公开(公告)号：US11152559B2

公开(公告)日：2021-10-19

申请号：US15926213

申请日：2018-03-20

申请人： Seiko Epson Corporation

发明人： Chikara Kojima ,  Koji Ohashi

IPC分类号： H01L41/047 ,  H01L41/053 ,  H01L41/04 ,  H02N2/00 ,  H01L41/08 ,  H01L41/113 ,  H01L27/20 ,  B06B1/06 ,  H01L41/09 ,  H01L41/318 ,  B41J2/14 ,  H01L41/332 ,  A61B8/00

摘要： A supporting film is provided on an opening and a wall of a substrate. A piezoelectric film is provided on a first region of the supporting film corresponding to the opening and a second region of the supporting film corresponding to the wall. The thickness of the piezoelectric film at the second region is smaller than that of the piezoelectric film provided at the first region. Therefore, vibration of the piezoelectric film in the first region is large, and vibration of the piezoelectric film in the second region is small. This alleviates disadvantages such as a loss of the vibration characteristics of a piezoelectric element.

公开(公告)号：US11041832B2

公开(公告)日：2021-06-22

申请号：US16431783

申请日：2019-06-05

申请人： Seiko Epson Corporation

发明人： Hironori Suzuki ,  Chikara Kojima

IPC分类号： G01N29/32 ,  B65H7/12

摘要： An ultrasonic device has a substrate in which ultrasonic elements transmitting an ultrasonic wave in a first direction are arrayed. A reverberation reduction film which reduces reverberant vibration of the substrate is arranged on a side of the first direction in the ultrasonic element. In the reverberation reduction film, a groove is arranged between the ultrasonic elements next to each other.

公开(公告)号：US10916693B2

公开(公告)日：2021-02-09

申请号：US15920829

申请日：2018-03-14

申请人： Seiko Epson Corporation

发明人： Takayuki Yonemura ,  Chikara Kojima ,  Xiaoxing Wang ,  Tetsuya Isshiki ,  Yasuhiro Itayama

IPC分类号： H01L41/187 ,  H01L41/09 ,  H01L41/047 ,  C01G25/00 ,  A61B8/00 ,  A61B8/14 ,  B41J2/14 ,  B41J2/16 ,  G01N29/24 ,  H01L41/04 ,  H01L41/08 ,  B06B1/06 ,  H01L41/47

摘要： A piezoelectric element has a diaphragm, a first electrode on the diaphragm, a piezoelectric layer on the first electrode, and a second electrode on the piezoelectric layer. The piezoelectric layer is a stack of multiple piezoelectric films and is made of a perovskite composite oxide containing lead, zirconium, and titanium and represented by the general formula ABO3, with the molar ratio of the A-site to the B-site (A/B) in the perovskite composite oxide being 1.14 or more and 1.22 or less. In current-time curve measurement, the activation energy calculated from relaxation current using an Arrhenius plot is 0.6 [eV] or less. The relaxation current is the amount of current at the time at which a downward trend in current turns upward.

公开(公告)号：US10656003B2

公开(公告)日：2020-05-19

申请号：US16203908

申请日：2018-11-29

申请人： Seiko Epson Corporation

发明人： Chikara Kojima

IPC分类号： G01F23/296 ,  G01F23/00 ,  B41J2/175

摘要： A liquid surface sensor includes a hollow member having a first opening end and a second opening end, and a sensor unit provided so as to close the first opening end of the hollow member. The sensor unit includes a vibration plate, and a piezoelectric element which is provided on the vibration plate and is formed by laminating a first electrode film, a piezoelectric film, and a second electrode film in a thickness direction of the vibration plate.

公开(公告)号：US10130339B2

公开(公告)日：2018-11-20

申请号：US15115146

申请日：2015-06-30

申请人： Seiko Epson Corporation

发明人： Chikara Kojima

IPC分类号： H01L41/047 ,  A61B8/00 ,  H01L41/113 ,  H01L41/29 ,  H04R17/00 ,  H04R31/00

摘要： An ultrasound sensor, including a plurality of ultrasound elements which include a first electrode, a piezoelectric layer, and a second electrode and which are arranged in a first direction and a second direction, in which at least a portion of the plurality of ultrasound elements are grouped, at least one of the first electrode and the second electrode is shared for each of the grouped ultrasound elements, bypass wiring is connected to at least one of the shared first electrode and second electrode, a following α value of the bypass wiring is greater than the α value of the first electrode or second electrode on which the bypass wiring is connected, and the electric resistance value per unit length of the bypass wiring is lower than that of the first electrode or the second electrode. α value=(Young's modulus of Constituent Material)×(cross-sectional area of wiring or electrode).