公开(公告)号：US07928403B2

公开(公告)日：2011-04-19

申请号：US11323017

申请日：2005-12-30

Applicant: Pavel Adamec

Inventor： Pavel Adamec

IPC: H01J37/26

CPC classification number: H01J37/12 ,  H01J37/14 ,  H01J37/28 ,  H01J2237/1205 ,  H01J2237/121 ,  H01J2237/1405 ,  H01J2237/1501 ,  H01J2237/2611 ,  H01J2237/2817

Abstract: The invention provides a multiple-lens assembly 1 for a charged particle beam device which comprises at least two lens sub units 2, each sub unit having an optical axis 3, wherein at least two of the optical axes of the lens sub units are inclined to each other. Further, the invention provides a charged particle beam device which comprises at least one multiple-lens assembly and a method for operating a charged particle beam device.

Abstract translation: 本发明提供了一种用于带电粒子束装置的多透镜组件1，其包括至少两个透镜子单元2，每个子单元具有光轴3，其中透镜子单元的至少两个光轴倾斜于 彼此。 此外，本发明提供一种带电粒子束装置，其包括至少一个多透镜组件和用于操作带电粒子束装置的方法。

公开(公告)号：US07842930B2

公开(公告)日：2010-11-30

申请号：US11923421

申请日：2007-10-24

Applicant: Gilad Almogy ,  Dror Shemesh ,  Pavel Adamec

Inventor： Gilad Almogy ,  Dror Shemesh ,  Pavel Adamec

IPC: H01J37/28

CPC classification number: H01J37/244 ,  H01J2237/2443 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/24465 ,  H01J2237/2802 ,  H01J2237/2804

Abstract: A charged particle detector assembly comprises a particle detector, which has at least one particle sensitive region for detecting at least a portion of the spatial distribution of charged particles and for generating a two-dimensional optical signal which correlates to the detected spatial distribution. Further, an image conduit has an input coupled to the particle sensitive region of the particle detector for transmitting the two-dimensional optical signal to at least one optical detector. Further, a selecting means is adapted for selecting at least a portion of the two-dimensional optical signal.

Abstract translation: 带电粒子检测器组件包括粒子检测器，该粒子检测器具有至少一个用于检测带电粒子的空间分布的至少一部分的粒子敏感区域，并用于产生与检测到的空间分布相关的二维光信号。 此外，图像导管具有耦合到粒子检测器的粒子敏感区域的输入端，用于将二维光信号传输到至少一个光学检测器。 此外，选择装置适于选择二维光信号的至少一部分。

公开(公告)号：US20100051804A1

公开(公告)日：2010-03-04

申请号：US12202833

申请日：2008-09-02

Applicant: Pavel ADAMEC

Inventor： Pavel ADAMEC

IPC: G01N23/00 ,  H01J3/14

CPC classification number: H01J37/28 ,  H01J37/244 ,  H01J37/265 ,  H01J2237/24465 ,  H01J2237/24495 ,  H01J2237/24592

Abstract: A charged particle beam device is provided including a particle source emitting a primary particle beam, a secondary particle beam generated by the impingement of the primary particle beam on the sample, a detection unit for detecting the secondary particle beam, the detector having at least two detector channels, and a distribution deflecting device for deflecting the secondary particle beam in a chronological sequence. Further, a detection assembly for a fast wafer inspection system is provided including a distribution deflecting device for distributing a secondary particle beam in a chronological sequence and a detector for detecting the secondary particle beam, the detector having multiple detector channels. Further, a method of operating a particle beam device with chronological resolution is provided.

Abstract translation: 提供一种带电粒子束装置，包括发射一次粒子束的粒子源，通过一次粒子束撞击在样本上产生的二次粒子束，用于检测二次粒子束的检测单元，该检测器具有至少两个 检测器通道和用于按时间顺序偏转次级粒子束的分布偏转装置。 此外，提供了一种用于快速晶片检查系统的检测组件，其包括用于按时间顺序分布二次粒子束的分布偏转装置和用于检测二次粒子束的检测器，该检测器具有多个检测器通道。 此外，提供了按照时间分辨率操作粒子束装置的方法。

公开(公告)号：US07659514B2

公开(公告)日：2010-02-09

申请号：US11849768

申请日：2007-09-04

Applicant: Pavel Adamec

Inventor： Pavel Adamec

IPC: G01T1/20

CPC classification number: H01J37/244 ,  H01J2237/2443

Abstract: An assembly for a detection unit for an optical device is described. The assembly includes a scintillator adapted to received secondary particles and, in response, generate photons, wherein the scintillator includes an opening for trespassing of a primary beam through the scintillator. The scintillator including the opening is asymmetrical with regard to one axis.

Abstract translation: 描述了用于光学装置的检测单元的组件。 该组件包括适于接收的二次粒子的闪烁体，并且作为响应产生光子，其中闪烁体包括用于侵入通过闪烁体的初级束的开口。 包括开口的闪烁体相对于一个轴线是不对称的。

公开(公告)号：US20090101819A1

公开(公告)日：2009-04-23

申请号：US12234453

申请日：2008-09-19

Applicant: FANG ZHOU ,  JURGEN FROSIEN ,  PAVEL ADAMEC

Inventor： FANG ZHOU ,  JURGEN FROSIEN ,  PAVEL ADAMEC

IPC: G01N23/00 ,  G01J1/00

CPC classification number: H01J37/05 ,  H01J37/073 ,  H01J37/153 ,  H01J2237/057 ,  H01J2237/06341 ,  H01J2237/1207 ,  H01J2237/1534 ,  H01J2237/28

Abstract: An electron beam apparatus and a method for providing an energy-filtered primary electron beam are described. Therein, a primary electron beam having an asymmetric first energy distribution is generated by means of an electron source. The primary electron beam is high-pass energy filtered using a retarding lens.

Abstract translation: 描述了一种用于提供能量过滤的一次电子束的电子束装置和方法。 其中，通过电子源产生具有不对称的第一能量分布的一次电子束。 一次电子束是使用延迟透镜进行高通能量滤波。

公开(公告)号：US20090039280A1

公开(公告)日：2009-02-12

申请号：US12181199

申请日：2008-07-28

Applicant: Pavel ADAMEC ,  Carlo SALVESEN ,  Ivo LISKA

Inventor： Pavel ADAMEC ,  Carlo SALVESEN ,  Ivo LISKA

IPC: H01J3/26 ,  H01F7/06

CPC classification number: H01J37/141 ,  H01J2237/1405 ,  Y10T29/4902

Abstract: A lens assembly having a magnetic lens assembly for a charged particle beam system is provided. The lens assembly includes: a first pole piece having a connecting portion of the first pole piece and a gap portion of the first pole piece, a second pole piece having a connecting portion of the second pole piece and a gap portion of the second pole piece, wherein the first pole piece and the second pole piece provide a gap at the respective gap portions, a coil for exciting the magnetic lens assembly, a centering element comprising a material that has a smaller Young's modulus than the material of the first and the material of the second pole piece, wherein the pole pieces are connected with each other at the respective connecting portions and have a centering element receiving portion towards the respective gap portion ends of the pole pieces.

Abstract translation: 提供了一种具有用于带电粒子束系统的磁性透镜组件的透镜组件。 透镜组件包括：第一极片，其具有第一极靴的连接部分和第一极靴的间隙部分，第二极靴具有第二极靴的连接部分和第二极靴的间隙部分 ，其中所述第一极靴和所述第二极靴在相应的间隙部分处提供间隙，用于激发所述磁性透镜组件的线圈;定心元件，包括具有比所述第一材料和材料的材料更小的杨氏模量的材料 所述极片在相应的连接部分处彼此连接并且具有朝向所述极片的相应间隙部分端部的定心元件接收部分。

公开(公告)号：US20090026384A1

公开(公告)日：2009-01-29

申请号：US12181171

申请日：2008-07-28

Applicant: Pavel ADAMEC ,  Carlo SALVESEN ,  Ivo LISKA

Inventor： Pavel ADAMEC ,  Carlo SALVESEN ,  Ivo LISKA

IPC: H01J3/18 ,  H01J3/20

CPC classification number: H01J37/12 ,  H01J37/145 ,  H01J2237/032 ,  H01J2237/038 ,  H01J2237/121 ,  H01J2237/1405 ,  H01J2237/28

Abstract: A lens assembly having an electrostatic lens component for a charged particle beam system is provided. The assembly includes: a first electrode having a conically shaped portion, a second electrode having a conically shaped portion, and a first insulator having a conically shaped portion, wherein the first insulator comprises two extending portions towards each of its ends, and wherein the two extending portions are formed to generate a gap between the insulator and each of the adjacent electrodes.

Abstract translation: 提供一种具有用于带电粒子束系统的静电透镜部件的透镜组件。 组件包括：具有锥形部分的第一电极，具有锥形部分的第二电极和具有锥形部分的第一绝缘体，其中第一绝缘体包括朝向其每个端部的两个延伸部分，并且其中两个 形成延伸部分以在绝缘体和每个相邻电极之间产生间隙。

公开(公告)号：US20080283745A1

公开(公告)日：2008-11-20

申请号：US12105616

申请日：2008-04-18

Applicant: Pavel ADAMEC ,  Fang ZHOU

Inventor： Pavel ADAMEC ,  Fang ZHOU

IPC: G01N23/00

CPC classification number: H01J37/065 ,  H01J7/18 ,  H01J37/073 ,  H01J37/18 ,  H01J2237/022 ,  H01J2237/06341 ,  H01J2237/1825 ,  H01J2237/188

Abstract: An emitter chamber for a charged particle beam apparatus with a wall defining a vacuum enclosure is provided, the emitter chamber comprising a housing enclosing an emitter (and at least one pump and attachment means for attaching said emitter chamber to the wall of said charged particle apparatus so that the housing of said emitter chamber is accommodated within said vacuum enclosure.

Abstract translation: 提供了一种用于带有限定真空外壳的壁的带电粒子束装置的发射器室，发射器室包括封闭发射器的壳体（以及至少一个泵和用于将所述发射器室附接到所述带电粒子装置的壁的附接装置 使得所述发射器室的壳体容纳在所述真空外壳内。

公开(公告)号：US20070158588A1

公开(公告)日：2007-07-12

申请号：US11469728

申请日：2006-09-01

Applicant: Fang Zhou ,  Pavel Adamec ,  Jurgen Frosien ,  Jimmy Vishnipolsky

Inventor： Fang Zhou ,  Pavel Adamec ,  Jurgen Frosien ,  Jimmy Vishnipolsky

IPC: A61N5/00

CPC classification number: H01J37/073 ,  H01J2237/022 ,  H01J2237/06325

Abstract: A method for operating a charged particle beam emitting device and, in particular, an electron beam emitting device including a cold field emitter is provided. The method includes the steps of placing the cold field emitter in a vacuum of a given pressure, the emitter exhibiting a high initial emission current I0 and a lower stable mean emission current IS under a given electric extraction field; applying the given electric extraction field to the emitter for emitting electrons from the emitter surface; performing a cleaning process by applying at least one heating pulse to the cold field emitter for heating the emitter surface, whereby the cleaning process is performed before the emission current of the cold field emitter has declined to the lower stable mean emission value IS; and repeating the cleaning process to keep the emission current of the emitter continuously above the substantially stable emission value IS.

Abstract translation: 提供了一种用于操作带电粒子束发射器件的方法，特别是包括冷场发射器的电子束发射器件。 该方法包括以下步骤：将冷场发射器置于给定压力的真空中，发射体表现出高的初始发射电流I 0和较低的稳定平均发射电流I S， 在给定的电提取场下; 将给定的电提取场施加到发射器以从发射器表面发射电子; 通过对冷场发射器施加至少一个加热脉冲来加热发射体表面来执行清洁处理，由此在冷场发射器的发射电流已经下降到较低的稳定平均发光值I < S

公开(公告)号：US20070145303A1

公开(公告)日：2007-06-28

申请号：US11553153

申请日：2006-10-26

Applicant: Pavel Adamec

Inventor： Pavel Adamec

IPC: G21K5/10

CPC classification number: H01J37/301 ,  H01J37/18 ,  H01J2237/188

Abstract: A charged particle beam apparatus and a method are provided. The apparatus comprises a charged particle emitter located within a gun chamber, the gun chamber being adapted to encompass a first pressure; at least one further vacuum chamber adapted to encompass a second pressure between one order and four orders of magnitude higher than the first pressure; a first aperture unit; comprising at least a first aperture opening and a molecule blocking area; a second aperture unit comprising a second aperture opening. Thereby, the first aperture unit and/or the second aperture unit is a differential pressure aperture separating two independently evacuateable vacuum chambers and being adapted for maintaining a pressure difference of at least two orders of magnitude and the emitter, the molecule blocking area and the second aperture opening are positioned to be on a straight line.

Abstract translation: 提供带电粒子束装置和方法。 该装置包括位于枪室内的带电粒子发射器，枪室适于包围第一压力; 至少一个另外的真空室，其适于包含比所述第一压力高一到四个数量级的第二压力; 第一光圈单元; 至少包括第一孔口和分子阻挡区域; 第二孔单元，包括第二孔口。 因此，第一孔单元和/或第二孔单元是分离两个独立可抽空的真空室的差压孔，并适于保持至少两个数量级的压力差和发射极，分子阻挡面积和第二孔 孔径开口位于直线上。