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公开(公告)号:US20180096093A1
公开(公告)日:2018-04-05
申请号:US15281183
申请日:2016-09-30
Applicant: GLOBALFOUNDRIES Inc.
Inventor: Ioana C. Graur , Dmitry Vengertsev
IPC: G06F17/50
CPC classification number: G06F17/5081 , G06F2217/12
Abstract: Systems, methods, and computer program products for design rules checking in which the waiver of design rules is optimized while ensuring compliant designs that are manufacturable. A first design rule and a plurality of patterns of a layout that violate the first design rule are received by a design rule waiver system. The design rule waiver system may process the first design rule to extract a plurality of descriptors that can be perturbed. The design rule waiver system may perturb an attribute associated with at least one of the plurality of descriptors extracted from the first design rule in order to define a second design rule that is satisfied by the plurality of patterns.
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公开(公告)号:US20180096090A1
公开(公告)日:2018-04-05
申请号:US15411613
申请日:2017-01-20
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Yun-Lin Wu , Cheng-Cheng Kuo , Chia-Ping Chiang , Chih-Wei Hsu , Hua-Tai Lin , Kuei-Shun Chen , Yuan-Hsiang Lung , Yan-Tso Tsai
IPC: G06F17/50 , H01L21/308 , H01L21/306 , H01L21/027
CPC classification number: G06F17/5072 , G06F17/504 , G06F17/5081 , G06F2217/12 , H01L21/0274 , H01L21/30604 , H01L21/3086 , H01L21/823431 , H01L21/823475 , H01L23/5226 , H01L23/528 , H01L27/0207 , H01L27/11807
Abstract: A method of manufacturing an integrated circuit (IC) includes receiving a layout of the IC having a first region interposed between two second regions. The layout includes a first layer having first features and second and third layer having second and third features in the first region. The second and third features collectively form cut patterns for the first features. The method further includes modifying the second and third features by a mask house tool, resulting in modified second and third features, which collectively form modified cut patterns for the first features. The modifying of the second and third features meets at least one of following conditions: total spacing between adjacent modified second (third) features is greater than total spacing between adjacent second (third) features, and total length of the modified second (third) features is smaller than total length of the second (third) features.
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43.
公开(公告)号:US20180095359A1
公开(公告)日:2018-04-05
申请号:US15631763
申请日:2017-06-23
Applicant: Samsung Electronics Co., Ltd.
Inventor: Moon-Gyu JEONG
CPC classification number: G03F1/36 , G03F7/70091 , G03F7/70441 , G03F7/705 , G03F7/7085 , G06F17/14 , G06F17/5009 , G06F17/5081 , G06F2217/12 , G21K5/00
Abstract: A mask optimization method for optimizing a target mask used for a partial coherent system including a plurality of spatial filters is provided. The mask optimization method includes obtaining a trainer mask that is an optimized sample mask by performing a mask optimization on a sample mask, generating a mask optimization estimation model by performing a pixel-based learning using, as a feature vector of each of pixels of the trainer mask, partial signals of each of the pixels of the trainer mask respectively determined based on the spatial filters and using, as a target value, a degree of overlap between each of the pixels and a mask polygon of the trainer mask, and performing a mask optimization on the target mask using the mask optimization estimation model.
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公开(公告)号:US20180081997A1
公开(公告)日:2018-03-22
申请号:US15710723
申请日:2017-09-20
Applicant: NEW YORK UNIVERSITY
Inventor: Nikhil GUPTA
IPC: G06F17/50 , B29C64/386 , B33Y50/00
CPC classification number: G06F17/50 , B29C64/386 , B33Y50/00 , B33Y80/00 , G06F2217/12 , H04N1/00838 , Y02P90/265
Abstract: A method for securing a computer-aided design (CAD)-based shape to prevent shape counterfeiting by unauthorized three-dimensional (3D) printing includes creating and embedding a security element in the CAD-based shape itself. In some embodiments, the method includes splitting (slicing) a first solid of a three-dimensional 3D model into at least two parts, such that the 3D model comprises at least two distinct solids. The shape of the distinct solid(s) may be specified by a plurality of curved surfaces, which are defined by performing a finite element analysis on the CAD-based shape to determine an optimal shape for each curved surface. The method further includes converting the 3D model to a digital surface geometry schema according to a first resolution. The digital surface geometry schema describes the surface geometry of the at least two distinct solids. The first resolution is part of the security controls of the CAD-based shape. The first resolution may be selected based on a shape of the split of the first solid, a location of the split of the first solid, a 3D printer type, an anticipated horizontal print direction, an anticipated vertical print direction, an anticipated slicer software scheme, an anticipated slice thickness, and/or an anticipated slice location.
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公开(公告)号:US09916411B2
公开(公告)日:2018-03-13
申请号:US14713488
申请日:2015-05-15
Applicant: Synopsys, Inc.
Inventor: Gary B Nifong , Jun Chen , Karthikeyan Muthalagu , James Lewis Nance
IPC: G06F17/50
CPC classification number: G06F17/5072 , G06F17/50 , G06F17/5009 , G06F17/5068 , G06F17/5081 , G06F2217/12 , Y02P90/265
Abstract: A virtual hierarchical layer (VHL) is constructed for a semiconductor design in order to reduce the computational requirement of design rules checking (DRC) and design rules for manufacture (DRM) procedures. In order to form the VHL, a negative plane is created. A cell and multiple instances of the cell are then identified in the semiconductor design and polygons which overlap the cell and its instances are determined. The polygons are pushed into the negative plane to create holes in the plane. Shapes overlapping other instances of the cell which fall onto holes in the solid virtual cell plane are ignored. The resulting holed solid virtual cell plane can then be inverted to create a VHL to be used for design simulation and verification.
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46.
公开(公告)号:US20180068047A1
公开(公告)日:2018-03-08
申请号:US15389558
申请日:2016-12-23
Applicant: MAPPER Lithography IP B.V.
IPC: G06F17/50
CPC classification number: G06F17/5072 , G06F17/5077 , G06F2217/12 , H01L21/027 , H01L21/0274 , H01L21/0277 , H01L21/76816 , H01L23/573
Abstract: A method of creating electronic devices such as semiconductor chips using a maskless lithographic exposure system such as a charged particle multi-beamlet lithography system (301A-301D). The maskless lithographic exposure system comprises a lithography subsystem (316) including a maskless pattern writer such as a charged particle multi-beamlet lithography machine (1) or ebeam machine. The method comprises introducing unique chip design data (430) or information related thereto into pattern data comprising common chip design data before streaming the pattern data to the maskless pattern writer.
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公开(公告)号:US09902114B2
公开(公告)日:2018-02-27
申请号:US14591320
申请日:2015-01-07
Inventor: Suraj Ravi Musuvathy
IPC: B29C67/00 , G06F17/50 , B29C64/386 , B33Y50/02
CPC classification number: B29C64/386 , B33Y50/02 , G06F17/50 , G06F17/5018 , G06F17/5086 , G06F2217/12 , Y02P90/265
Abstract: Methods for creating three dimensional lattice structures in computer-aided design models. A method includes receiving a solid model containing a plurality of boundary surfaces for a void region, computing a bounding box of the solid model and a plurality of grid points on an axis-aligned grid within the bounding box, creating a lattice cell layout for a lattice structure within the void region, computing an implicit model defined by a scalar value for each of the grid points on the axis-aligned grid, extracting the lattice structure in the solid model based on the implicit model.
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48.
公开(公告)号:US20180046746A1
公开(公告)日:2018-02-15
申请号:US15235273
申请日:2016-08-12
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor: Lawrence A. Clevenger , Jason D. Hibbeler , Dongbing Shao , Robert C. Wong
IPC: G06F17/50
CPC classification number: G06F17/5081 , G06F17/504 , G06F17/5045 , G06F17/5068 , G06F17/5072 , G06F2217/12 , H01L2924/37001
Abstract: Embodiments include methods, design layout optimization systems, and computer program products for optimizing design layout of integrated circuits. Aspects include receiving a design layout of an integrated circuit from a design layout tool module, identifying a critical pitch in the design layout received, searching design rules forming design arc limited by identified critical pitch from a set of design rules associated with the received design layout, extracting a process variation and one or more failure mechanisms of design layout based on critical pitch and rules forming design arc identified, performing layout based ground rule calculation based on the process variation and the one or more failure mechanisms extracted, determining whether wafer risks exist in the design layout, responsive to determining the wafer risks exist in the design layout, revising the design layout and performing additional layout based ground rule calculation after the revision, and otherwise, outputting an optimized design layout.
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公开(公告)号:US20180046744A1
公开(公告)日:2018-02-15
申请号:US15334918
申请日:2016-10-26
Inventor: Wan-Ru Lin , Ching-Shun Yang
IPC: G06F17/50
CPC classification number: G06F17/5072 , G06F17/5077 , G06F17/5081 , G06F2217/12 , Y02P90/265
Abstract: The present disclosure is directed to systems and methods for cell placement. In embodiments, the methods include placing a plurality of cells selected from a cell library in a chip design to produce a first cell placement and determining whether the first cell placement satisfies design demands. In further embodiments, the method also includes rearranging a first cell to abut the first cell with a second cell when the first cell placement fails to satisfy design demands. In still further embodiments, the first cell is rearranged until a second cell placement providing a minimum metal route between the first and second cells is determined. In various embodiments, the method further includes generating a design layout based on the second cell placement and outputting the design layout to a machine readable storage medium. The outputted layout is used to manufacture a set of masks used in chip fabrication processes.
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公开(公告)号:US09892225B2
公开(公告)日:2018-02-13
申请号:US15088581
申请日:2016-04-01
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor: Jaione Tirapu Azpiroz , Peter W. Bryant , Rodrigo N. B. Ferreira , Bruno D. C. Flach , Ronaldo Giro , Ricardo L. Ohta
CPC classification number: G06F17/5068 , B01L3/502707 , B01L3/502761 , B01L2200/0652 , B01L2200/0668 , B01L2300/0816 , B01L2400/0424 , G06F17/5009 , G06F2217/06 , G06F2217/08 , G06F2217/12
Abstract: Described herein is a method of designing micro-fluidic devices. A target cost function based on device design parameters is chosen. The performance of one or more design candidates is run in a simulation model. A design candidate with a cost function closest to the target cost function is chosen and modified in an optimization routine to provide a modified design candidate having modified device design parameters. The cost function for the modified initial design candidate is computed, and when the modified design candidate has a computed cost function that meets the target cost function, optimized device design parameters of an optimized device design are obtained. Additional optimization iterations may be performed as needed to arrive at an optimized device design. A micro-fluidic device based on the optimized device design is manufactured.
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