公开(公告)号：US20120308173A1

公开(公告)日：2012-12-06

申请号：US13478280

申请日：2012-05-23

Applicant: Hideki YAGI

Inventor： Hideki YAGI

IPC: G02F1/025 ,  H01L21/302

CPC classification number: G02F1/025 ,  G02F1/2257 ,  G02F2201/066

Abstract: A method for manufacturing a semiconductor optical modulator includes forming a p-type semiconductor layer on a main surface of a p-type semiconductor substrate; forming a pair of stripe-shaped masks on the p-type semiconductor layer, the stripe-shaped masks extending in a first direction along the main surface of the p-type semiconductor substrate and being spaced apart from each other; simultaneously forming a hole and a pair of stripe structures extending in the first direction by etching the p-type semiconductor layer through the stripe-shaped masks, the pair of stripe structures defining the hole; after removing the stripe-shaped masks, forming a buried layer in the hole; forming a core layer on the buried layer and the stripe structures; and forming an upper cladding layer on the core layer. The buried layer is made of a semiconductor material with a lower optical absorption loss than that of the p-type semiconductor layer.

Abstract translation: 一种制造半导体光调制器的方法包括在p型半导体衬底的主表面上形成p型半导体层; 在p型半导体层上形成一对条形掩模，所述条形掩模沿着所述p型半导体衬底的主表面沿第一方向延伸并且彼此间隔开; 同时形成通过蚀刻p型半导体层通过条形掩模在第一方向延伸的孔和一对条纹结构，所述一对条纹结构限定该孔; 在去除条形掩模之后，在孔中形成掩埋层; 在掩埋层和条纹结构上形成核心层; 以及在所述芯层上形成上包层。 埋层由具有比p型半导体层低的光吸收损耗的半导体材料制成。

公开(公告)号：US20110128614A1

公开(公告)日：2011-06-02

申请号：US13018997

申请日：2011-02-01

Applicant: Girsh Blumberg ,  Aref Chowdhury

Inventor： Girsh Blumberg ,  Aref Chowdhury

IPC: G02F1/37 ,  G02B6/00

CPC classification number: G02B6/1226 ,  B82Y20/00 ,  G02F1/0356 ,  G02F1/3532 ,  G02F1/3534 ,  G02F1/3536 ,  G02F2001/3548 ,  G02F2201/066 ,  G02F2201/127 ,  G02F2202/20 ,  G02F2203/10

Abstract: A frequency-conversion method that uses a nonlinear optical process to transfer energy between a surface-plasmon (SP) wave that is guided along an electrically conducting strip and a light beam that is guided along an optical waveguide whose core is adjacent to the electrically conducting strip. A periodic structure spatially modulates the nonlinear susceptibility of the waveguide core with a spatial period that is related to a momentum mismatch in the nonlinear optical process. The spatial modulation provides quasi-phase matching for the SP wave and the light beam and enables efficient energy transfer between them.

Abstract translation: 一种频率转换方法，其使用非线性光学方法在沿着导电条带引导的表面等离子体（SP）波之间传递能量，并且沿着沿与光导体相邻的光波导引导的光束 跳闸。 周期性结构利用与非线性光学过程中的动量失配相关的空间周期空间调制波导芯的非线性磁化率。 空间调制为SP波和光束提供准相位匹配，并实现它们之间的有效能量传递。

公开(公告)号：US07931831B2

公开(公告)日：2011-04-26

申请号：US12434207

申请日：2009-05-01

Applicant: Takashi Yoshino

Inventor： Takashi Yoshino

IPC: B29D11/00

CPC classification number: G02F1/3775 ,  G02F1/3558 ,  G02F2201/066 ,  G02F2201/124

Abstract: A voltage is applied on an interdigitated electrode provided on one main face of a single-domain ferroelectric single crystal substrate to form a periodic domain inversion structure. The interdigitated electrode is then removed. The optical waveguide is then formed in the substrate. An optical intensity center P1 of the optical waveguide is kept away from a location P0 of the end of the interdigitated electrode.

Abstract translation: 在单畴铁电单晶衬底的一个主面上的交叉电极上施加电压，形成周期性畴反转结构。 然后去除叉指电极。 然后在衬底中形成光波导。 光波导的光强度中心P1远离交叉电极的端部的位置P0。

公开(公告)号：US07192480B2

公开(公告)日：2007-03-20

申请号：US10919695

申请日：2004-08-16

Applicant: Lee J. Burrows

Inventor： Lee J. Burrows

IPC: C30B1/02

CPC classification number: G02F1/035 ,  C30B15/00 ,  C30B29/30 ,  C30B33/00 ,  G02B6/1345 ,  G02B2006/12169 ,  G02F2201/066 ,  G02F2201/07 ,  G02F2202/20 ,  Y10S117/91

Abstract: A method for fabricating ion exchange waveguides, such as lithium niobate or lithium tantalate waveguides in optical modulators and other optical waveguide devices, utilizes pressurized annealing to further diffuse and limit exchange of the ions and includes ion exchanging the crystalline substrate with a source of ions and annealing the substrate by pressurizing a gas atmosphere containing the lithium niobate or lithium tantalate substrate above normal atmospheric pressure, heating the substrate to a temperature ranging from about 150 degrees Celsius to about 1000 degrees Celsius, maintaining pressure and temperature to effect greater ion diffusion and limit exchange, and cooling the structure to an ambient temperature at an appropriate ramp down rate. In another aspect of the invention a powder of the same chemical composition as the crystalline substrate is introduced into the anneal process chamber to limit the crystalline substrate from outgassing alkaline earth metal oxide during the anneal period. In yet another aspect of the invention an anneal container is provided that allows for crystalline substrates to be annealed in the presence of powder without contaminating the substrate with the powder during the anneal process. Waveguides manufactured in accordance with the method exhibit superior drift performance.

Abstract translation: 用于制造离子交换波导的方法，如光调制器和其它光波导器件中的铌酸锂或钽酸锂波导，利用加压退火来进一步扩散和限制离子的交换，并且包括使晶体衬底与离子源离子交换， 通过将含有铌酸锂或钽酸锂衬底的气体气氛加压到正常大气压下来对衬底进行退火，将衬底加热至约150摄氏度至约1000摄氏度的温度，保持压力和温度以实现更大的离子扩散和限制 交换，并以适当的降速率将结构冷却至环境温度。 在本发明的另一方面，将与结晶基底相同的化学组成的粉末引入退火处理室中，以在退火期间限制结晶底物从脱气碱土金属氧化物。 在本发明的另一方面，提供一种退火容器，其允许结晶基材在粉末存在下进行退火，而不会在退火过程中用粉末污染基材。 根据该方法制造的波导显示出优异的漂移性能。

公开(公告)号：US20060210216A1

公开(公告)日：2006-09-21

申请号：US11084462

申请日：2005-03-17

Applicant: Michael Lee ,  Kishio Yokouchi

Inventor： Michael Lee ,  Kishio Yokouchi

IPC: G02B6/12

CPC classification number: G02F1/2255 ,  G02B6/12002 ,  G02B6/1221 ,  G02B2006/12159 ,  G02F2001/212 ,  G02F2201/066 ,  G02F2202/022

Abstract: Compact optical devices and methods of constructing the same are disclosed. The optical devices are formed with perpendicular orientations to the surface of a supporting layer (e.g., substrate), and have three-dimensional structures rather than planar structures. The optical devices can be formed with high density on supporting layers without the need for several built-up layers. Maintaining the processing temperatures within the cure profiles of polymer optical layers is readily achieved.

Abstract translation: 公开了紧凑型光学器件及其构造方法。 光学器件形成为垂直取向到支撑层（例如，衬底）的表面，并且具有三维结构而不是平面结构。 可以在支撑层上形成高密度的光学器件，而不需要几个积层。 在聚合物光学层的固化分布内保持加工温度是容易实现的。

公开(公告)号：US06917463B2

公开(公告)日：2005-07-12

申请号：US09983057

申请日：2001-10-23

Applicant: Isao Tsuruma

Inventor： Isao Tsuruma

IPC: G02B6/134 ,  G02F1/03 ,  G02F1/377 ,  G02F1/365

CPC classification number: G02F1/3775 ,  G02B6/1347 ,  G02F1/0316 ,  G02F2201/066

Abstract: A wavelength converting element is provided in which a fundamental wave with respect to an optical crystal substrate and a peak of a vertical transverse mode of a second harmonic are made to coincide, the converting efficiency is good, and a beam shape which enables good joining to a lens or an optical fiber is obtained. Given that an angle formed by a surface of the optical crystal substrate and a C axis of the optical crystal substrate is θ, a period at which inverted domains are formed is p, and a distance from a distal end of a comb-shaped electrode for forming the inverted domain to a central position of a waveguide is G, in the ion implantation, a concentration peak of the ion implantation is formed at a distance of substantially (G·tanθ+p/4) from the surface of the optical crystal substrate.

Abstract translation: 提供一种波长转换元件，其中使相对于光学晶体基板的基波和二次谐波的垂直横向模式的峰值一致，转换效率良好，并且能够良好地接合到 获得透镜或光纤。 假设由光学晶体基板的表面和光学晶体基板的C轴形成的角度为θ，则形成反转畴的周期为p，并且与梳状电极的远端的距离为 在波导的中心位置处形成反向域为G，在离子注入中离子注入的浓度峰从与光晶体基板的表面基本上（G.tantheta + p / 4）的距离形成 。

公开(公告)号：US20040208412A1

公开(公告)日：2004-10-21

申请号：US10813123

申请日：2004-03-31

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Shun-ichi Miyazaki ,  Akira Miura ,  Shinji Kobayashi ,  Morio Wada ,  Tsuyoshi Yakihara ,  Sadaharu Oka ,  Shinji Iio ,  Chie Sato

IPC: G02F001/295 ,  G02B006/26

CPC classification number: G02F1/31 ,  G02B6/3548 ,  G02F1/295 ,  G02F2001/311 ,  G02F2201/066 ,  G02F2202/101

Abstract: According to this invention, electrodes are formed on both sides of a part of an optical waveguide formed on a substrate and a voltage is applied between the electrodes to change the refractive index at the part of the optical waveguide where the electrode is formed. Therefore, the traveling direction of light can be changed. Moreover, an optical waveguide formed on a substrate, plural electrodes formed on both sides of the optical waveguide, plural incidence units formed at one end of the substrate, and plural emission units formed at the other end are provided. A voltage applied to an arbitrary electrode of the plural electrodes is controlled to change the refractive index at the part of the optical waveguide where the voltage is applied. Light emitted from an arbitrary incidence unit and incident on a core of the substrate thus becomes incident on an arbitrary emission unit. As the position of incidence of incident light or the diameter of the incident light is controlled to emit light to an arbitrary emission unit, an optical switch is realized that has a high degree of freedom in control, is small-sized, has no moving part and has high reliability. Moreover, as a voltage application unit is provided with an algorithm-based optimization processing function in order to improve the responsiveness and the degree of freedom of the optical switch, a highly flexible optical switch that can cope with, for example, changes in communication quantity and communication failure, is realized.

Abstract translation: 根据本发明，在形成在基板上的光波导的一部分的两侧形成电极，并且在电极之间施加电压以改变形成电极的光波导部分的折射率。 因此，可以改变光的行进方向。 此外，形成在基板上的光波导，形成在光波导的两侧的多个电极，形成在基板一端的多个入射单元和形成在另一端的多个发光单元。 控制施加到多个电极中的任意电极的电压，以改变在施加电压的光波导的部分处的折射率。 从任意入射单元发射的入射在基板的芯上的光就入射到任意的发射单元上。 当入射光的入射位置或入射光的直径被控制为发射光到任意的发射单元时，实现了具有高自由度控制的光学开关，小型化，没有移动部分 并具有很高的可靠性。 此外，为了提高光开关的响应性和自由度，为了提供基于算法的优化处理功能，电压施加单元具有高灵活性的光开关，能够应付例如通信量的变化 和通信故障，实现。

公开(公告)号：US20030185481A1

公开(公告)日：2003-10-02

申请号：US10112938

申请日：2002-04-02

Inventor： Koji Yamada

IPC: G02F001/035

CPC classification number: B82Y20/00 ,  G02B6/1228 ,  G02F1/01708 ,  G02F1/025 ,  G02F2001/0155 ,  G02F2201/066

Abstract: A semiconductor waveguide device includes a lower clad layer, an upper clad layer, an optical waveguide layer interposed between the lower clad layer and the upper clad layer, and a lower electrode and an upper electrode for applying a voltage to a laminated structure including the lower clad layer, the optical waveguide layer, and the upper clad layer. Light is made incident from an end face of the optical waveguide layer. The upper clad layer includes a stripe-like width-narrowed portion, and a width-broadened portion formed at a position closer to a light-incident end face than the width-narrowed portion and having a width wider than the width-narrowed portion.

Abstract translation: 半导体波导器件包括下包层，上覆层，插入在下包层和上覆层之间的光波导层，以及用于向包括下覆层的层叠结构施加电压的下电极和上电极 包层，光波导层和上包层。 光从光波导层的端面入射。 上覆盖层包括条状宽度窄部分和形成在比宽度窄部分更靠近光入射端面的位置并且具有比宽度变窄部分宽的宽度的宽度变宽部分。

公开(公告)号：US06522792B1

公开(公告)日：2003-02-18

申请号：US09529223

申请日：2000-04-10

Applicant: Tohru Sugamata ,  Yasuyuki Miyama ,  Yoshihiro Hashimoto

Inventor： Tohru Sugamata ,  Yasuyuki Miyama ,  Yoshihiro Hashimoto

IPC: G02F1035

CPC classification number: G02F1/0356 ,  G02F2201/066 ,  G02F2201/07

Abstract: An optical waveguide modulator 40 has a substrate 1 made of a material with an electrooptic effect, an optical waveguide 2 to guide a lightwave 2, a travelling wave-type signal electrode 3 and the ground electrodes 4 to control the lightwave. Moreover, it has a buffer layer 6, at least a part thereof being embedded in the superficial layer of the substrate 1, having a larger width “W” than a width “&ohgr;” of the travelling wave-type signal electrode 3 only under the signal electrode 3 and its nearby part.

Abstract translation: 光波导调制器40具有由具有电光效应的材料制成的基板1，引导光波2的光波导2，行波型信号电极3和接地电极4以控制光波。 此外，其具有缓冲层6，其至少一部分嵌入在基板1的表层中，具有比行波信号电极3的宽度“ω”更大的宽度“W”，仅在 信号电极3及其附近部分。

公开(公告)号：US06512866B1

公开(公告)日：2003-01-28

申请号：US09619926

申请日：2000-07-20

Applicant: Shanhui Fan ,  Pierre R. Villeneuve ,  John D. Joannopoulos ,  Brent E. Little ,  Hermann A. Haus

Inventor： Shanhui Fan ,  Pierre R. Villeneuve ,  John D. Joannopoulos ,  Brent E. Little ,  Hermann A. Haus

IPC: G02B6293

CPC classification number: G02F1/3132 ,  G02B6/12007 ,  G02B6/1225 ,  G02F1/17 ,  G02F2201/066 ,  G02F2202/32 ,  G02F2203/15 ,  G02F2203/585 ,  H04Q3/00

Abstract: A highly efficient channel drop filter. The filter employs a coupling element including a resonator-system between two waveguides, which contains at least two resonant modes. The resonator-system includes one or more interacting resonant cavities which in addition to being coupled to the waveguides, can also be coupled directly among themselves and indirectly among themselves via the waveguides. Each component of the coupling element can be configured or adjusted individually. The geometry and/or dielectric constant/refractive index of the resonator-system are configured so that the frequencies and decay rates of the resonant modes are made to be substantially the same. The filter can achieve 100% signal transfer between the waveguides at certain frequencies, while completely prohibiting signal transfer at other frequencies. In exemplary embodiments, the filter is configured with photonic crystals. In accordance with alternative embodiments of the invention, the filter is configured as an absorption induced on/off switch and modulator. The switching action is achieved with either electrical or optical absorption.

Abstract translation: 高效的通道降滤波器。 滤波器采用耦合元件，其包括在两个波导之间的谐振器系统，其包含至少两个谐振模式。 谐振器系统包括一个或多个相互作用的谐振腔，除了耦合到波导之外，它们也可以直接耦合到它们之间并通过波导间接地彼此间耦合。 耦合元件的每个部件可以单独配置或调整。 谐振器系统的几何形状和/或介电常数/折射率被配置为使谐振模式的频率和衰减速率基本上相同。 滤波器可以在某些频率下实现波导之间的100％信号传输，同时完全禁止其他频率的信号传输。 在示例性实施例中，滤光器配置有光子晶体。 根据本发明的替代实施例，滤波器被配置为吸收诱导的开/关开关和调制器。 开关动作通过电吸收或光吸收来实现。