公开(公告)号：US4690559A

公开(公告)日：1987-09-01

申请号：US744861

申请日：1985-06-14

Applicant: Stefan Florek ,  Helmut Becker-Ross ,  Hans-Jurgen Dobschal ,  Joachim Mohr

Inventor： Stefan Florek ,  Helmut Becker-Ross ,  Hans-Jurgen Dobschal ,  Joachim Mohr

IPC: G01J3/12 ,  G01J3/02 ,  G01J3/04 ,  G01J3/18

CPC classification number: G01J3/1809 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0229 ,  G01J3/04 ,  G01J2003/1828

Abstract: The invention relates to an optical system for spectral analysis devices particularly for use in atomic emission spectroscopy in which the aberrations, astigmatis and coma are compensated separately, comprising two concave spherical reflectors adjacently arranged and having their vertices equidistantly located relative to a center of a dispersing member. The latter has a dispersion plane at right angles to the dispersing structure of the dispersing member and to its surface, the vertices are located in said dispersion plane. The center beams originating from an excitation light source are reflected at the reflectors in reflection planes which are at right angles to the dispersion plane. The light entrance of the optical system comprises two slits the images of which coincide in a focal plane. The center of the focal plane and the light entrance have a same distance to the dispersion plane and are located on different sides of the latter.

Abstract translation: 本发明涉及一种用于光谱分析装置的光学系统，其特别用于原子发射光谱法，其中像差，散光和昏迷被单独补偿，其包括相邻布置的两个凹球形反射器，并且其顶点相对于分散的中心等距定位 会员。 后者具有与分散构件的分散结构成直角且与其表面成直角的分散平面，顶点位于所述分散平面中。 源自激发光源的中心光束在与分散平面成直角的反射面中的反射器处反射。 光学系统的光入射包括两个狭缝，其图像在焦平面上重合。 焦平面和光入口的中心具有与分散平面相同的距离并且位于后者的不同侧。

公开(公告)号：US4205229A

公开(公告)日：1980-05-27

申请号：US956529

申请日：1978-10-31

Applicant: Robert A. Administrator of the National Aeronautics and Space Administration, with respect to an invention of Frosch ,  Reinhard Beer

Inventor： Robert A. Administrator of the National Aeronautics and Space Administration, with respect to an invention of Frosch ,  Reinhard Beer

IPC: G01J3/18 ,  G01J1/00

CPC classification number: G01J3/1809 ,  G01J3/0286

Abstract: A cooled echelle grating spectrometer for detecting wavelengths between one micron and fifteen microns. More specifically, a spectrometer is disclosed having a cross-dispersing grating for ordering infrared energy, and an echelle grating for further ordering of the infrared energy. Means are disclosed to direct infrared energy to the cross-dispersing grating and then to the echelle grating. Ordered radiation from the echelle grating is sensed by a detecting means. Means are also disclosed for cooling the cross-dispersing grating, the echelle grating and the detecting means so that background radiation can be minimized. In a specific embodiment the cross-dispersing grating and echelle grating are in separate enclosed volumes having access to each other through a single intermediate aperture, reflected energy from the cross-dispersing grating being focused so as to pass through the intermediate aperture and then collimated and directed to the echelle grating for further ordering. Also disclosed is use of a Schmidt camera for focusing the further ordered radiation from the echelle grating onto a detector array having individual detectors dispersed on a plane which substantially corresponds to a curved focal plane of the Schmidt camera. A spectrometer constructed according to the teachings of the present invention will continuously cover the spectrum between one micron and fifteen microns and have a resolution of 0.1 cm..sup.-1.

Abstract translation: 用于检测1微米至15微米波长的冷却式梯形光栅光谱仪。 更具体地，公开了一种具有用于排列红外能量的交叉分散光栅的光谱仪，以及用于进一步排列红外能量的梯形光栅。 公开的手段是将红外能量引导到交叉分散光栅，然后到梯形光栅。 通过检测装置感测来自梯形光栅的有序辐射。 还公开了用于冷却交叉分散光栅，梯形光栅和检测装置的装置，使得可以最小化背景辐射。 在一个具体实施例中，交叉分散光栅和梯形光栅处于分离的封闭体积中，其通过单个中间孔相互接近，来自交叉分散光栅的反射能量被聚焦以便穿过中间孔然后准直 针对梯形栅格进一步排序。 还公开了使用施密特照相机将来自梯形光栅的进一步有序辐射聚焦到具有分散在基本上对应于施密特照相机的弯曲焦平面的平面上的各个检测器的检测器阵列上。 根据本发明的教导构造的光谱仪将连续地覆盖1微米至15微米的光谱并具有0.1厘米-1的分辨率。

公开(公告)号：US3922089A

公开(公告)日：1975-11-25

申请号：US34098073

申请日：1973-03-14

Applicant: DANIELSSON NILS ALLAN ,  LINDBLOM KARL PETER

Inventor： DANIELSSON NILS ALLAN ,  LINDBLOM KARL-PETER CHRISTIAN

IPC: G01J3/00 ,  G01J3/12 ,  G01J3/18

CPC classification number: G01J3/1809 ,  G01J2003/1204 ,  G01J2003/1828

Abstract: A method and apparatus by which spectral orders produced by a main grating are separated and focused on a focal surface of restricted size, using a combination of grating and prism for the separation of spectral orders, which provides for a relatively uniform spacing of the spectral orders over the entire wave length range within the restricted focal surface.

Abstract translation: 一种方法和装置，通过该方法和装置，由主光栅产生的光谱指令被分离并聚焦在受限尺寸的焦面上，使用光栅和棱镜的组合来分离光谱级，这提供了光谱级的相对均匀的间隔 在受限焦点表面内的整个波长范围内。

公开(公告)号：US20240044707A1

公开(公告)日：2024-02-08

申请号：US18258528

申请日：2021-12-16

Applicant: Thermo Fisher Scientific (Bremen) GmbH

Inventor： Lutz Frommberger ,  Hans-Jurgen Schluter ,  Konstantin Ayzikov ,  Antonella Guzzonato

IPC: G01J3/28 ,  G01J3/18 ,  G01J3/443

CPC classification number: G01J3/2803 ,  G01J3/1809 ,  G01J3/443 ,  G01J2003/2813 ,  G01J2003/2869

Abstract: A method of optical spectroscopy for analysing a sample using an optical spectrometer is provided. The method comprises obtaining a sample spectrum of the sample using the optical spectrometer and obtaining a blank spectrum using the optical spectrometer. The blank spectrum comprises structured background radiation which is correlated with the sample spectrum. A cross-correlation of the sample spectrum and the blank spectrum is determined. A mapped blank spectrum is generated by mapping the blank spectrum to the sample spectrum based on the cross-correlation, and the mapped blank spectrum is subtracted from the sample spectrum to generate a background corrected sample spectrum.

公开(公告)号：US20140104614A1

公开(公告)日：2014-04-17

申请号：US13830466

申请日：2013-03-14

Applicant: CYMER, INC.

Inventor： Rostislav Rokitski ,  Nakgeuon Seong ,  Kevin O'Brien

IPC: G01J3/28 ,  G03F7/20

CPC classification number: G01J3/28 ,  G01J3/027 ,  G01J3/1809 ,  G01J11/00 ,  G01J2001/4238 ,  G01J2009/006 ,  G03F7/70091 ,  G03F7/70575 ,  G03F7/7085

Abstract: A spectral feature of a pulsed light beam produced by an optical source is estimated by modifying the wavelength of the pulsed light beam based on a predefined repeating pattern having a pattern period including a plurality of steps, the modification including shifting the wavelength of the pulsed light beam by a wavelength offset from a baseline wavelength for each step in the pattern period; measuring the wavelength of the light beam for each step in the pattern period as the wavelength is modified across the pattern; and estimating a spectral feature of the pulsed light beam over an evaluation window that includes all of the steps within the pattern period based at least in part on the measured wavelength of the light beam for each step in the pattern period.

Abstract translation: 由光源产生的脉冲光束的光谱特征通过基于具有包括多个步骤的图案周期的预定重复图案修改脉冲光束的波长来估计，该修改包括移动脉冲光的波长 在图案周期中对于每个步骤的基线波长的波长偏移; 在图案周期中测量每个步骤的光束的波长，当波长跨越图案被修改时; 以及至少部分地基于所述模式周期中的每个步骤的所述光束的波长来估计包括所述模式周期内的所有步骤的评估窗口上的所述脉冲光束的光谱特征。

公开(公告)号：US08331027B2

公开(公告)日：2012-12-11

申请号：US12510900

申请日：2009-07-28

Applicant: Howard A. Padmore ,  Dmytro L. Voronov ,  Rossana Cambie ,  Valeriy V. Yashchuk ,  Eric M. Gullikson

Inventor： Howard A. Padmore ,  Dmytro L. Voronov ,  Rossana Cambie ,  Valeriy V. Yashchuk ,  Eric M. Gullikson

IPC: G02B5/18 ,  G01J3/28

CPC classification number: G02B5/1838 ,  B29D11/0073 ,  B29D11/00769 ,  B82Y10/00 ,  G01J3/1809 ,  G21K1/06 ,  G21K1/062 ,  G21K2201/061 ,  G21K2201/067

Abstract: A diffraction grating structure having ultra-high density of grooves comprises an echellette substrate having periodically repeating recessed features, and a multi-layer stack of materials disposed on the echellette substrate. The surface of the diffraction grating is planarized, such that layers of the multi-layer stack form a plurality of lines disposed on the planarized surface of the structure in a periodical fashion, wherein lines having a first property alternate with lines having a dissimilar property on the surface of the substrate. For example, in one embodiment, lines comprising high-Z and low-Z materials alternate on the planarized surface providing a structure that is suitable as a diffraction grating for EUV and soft X-rays. In some embodiments, line density of between about 10,000 lines/mm to about 100,000 lines/mm is provided.

Abstract translation: 具有超高密度凹槽的衍射光栅结构包括具有周期性重复的凹陷特征的薄片基片和设置在薄片基片上的多层材料堆叠。 衍射光栅的表面被平坦化，使得多层叠层的层以周期的方式形成布置在结构的平坦化表面上的多条线，其中具有第一属性的线与具有不同性质的线交替 衬底的表面。 例如，在一个实施例中，包括高Z和低Z材料的线在平坦化表面上交替，提供适合作为EUV和软X射线的衍射光栅的结构。 在一些实施例中，提供约10,000线/ mm至约100,000线/ mm之间的线密度。

公开(公告)号：US20110285993A1

公开(公告)日：2011-11-24

申请号：US13147190

申请日：2010-01-25

Applicant: Helmut Becker-Ross ,  Stefan Florek ,  Michael Okruss

Inventor： Helmut Becker-Ross ,  Stefan Florek ,  Michael Okruss

IPC: G01J3/40 ,  G01J3/443 ,  G01J3/42

CPC classification number: G01J3/1809 ,  G01J3/02 ,  G01J3/0213 ,  G01J3/2803 ,  G01J2003/1828

Abstract: An Echelle spectrometer arrangement (10) with internal order separation contains an Echelle grating (34) and a dispersing element (38) for order separation so that a two-dimensional spectrum having a plurality of separate orders (56) can be generated, an imagine optical system (18, 22, 28, 46), a flat-panel detector (16), and predispersion means (20) for predispersing the radiation into the direction of traverse dispersion of the dispersion element (38). The arrangement is characterized in that the predispersion means (20) comprise a predispersion element which is arranged along the optical path behind the inlet spacing (12) inside the spectrometer arrangement. The imaging optical system is designed in such a manner that the predispersed radiation can be imaged onto an additional image plane (24) which does not have any boundaries in the predispersion direction and which is arranged along the optical path between the predispersion element (20) and the echelle grating (34). Optical means (20, 68) in the area of the predispersed spectrum are arranged to influence the spatial and/or the spectral beam density distribution on the detector (16).

Abstract translation: 具有内部顺序分离的Echelle光谱仪装置（10）包含Echelle光栅（34）和分散元件（38），用于顺序分离，使得可以产生具有多个分开的阶数（56）的二维光谱， 光学系统（18,22,28,46），平板检测器（16）和用于将辐射预分散到分散元件（38）的横向分散方向的预分散装置（20）。 该装置的特征在于，预分散装置（20）包括预分散元件，该预分散元件沿着光谱仪装置内的入口间隔（12）的光路布置。 成像光学系统被设计成使得预分散的辐射可以被成像到在预分散方向上没有任何边界并且沿着预分散元件（20）之间的光路布置的附加图像平面（24）上， 和梯形光栅（34）。 在预分散频谱的区域中的光学装置（20,68）被布置成影响检测器（16）上的空间和/或光谱光束密度分布。

公开(公告)号：US07936455B2

公开(公告)日：2011-05-03

申请号：US12246232

申请日：2008-10-06

Applicant: Burt Jay Beardsley ,  Wendy Lynn Beardsley

Inventor： Burt Jay Beardsley ,  Wendy Lynn Beardsley

IPC: G01J3/28

CPC classification number: G01J3/1809 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0262 ,  G01J3/027 ,  G01J3/0291 ,  G01J3/443

Abstract: A spectrograph including a primary mirror, a secondary mirror, and a tertiary mirror forming a TMA having a common vertex axis. The spectrograph also may include a collimating mirror, a diffraction grating, and a dispersive prism. The collimating mirror and an entrance aperture form an interchangeable module. Radiation received through the entrance aperture is reflected in a collimated pattern towards an aperture stop. The diffraction grating, located between the collimating mirror and prism, diffracts radiation passed through the aperture stop into multiple beams directed onto the prism. A flat mirror, located to one side of the vertex axis. receives and reflects the multiple beams exiting the prism onto the primary mirror, where they are reflected onto the secondary mirror. The secondary mirror reflects the beams to the tertiary mirror where they are reflected onto an image plane located on the other side of the vertex axis.

Abstract translation: 包括主镜，次镜和形成具有共同顶点轴的TMA的第三镜的光谱仪。 光谱仪还可以包括准直镜，衍射光栅和分散棱镜。 准直镜和入口孔形成可互换的模块。 通过入射孔收到的辐射以朝向孔径光阑的准直图案反射。 位于准直镜和棱镜之间的衍射光栅将通过孔径光阑的辐射衍射成多个指向棱镜的光束。 平面镜，位于顶点轴的一侧。 接收和反射离开棱镜的多个光束到主镜上，在那里它们被反射到次镜上。 次级反射镜将光束反射到第三级反射镜，它们被反射到位于顶点轴线另一侧的图像平面上。

公开(公告)号：US07936454B2

公开(公告)日：2011-05-03

申请号：US12551375

申请日：2009-08-31

Applicant: Burt Jay Beardsley ,  Wendy Lynn Beardsley

Inventor： Burt Jay Beardsley ,  Wendy Lynn Beardsley

IPC: G01J3/30

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/0256 ,  G01J3/0272 ,  G01J3/18 ,  G01J3/1809 ,  G01J3/2803 ,  G01J3/2823

Abstract: A portable spectrograph including a primary mirror, a secondary mirror, and a tertiary mirror forming a TMA having a common vertex axis, a diffraction grating, and a dispersive prism, where the portable spectrograph can detect wavelengths between 150 nm and 1.1 μm. The portable spectrograph also may include a collimating mirror and an entrance aperture, which form an interchangeable module. Radiation received through the entrance aperture is reflected in a collimated pattern towards an aperture stop. The diffraction grating, located between the collimating mirror and prism, diffracts radiation passed through the aperture stop into multiple beams directed onto the prism. A flat mirror, located to one side of the vertex axis receives and reflects the multiple beams exiting the prism onto the primary mirror, where they are reflected onto the secondary mirror. The secondary mirror reflects the beams to the tertiary mirror where they are reflected onto an image plane located on the other side of the vertex axis.

Abstract translation: 一种便携式光谱仪，其包括主镜，次镜和形成具有共同顶点轴的TMA的第三镜，衍射光栅和色散棱镜，其中便携式光谱仪可以检测150nm和1.1μm之间的波长。 便携式光谱仪还可以包括形成可互换模块的准直镜和入口孔。 通过入射孔收到的辐射以朝向孔径光阑的准直图案反射。 位于准直镜和棱镜之间的衍射光栅将通过孔径光阑的辐射衍射成多个指向棱镜的光束。 位于顶点轴的一侧的平面镜将接收并反射离开棱镜的多个光束到主镜上，并将反射镜反射到次镜上。 次级反射镜将光束反射到第三级反射镜，它们被反射到位于顶点轴线另一侧的图像平面上。

公开(公告)号：US07869040B1

公开(公告)日：2011-01-11

申请号：US12184419

申请日：2008-08-01

Applicant: Hidong Kwak ,  Shankar Krishnan ,  Shing Lee ,  Haixing Zou

Inventor： Hidong Kwak ,  Shankar Krishnan ,  Shing Lee ,  Haixing Zou

IPC: G01J4/00

CPC classification number: G01J3/10 ,  G01B11/0641 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/0237 ,  G01J3/14 ,  G01J3/1809 ,  G01N21/211 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/212 ,  G01N2021/213 ,  G01N2021/95676

Abstract: An illumination subsystem configured to provide illumination for a measurement system includes first and second light sources configured to generate light for measurements in different wavelength regimes. The illumination subsystem also includes a TIR prism configured to be moved into and out of an optical path from the first and second light sources to the measurement system. If the TIR prism is positioned out of the optical path, light from only the first light source is directed along the optical path. If the TIR prism is positioned in the optical path, light from only the second light source is directed along the optical path. Various measurement systems are also provided. One measurement system includes an optical subsystem configured to perform measurements of a specimen using light in different wavelength regimes directed along a common optical path. The different wavelength regimes include vacuum ultraviolet, ultraviolet, visible, and near infrared wavelength regimes.

Abstract translation: 被配置为为测量系统提供照明的照明子系统包括被配置为产生用于不同波长方案中的测量的光的第一和第二光源。 照明子系统还包括被配置为移入和移出从第一和第二光源到测量系统的光路的TIR棱镜。 如果TIR棱镜位于光路外，则仅沿着光路引导来自第一光源的光。 如果TIR棱镜位于光路中，则仅沿着光路引导来自第二光源的光。 还提供了各种测量系统。 一个测量系统包括光学子系统，该光学子系统被配置为使用沿着公共光路引导的不同波长方式的光来对样本进行测量。 不同的波长方案包括真空紫外线，紫外线，可见光和近红外波长方案。