Multi-stage system, a control method therefor, and a lithographic apparatus

    公开(公告)号:US09726988B2

    公开(公告)日:2017-08-08

    申请号:US15258758

    申请日:2016-09-07

    IPC分类号: G03F7/20 G05B19/418 H02P25/06

    摘要: A multi-stage system includes a stator including a plurality of electric coils; a first stage including a first magnet assembly, the first stage moveable relative to the stator; a second stage including a second magnet assembly, the second stage moveable relative to the stator; a controller configured to position the first and the second stage relative to the stator by activating, respectively, a first subset of the plurality of electric coils to interact with the first magnet assembly and a second subset of the plurality of electric coils to interact with the second magnet assembly, the controller adapted to prevent at least one electric coil, to be simultaneously shared by the first and the second subset to position the first and the second stage on the stator, from activating.

    Controlled motion system
    32.
    发明授权
    Controlled motion system 有权
    受控运动系统

    公开(公告)号:US09590539B2

    公开(公告)日:2017-03-07

    申请号:US14552255

    申请日:2014-11-24

    摘要: A controlled motion system having a plurality of movers controlled as they travel along both smart and simple sections of a track. The controlled motion system comprises a control system for controlling the speed of a mover as it travels along a simple section, and permits the pitch or distance between movers to increase or decrease as they travel along a simple section. In a preferred embodiment the controlled motion system includes at least one coupling feature having a driving feature on a simple section for engaging and operably driving a driven feature on each mover such that positive control of each mover is maintained throughout its transition from a smart section to a simple section.

    摘要翻译: 具有多个移动器的受控运动系统在轨道的智能和简单部分行进时被控制。 受控运动系统包括一个控制系统,用于在沿着简单部分行进时控制移动器的速度,并且允许移动器之间的间距或距离随着它们沿简单部分行进而增加或减小。 在优选实施例中,受控运动系统包括至少一个耦合特征,其具有在简单部分上的驱动特征,用于接合和可操作地驱动每个动子上的驱动特征,使得每个动子的积极控制在其从智能部分到 一个简单的部分。

    Control device for air conditioner
    33.
    发明授权
    Control device for air conditioner 有权
    空调控制装置

    公开(公告)号:US09581352B2

    公开(公告)日:2017-02-28

    申请号:US14355151

    申请日:2012-10-29

    申请人: DENSO CORPORATION

    摘要: The present disclosure simplifies the H-bridge circuit of the direct current motor for driving the damper (door) that switches the air passages in the indoor unit of an air conditioning device. The control device for an air conditioner that takes in inside or outside air and conditions the air inside an air conditioning unit using an evaporator and a heater core is provided with: a first actuator and a second actuator that drive the multiple dampers installed inside the air conditioning unit for switching the air passages; and three half-bridge circuits that control the first actuator and the second actuator sharing one of the half-bridge circuits. Of the multiple dampers, the first actuator is connected to the inside/outside air switching damper. Of the multiple dampers, the second actuator is connected to at least one air mix damper.

    摘要翻译: 本公开简化了用于驱动用于切换空调装置的室内单元中的空气通道的阻尼器(门)的直流电动机的H桥电路。 空调机的控制装置具有:第一致动器和驱动安装在空气内的多个风门的第二致动器,所述空调机的内部或外部空气使用蒸发器和加热器芯来调节空调单元内的空气 用于切换空气通道的调节单元; 以及三个半桥电路,其控制第一致动器和第二致动器共享半桥电路之一。 在多个阻尼器中,第一致动器连接到内/外空气切换阻尼器。 在多个阻尼器中,第二致动器连接到至少一个空气混合阻尼器。

    DYNAMIC LINEAR STATOR SEGMENT CONTROL
    35.
    发明申请
    DYNAMIC LINEAR STATOR SEGMENT CONTROL 有权
    动态线性定律分段控制

    公开(公告)号:US20160233809A1

    公开(公告)日:2016-08-11

    申请号:US15008024

    申请日:2016-01-27

    IPC分类号: H02P25/06 B61C3/00

    摘要: A dynamic linear motor is controlled by determining a relative proximity of a moving rotor of the linear motor to a fixed stator segment of the linear motor using a current location of the moving rotor. A current driving characteristic of the linear motor at the current location of the moving rotor is determined. Settings for the fixed stator segment when the moving rotor reaches the fixed stator segment are identified based on the current driving characteristic. The fixed stator segment is driven based on the settings when the moving rotor reaches the fixed stator segment.

    摘要翻译: 通过使用移动转子的当前位置确定线性电动机的移动转子与线性电动机的固定定子部分的相对接近度来控制动态线性电动机。 确定在移动转子的当前位置处的线性电动机的电流驱动特性。 基于当前的驱动特性,确定当移动转子到达固定定子段时固定定子段的设定。 固定定子段根据移动转子到达固定定子段时的设定来驱动。

    Pinch detection apparatus for opening-and-closing member, and opening-and-closing member apparatus
    36.
    发明授权
    Pinch detection apparatus for opening-and-closing member, and opening-and-closing member apparatus 有权
    用于打开和关闭构件的夹紧检测装置,以及打开和关闭构件装置

    公开(公告)号:US09294031B2

    公开(公告)日:2016-03-22

    申请号:US14151186

    申请日:2014-01-09

    摘要: A pinch detection apparatus for an opening-and-closing member actuated by a motor, the pinch detection apparatus includes a reference data storage portion calculating load data on the basis of a rotation speed of the motor and an environmental temperature, the reference data storage portion storing the load data and the environmental temperature as reference load data and reference temperature data, respectively, a drive load calculation portion calculating drive load data, and a pinch determination portion configured to determine an occurrence of pinch on the basis of a comparison result obtained by comparing a difference between the reference load data and the drive load data with a threshold, the pinch determination portion configured to correct a relative relation between the difference between the reference load data and the drive load data, and the threshold on the basis of a relative relation between a reference temperature and a drive temperature.

    摘要翻译: 一种用于由马达驱动的打开和关闭部件的夹紧检测装置,所述夹送检测装置包括基准数据存储部分,其基于所述马达的转速和环境温度来计算加载数据,所述参考数据存储部分 分别存储负载数据和环境温度作为参考负载数据和参考温度数据,驱动负载计算部分计算驱动负载数据,以及压缩确定部分,被配置为基于由 将所述参考负载数据与所述驱动负载数据之间的差与阈值进行比较,所述压缩确定部分被配置为基于相对值来校正所述参考负载数据与所述驱动负载数据之间的差异与所述阈值之间的相对关系 参考温度与驱动温度之间的关系。

    Moving member control apparatus and imaging apparatus incorporating the same
    37.
    发明授权
    Moving member control apparatus and imaging apparatus incorporating the same 有权
    移动构件控制装置及其结合的成像装置

    公开(公告)号:US09232141B2

    公开(公告)日:2016-01-05

    申请号:US14480755

    申请日:2014-09-09

    摘要: The invention disclosed herein provides a small-format image-shake correction apparatus and an imaging apparatus incorporating the same. The moving member control apparatus is comprising a base part 10, a moving part 30 that is movable relatively to the base part 10, a first driving part 71 that applies an driving force to the moving part 30, a second driving part 72 that applies an driving force to the moving part 30, a third driving part 73 that applies an driving force to the moving part 30 from a position different from the first 71 and the second driving part 72, a control part 2 that gains control of the driving forces of the first 71, the second 72 and the third driving part 73, and a correction part 3 that makes correction of a first output value Ix1 produced from the control part 2 to the first driving part 71 and a second output value Ix2 produced from the control part 2 to the second driving part 72, depending on a third output value Iy produced from the control part 2 to the third driving part 73, as shown in FIG. 12.

    摘要翻译: 本文公开的本发明提供了一种小格式图像抖动校正装置和包括该图像抖动校正装置的成像装置。 移动构件控制装置包括基部10,可相对于基部10移动的移动部30,向移动部30施加驱动力的第一驱动部71, 向移动部30的驱动力,从与第一和第二驱动部72不同的位置向移动部30施加驱动力的第三驱动部73,控制部2, 第一71,第二72和第三驱动部73,以及校正部3,其将从控制部2产生的第一输出值Ix1修正为第一驱动部71,第二输出值Ix2从控制 根据从控制部分2到第三驱动部分73产生的第三输出值Iy,第二部分到第二驱动部分72,如图3所示。 12。

    Driving Signal Generator and Method of Generating Driving Signal
    38.
    发明申请
    Driving Signal Generator and Method of Generating Driving Signal 审中-公开
    驱动信号发生器及其产生驱动信号的方法

    公开(公告)号:US20150349690A1

    公开(公告)日:2015-12-03

    申请号:US14335877

    申请日:2014-07-19

    IPC分类号: H02P23/04 H02P25/06 H02P25/16

    CPC分类号: H02P23/04 H02P25/034

    摘要: A driving signal generator for driving a transducer includes: an input terminal for receiving a control signal; and a digital filter, coupled to the input terminal, for generating a driving signal to drive the transducer in response to the control signal. The digital filter is a notch filter, and the transfer function of the digital filter is related to the characteristics of the transducer.

    摘要翻译: 用于驱动换能器的驱动信号发生器包括:用于接收控制信号的输入端; 以及耦合到输入端的数字滤波器,用于响应于控制信号产生驱动信号以驱动换能器。 数字滤波器是陷波滤波器,数字滤波器的传递函数与传感器的特性有关。

    Ultrasonic system controls, tool recognition means and feedback methods
    40.
    发明授权
    Ultrasonic system controls, tool recognition means and feedback methods 有权
    超声波系统控制,工具识别手段和反馈方法

    公开(公告)号:US09018887B2

    公开(公告)日:2015-04-28

    申请号:US13078134

    申请日:2011-04-01

    CPC分类号: A61C17/20 B06B1/0253 B06B1/08

    摘要: An ultrasonic electro-mechanical resonant system and instrument that provides improvements in the design and implementation of a feedback system. The disclosed configuration and orientation of coils enhance the motional or velocity feedback signals while minimizing the effects of transformer coupling. A two coil and a three coil approach is disclosed that takes advantage of non-homogeneous magnetic fields. An asymmetrical arrangement enables velocity signals to be coupled into the coils without requiring additional signal conditioning or capacitive elements.

    摘要翻译: 一种超声机电共振系统和仪器,可提供反馈系统的设计和实现。 所公开的线圈的配置和取向增强了运动或速度反馈信号,同时使变压器耦合的影响最小化。 公开了利用非均匀磁场的二线圈和三线圈方法。 不对称布置使得速度信号能够耦合到线圈中,而不需要额外的信号调节或电容元件。