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    Evaporating method for forming thin film
    41.
    发明授权
    Evaporating method for forming thin film 有权
    用于形成薄膜的蒸发方法

    公开(公告)号：US08691339B2

    公开(公告)日：2014-04-08

    申请号：US14029781

    申请日：2013-09-17

    Applicant: Samsung Display Co., Ltd.

    Inventor： Ji-Hwan Yoon ,  Kwan-Hee Lee ,  Jae-Hyun Kwak ,  Dong-Hun Kim ,  Min-Seung Chun ,  Jung-Ha Son

    IPC: C23C16/00 ,  B05D5/06

    CPC classification number: H05B33/10 ,  C23C14/12 ,  C23C14/24 ,  C23C14/243 ,  H01L2251/5346 ,  H01L2251/5384

    Abstract: A method of forming a film on a substrate includes depositing first and second evaporating source materials respective from first and second evaporating sources onto the substrate while moving the evaporating sources together with respect to the substrate, the first and second evaporating source materials being different from each other and positioned to provide a non-overlapping deposition region of the first evaporating source material, an overlapping deposition region of the first and second evaporating source materials and a non-overlapping deposition region of the second source material such that when the evaporating sources are moved, a film is formed to include a first layer that is a deposition of only the first evaporating source material, a second layer that is a deposition of a mixture of the first evaporating source material and the second evaporating source material and a third layer that is a deposition of only the second source material.

    Abstract translation: 一种在衬底上形成膜的方法包括将第一和第二蒸发源相应于第一和第二蒸发源的第一和第二蒸发源材料沉积到衬底上，同时相对于衬底移动蒸发源，第一和第二蒸发源材料与每个 并且定位成提供第一蒸发源材料的不重叠的沉积区域，第一和第二蒸发源材料的重叠沉积区域和第二源材料的非重叠沉积区域，使得当蒸发源移动时 形成膜，以包括仅第一蒸发源材料的沉积的第一层，作为第一蒸发源材料和第二蒸发源材料的混合物沉积的第二层，以及第三层 仅沉积第二源材料。

    Deposition Apparatus and Method for Manufacturing Organic Light Emitting Diode Display Using the Same
    42.
    发明申请
    Deposition Apparatus and Method for Manufacturing Organic Light Emitting Diode Display Using the Same 有权
    用于制造使用其的有机发光二极管显示器的沉积装置和方法

    公开(公告)号：US20130323868A1

    公开(公告)日：2013-12-05

    申请号：US13666768

    申请日：2012-11-01

    Applicant: SAMSUNG DISPLAY CO., LTD.

    Inventor： Ja-Hyun Im ,  Kwan-Hee Lee ,  Ji-Hwan Yoon ,  Joong-Won Sim ,  Tae-Kwang Sung

    IPC: H01L51/56

    CPC classification number: H01L21/6715 ,  C23C14/044 ,  C23C14/22 ,  H01L51/0003 ,  H01L51/001 ,  H01L51/56

    Abstract: A deposition apparatus includes: a deposition source including a spray nozzle linearly arranged in a first direction and discharging a deposition material; and a pair of angle control members disposed at both sides of the deposition source and controlling a discharging direction angle of the deposition material. Each angle control member includes a rotation axis parallel to the first direction, and a plurality of shielding plates inst7lled about the rotation axis and separated from each other by a predetermined interval around the rotation axis. Although the deposition angle is changed according to the increasing of the process time, the deposition angle is compensated to form a uniform thin film. Also, the organic thin film may be uniformly deposited through each pixel of an organic light emitting diode (OLED) display, thereby increasing luminance uniformity for each pixel.

    Abstract translation: 沉积设备包括：沉积源，包括沿第一方向线性排列并排出沉积材料的喷嘴; 以及设置在所述沉积源的两侧并控制所述沉积材料的排出方向角度的一对角度控制构件。 每个角度控制构件包括平行于第一方向的旋转轴线，并且围绕旋转轴线设置并围绕旋转轴线彼此隔开预定间隔的多个屏蔽板。 尽管沉积角度根据处理时间的增加而改变，但沉积角度被补偿以形成均匀的薄膜。 此外，有机薄膜可以通过有机发光二极管（OLED）显示器的每个像素均匀地沉积，从而增加每个像素的亮度均匀性。

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