公开(公告)号：US06901089B1

公开(公告)日：2005-05-31

申请号：US10607088

申请日：2003-06-26

Applicant: Milton Bernard Hollander

Inventor： Milton Bernard Hollander

IPC: G01J5/08 ,  G02B23/00 ,  G02B23/04 ,  G02B27/10 ,  G02B27/20 ,  H01S3/10

CPC classification number: G02B27/106 ,  G01J5/0265 ,  G01J5/08 ,  G01J5/0812 ,  G01J5/0831 ,  G01J5/084 ,  G01J5/089 ,  G01J5/0896 ,  G02B23/00 ,  G02B23/04 ,  G02B27/108 ,  G02B27/1093 ,  G02B27/123 ,  G02B27/20

Abstract: The invention relates to instruments which include radiometers and which generate a laser beam for striking a target at a distance to assist in aiming the instrument at a selected area of a target. Provision is made for splitting a single beam, used for instance for centering the instrument on the target, into a plurality of beams for creating a pattern or for defining an area on the target. When a single beam is split, the resultant plural beams produced are of relatively lower power, which may be insufficient for visibility on a target at a distance. The invention provides apparatus to increase the power of the single laser beam when it is split, so as to provide plural beams of appropriately higher power and visibility.

Abstract translation: 本发明涉及包括辐射计并且产生用于在一定距离处击打目标的激光束以帮助将仪器瞄准目标的选定区域的仪器。 提供了将用于将仪器定位在目标上的单个波束分成用于创建模式或用于在目标上定义区域的多个波束。 当单个光束被分裂时，产生的所产生的多个光束具有相对较低的功率，这可能不足以在远处的目标物上的可视性。 本发明提供了当单个激光束分裂时增加单个激光束的功率的装置，以便提供多个适当更高功率和可见度的光束。

公开(公告)号：US06900921B2

公开(公告)日：2005-05-31

申请号：US10469596

申请日：2002-03-01

Applicant: Serge Valette

Inventor： Serge Valette

IPC: G02B26/08 ,  G02B27/10 ,  G02B26/00 ,  G02B6/26

CPC classification number: G02B27/108 ,  G02B26/08 ,  G02B27/1006 ,  G02B27/141 ,  G02B27/144

Abstract: An optical deflection module adapted to generate a plurality of angular positions for at least one incident optical beam. For each optical beam, the module comprises a line containing:—a plurality of N cascading deflection elements (MD1, MD2, . . . MDI, . . . MDN) which can each take respectively P1, P2, . . . PI, . . . or PN different angular deflection configurations around at least one given axis; and—a plurality of N−1 optical conjugate elements (MCO1, MCO2, . . . MCO1, . . . , MCON−1) which are each disposed between two successive deflection elements in order to produce an object/image conjugate between the successive deflection elements.

Abstract translation: 适于产生用于至少一个入射光束的多个角度位置的光学偏转模块。 对于每个光束，模块包括一条线，该线包含： - 多个N个级联偏转元件（MD＆lt; 1＆gt;，MD＆gt;，...，MD＆ / SUB>，...，MD N N），它们各自可以分别为P 1，P 2，N 2。 。 。 P ，。 。 。 或至少一个给定轴线上的不同角度偏转构造; 和多个N-1个光共轭元件（MCO 1，MCO 2，... MCO 1，...，MCO N-1＆gt;），其各自设置在两个连续的偏转元件之间，以便在连续的偏转元件之间产生物体/图像共轭。

公开(公告)号：US06809871B2

公开(公告)日：2004-10-26

申请号：US10196226

申请日：2002-07-17

Applicant: Matthias Heller ,  Werner Kress ,  Matthias Kuhn ,  Stefan Weissenrieder

Inventor： Matthias Heller ,  Werner Kress ,  Matthias Kuhn ,  Stefan Weissenrieder

IPC: G02B2710

CPC classification number: G03F7/70058 ,  G02B27/1073 ,  G02B27/108 ,  G02B27/142 ,  G02B27/147 ,  G03F7/70066

Abstract: A method for fabricating a geometric beamsplitter involves applying a reflective coating having at least one metallic layer to a transparent substrate. A pattern of holes containing numerous holes that are preferably randomly distributed over its reflective surface is created in the reflective coating using laser processing. The method allows inexpensively fabricating beamsplitters that have accurately defined transmittances. Beamsplitters in accordance with the invention are suitable for use as dosimetry mirrors on, for example, the illumination systems of microlithographic projection exposure systems.

Abstract translation: 一种用于制造几何分束器的方法包括将具有至少一个金属层的反射涂层施加到透明基底上。 在反射涂层中使用激光加工产生了包含多个孔的孔，其优选地随机分布在其反射表面上。 该方法允许廉价地制造具有精确定义的透射率的分束器。 根据本发明的分束镜适合用作例如微光刻投影曝光系统的照明系统上的剂量测定镜。

公开(公告)号：US06631155B1

公开(公告)日：2003-10-07

申请号：US10287146

申请日：2002-11-04

Applicant: John L. Nightingale

Inventor： John L. Nightingale

IPC: H01S308

CPC classification number: G02B27/108 ,  G02B6/4206 ,  G02B27/14 ,  G02B27/144 ,  H01S3/005

Abstract: A laser-radiation source includes a laser delivering an output beam, a lens, and an optical arrangement for dividing the output beam into a main beam and an auxiliary beam. The main and auxiliary beams are coupled by the lens into entrance faces of respectively a main optical fiber and an auxiliary optical fiber. The entrance face of the main optical fiber is located on the optical axis of the lens. The entrance face of the auxiliary optical fiber is laterally displaced from the optical axis of the lens.

Abstract translation: 激光辐射源包括传送输出光束的激光器，透镜和用于将输出光束分成主光束和辅助光束的光学装置。 主光束和辅助光束通过透镜耦合到分别为主光纤和辅助光纤的入射面。 主光纤的入射面位于透镜的光轴上。 辅助光纤的入射面从透镜的光轴侧向移位。

公开(公告)号：US06621636B2

公开(公告)日：2003-09-16

申请号：US10026340

申请日：2001-12-21

Applicant: Koichiro Tanaka ,  Setsuo Nakajima ,  Takehito Yagi ,  Mikito Ishii ,  Kenichiro Nishida ,  Norihito Kawaguchi ,  Miyuki Masaki ,  Atsushi Yoshinouchi

Inventor： Koichiro Tanaka ,  Setsuo Nakajima ,  Takehito Yagi ,  Mikito Ishii ,  Kenichiro Nishida ,  Norihito Kawaguchi ,  Miyuki Masaki ,  Atsushi Yoshinouchi

IPC: G02B2710

CPC classification number: G02B27/108 ,  G02B27/145

Abstract: A laser irradiation apparatus having a low running cost compared to the conventional, and a laser irradiation method using the laser irradiation apparatus, are provided. Crystal grains having a size in the same order as, or greater than, conventional grains are formed. The cooling speed of a semiconductor film is made slower, and it becomes possible to form crystal grains having a grain size in the same order as, or greater than, the size of grains formed in the case of irradiating laser light having a long output time to the semiconductor film. This is achieved by delaying one laser light with respect to another laser light, combining the laser lights, and performing irradiation to the semiconductor film in the case of irradiating laser light using a solid state laser as a light source, which has a short output time.

公开(公告)号：US20030118269A1

公开(公告)日：2003-06-26

申请号：US10114717

申请日：2002-04-02

Inventor： Christopher Wimperis ,  William McCreath ,  William Eccleshall ,  Mandeep Singh ,  Christopher D. Becker ,  Richard A. Neily ,  Kurt Pelsue

IPC: G02B006/12

CPC classification number: G02B27/108 ,  G01J3/26 ,  G02B6/12 ,  G02B6/12007 ,  G02B6/13 ,  G02B6/4207 ,  G02B27/1073 ,  G02B27/144 ,  G02B27/145 ,  G02B2006/12159

Abstract: A method of fabricating a plurality of composite optical assemblies is disclosed. Each optical assembly includes a first optical element and a second optical element. The method includes the steps of providing a first composite substrate that may be divided into a plurality of first optical elements and forming on an exposed surface of the first composite substrate a second composite substrate that may be divided into a plurality of second optical elements, the first and second composite substrates providing a composite structure.

公开(公告)号：US20030081901A1

公开(公告)日：2003-05-01

申请号：US09999533

申请日：2001-10-31

Applicant: ADC Telecommunications, Inc.

Inventor： Edward C. Gage ,  Steven C. Dohmeier ,  Ronald E. Gerber ,  Craig A. Parsons ,  Thomas J. Schmitt ,  Eric K. Lindmark ,  John C. Holman ,  Kevin D. Batko ,  Timothy S. Gardner

IPC: G02B006/26

CPC classification number: G02B6/2937 ,  G02B6/32 ,  G02B6/4204 ,  G02B6/4219 ,  G02B6/4231 ,  G02B6/4239 ,  G02B6/4246 ,  G02B27/108 ,  G02B27/144

Abstract: An improved fiber optic tap monitor has characteristics that are flatter over the wavelength range of interest. The polarization dependence of the characteristics of the tap monitor is reduced, and the package for the tap monitor is smaller. The tap monitor reduces the amount of light reflected back to the source. The tap monitor is also assembled in a manner to improve temperature stability, so that its characteristics over a range of temperatures are more nearly constant.

Abstract translation: 改进的光纤抽头监测器具有在感兴趣的波长范围上更平坦的特征。 水龙头监控器特性的极化依赖性降低，水龙头监控器的封装更小。 水龙头监视器可减少反射回源的光量。 分接头监控器也以一种改进温度稳定性的方式组装，使得其在一定温度范围内的特性更接近恒定。

公开(公告)号：US20030043376A1

公开(公告)日：2003-03-06

申请号：US10183311

申请日：2002-06-25

Inventor： Yasuhiro Kishikawa ,  Seiji Takeuchi

IPC: G03B027/00 ,  G01N021/00

CPC classification number: G03F7/70058 ,  G02B27/106 ,  G02B27/1073 ,  G02B27/108 ,  G02B27/144 ,  G02B27/145 ,  G03F7/7085

Abstract: A beam splitting apparatus generates, from incident light having a specific polarization, first and second split light that has the specific polarization.

Abstract translation: 分束装置从具有特定极化的入射光产生具有特定极化的第一和第二分离光。

公开(公告)号：US20020191177A1

公开(公告)日：2002-12-19

申请号：US10154938

申请日：2002-05-24

Applicant: Leica Microsystems Heidelberg GmbH

Inventor： Heinrich Ulrich ,  Holger Birk ,  William C. Hay ,  Holger Nissle

IPC: G01N021/55

CPC classification number: G02B27/108 ,  G02B21/00 ,  G02B27/144 ,  G11B7/00

Abstract: An apparatus for determining the light power level of a light beam (7), having a beam splitter (1) and a detector (11) associated with the beam splitter (1), is disclosed. The apparatus is characterized in that the beam splitter (1) splits measuring light (23) out of the light beam and conveys it to the detector (11), and that the ratio between the light power level of the light beam (7) and the light power level of the measuring light (23) measured at the detector (11) is constant over time.

Abstract translation: 公开了一种用于确定具有与分束器（1）相关联的分束器（1）和检测器（11）的光束（7）的光功率水平的装置。 该装置的特征在于，分束器（1）将测量光（23）分离出光束并将其传送到检测器（11），并且光束（7）的光功率级与 在检测器（11）处测量的测量光（23）的光功率水平随时间而是恒定的。

公开(公告)号：US20020176151A1

公开(公告)日：2002-11-28

申请号：US10115647

申请日：2002-04-03

Inventor： John Moon ,  Alan D. Kersey ,  James Sirkis ,  James Dunphy ,  Joseph Pinto ,  Paul Szczepanek ,  Michael Davis

IPC: G02B026/00 ,  G02F001/29 ,  G02B026/08

CPC classification number: G02B6/4246 ,  G02B6/262 ,  G02B6/266 ,  G02B6/2713 ,  G02B6/272 ,  G02B6/278 ,  G02B6/2793 ,  G02B6/2931 ,  G02B6/29311 ,  G02B6/29313 ,  G02B6/29314 ,  G02B6/29395 ,  G02B6/29398 ,  G02B6/3516 ,  G02B6/356 ,  G02B6/3588 ,  G02B6/359 ,  G02B6/4226 ,  G02B26/0833 ,  G02B26/0841 ,  G02B27/1006 ,  G02B27/1073 ,  G02B27/108 ,  G02B27/1086 ,  G02B27/126 ,  G02B27/144 ,  G02B27/147 ,  H04J14/021 ,  H04J14/0213 ,  H04J14/0221 ,  H04Q2011/0009 ,  H04Q2011/0026

Abstract: An dynamic optical filter 10 is provided to selectively attenuate or filter a wavelength band(s) of light (i.e., optical channel(s)) or a group(s) of wavelength bands of an optical WDM input signal 12. The optical filter is controllable or programmable to selectively provide a desired filter function. The optical filter 10 includes a spatial light modulator 36, which comprises an array of micromirrors 52 that effectively forms a two-dimensional diffraction grating mounted in a retro-reflecting configuration. Each optical channel 14 is dispersed separately or overlappingly onto the array of micro-mirrors 52 along a spectral axis or direction 55 such that each optical channel or group of optical channels are spread over a plurality of micromirrors to effectively pixelate each of the optical channels or input signal. Each channel 14 or group of channels may be selectively attenuated by flipping or tilting a selected number of micromirrors to thereby deflect a portion of the incident radiation away from the return optical path. The micro-mirrors operate in a digital manner by flipping between a first and second position in response to a control signal 56 provided by a controller 58 in accordance with an attenuation algorithm and an input command 60. The switching algorithm may provide a bit (or pixel) map or look-up table indicative of the state of each of the micro-mirrors 52 of the array to selectively attenuate the input signal and provide a modified output signal 38 at optical fiber 40.

Abstract translation: 提供动态滤光器10以选择性地衰减或过滤光学WDM输入信号12的波长带（即，光学通道）或波长带的组。滤光器是 可控或可编程以选择性地提供期望的滤波器功能。 滤光器10包括空间光调制器36，其包括有效地形成以反射构造安装的二维衍射光栅的微镜阵列52。 每个光通道14沿着光谱轴或方向55分开或重叠地分散或重叠地分散在微镜52的阵列上，使得每个光通道或一组光通道分布在多个微镜上以有效地像素化每个光通道，或 输入信号。 可以通过翻转或倾斜选定数量的微反射镜来选择性地衰减每个通道14或通道组，从而使一部分入射的辐射偏离返回光路。 响应于控制器58根据衰减算法和输入命令60提供的控制信号56，微镜以数字方式操作，通过在第一和第二位置之间翻转。切换算法可以提供位（或 像素）映射或查找表，其指示阵列的每个微镜52的状态，以选择性地衰减输入信号，并在光纤40提供经修改的输出信号38。