公开(公告)号：US06184993B2

公开(公告)日：2001-02-06

申请号：US09248182

申请日：1999-02-09

申请人： Carlos A. Durán ,  Kenneth H. Womack

发明人： Carlos A. Durán ,  Kenneth H. Womack

IPC分类号： G01B1102

CPC分类号： G11B7/122 ,  G01B11/14

摘要： An apparatus that can measure a space between a first surface and a second surface such as the air bearing between a slider and a disk. The apparatus may include a light source that can reflect a light beam from the slider and the disk. By way of example, the light beam can be reflected off of an Al2O3 cap of a slider. A birefringent element such as a Savart plate may split the reflected light beam into an ordinary beam and an extraordinary beam. The ordinary and extraordinary beams may combine to form an interference pattern that is detected by a photodetector. A controller receives data from the photodetector. The apparatus may have a mechanism which can vary a phase between the ordinary and extraordinary beams so that the controller can calculate a phase value &phgr;. The controller then computes the space from the phase value &phgr;. The variation in phase between the beams may be created by tilting the birefringent element, or moving the reflected light beam directed into the birefringent element. The apparatus can determine the space without performing a retract calibration routine that moves the slider as is required in the prior art.

摘要翻译： 可以测量第一表面和第二表面之间的空间的装置，例如滑块和盘之间的空气轴承。 该装置可以包括可以反射来自滑块和盘的光束的光源。 作为示例，光束可以从滑块的Al 2 O 3盖反射。 诸如萨瓦特板之类的双折射元件可以将反射光束分裂成普通光束和非常光束。 普通和非常的光束可以组合以形成由光电检测器检测到的干涉图案。 控制器从光电检测器接收数据。 该装置可以具有可以改变普通光束和非常光束之间的相位的机构，使得控制器可以计算相位值phi。 然后，控制器从相位值phi计算空间。 可以通过倾斜双折射元件或者将引导到双折射元件的反射光束移动来产生光束之间的相位变化。 该装置可以确定空间，而不执行如现有技术中所需的移动滑块的缩回校准例程。

公开(公告)号：US06812478B2

公开(公告)日：2004-11-02

申请号：US09976442

申请日：2001-10-12

申请人： Sundar Amartur

发明人： Sundar Amartur

IPC分类号： G01B1102

CPC分类号： B24B49/04 ,  B24B37/013 ,  B24B49/12

摘要： An invention for detecting an endpoint during a chemical mechanical polishing (CMP) process is provided. A reflected spectrum data sample is received that corresponds to a plurality of spectrums of light reflected from an illuminated portion of the surface of a wafer. The reflected spectrum data sample is normalized using a normalization reference comprising a first reflected spectrum data sample obtained earlier during the CMP process. In addition, the normalization reference is updated during the process using a second reflected spectrum data sample obtained earlier during the CMP process. The second reflected spectrum data sample is obtained after the first reflected spectrum data sample. In this manner, an endpoint is determined based on optical interference occurring in the reflected spectrum data.

摘要翻译： 提供了一种用于在化学机械抛光（CMP）工艺期间检测端点的发明。 接收对应于从晶片的表面的照射部分反射的多个光谱的反射光谱数据样本。 使用包括在CMP过程中较早获得的第一反射光谱数据样本的归一化参考来对反射光谱数据样本进行归一化。 另外，使用在CMP工艺中较早获得的第二反射光谱数据样本，在该过程期间更新归一化参考。 在第一反射光谱数据样本之后获得第二反射光谱数据样本。 以这种方式，基于在反射光谱数据中发生的光学干涉来确定端点。

公开(公告)号：US06807512B2

公开(公告)日：2004-10-19

申请号：US10313064

申请日：2002-12-06

申请人： Mark Robert Mazgaj ,  Brian Lewis Spunaugle

发明人： Mark Robert Mazgaj ,  Brian Lewis Spunaugle

IPC分类号： G01B1102

CPC分类号： G01D21/02

摘要： A method of identifying a node of an arrangement that includes a plurality of movable parts, the method including moving only one of a plurality of movable parts of an arrangement, detecting the moving of the one of the plurality of movable parts and distinguishing a node associated with the one of the plurality of movable parts based on the detecting.

摘要翻译： 一种识别包括多个可移动部件的布置的节点的方法，所述方法包括仅移动布置的多个可移动部分中的一个，检测多个可移动部分中的一个的移动并区分相关联的节点 与多个可动部中的一个基于检测。

公开(公告)号：US06798528B1

公开(公告)日：2004-09-28

申请号：US09957172

申请日：2001-09-20

申请人： Richard L. Hartman

发明人： Richard L. Hartman

IPC分类号： G01B1102

CPC分类号： G01B11/04

摘要： A system and method for measuring the dimensions of moving packages includes a computer system connected to a position tracking system and a slice measurement system. The computer system uses the position tracking system to generate a series of position measurements of the packages as they move through the slice measurement system and uses the slice measurement system to generate a cross sectional slice of the packages at each measured positioned. The computer system then uses the cross sectional slice information to determine the height and width of the packages and uses the position measurements to determine the length of the packages.

摘要翻译： 用于测量移动包装尺寸的系统和方法包括连接到位置跟踪系统和切片测量系统的计算机系统。 计算机系统使用位置跟踪系统在包装移动通过切片测量系统时产生一系列位置测量，并使用切片测量系统在每个测量的定位处产生包装的横截面切片。 然后，计算机系统使用截面切片信息来确定包装的高度和宽度，并使用位置测量来确定包装的长度。

公开(公告)号：US06772089B2

公开(公告)日：2004-08-03

申请号：US10188889

申请日：2002-07-05

申请人： Takahiro Ikeda ,  Yumiko Miyano

发明人： Takahiro Ikeda ,  Yumiko Miyano

IPC分类号： G01B1102

CPC分类号： G06K9/48 ,  G06K9/6253

摘要： A graphic contour extracting method includes: acquiring an image of a graphic form to be inspected; defining an inspection region for the image of the graphic form to be inspected by an inspection graphic form including at least one of a circle, an ellipse, a rectangle, a first rectangular graphic form, a second rectangular graphic form and a closed curved graphic form, at least one end of the first rectangular graphic form being replaced with any one of a semi-circle, a semi-ellipse and a parabola, at least one of four corners of the second rectangular graphic form being replaced with a ¼ circle or a ¼ ellipse, the closed curved graphic form being expressed by the following expression: ( x - x 0 ) 4 a 4 + ( y - y 0 ) 4 b 4 = 1 , and the inspection graphic form having an edge searching direction previously defined for at least one component thereof; and searching an edge of the graphic form to be inspected on the basis of the inspection graphic form to acquire contour information of the graphic form to be inspected.

摘要翻译： 图形轮廓提取方法包括：获取要检查的图形的图像; 通过包括圆形，椭圆形，矩形，第一矩形图形，第二矩形图形和闭合曲线图形中的至少一个的检查图形来定义要检查的图形形状的图像的检查区域 第一矩形图形的至少一端用半圆，半椭圆和抛物线中的任一个代替，第二矩形图形的四个角中的至少一个被替换为1/4圈或 ¼椭圆形，闭合曲线图形由以下表达式表示：检查图形具有先前为其至少一个分量定义的边缘搜索方向; 并且基于检查图形来搜索图形形式的边缘以获取待检查图形的轮廓信息。

公开(公告)号：US06744511B1

公开(公告)日：2004-06-01

申请号：US09372343

申请日：1999-08-11

申请人： Kazuaki Saiki ,  Tomohide Hamada

发明人： Kazuaki Saiki ,  Tomohide Hamada

IPC分类号： G01B1102

CPC分类号： G03F7/70725

摘要： An exposure device which includes a stage device having a first stage which movably supports an object and a drive mechanism which drives the first stage in at least a first direction. The first stage has a first portion coupled to the drive mechanism and a second portion for supporting the object. The first stage device is configured with a first position measuring device which measures the position of the first portion in a predetermined measurement direction. The exposure device further includes a first stage control system which controls the drive mechanism to control the position of the object in at least a first direction based on a measurement result obtained by the first position measuring device.

摘要翻译： 一种曝光装置，包括具有可移动地支撑物体的第一台和在至少第一方向上驱动第一台的驱动机构的平台装置。 第一级具有联接到驱动机构的第一部分和用于支撑物体的第二部分。 第一级装置配置有测量第一部分在预定测量方向上的位置的第一位置测量装置。 曝光装置还包括第一级控制系统，其基于由第一位置测量装置获得的测量结果控制驱动机构以至少在第一方向上控制物体的位置。

公开(公告)号：US06687013B2

公开(公告)日：2004-02-03

申请号：US09818713

申请日：2001-03-28

申请人： Fumio Isshiki ,  Masakazu Sugaya ,  Tatsundo Suzuki ,  Masahiro Yamaoka ,  Sumio Hosaka

发明人： Fumio Isshiki ,  Masakazu Sugaya ,  Tatsundo Suzuki ,  Masahiro Yamaoka ,  Sumio Hosaka

IPC分类号： G01B1102

CPC分类号： G03F7/70775 ,  H01J37/3045 ,  H01J2237/20292

摘要： An absolute accuracy in the range from ±2 nm to ±1 nm for a displacement measurement value is provided by a laser interferometer displacement measuring system. A fluctuating error component that appears corresponding to the wave cycle of laser light is detected and subtracted from the measurement value while a stage is moving, thereby providing a high accuracy.

摘要翻译： 激光干涉仪位移测量系统提供了位移测量值在±2 nm至±1 nm范围内的绝对精度。 在阶段移动时，从测量值中检测出相应于激光波周期出现的波动误差分量，从而提供高精度。

公开(公告)号：US06624894B2

公开(公告)日：2003-09-23

申请号：US09888826

申请日：2001-06-25

申请人： Artur Olszak ,  Joanna Schmit

发明人： Artur Olszak ,  Joanna Schmit

IPC分类号： G01B1102

CPC分类号： G01B11/2441 ,  G01B9/02057 ,  G01B9/02071 ,  G01B9/0209 ,  G01B2290/60 ,  G01J3/45

摘要： A reference signal is used to track the actual behavior of the scanner in an interferometer to produce scanner-position data that can be used to correct errors introduced by scanner nonlinearities and other error sources. A narrow-band light source is advantageously utilized to cover the entire range of operation of the scanner. Because of the independent reference channel, the invention is suitable for implementation with all types of conventional interferometric techniques. The concept is preferably implemented by utilizing an additional light source and the same scanner used for the measurement, so that the OPD varies in synchronization of both the reference-signal and data-collection procedures. Alternatively, a high temporal-coherence filter may be used with the same light source and optical path used for the interferometric measurement.

摘要翻译： 参考信号用于跟踪扫描仪在干涉仪中的实际行为，以产生可用于校正扫描仪非线性和其他错误源引入的误差的扫描仪位置数据。 有利地，窄带光源用于覆盖扫描仪的整个操作范围。 由于独立的参考通道，本发明适用于所有类型的常规干涉技术的实现。 该概念优选地通过利用附加光源和用于测量的相同扫描器来实现，使得OPD在参考信号和数据收集过程的同步上变化。 或者，可以使用与用于干涉测量的相同光源和光路的高时间相干滤波器。

公开(公告)号：US06580515B1

公开(公告)日：2003-06-17

申请号：US09870350

申请日：2001-05-29

申请人： Guoguang Li ,  Rajeshwar C. Chhibber

发明人： Guoguang Li ,  Rajeshwar C. Chhibber

IPC分类号： G01B1102

CPC分类号： G01B11/303 ,  G01B11/0675

摘要： A differential interferometer is used to measure the step height between a reference region and at least one point in a measurement region using the relative phase difference as well as the measured reflectance from at least the point in the measurement region. The measured reflectance can be derived from the information provided by the differential interferometer. The measured reflectance from the reference region can also be used to provide a step height measured, where, e.g., the reference region has a changing thickness. Where the measurement region includes a composite material, e.g., copper and silicon dioxide, the step height between the reference region and the measurement region may be determined by including the area fraction or the height difference of the materials in the composite material in the final determination of the step height.

摘要翻译： 差分干涉仪用于使用相对相位差以及至少在测量区域中的点测量的反射率来测量参考区域和测量区域中的至少一个点之间的台阶高度。 测量的反射率可以从差分干涉仪提供的信息导出。 来自参考区域的测量的反射率也可以用于提供测量的台阶高度，其中例如参考区域具有变化的厚度。 当测量区域包括复合材料（例如铜和二氧化硅）时，参考区域和测量区域之间的台阶高度可以通过在最终确定中包括复合材料中的材料的面积分数或高度差来确定 的步高。

公开(公告)号：US06542234B1

公开(公告)日：2003-04-01

申请号：US09680012

申请日：2000-10-05

申请人： Reinhard Ulrich ,  Arno Weiss ,  Gerald Schmekel ,  Heinz-Werner Masurat ,  Uwe Werner Ehling

发明人： Reinhard Ulrich ,  Arno Weiss ,  Gerald Schmekel ,  Heinz-Werner Masurat ,  Uwe Werner Ehling

IPC分类号： G01B1102

CPC分类号： G01N15/02 ,  A24B1/04 ,  A24C5/3412 ,  A24C5/396 ,  G01N2015/0049 ,  G01N2015/0294

摘要： The invention relates to a method of detecting the particles of a tobacco particle stream in the production of smokable articles by scanning by means of a fine-beam light barrier, the diameter of which is smaller than the dimensions of the tobacco particles, and from the distribution of the dimensions of the tobacco particles determined by darkening of the fine-beam light barrier.

摘要翻译： 本发明涉及一种通过利用其直径小于烟草颗粒的尺寸的细小束光屏障进行扫描来检测生产可吸烟制品中烟草颗粒物流的颗粒的方法， 通过细光束屏障变暗确定的烟草颗粒尺寸的分布。