the diffraction plane of the objective lens system into a first intermediate diffraction plane. A second projection system images the first intermediate diffraction plane into a second intermediate diffraction plane. A first aperture located in the first intermediate diffraction plane has a central opening of a first radius. A bright field detector located in the second intermediate diffraction plane has a detection surface defined by an inner edge of a second radius. The first radius and the second radius define a maximum angle and a minimum angle, respectively, relative to the optical axis of directions of bright field electrons traversing the sample plane and detectable by the bright field detector.

Abstract translation: 透射电子显微镜系统具有照明系统和物镜系统。 第一投影系统将物镜系统的衍射平面成像为第一中间衍射平面。 第二投影系统将第一中间衍射平面成像为第二中间衍射平面。 位于第一中间衍射平面中的第一孔具有第一半径的中心开口。 位于第二中间衍射平面中的明场检测器具有由第二半径的内边缘限定的检测表面。 第一半径和第二半径分别相对于穿过采样平面的可见光场检测器的亮场电子的方向的光轴分别确定最大角度和最小角度。

公开(公告)号：US5945683A

公开(公告)日：1999-08-31

申请号：US906389

申请日：1997-08-05

Applicant: Tatsuro Ohkawa ,  Yoshihisa Ooae ,  Hitoshi Tanaka ,  Hiroshi Yasuda

Inventor： Tatsuro Ohkawa ,  Yoshihisa Ooae ,  Hitoshi Tanaka ,  Hiroshi Yasuda

IPC: H01J37/06 ,  H01J37/063 ,  H01J37/305 ,  H01L21/027

CPC classification number: H01J37/063 ,  H01J2237/30433 ,  H01J2237/3175

Abstract: An electron beam exposure device includes an alignment optical system; an electromagnetic lens system; a stage on which the sample is provided; and an electron gun. The electron gun is comprised of an electron generating source; an electron generating source heating element which generates heat for increasing the temperature of the electron generating source; a supporting member which supports the electron generating source and the electron generating source heating element; and a Wehnelt. The electron beam exposure device is provided with at least one auxiliary heating element located at respective portion thermally connected to the electron generating source heating element.

Abstract translation: 电子束曝光装置包括对准光学系统; 电磁透镜系统; 提供样品的阶段; 和电子枪。 电子枪由电子发生源组成; 电子发生源加热元件，其产生用于增加电子发生源的温度的热量; 支撑电子发生源和电子发生源加热元件的支撑构件; 和一个Wehnelt。 电子束曝光装置设置有至少一个位于与电子发生源加热元件热连接的相应部分处的辅助加热元件。

公开(公告)号：US5895919A

公开(公告)日：1999-04-20

申请号：US991681

申请日：1997-12-16

Applicant: Jurgen Frosien ,  Stefan Lanio ,  Gerald Schonecker

Inventor： Jurgen Frosien ,  Stefan Lanio ,  Gerald Schonecker

IPC: H01J37/06 ,  H01J3/02 ,  H01J37/063 ,  H01J37/073 ,  H01J37/145 ,  G21K1/08

CPC classification number: H01J3/029 ,  H01J37/063

Abstract: The invention relates to a gun lens for generating a particle beam with a cathode, an extraction electrode, an anode and a condenser lens, wherein a deceleration field is generated between the extraction electrode and the anode and the condenser lens produces a magnetic field which is superimposed on both the cathode, the extraction electrode and the anode.

Abstract translation: 本发明涉及一种用于产生具有阴极，提取电极，阳极和聚光透镜的粒子束的枪式透镜，其中在引出电极和阳极之间产生减速场，聚光透镜产生磁场， 叠加在阴极，引出电极和阳极上。

公开(公告)号：US5623183A

公开(公告)日：1997-04-22

申请号：US408210

申请日：1995-03-22

Applicant: Curtis G. Allen ,  Richard B. True

Inventor： Curtis G. Allen ,  Richard B. True

IPC: H01J37/063

CPC classification number: H01J37/063 ,  B01D53/007 ,  B01D2259/812 ,  H01J2237/083 ,  H01J2237/3165

Abstract: An electron gun for use in remediation of hazardous volatile organic compounds is provided. The electron gun comprises a cathode having a concave emitting surface and a dome-shaped focusing electrode concentrically surrounding the emitting surface. The focusing electrode has an inwardly protruding lip portion that extends at least partially into a beam focusing region defined in front of the emitting surface. A target grid is spaced from the cathode and a negative voltage is applied between the emitting surface and the target. The target grid has a surface area that is substantially larger than an associated surface area of the emitting surface. An electron beam is provided by the emitting surface in response to the negative voltage, and is focused into a broad diverging beam by the focusing electrode. The electron gun may be configured for temperature limited emission or space charge limited emission.

Abstract translation: 提供了用于修复有害挥发性有机化合物的电子枪。 电子枪包括具有凹发射表面的阴极和同心地围绕发射表面的圆顶形聚焦电极。 聚焦电极具有向内突出的唇部，其至少部分地延伸到限定在发射表面前面的束聚焦区域。 目标栅极与阴极间隔开，并且在发射表面和靶之间施加负电压。 目标栅格具有基本上大于发射表面的相关表面积的表面积。 电子束由发射表面响应于负电压提供，并且被聚焦电极聚焦成宽的发散光束。 电子枪可以被配置用于温度限制发射或空间电荷限制发射。

公开(公告)号：US5233196A

公开(公告)日：1993-08-03

申请号：US764772

申请日：1991-09-24

Applicant: Masahiko Okunuki ,  Haruhito Ono

Inventor： Masahiko Okunuki ,  Haruhito Ono

IPC: H01J1/312 ,  H01J1/308 ,  H01J3/18 ,  H01J37/063 ,  H01J37/073 ,  H01J37/305 ,  H01L21/027 ,  H01L21/30

CPC classification number: H01J37/063 ,  H01J1/308 ,  H01J2201/319 ,  H01J2237/062 ,  H01J2237/06325 ,  H01J2237/1202

Abstract: An electron beam apparatus for applying an electron beam from an electron source onto a target plane is characterized by comprising one sheet of electrode disposed between said electron source for emitting the electron beam in parallel or substantially parallel and a target arrangement position, and a power source for supplying a desired voltage to said electrode.

Abstract translation: 用于将来自电子源的电子束施加到目标平面上的电子束装置的特征在于包括设置在所述电子源之间的一片电极，用于平行或基本平行地发射电子束和目标布置位置，以及电源 用于向所述电极提供所需的电压。

公开(公告)号：US5109179A

公开(公告)日：1992-04-28

申请号：US464458

申请日：1990-01-12

Applicant: Georges Faillon ,  Christophe Bastien ,  Christine Farvet

Inventor： Georges Faillon ,  Christophe Bastien ,  Christine Farvet

IPC: H01J37/06 ,  H01J23/065 ,  H01J23/087 ,  H01J37/063

CPC classification number: H01J23/087 ,  H01J23/065

Abstract: This disclosure concerns electron guns comprising several electrodes, including a cathode. The gun has a device producing a magnetic field, adjustable if necessary, in the vicinity of the cathode. This device works together with one of the electrodes other than the cathode. It cooperates notably with the anode or the wehnelt. This device is either a solenoid or one or more permanent magnets. This device is placed either inside or outside the gun. It can be applied to high-power, "O" type electron tubes.

Abstract translation: 本公开涉及包括几个电极的电子枪，包括阴极。 枪具有产生磁场的装置，如果需要，可在阴极附近调节。 该装置与阴极以外的其中一个电极一起工作。 它与阳极或wehnelt显着配合。 该装置是螺线管或一个或多个永磁体。 该装置放置在枪的内部或外部。 它可以应用于大功率“O”型电子管。

公开(公告)号：US4899078A

公开(公告)日：1990-02-06

申请号：US180850

申请日：1988-04-12

Applicant: Otto Winkler

Inventor： Otto Winkler

IPC: H01J37/063 ,  H01J1/16

CPC classification number: H01J1/16

Abstract: A thermionic hairpin cathode with a long operating life is made of a high melting metal wire, in which the temperature distribution along the legs is influenced either by locally increasing the radiation at a distance of 10 to 50% of the leg length from the crown or by decreasing the radiation in the immediate vicinity of the crown without changing the wire legs, possibly also by combining both measures, so that by increasing the temperature gradient in the crown region the maximum temperature is shifted close to or at the emission center.

Abstract translation: 具有长使用寿命的热电子发夹阴极由高熔点金属线制成，其中沿着腿部的温度分布通过局部地增加距冠部的腿长度的10至50％的距离而受到影响，或 通过降低冠部附近的辐射而不改变线腿，可能也可以通过组合两种措施，使得通过增加冠部区域中的温度梯度，最大温度在发射中心附近或在发射中心处移动。

公开(公告)号：US4500791A

公开(公告)日：1985-02-19

申请号：US348064

申请日：1982-02-08

Applicant: Siegfried Beisswenger

Inventor： Siegfried Beisswenger

IPC: H01J3/02 ,  H01J37/04 ,  H01J37/06 ,  H01J37/063

CPC classification number: H01J37/063 ,  H01J3/029

Abstract: Apparatus for generating and controlling an electron gun in a vacuum envelope comprising, a cathode, means for controlling the temperature of the cathode to control its current emission, an auxiliary electrode with an aligned opening mounted adjacent to said cathode and with the electron beam from the cathode passing through said aligned opening, means for maintaining the voltage of said auxiliary electrode slightly more negative than said cathode, and an annular anode mounted in a spaced relationship from said cathode and said auxiliary electrode.

Abstract translation: PCT No.PCT / DE80 / 00086 Sec。 371日期1982年2月8日 102（e）日期1982年2月8日PCT归档1980年6月7日PCT公布。 公开号WO81 / 03579 日本1991年12月10日。用于在真空外壳中产生和控制电子枪的装置，包括阴极，用于控制阴极的温度以控制其电流发射的装置，具有邻近所述阴极安装的对准开口的辅助电极 并且来自阴极的电子束通过所述对准的开口，用于将所述辅助电极的电压维持为比所述阴极稍负的装置，以及以与所述阴极和所述辅助电极间隔的方式安装的环形阳极。