公开(公告)号：US20040085618A1

公开(公告)日：2004-05-06

申请号：US10413447

申请日：2003-04-14

发明人： Hideyuki Kawai

IPC分类号： G02B026/00 ,  G02F001/29 ,  G02B026/08

CPC分类号： G02F1/167 ,  G02F1/1368 ,  G02F2201/42

摘要： An electrophoretic device 20 is provided which includes a circuit board 1 provided with a plurality of pixel electrodes 3, a transparent electrode (counter electrode) 4 opposed to the individual pixel electrodes 3, an electrophoretic dispersion layer 11 containing an electrophoretic dispersion 11, the electrophoretic dispersion layer 11 being partially interposed between the electrodes, a plurality of thin-film transistors 30 disposed on a surface of the circuit board 1 remote from the electrophoretic dispersion layer 11, and conducting parts 8 extending through the circuit board 1 and electrically connecting the pixel electrodes 3 and the thin-film transistors to each other.

公开(公告)号：US20030206332A1

公开(公告)日：2003-11-06

申请号：US09817675

申请日：2001-03-27

发明人： Shunpei Yamazaki ,  Noriko Shibata

IPC分类号： G02F001/33 ,  G02F001/29

CPC分类号： H01L51/5259 ,  H01L27/3244 ,  H01L51/0005 ,  H01L51/0034 ,  H01L51/0035 ,  H01L51/0038 ,  H01L51/0042 ,  H01L51/005 ,  H01L51/0084 ,  H01L51/0087 ,  H01L51/5253 ,  H01L51/56 ,  Y10S428/917 ,  Y10T428/23

摘要： To provide a process of successively forming from an EL layer, a cathode, a barrier layer and a cover layer in the same multi-chamber. By using a same film deposition method to form the EL layer and the cover layer, as shown in FIG. 1A, the EL layer, the cathode, the barrier layer, and the cover layer can be formed in the same multi-chamber in succession. Thus, as shown in FIG. 1B, a sealed structure of an EL element can be formed.

摘要翻译： 提供在相同的多室中从EL层，阴极，阻挡层和覆盖层连续地形成的工艺。 通过使用相同的成膜方法形成EL层和覆盖层，如图1所示。 如图1A所示，EL层，阴极，势垒层和覆盖层可以连续形成在相同的多室中。 因此，如图1所示。 如图1B所示，可以形成EL元件的密封结构。

公开(公告)号：US20030099028A1

公开(公告)日：2003-05-29

申请号：US10151011

申请日：2002-05-21

申请人： Samsung Electronics Co., Ltd.

发明人： Chang-ho Cho ,  Hyung-jae Shin ,  Woon-bae Kim

IPC分类号： G02F001/29 ,  G02B026/08

CPC分类号： G02B26/0841 ,  B81B3/0005 ,  B81B2201/042 ,  B81C1/0096 ,  B81C2201/112

摘要： The micro-mechanical structure includes an anti-stiction layer formed by plasma enhanced chemical vapor deposition. The anti-stiction layer is formed on only the area of a substrate other than the top of a movable structure and a part of an electrode that is subsequently bonded to a wire.

摘要翻译： 微机械结构包括通过等离子体增强化学气相沉积形成的抗静电层。 抗静电层仅形成在除了可移动结构的顶部之外的基底的区域和随后结合到线的电极的一部分上。

公开(公告)号：US20030025982A1

公开(公告)日：2003-02-06

申请号：US09919119

申请日：2001-07-31

申请人： AXSUN Technologies, Inc.

发明人： Xiaomei Wang ,  Dale C. Flanders

IPC分类号： G02B026/00 ,  G02F001/29 ,  G02B026/08

CPC分类号： G02B26/0841

摘要： A movable MEMS mirror system with a mirror position detection system, such as a capacitive sensor, is calibrated using a physical stop with a range of movement of the mirror structure. Thus, drift in the position detection system can be compensated without the need for a separate reference signal source as used in conventional systems.

摘要翻译： 具有反射镜位置检测系统（诸如电容传感器）的可移动的MEMS镜系统使用具有镜面结构的移动范围的物理停止来校准。 因此，可以补偿位置检测系统中的漂移，而不需要在常规系统中使用的单独的参考信号源。

公开(公告)号：US20020149834A1

公开(公告)日：2002-10-17

申请号：US09999149

申请日：2001-11-15

申请人： Ball Semiconductor, Inc.

发明人： Wenhui Mei ,  Kin Foong Chan ,  Dong Youn Sim

IPC分类号： G02B026/00 ,  G02F001/29

CPC分类号： G02B6/3512 ,  G02B6/3556 ,  G02B6/357 ,  G02B6/358 ,  G02B26/0841 ,  G03F7/70291 ,  G03F7/70375

摘要： A light modulation element, device, and system is discussed. The light modulation element includes three electrodes, a rigid member, and a mirror. The rigid member is connected between the three electrodes so that the first and second electrodes are on one side and the third electrode is on the opposite side of the rigid member. The mirror is attached to the rigid member so that it can move therewith. The rigid member moves responsive to an external electrostatic force provided by one or more of the three electrodes so that the mirror is positioned in a predetermined position responsive to the state of the rigid member.

摘要翻译： 讨论了光调制元件，器件和系统。 光调制元件包括三个电极，刚性构件和反射镜。 刚性构件连接在三个电极之间，使得第一和第二电极在一侧，而第三电极位于刚性构件的相反侧。 镜子连接到刚性构件，使得其可以随之移动。 刚性构件响应于由三个电极中的一个或多个提供的外部静电力移动，使得反射镜响应于刚性构件的状态而定位在预定位置。

公开(公告)号：US20020149584A1

公开(公告)日：2002-10-17

申请号：US09834422

申请日：2001-04-13

发明人： John T. Simpson ,  Roger K. Richards ,  Donald P. Hutchinson ,  Marcus L. Simpson

IPC分类号： G02F001/29 ,  G06T015/30 ,  G06T017/20 ,  G06T017/00

CPC分类号： H04N9/3129 ,  G02F1/011 ,  G02F2201/123 ,  G02F2201/305 ,  G02F2202/107 ,  H04N5/7441

摘要： A reflective coherent spatial light modulator (RCSLM) includes a subwavelength resonant grating structure (SWS), the SWS including at least one subwavelength resonant grating layer (SWL) have a plurality of areas defining a plurality of pixels. Each pixel represents an area capable of individual control of its reflective response. A structure for modulating the resonant reflective response of at least one pixel is provided. The structure for modulating can include at least one electro-optic layer in optical contact with the SWS. The RCSLM is scalable in both pixel size and wavelength. A method for forming a RCSLM includes the steps of selecting a waveguide material and forming a SWS in the waveguide material, the SWS formed from at least one SWL, the SWL having a plurality of areas defining a plurality of pixels.

摘要翻译： 反射相干空间光调制器（RCSLM）包括亚波长谐振光栅结构（SWS），包括至少一个亚波长谐振光栅层（SWL）的SWS具有限定多个像素的多个区域。 每个像素表示能够单独控制其反射响应的区域。 提供了用于调制至少一个像素的谐振反射响应的结构。 用于调制的结构可以包括与SWS光学接触的至少一个电光层。 RCSLM在像素大小和波长方面都是可扩展的。 用于形成RCSLM的方法包括以下步骤：在波导材料中选择波导材料并形成SWS，由至少一个SWL形成的SWS，SWL具有限定多个像素的多个区域。

公开(公告)号：US20020093723A1

公开(公告)日：2002-07-18

申请号：US09987387

申请日：2001-11-14

发明人： Hideaki Okayama

IPC分类号： G02F001/29 ,  G02B027/10 ,  G02B006/26 ,  G02B006/42

CPC分类号： G02B6/351 ,  G02B6/32 ,  G02B6/3512 ,  G02B6/3526 ,  G02B6/3556

摘要： An optical switch (26) comprises an input switching element (12) having a plurality of light input ports (10) and an output switching element (16) having a plurality of light output ports (14). The input switching element (12) comprises a plurality of input optical deflector sets (20), each set consisting of a plurality of optical deflectors (18a, 18b), at each light input port (10). The input optical deflectors in each set are arranged in the incident direction of an optical signal that is input to one of the light input ports. The output switching element (16) comprises a plurality of output optical deflector sets (24), each set consisting of a plurality of optical deflectors (22a, 22b), at each light output port (14). The output optical deflectors in each set are arranged in the emergent direction of an optical signal that is output from one of the light output ports.

摘要翻译： 光开关（26）包括具有多个光输入端口（10）的输入开关元件（12）和具有多个光输出端口（14）的输出开关元件（16）。 输入开关元件（12）包括在每个光输入端口（10）处由多个光学偏转器（18a，18b）组成的多个输入光学偏转器组（20）。 每组中的输入光偏转器被布置在输入到一个光输入端口的光信号的入射方向上。 输出开关元件（16）包括在每个光输出端口（14）处的由多个光学偏转器（22a，22b）组成的多个输出光学偏转器组（24）。 每组中的输出光偏转器布置在从一个光输出端口输出的光信号的出射方向上。

公开(公告)号：US20020018311A1

公开(公告)日：2002-02-14

申请号：US09948801

申请日：2001-09-07

发明人： Roger Jonathan Helkey

IPC分类号： G02B026/08 ,  G02F001/29 ,  G02B005/08 ,  G02B007/182

CPC分类号： G02B26/0841 ,  Y10S359/904

摘要： A micromachined apparatus for reflecting light is described that is designed to reduce losses in quality or intensity of light. Mirrors are used having lengths that are longer than their widths to reduce clipping of light when a mirror is located at an angle with respect to light falling thereon. Relatively long mirror torsion components are used to reduce forces required to pivot the mirrors. Regardless of the dimensions of the mirrors and the use of long torsion components, the mirrors are still located relatively dose to one another. The relatively close positioning of the mirrors is due to a combined use of notches formed in support frames to which the torsion components are secured, oval shapes of the mirrors which take up less space than rectangular shapes, matching oval openings in the support frames, and the arrangement of the support frames in a non-rectangular array wherein tips of the support frames are located between one another.

摘要翻译： 描述了一种用于反射光的微加工设备，其被设计为减少光的质量或强度的损失。 反射镜使用的长度比其宽度长，以便当反射镜相对于其上的光定位成一定角度时减少光的削波。 相对较长的镜面扭转部件用于减少枢转镜子所需的力。 不管反射镜的尺寸和使用长的扭转部件，反射镜仍然相对放置在彼此之间。 反射镜的相对紧密的定位是由于组合使用形成在支撑框架中的扭曲部件被固定的凹口，反射镜的椭圆形形状占据比矩形形状更小的空间，在支撑框架中匹配椭圆形开口，以及 支撑框架在非矩形阵列中的布置，其中支撑框架的尖端位于彼此之间。

公开(公告)号：US20020001122A1

公开(公告)日：2002-01-03

申请号：US09283999

申请日：1999-04-02

发明人： HEE-KWON KO ,  HYUNGJAE SHIN

IPC分类号： G02F001/29 ,  G02B026/08 ,  G02B026/00

CPC分类号： G02B26/0841

摘要： A micromirror device for an image display apparatus in which it is possible to drive a mirror by rotation is provided. The micromirror device according to the present invention includes a substrate, a pair of first posts protrusively formed on an upper surface of the substrate so as to be separated from each other by a predetermined distance, electrodes formed on the substrate, a supporting plate supported by the first posts and rotatably arranged using a portion supported by the first posts as a hinge point, a second post protrusively formed on the supporting plate, and a mirror supported by the second post for reflecting light incident on one surface thereof, wherein a slope of the mirror can be controlled by an electrostatic attraction between the electrode and the mirror.

摘要翻译： 提供了一种用于可以通过旋转来驱动反射镜的图像显示装置的微镜装置。 根据本发明的微反射镜装置包括基板，一对第一柱，其突出地形成在基板的上表面上以彼此分开预定距离，形成在基板上的电极，由 所述第一柱和所述第一柱可旋转地布置，使用由所述第一柱支撑的部分作为铰链点，在所述支撑板上突出形成的第二柱以及由所述第二柱支撑的用于反射入射在其一个表面上的光的反射镜， 可以通过电极和反射镜之间的静电吸引来控制反射镜。

公开(公告)号：US20010030817A1

公开(公告)日：2001-10-18

申请号：US09879025

申请日：2001-06-11

发明人： Paul Merritt Hagelin ,  John J. Fling

IPC分类号： G02F001/29

CPC分类号： G02B26/0833 ,  G02B7/1821

摘要： An optical mirror system with multi-axis rotational control is disclosed. The mirror system includes an optical surface assembly, and at least one leg assembly coupled to the optical surface assembly. The at least one leg assembly supports the optical surface above a substrate. A system and method in accordance with the present invention can operate with many different actuator mechanisms, including but not limited to, electrostatic, thermal, piezoelectric, and magnetic. An optical mirror system in accordance with the present invention accommodates large mirrors and rotation angles. Scanning mirrors can be made with this technique using standard surface-micromachining processes, or a deep RIE etch process. A device in accordance with the present invention meets the requirements for a directly scalable, high port count optical switch, utilizing a two mirror per optical I/O port configuration. An optical mirror in accordance with the present invention can be utilized in, but is not limited to, the following applications: optical add-drop multiplexers, wavelength routers, free-space optical interconnects, chip-level optical I/O, optical scanning displays, optical scanner (bar-codes, micro cameras), optical storage read/write heads, laser printers, medical replacement for glasses (incorporated with adaptive optics), medical diagnostic equipment, optical scanning for security applications.