公开(公告)号：US20200041363A1

公开(公告)日：2020-02-06

申请号：US16276656

申请日：2019-02-15

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Shotaro BABA ,  Yoshihiko Fuji ,  Kazuaki Okamoto ,  Shiori Kaji ,  Tomohiko Nagata ,  Yoshihiro Higashi ,  Akiko Yuzawa ,  Michiko Hara

IPC: G01L1/12 ,  H04R1/08 ,  H01L41/12 ,  H01F1/00

Abstract: According to one embodiment, a sensor includes a supporter, a film portion, a first element, and a first magnetic portion. The supporter includes a first support portion and a second support portion. The film portion includes a first partial region supported by the first support portion. The first element is provided at the first partial region. The first element includes a first electrode region, a first opposing electrode region, and a first magnetic layer provided between the first electrode region and the first opposing electrode region. A direction from the second support portion toward the first magnetic portion is aligned with a first direction. The first direction is from the first opposing electrode region toward the first electrode region. At least a portion of the first magnetic portion overlaps at least a portion of the first element in a direction crossing the first direction.

公开(公告)号：US10473685B2

公开(公告)日：2019-11-12

申请号：US15445748

申请日：2017-02-28

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Yoshihiko Fuji ,  Michiko Hara ,  Kei Masunishi ,  Yoshihiro Higashi ,  Shiori Kaji ,  Akiko Yuzawa ,  Tomohiko Nagata ,  Kenji Otsu ,  Kazuaki Okamoto ,  Shotaro Baba

IPC: G01C19/5607 ,  G01P15/09 ,  G01P15/105 ,  G01P3/44

Abstract: According to one embodiment, a sensor includes a first support portion, a first movable portion, a first piezoelectric element, and a first magnetic element. The first movable portion extends in a first extension direction and is connected to the first support portion. The first piezoelectric element is fixed to the first movable portion. The first piezoelectric element includes a first electrode, a second electrode provided between the first electrode and the first movable portion, and a first piezoelectric layer provided between the first electrode and the second electrode. The first magnetic element is fixed to the first movable portion. The first magnetic element includes a first magnetic layer, a second magnetic layer, and a first intermediate layer provided between the first magnetic layer and the second magnetic layer.

公开(公告)号：US10448845B2

公开(公告)日：2019-10-22

申请号：US15421283

申请日：2017-01-31

Applicant: Kabushiki Kaisha Toshiba

Inventor： Yoshihiko Fuji ,  Hideaki Fukuzawa ,  Shiori Kaji

IPC: G01L1/12 ,  G01L19/06 ,  H04R15/00 ,  H04R19/04 ,  A61B5/021 ,  H04R23/00 ,  G01L9/00 ,  G01L9/16 ,  B81B3/00 ,  H04R3/00 ,  H04R31/00 ,  G06F3/041

Abstract: According to one embodiment, a strain sensing element provided on a deformable substrate includes: a first magnetic layer; a second magnetic layer; a spacer layer; and a bias layer. Magnetization of the second magnetic layer changes according to deformation of the substrate. The spacer layer is provided between the first magnetic layer and the second magnetic layer. The second magnetic layer is provided between the spacer layer and the bias layer. The bias layer is configured to apply a bias to the second magnetic layer.

公开(公告)号：US10342439B2

公开(公告)日：2019-07-09

申请号：US15974030

申请日：2018-05-08

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Alexander Devin Giddings ,  Hideaki Fukuzawa ,  Yoshihiko Fuji ,  Hiromi Yuasa ,  Michiko Hara ,  Shuichi Murakami

IPC: G01B7/24 ,  G01L1/00 ,  A61B5/021 ,  G01L1/12

Abstract: A strain sensor element comprises a laminated film which has a magnetic free layer, a spacer layer, and a magnetic reference layer. The free layer has a variable magnetization direction and a out-of-plane magnetization direction. The reference layer has a variable magnetization direction which is pinned more strongly than the magnetization of the free layer. The spacer layer provided between the free layer and the reference layer. A pair of electrodes is provided with a plane of the laminated film. A substrate is provided with either of the pair electrodes and can be strained. The rotation angle of the magnetization of the free layer is different from the rotation angle of the magnetization of the reference layer when the substrate is distorted. Electrical resistance is changed depending on the magnetization angle between the free layer and the reference layer, which allows the element to operate as a strain sensor.

公开(公告)号：US10254305B2

公开(公告)日：2019-04-09

申请号：US15724385

申请日：2017-10-04

Applicant: Kabushiki Kaisha Toshiba

Inventor： Hideaki Fukuzawa ,  Michiko Hara ,  Yoshihiko Fuji ,  Yoshihiro Higashi ,  Shiori Kaji ,  Akio Hori ,  Tomohiko Nagata ,  Akiko Yuzawa ,  Akira Kikitsu

IPC: G01P15/105 ,  G01P15/08

Abstract: An inertial sensor includes a base portion, a weight portion, a connection portion, and a first sensing element unit. The connection portion connects the weight portion and the base portion and is capable of being deformed in accordance with a change in relative position of the weight portion with respect to the position of the base portion. The first sensing element unit is provided on a first portion of the connection portion and includes a first magnetic layer, a second magnetic layer, and a nonmagnetic first intermediate layer. The nonmagnetic first intermediate layer is provided between the first magnetic layer and the second magnetic layer.

公开(公告)号：US10206654B2

公开(公告)日：2019-02-19

申请号：US15254377

申请日：2016-09-01

Applicant: Kabushiki Kaisha Toshiba

Inventor： Kei Masunishi ,  Akiko Yuzawa ,  Yoshihiko Fuji ,  Michiko Hara ,  Yoshihiro Higashi ,  Kazuaki Okamoto ,  Kenji Otsu

IPC: A61B8/00 ,  A61B5/021 ,  G06F3/041 ,  G01L9/00 ,  H04R15/00

Abstract: A pressure sensor of an embodiment includes a support portion, a transformable membrane part and a sensor portion. The membrane part includes an end portion supported by the support portion, and a first area and a second area. The first area is positioned between a center of the membrane part and the end portion and has a first rigidity. The second area is positioned between the first area and the end portion, and has a second rigidity lower than the first rigidity. The sensor portion is provided at the first area and includes a first magnetic layer, a second magnetic layer and a first intermediate layer provided between the first magnetic layer and the second magnetic layer. An end-side distance between the first area and the end portion is shorter than a center-side distance between the second area and the center of the membrane part.

公开(公告)号：US10145751B2

公开(公告)日：2018-12-04

申请号：US15248412

申请日：2016-08-26

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Yoshihiko Fuji ,  Michiko Hara ,  Kei Masunishi ,  Yoshihiro Higashi ,  Shiori Kaji ,  Akiko Yuzawa ,  Akio Hori ,  Tomohiko Nagata ,  Kazuaki Okamoto ,  Kenji Otsu ,  Shotaro Baba

IPC: G01L9/00 ,  G01L9/16 ,  H04R21/02 ,  A61B5/021 ,  H04R1/46 ,  A61B5/00

Abstract: According to one embodiment, a sensor includes a deformable film portion, a first sensing element and a second sensing element. The first sensing element is fixed to the film portion, and includes a first magnetic layer of a first material, a first opposing magnetic layer, and a first intermediate layer. The first intermediate layer is provided between the first magnetic layer and the first opposing magnetic layer. The second sensing element is fixed to the film portion, and includes a second magnetic layer of a second material, a second opposing magnetic layer, and a second intermediate layer. The second material is different from the first material. The second intermediate layer is provided between the second magnetic layer and the second opposing magnetic layer.

公开(公告)号：US10082430B2

公开(公告)日：2018-09-25

申请号：US15671592

申请日：2017-08-08

Applicant: Kabushiki Kaisha Toshiba

Inventor： Hideaki Fukuzawa ,  Akihiko Enamito ,  Osamu Nishimura ,  Michiko Hara ,  Hiromi Yuasa ,  Yoshihiko Fuji ,  Masayuki Kii ,  Eizo Fujisawa

IPC: G01B7/16 ,  G01L1/12 ,  G01L9/00 ,  G01L9/16

CPC classification number: G01L1/12 ,  G01L1/125 ,  G01L9/005 ,  G01L9/008 ,  G01L9/16

Abstract: According to one embodiment, a pressure sensor includes a base, and a first sensor unit. The first sensor unit includes a first transducer thin film, a first strain sensing device and a second strain sensing device. The first strain sensing device includes a first magnetic layer, a second magnetic layer, and a first intermediate layer provided between the first and the second magnetic layers. The second strain sensing device is provided apart from the first strain sensing device on the first membrane surface and provided at a location different from a location of the barycenter, the second strain sensing device including a third magnetic layer, a fourth magnetic layer, and a second intermediate layer provided between the third and the fourth magnetic layers, the first and the second intermediate layers being nonmagnetic. The first and the second strain sensing devices, and the barycenter are in a straight line.

公开(公告)号：US20180256035A1

公开(公告)日：2018-09-13

申请号：US15974030

申请日：2018-05-08

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Alexander Devin GIDDINGS ,  Hideaki Fukuzawa ,  Yoshihiko Fuji ,  Hiromi Yuasa ,  Michiko Hara ,  Shuichi Murakami

IPC: A61B5/021 ,  G01B7/24 ,  G01L1/12

CPC classification number: A61B5/021 ,  A61B5/02108 ,  G01B7/24 ,  G01L1/125

Abstract: A strain sensor element comprises a laminated film which has a magnetic free layer, a spacer layer, and a magnetic reference layer. The free layer has a variable magnetization direction and a out-of-plane magnetization direction. The reference layer has a variable magnetization direction which is pinned more strongly than the magnetization of the free layer. The spacer layer provided between the free layer and the reference layer. A pair of electrodes is provided with a plane of the laminated film. A substrate is provided with either of the pair electrodes and can be strained. The rotation angle of the magnetization of the free layer is different from the rotation angle of the magnetization of the reference layer when the substrate is distorted. Electrical resistance is changed depending on the magnetization angle between the free layer and the reference layer, which allows the element to operate as a strain sensor.

公开(公告)号：US10048150B2

公开(公告)日：2018-08-14

申请号：US14755633

申请日：2015-06-30

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Yoshihiko Fuji ,  Hideaki Fukuzawa ,  Akio Hori ,  Shiori Kaji

IPC: G01L9/16 ,  G01L9/00

Abstract: A strain detection element is provided above a deformable membrane. Moreover, this strain detection element includes an electrode and a stacked body, the stacked body including: a first magnetic layer whose magnetization direction is variable according to a deformation of the membrane; a second magnetic layer provided facing the first magnetic layer; and an intermediate layer provided between these first magnetic layer and second magnetic layer, and at least part of the first magnetic layer is amorphous, and the electrode includes a metal layer configured from a Cu—Ag alloy.