公开(公告)号：US20140104614A1

公开(公告)日：2014-04-17

申请号：US13830466

申请日：2013-03-14

Applicant: CYMER, INC.

Inventor： Rostislav Rokitski ,  Nakgeuon Seong ,  Kevin O'Brien

IPC: G01J3/28 ,  G03F7/20

CPC classification number: G01J3/28 ,  G01J3/027 ,  G01J3/1809 ,  G01J11/00 ,  G01J2001/4238 ,  G01J2009/006 ,  G03F7/70091 ,  G03F7/70575 ,  G03F7/7085

Abstract: A spectral feature of a pulsed light beam produced by an optical source is estimated by modifying the wavelength of the pulsed light beam based on a predefined repeating pattern having a pattern period including a plurality of steps, the modification including shifting the wavelength of the pulsed light beam by a wavelength offset from a baseline wavelength for each step in the pattern period; measuring the wavelength of the light beam for each step in the pattern period as the wavelength is modified across the pattern; and estimating a spectral feature of the pulsed light beam over an evaluation window that includes all of the steps within the pattern period based at least in part on the measured wavelength of the light beam for each step in the pattern period.

Abstract translation: 由光源产生的脉冲光束的光谱特征通过基于具有包括多个步骤的图案周期的预定重复图案修改脉冲光束的波长来估计，该修改包括移动脉冲光的波长 在图案周期中对于每个步骤的基线波长的波长偏移; 在图案周期中测量每个步骤的光束的波长，当波长跨越图案被修改时; 以及至少部分地基于所述模式周期中的每个步骤的所述光束的波长来估计包括所述模式周期内的所有步骤的评估窗口上的所述脉冲光束的光谱特征。