公开(公告)号：US20140264062A1

公开(公告)日：2014-09-18

申请号：US13934094

申请日：2013-07-02

Applicant: Pavel ADAMEC

Inventor： Pavel ADAMEC

IPC: H01J37/14

CPC classification number: H01J37/14 ,  H01F5/003 ,  H01J37/1475 ,  H01J2237/1526 ,  Y10T29/4902

Abstract: A magnetic deflector assembly configured for scanning a primary electron beam and providing an upgrade kit for a wafer imaging system is described. The assembly includes at least one magnetic deflector for scanning the beam over the wafer in one direction, wherein the at least one magnetic deflector comprises at least two coils forming a pair of the at least two coils, wherein the number of turns in the at least two coils is 8 or less and wherein a maximum dimension of a cross-section of a coil-forming wire or of a coil forming conductor is 0.2 mm or less.

Abstract translation: 描述了构造成用于扫描一次电子束并提供用于晶片成像系统的升级套件的磁偏转器组件。 组件包括至少一个用于在一个方向上扫描晶片上的光束的磁偏转器，其中所述至少一个磁偏转器包括形成一对所述至少两个线圈的至少两个线圈，其中所述至少两个线圈中的匝数 两个线圈为8个以下，线圈成形线或线圈形成导体的截面的最大尺寸为0.2mm以下。

公开(公告)号：US20080224062A1

公开(公告)日：2008-09-18

申请号：US12047614

申请日：2008-03-13

Applicant: Pavel ADAMEC

Inventor： Pavel ADAMEC

IPC: H01J1/50

CPC classification number: H01J37/141 ,  H01J2237/002 ,  H01J2237/1405

Abstract: A magnetic lens for a charged particle beam device and a charged particle beam device are provided. The magnetic lens includes a coil with coil windings to be excited for generation of a magnetic field, a pole piece to guide the magnetic field, a heat shield, which is connected to a cooling system, and a thermal insulation layer provided between the heat shield and the coil.

Abstract translation: 提供了一种用于带电粒子束装置和带电粒子束装置的磁透镜。 磁性透镜包括具有用于产生磁场的被激励的线圈绕组的线圈，用于引导磁场的极片，连接到冷却系统的隔热层和设置在隔热层之间的绝热层 和线圈。

公开(公告)号：US20100200748A1

公开(公告)日：2010-08-12

申请号：US12701463

申请日：2010-02-05

Applicant: Pavel ADAMEC ,  Helmut BANZHOF ,  Ivo LISKA

Inventor： Pavel ADAMEC ,  Helmut BANZHOF ,  Ivo LISKA

IPC: G01N23/22

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/2446

Abstract: It is provided a charged particle beam device for inspecting a specimen, comprising a charged particle beam source adapted to generate a primary charged particle beam; an objective lens device adapted to direct the primary charged particle beam onto the specimen; and a detector device comprising one or more charged particle detectors adapted to detect a secondary charged particle beam generated by the primary charged particle beam at the specimen and passing through the objective lens device, the secondary charged particle beam comprising a first group of secondary charged particles starting from the specimen with high starting angles and a second group of secondary charged particles starting from the specimen with low starting angles; wherein at least one of the charged particle detectors is adapted to detect depending on the starting angles one group of the first and the second groups of secondary charged particles.

Abstract translation: 提供了一种用于检查样本的带电粒子束装置，包括适于产生初级带电粒子束的带电粒子束源; 适于将初级带电粒子束引导到样本上的物镜装置; 以及检测器装置，其包括一个或多个带电粒子检测器，其适于检测在所述样本处由所述初级带电粒子束产生的并通过所述物镜装置的次级带电粒子束，所述次级带电粒子束包括第一组次级带电粒子 从具有较高起始角度的样品开始，第二组二次带电粒子从起始角低的样品开始; 其中所述带电粒子检测器中的至少一个适于根据起始角度检测一组第一和第二组次级带电粒子。

公开(公告)号：US20090200497A1

公开(公告)日：2009-08-13

申请号：US12366465

申请日：2009-02-05

Applicant: Pavel ADAMEC ,  Fang ZHOU

Inventor： Pavel ADAMEC ,  Fang ZHOU

IPC: G01J1/00 ,  H01J3/14 ,  G01D18/00

CPC classification number: H01J37/244 ,  H01J37/261 ,  H01J2237/2443 ,  H01J2237/24507 ,  H01J2237/2826

Abstract: A charged particle beam device is described. The charged particle beam device includes an emitter adapted for emitting a primary charged particle beam, a specimen location adapted for holding a specimen, from which secondary and/or backscattered charged particles are released on impingement of the primary charged particle beam, a detection unit adapted for detecting the secondary particles and/or secondary particles, and a beam guiding unit adapted for guiding the primary charged particle beam to the detection unit for impingement of a primary charged particle beam on the detection unit.

Abstract translation: 描述带电粒子束装置。 带电粒子束装置包括适于发射初级带电粒子束的发射器，适于保持试样的试样位置，从而从初级带电粒子束的冲击中释放辅助和/或反向散射的带电粒子，检测单元适于 用于检测二次粒子和/或二次粒子的光束引导单元，以及用于将初级带电粒子束引导到检测单元的光束引导单元，用于将一次带电粒子束撞击在检测单元上。

公开(公告)号：US20100051804A1

公开(公告)日：2010-03-04

申请号：US12202833

申请日：2008-09-02

Applicant: Pavel ADAMEC

Inventor： Pavel ADAMEC

IPC: G01N23/00 ,  H01J3/14

CPC classification number: H01J37/28 ,  H01J37/244 ,  H01J37/265 ,  H01J2237/24465 ,  H01J2237/24495 ,  H01J2237/24592

Abstract: A charged particle beam device is provided including a particle source emitting a primary particle beam, a secondary particle beam generated by the impingement of the primary particle beam on the sample, a detection unit for detecting the secondary particle beam, the detector having at least two detector channels, and a distribution deflecting device for deflecting the secondary particle beam in a chronological sequence. Further, a detection assembly for a fast wafer inspection system is provided including a distribution deflecting device for distributing a secondary particle beam in a chronological sequence and a detector for detecting the secondary particle beam, the detector having multiple detector channels. Further, a method of operating a particle beam device with chronological resolution is provided.

Abstract translation: 提供一种带电粒子束装置，包括发射一次粒子束的粒子源，通过一次粒子束撞击在样本上产生的二次粒子束，用于检测二次粒子束的检测单元，该检测器具有至少两个 检测器通道和用于按时间顺序偏转次级粒子束的分布偏转装置。 此外，提供了一种用于快速晶片检查系统的检测组件，其包括用于按时间顺序分布二次粒子束的分布偏转装置和用于检测二次粒子束的检测器，该检测器具有多个检测器通道。 此外，提供了按照时间分辨率操作粒子束装置的方法。

公开(公告)号：US20090039280A1

公开(公告)日：2009-02-12

申请号：US12181199

申请日：2008-07-28

Applicant: Pavel ADAMEC ,  Carlo SALVESEN ,  Ivo LISKA

Inventor： Pavel ADAMEC ,  Carlo SALVESEN ,  Ivo LISKA

IPC: H01J3/26 ,  H01F7/06

CPC classification number: H01J37/141 ,  H01J2237/1405 ,  Y10T29/4902

Abstract: A lens assembly having a magnetic lens assembly for a charged particle beam system is provided. The lens assembly includes: a first pole piece having a connecting portion of the first pole piece and a gap portion of the first pole piece, a second pole piece having a connecting portion of the second pole piece and a gap portion of the second pole piece, wherein the first pole piece and the second pole piece provide a gap at the respective gap portions, a coil for exciting the magnetic lens assembly, a centering element comprising a material that has a smaller Young's modulus than the material of the first and the material of the second pole piece, wherein the pole pieces are connected with each other at the respective connecting portions and have a centering element receiving portion towards the respective gap portion ends of the pole pieces.

Abstract translation: 提供了一种具有用于带电粒子束系统的磁性透镜组件的透镜组件。 透镜组件包括：第一极片，其具有第一极靴的连接部分和第一极靴的间隙部分，第二极靴具有第二极靴的连接部分和第二极靴的间隙部分 ，其中所述第一极靴和所述第二极靴在相应的间隙部分处提供间隙，用于激发所述磁性透镜组件的线圈;定心元件，包括具有比所述第一材料和材料的材料更小的杨氏模量的材料 所述极片在相应的连接部分处彼此连接并且具有朝向所述极片的相应间隙部分端部的定心元件接收部分。

公开(公告)号：US20090026384A1

公开(公告)日：2009-01-29

申请号：US12181171

申请日：2008-07-28

Applicant: Pavel ADAMEC ,  Carlo SALVESEN ,  Ivo LISKA

Inventor： Pavel ADAMEC ,  Carlo SALVESEN ,  Ivo LISKA

IPC: H01J3/18 ,  H01J3/20

CPC classification number: H01J37/12 ,  H01J37/145 ,  H01J2237/032 ,  H01J2237/038 ,  H01J2237/121 ,  H01J2237/1405 ,  H01J2237/28

Abstract: A lens assembly having an electrostatic lens component for a charged particle beam system is provided. The assembly includes: a first electrode having a conically shaped portion, a second electrode having a conically shaped portion, and a first insulator having a conically shaped portion, wherein the first insulator comprises two extending portions towards each of its ends, and wherein the two extending portions are formed to generate a gap between the insulator and each of the adjacent electrodes.

Abstract translation: 提供一种具有用于带电粒子束系统的静电透镜部件的透镜组件。 组件包括：具有锥形部分的第一电极，具有锥形部分的第二电极和具有锥形部分的第一绝缘体，其中第一绝缘体包括朝向其每个端部的两个延伸部分，并且其中两个 形成延伸部分以在绝缘体和每个相邻电极之间产生间隙。

公开(公告)号：US20080283745A1

公开(公告)日：2008-11-20

申请号：US12105616

申请日：2008-04-18

Applicant: Pavel ADAMEC ,  Fang ZHOU

Inventor： Pavel ADAMEC ,  Fang ZHOU

IPC: G01N23/00

CPC classification number: H01J37/065 ,  H01J7/18 ,  H01J37/073 ,  H01J37/18 ,  H01J2237/022 ,  H01J2237/06341 ,  H01J2237/1825 ,  H01J2237/188

Abstract: An emitter chamber for a charged particle beam apparatus with a wall defining a vacuum enclosure is provided, the emitter chamber comprising a housing enclosing an emitter (and at least one pump and attachment means for attaching said emitter chamber to the wall of said charged particle apparatus so that the housing of said emitter chamber is accommodated within said vacuum enclosure.

Abstract translation: 提供了一种用于带有限定真空外壳的壁的带电粒子束装置的发射器室，发射器室包括封闭发射器的壳体（以及至少一个泵和用于将所述发射器室附接到所述带电粒子装置的壁的附接装置 使得所述发射器室的壳体容纳在所述真空外壳内。

公开(公告)号：US20130306863A1

公开(公告)日：2013-11-21

申请号：US13895576

申请日：2013-05-16

Applicant: Pavel ADAMEC ,  Carlo SALVESEN

Inventor： Pavel ADAMEC ,  Carlo SALVESEN

IPC: H01J37/141

CPC classification number: H01J37/141 ,  H01J37/1475 ,  H01J37/16 ,  H01J2237/0268

Abstract: A deflector system for fast magnetic deflection of a charged particle beam is described. The deflector system includes a tube for separating the beam from the magnetic deflector coil arrangement, the tube having a middle section, at least a first end section, and a second end section, wherein a wall thickness of the middle section is lower than a wall thickness of at least one of the first end section and the second end section.

Abstract translation: 描述了用于带电粒子束的快速磁偏转的偏转器系统。 偏转器系统包括用于将光束与磁偏转线圈装置分离的管，该管具有中间部分，至少第一端部部分和第二端部部分，其中中间部分的壁厚低于壁 第一端部和第二端部中的至少一个的厚度。

公开(公告)号：US20120261573A1

公开(公告)日：2012-10-18

申请号：US13204528

申请日：2011-08-05

Applicant: Pavel ADAMEC

Inventor： Pavel ADAMEC

IPC: H01J37/285

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/2449 ,  H01J2237/245

Abstract: A charged particle beam device for inspecting a specimen includes a charged particle beam source adapted to generate a primary charged particle beam; an objective lens device adapted to direct the primary charged particle beam onto the specimen; a retarding field device adapted to accelerate secondary charged particles starting from the specimen, a first detector device having a central opening, includes at least two azimuthal detector segments for detecting secondary particles, wherein the objective lens device is adapted such that particles with different starting angles from the specimen exhibit crossovers at substantially the same distance from the specimen between the objective lens and the detector device, and an aperture located between the objective lens and the crossovers, having an opening which is equal to or smaller than the central opening in the detector device.

Abstract translation: 用于检查样本的带电粒子束装置包括适于产生初级带电粒子束的带电粒子束源; 适于将初级带电粒子束引导到样本上的物镜装置; 适于加速从样本开始的次级带电粒子的延迟场设备，具有中心开口的第一检测器装置包括至少两个用于检测次级粒子的方位角检测器段，其中物镜装置适于使得起始角度不同的颗粒 来自该样本的物镜在与物镜和检测器装置之间的样本基本上相同的距离处展开交叉，以及位于物镜和交越器之间的孔，其具有等于或小于检测器中的中心开口的开口 设备。