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公开(公告)号：US1943554A
公开(公告)日：1934-01-16
申请号：US47643930
申请日：1930-08-19
Applicant: ZEISS CARL FA
Inventor： ROBERT RICHTER
IPC: G01J4/02
CPC classification number: G01J4/02
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公开(公告)号：US20240003819A1
公开(公告)日：2024-01-04
申请号：US18034875
申请日：2021-10-29
Inventor： Thaibao Phan , Evan W. Wang , Jonathan A. Fan
CPC classification number: G01N21/8422 , G01J4/02 , G01N21/95 , G01N21/21
Abstract: Certain examples are directed to methods for detection of anomalies in semiconductor thin-film materials, such as strains, defects and the like, that may precipitate defects in semiconductor processing steps and may adversely impact device and system-level functionality, processing, and yields. Certain methods use filtering optics to provide a set of filter-separated light beams respectively associated with different polarization states of polarized light directed towards a semiconductor-related material sample, and providing a set of sample-characterizing response data based on factors such as sets of polarization-state values, different wavelengths associated with the polarization states, and/or light-incidence angles characterizing separation of the different polarization states. Based on these factors, the types and severities of such anomalies may be analyzed and the related defects remedied.
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公开(公告)号：US09903805B2
公开(公告)日：2018-02-27
申请号：US15647106
申请日：2017-07-11
Applicant: Theodore Peter Rakitzis
Inventor： Theodore Peter Rakitzis
CPC classification number: G01N21/19 , G01J4/02 , G01J4/04 , G01J2004/001 , G01N21/21 , G01N2201/06113 , G01N2201/0636 , G01N2201/067
Abstract: A polarimeter for measuring chirality of a material comprising an optical ring cavity comprising a plurality of reflective elements configured to promote bi-directional propagation of a laser beam within the cavity, a laser-emitting device configured to introduce a first input beam and a second input beam into the cavity, a Faraday rotator, a phase compensator, an acousto-optic modulator configured to shift the frequency of the first output beam, an optical recombination device configured to recombine shifted and unshifted output beams, and first and second detectors configured to receive the recombined beams, wherein the plurality of reflective elements, Faraday rotator, and phase compensator are configured such that light from the first and second input beams passes through a chiral material located within the cavity a sufficient number of times for a measurement of optical rotary dispersion and circular dichroism of light transmitted through the material to be obtained at the detectors.
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公开(公告)号：US20170315050A1
公开(公告)日：2017-11-02
申请号：US15647106
申请日：2017-07-11
Applicant: Theodore Peter Rakitzis
Inventor： Theodore Peter Rakitzis
IPC: G01N21/21
CPC classification number: G01N21/19 , G01J4/02 , G01J4/04 , G01J2004/001 , G01N21/21 , G01N2201/06113 , G01N2201/0636 , G01N2201/067
Abstract: A polarimeter for measuring chirality of a material comprising an optical ring cavity comprising a plurality of reflective elements configured to promote bi-directional propagation of a laser beam within the cavity, a laser-emitting device configured to introduce a first input beam and a second input beam into the cavity, a Faraday rotator, a phase compensator, an acousto-optic modulator configured to shift the frequency of the first output beam, an optical recombination device configured to recombine shifted and unshifted output beams, and first and second detectors configured to receive the recombined beams, wherein the plurality of reflective elements, Faraday rotator, and phase compensator are configured such that light from the first and second input beams passes through a chiral material located within the cavity a sufficient number of times for a measurement of optical rotary dispersion and circular dichroism of light transmitted through the material to be obtained at the detectors.
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公开(公告)号：US09784622B2
公开(公告)日：2017-10-10
申请号：US15426364
申请日：2017-02-07
Inventor： David H. Hughes , Reinhard Erdmann
CPC classification number: G01J4/02 , G01J4/04 , G02B5/3083 , G02B27/283 , G02B27/286 , G02B27/288 , G02B2207/114
Abstract: A photon entanglement router comprises a modified birefringent spectral filter followed by a polarization beam splitter (PBS). Frequency degenerate or non-degenerate entangled photons, generated by a collinear laser source and incident on one input port of the photon entanglement router, are comprised of congruent photons and/or incongruent photons. The invention adds a plurality of additional filter stacks at each output port such that they invert the action of the first birefringent stack at the input port. Intermediate output photons from the invention is input to two ports of an additional PBS where they are spatially projected according to their frequencies and polarizations. Two congruent photons of an entangled photon pair exit as an entangled pair in one direction, while two incongruent photons exit as an entangled pair in the orthogonal direction. If one photon is congruent and the other photon incongruent, the photons remain entangled but are spectrally divided into orthogonal directions. The invention's birefringent spectral filter accepts specific input frequencies from the ITU optical C-band grid for proper operation.
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Patent Agency Ranking
公开(公告)号：US09651426B2
公开(公告)日：2017-05-16
申请号：US14788534
申请日：2015-06-30
Applicant: Agilent Technologies, Inc.
Inventor： Adam Kleczewski , Richard P Tella , Dower Cameron Bricker , Yang Han
CPC classification number: G01J4/02 , G01N2021/217 , G01N2021/556 , G02B5/3058 , G02B26/00 , G02B27/286 , G02F1/0136 , H01S5/005 , H01S5/0071 , H01S5/3401 , H01S5/3402 , H01S5/4012 , H01S5/4075
Abstract: A light source having first and second wire-grid polarizers and a laser that emits a beam of linearly polarized light that is characterized by a propagation direction is disclosed. The first wire-grid polarization filter is characterized by a first linear polarization pass direction and a first actuator for causing the first linear polarization pass direction to rotate relative to the beam of linearly polarized light. The second wire-grid polarization filter is characterized by a second linear polarization pass direction and a second actuator for causing the second linear polarization pass direction to rotate relative to the beam of linearly polarized light. A controller sets the first and second linear polarization pass directions to provide linearly polarized light having a specified polarization direction.
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公开(公告)号：US20170003170A1
公开(公告)日：2017-01-05
申请号：US14788534
申请日：2015-06-30
Applicant: Agilent Technologies, Inc.
Inventor： Adam Kleczewski , Richard P. Tella , Dower Cameron Bricker , Yang Han
CPC classification number: G01J4/02 , G01N2021/217 , G01N2021/556 , G02B5/3058 , G02B26/00 , G02B27/286 , G02F1/0136 , H01S5/005 , H01S5/0071 , H01S5/3401 , H01S5/3402 , H01S5/4012 , H01S5/4075
Abstract: A light source having first and second wire-grid polarizers and a laser that emits a beam of linearly polarized light that is characterized by a propagation direction is disclosed. The first wire-grid polarization filter is characterized by a first linear polarization pass direction and a first actuator for causing the first linear polarization pass direction to rotate relative to the beam of linearly polarized light. The second wire-grid polarization filter is characterized by a second linear polarization pass direction and a second actuator for causing the second linear polarization pass direction to rotate relative to the beam of linearly polarized light. A controller sets the first and second linear polarization pass directions to provide linearly polarized light having a specified polarization direction.
Abstract translation: 公开了一种具有第一和第二线栅偏振器的光源和发射以传播方向为特征的线偏振光束的激光器。 第一线栅偏振滤光器的特征在于第一线性偏振光通过方向和第一致动器，用于使第一线偏振光通过方向相对于线偏振光束旋转。 第二线栅偏振滤光器的特征在于第二线偏振光通过方向，第二致动器用于使第二线偏振光通过方向相对于线偏振光束旋转。 A控制器设置第一和第二线性偏振通过方向以提供具有指定偏振方向的线偏振光。
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公开(公告)号：US09354118B2
公开(公告)日：2016-05-31
申请号：US14173994
申请日：2014-02-06
Applicant: Film Sense, LLC
Inventor： Blaine D. Johs , Bruce A. Hadwiger
CPC classification number: G01J4/02 , G01N21/211 , G01N2021/213 , G01N2021/215 , G01N2021/216
Abstract: A multiple wavelength ellipsometer system for use in thin film characterization is disclosed. The light source for the system may include sequentially scanned multiple light emitting diodes or laser diodes. The polarization state detector may comprise no moving parts, and utilizes economical uncoated glass plates as beam splitters. The system compensates for potential measurement errors induced by misalignment of the input beam angle to the polarization state detector via a paired arrangement of the beam splitters. To provide improved accuracy in the analysis of data acquired by the system, methods herein actively compensate for the relatively large bandwidth of a preferable light emitting diode source.
Abstract translation: 公开了用于薄膜表征的多波长椭偏仪系统。 该系统的光源可以包括顺序扫描的多个发光二极管或激光二极管。 偏振状态检测器可以不包括移动部件，并且使用经济的未涂覆玻璃板作为分束器。 该系统通过分束器的配对布置来补偿由输入光束角与偏振状态检测器的未对准而引起的潜在测量误差。 为了提供对由系统获取的数据的分析的改进的精度，本文中的方法主动地补偿优选的发光二极管源的相对大的带宽。
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公开(公告)号：US20150323445A1
公开(公告)日：2015-11-12
申请号：US14706743
申请日：2015-05-07
Applicant: Theodore Peter Rakitzis
Inventor： Theodore Peter Rakitzis
CPC classification number: G01N21/19 , G01J4/02 , G01J4/04 , G01J2004/001 , G01N21/21 , G01N2201/06113 , G01N2201/0636 , G01N2201/067
Abstract: A polarimeter for measuring chirality of a material comprising an optical ring cavity comprising a plurality of reflective elements configured to promote bi-directional propagation of a laser beam within the cavity, a laser-emitting device configured to introduce a first input laser beam and a second input laser beam into the ring cavity, and a Faraday rotator and a phase compensator configured to suppress a birefringent background as the first and second laser beams pass through the ring cavity, wherein the plurality of mirrors, Faraday rotator, and phase compensator are configured such that light from the first and second laser beams passes through a chiral material located within the cavity a sufficient number of times for a measurement of optical rotary dispersion (ORD) and circular dichroism (CD) of light transmitted through the chiral material to be obtained. Particular implementations include monolithic ring cavities or microresonators or use of intra-cavity gain media.
Abstract translation: 一种用于测量包括光环腔的材料的手性的旋转计，包括配置成促进激光束在空腔内的双向传播的多个反射元件;激光发射器件，被配置为引入第一输入激光束和第二输入激光束 输入激光束进入环形腔，以及法拉第旋转器和相位补偿器，其构造成当第一和第二激光束通过环形空腔时抑制双折射背景，其中多个反射镜法拉第旋转器和相位补偿器被配置为 来自第一和第二激光束的光通过位于空腔内的手性材料足够多的次数，用于测量通过待获得的手性材料的光的旋转色散（ORD）和圆二色性（CD）。 具体的实施方式包括单片环腔或微谐振器或使用腔内增益介质。
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公开(公告)号：US20150219497A1
公开(公告)日：2015-08-06
申请号：US14173994
申请日：2014-02-06
Applicant: Film Sense, LLC
Inventor： Blaine D. Johs , Bruce A. Hadwiger
IPC: G01J4/02
CPC classification number: G01J4/02 , G01N21/211 , G01N2021/213 , G01N2021/215 , G01N2021/216
Abstract: A multiple wavelength ellipsometer system for use in thin film characterization is disclosed. The light source for the system may include sequentially scanned multiple light emitting diodes or laser diodes. The polarization state detector may comprise no moving parts, and utilizes economical uncoated glass plates as beam splitters. The system compensates for potential measurement errors induced by misalignment of the input beam angle to the polarization state detector via a paired arrangement of the beam splitters. To provide improved accuracy in the analysis of data acquired by the system, methods herein actively compensate for the relatively large bandwidth of a preferable light emitting diode source.
Abstract translation: 公开了用于薄膜表征的多波长椭偏仪系统。 该系统的光源可以包括顺序扫描的多个发光二极管或激光二极管。 偏振状态检测器可以不包括移动部件，并且使用经济的未涂覆的玻璃板作为分束器。 该系统通过分束器的配对布置补偿由输入光束角与偏振状态检测器的未对准而引起的潜在测量误差。 为了提供对由系统获取的数据的分析的改进的精度，本文中的方法主动地补偿优选的发光二极管源的相对大的带宽。
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