发明授权
US06772089B2 Graphic contour extracting method, pattern inspecting method, program and pattern inspecting system 失效
图形轮廓提取方法,图案检查方法,程序和模式检查系统

  • 专利标题: Graphic contour extracting method, pattern inspecting method, program and pattern inspecting system
  • 专利标题(中): 图形轮廓提取方法,图案检查方法,程序和模式检查系统
  • 申请号: US10188889
    申请日: 2002-07-05
  • 公开(公告)号: US06772089B2
    公开(公告)日: 2004-08-03
  • 发明人: Takahiro IkedaYumiko Miyano
  • 申请人: Takahiro IkedaYumiko Miyano
  • 优先权: JP2001-204478 20010705
  • 主分类号: G01B1102
  • IPC分类号: G01B1102
Graphic contour extracting method, pattern inspecting method, program and pattern inspecting system
摘要:
A graphic contour extracting method includes: acquiring an image of a graphic form to be inspected; defining an inspection region for the image of the graphic form to be inspected by an inspection graphic form including at least one of a circle, an ellipse, a rectangle, a first rectangular graphic form, a second rectangular graphic form and a closed curved graphic form, at least one end of the first rectangular graphic form being replaced with any one of a semi-circle, a semi-ellipse and a parabola, at least one of four corners of the second rectangular graphic form being replaced with a ¼ circle or a ¼ ellipse, the closed curved graphic form being expressed by the following expression: ( x - x 0 ) 4 a 4 + ( y - y 0 ) 4 b 4 = 1 , and the inspection graphic form having an edge searching direction previously defined for at least one component thereof; and searching an edge of the graphic form to be inspected on the basis of the inspection graphic form to acquire contour information of the graphic form to be inspected.
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