公开(公告)号：US06624894B2

公开(公告)日：2003-09-23

申请号：US09888826

申请日：2001-06-25

申请人： Artur Olszak ,  Joanna Schmit

发明人： Artur Olszak ,  Joanna Schmit

IPC分类号： G01B1102

CPC分类号： G01B11/2441 ,  G01B9/02057 ,  G01B9/02071 ,  G01B9/0209 ,  G01B2290/60 ,  G01J3/45

摘要： A reference signal is used to track the actual behavior of the scanner in an interferometer to produce scanner-position data that can be used to correct errors introduced by scanner nonlinearities and other error sources. A narrow-band light source is advantageously utilized to cover the entire range of operation of the scanner. Because of the independent reference channel, the invention is suitable for implementation with all types of conventional interferometric techniques. The concept is preferably implemented by utilizing an additional light source and the same scanner used for the measurement, so that the OPD varies in synchronization of both the reference-signal and data-collection procedures. Alternatively, a high temporal-coherence filter may be used with the same light source and optical path used for the interferometric measurement.

摘要翻译： 参考信号用于跟踪扫描仪在干涉仪中的实际行为，以产生可用于校正扫描仪非线性和其他错误源引入的误差的扫描仪位置数据。 有利地，窄带光源用于覆盖扫描仪的整个操作范围。 由于独立的参考通道，本发明适用于所有类型的常规干涉技术的实现。 该概念优选地通过利用附加光源和用于测量的相同扫描器来实现，使得OPD在参考信号和数据收集过程的同步上变化。 或者，可以使用与用于干涉测量的相同光源和光路的高时间相干滤波器。

公开(公告)号：US06624893B1

公开(公告)日：2003-09-23

申请号：US09875638

申请日：2001-06-06

申请人： Joanna Schmit ,  Artur Olszak

发明人： Joanna Schmit ,  Artur Olszak

IPC分类号： G01B1102

CPC分类号： G01B11/2441

摘要： Interferometric measurements are carried out in conventional manner to produce a correlogram corresponding to successive scanner steps. An approximation of the actual scan-step size between frames is calculated from multiple-frame intensity data collected around the frame of interest using common irradiance algorithms. The scan-step size so measured is then used in standard PSI, VSI or PSIOTF algorithms, instead of the scanner's nominal phase step. According to one embodiment, the invention utilizes a five-frame PSI algorithm to produce an average scan-step size of four scan steps. According to another embodiment, the phase step between frames is calculated directly utilizing a novel five-frame algorithm that produces an approximation of actual phase step for a given frame, rather than an average value of four steps around the frame. The method requires reduced data processing and can advantageously be applied “on-the fly” as intensity data are acquired during scanning.

摘要翻译： 以常规方式进行干涉测量以产生对应于连续的扫描器步骤的相关图。 使用共同的辐照算法，从感兴趣的帧周围的多帧强度数据计算帧之间的实际扫描步长的近似值。 然后将如此测量的扫描步长用于标准PSI，VSI或PSIOTF算法，而不是扫描仪的标称相位步长。 根据一个实施例，本发明利用五帧PSI算法来产生四个扫描步骤的平均扫描步长。 根据另一个实施例，直接利用新的五帧算法来计算帧之间的相位步长，该算法产生给定帧的实际相位步长的近似值，而不是围绕该帧的四个步长的平均值。 该方法需要减少数据处理，并且可以有利地在扫描期间获取强度数据时“即时”地应用该方法。

公开(公告)号：US06987570B1

公开(公告)日：2006-01-17

申请号：US10109361

申请日：2002-03-28

申请人： Joanna Schmit ,  Artur Olszak

发明人： Joanna Schmit ,  Artur Olszak

IPC分类号： G01B9/02

CPC分类号： G01B11/2441 ,  G01B9/02057 ,  G01B9/02071 ,  G01B9/0209 ,  G01B2290/60 ,  G01J3/45

摘要： Composite height profiles are produced by taking successive interferometric measurements of different sections of a sample surface by sequentially placing them within the field of view of the instrument. A reference signal is used to provide a full history of scanner motion during each measurement scan. The reference signal is independent of the fringes collected for profile-measurement purposes and is used to produce a z-position history of the scan that is independent of scanner nonlinearities and other error sources. As a result, errors caused by scanner nonlinearity and lack of repeatability are removed from the process and it is possible to combine profiles of sections that are spatially disconnected without loss of precision attributable to scanner imperfections.

摘要翻译： 通过将样品表面的不同部分顺序地放置在仪器的视场内，进行连续的干涉测量来产生复合高度分布。 参考信号用于在每次测量扫描期间提供扫描仪运动的完整历史。 参考信号独立于为了剖面测量目的收集的条纹，并用于产生独立于扫描仪非线性和其他误差源的扫描的z位置历史。 结果，扫描仪非线性和缺乏可重复性导致的错误从该过程中消除，并且可以组合在空间上断开的部分的轮廓，而不损失可归因于扫描仪缺陷的精度。

公开(公告)号：US09746315B1

公开(公告)日：2017-08-29

申请号：US14733092

申请日：2015-06-08

申请人： Joanna Schmit ,  Son Hoang Bui ,  Dong Chen ,  Matthew Jarrod Novak

发明人： Joanna Schmit ,  Son Hoang Bui ,  Dong Chen ,  Matthew Jarrod Novak

IPC分类号： G01B9/02 ,  G01B11/24

CPC分类号： G01B11/2441 ,  G02B21/0056 ,  H04N13/254

摘要： Side illumination is combined with scanning interferometry to provide a means for measuring with a single data-acquisition scan surfaces that contain sections suitable for interferometric processing as well as sections that are not suitable because of lack of fringes produced by the measurement. In the sections where no fringes are produced, the irradiance detected during the scan is processed using a depth-from-focus mapping method to yield a corresponding measurement. The result is a complete profilometric measurement of the sample surface with a single scan. In addition, by increasing sample irradiance through side illumination, the structural features of the sample become markedly more visible than when illuminated only by the object beam of the interferometer, which greatly facilitates finding focus and identifying regions of interest for the measurement.

公开(公告)号：US08953171B1

公开(公告)日：2015-02-10

申请号：US13719101

申请日：2012-12-18

申请人： Joanna Schmit ,  Erik Novak

发明人： Joanna Schmit ,  Erik Novak

IPC分类号： G01B11/02 ,  G01B11/22 ,  G01B9/02

CPC分类号： G01N21/954 ,  G01B2210/56 ,  G01N2021/95653 ,  H05K3/0032

摘要： The bottom surface of a via drilled in a fiber-reinforced PCB is profiled interferometrically with acceptable precision using an objective with sufficiently large numerical aperture to illuminate the bottom under the fibers. The light scattering produced by the inherent roughness of the surface of the via bottom causes diffused light to return to the objective and yield reliable data fringes. Under such appropriate numerical-aperture and surface roughness conditions, the bottom surface of vias can be profiled correctly simply by segmenting the correlograms produced by the scan and processing all fringes that correspond to the bottom surface elevation.

摘要翻译： 通过在纤维增强的PCB中钻出的通孔的底表面以可接受的精度进行成像干涉，使用具有足够大的数值孔径的物镜照射纤维下方的底部。 由通孔底表面的固有粗糙度产生的光散射导致扩散光返回到目标并产生可靠的数据条纹。 在这种适当的数值孔径和表面粗糙度条件下，可以简单地通过分割由扫描产生的相关图并处理与底面高程相对应的所有条纹来正确地形成通孔的底面。

公开(公告)号：US07283250B2

公开(公告)日：2007-10-16

申请号：US10759686

申请日：2004-01-16

申请人： Joanna Schmit ,  Paul R. Unruh ,  Erik L. Novak

发明人： Joanna Schmit ,  Paul R. Unruh ,  Erik L. Novak

IPC分类号： G01B9/02

CPC分类号： G01B11/161

摘要： An interferometric profiler is used to measure object motion by modifying the motion of the scanner so that the phase variation at each scanning step is kept within the acceptable limits of the algorithm used to calculate phase changes. The scanner motion is so manipulated on the basis of prior knowledge about the nature of the object motion, or knowledge obtained by pre-calibration, or by real-time feedback based on current measurements. The object motion is recovered from the scanning information by subtracting the scanner position from the object position as it evolves during the scan.

摘要翻译： 干涉测量分析器用于通过修改扫描仪的运动来测量物体运动，使得每个扫描步骤的相位变化保持在用于计算相位变化的算法的可接受限度内。 基于关于物体运动的性质或通过预校准获得的知识的现有知识或基于当前测量的实时反馈，扫描器运动被如此操纵。 通过在扫描期间从对象位置减去扫描仪位置，从扫描信息中恢复物体运动。

公开(公告)号：US20050280829A1

公开(公告)日：2005-12-22

申请号：US10869138

申请日：2004-06-16

申请人： Paul Unruh ,  Joanna Schmit ,  Erik Novak

发明人： Paul Unruh ,  Joanna Schmit ,  Erik Novak

IPC分类号： G01B11/02 ,  G01B11/06

CPC分类号： G01B11/0675

摘要： Two threshold parameters are used to identify the intensity modulation peaks corresponding to the interfaces of the two sides of a thin film with the adjacent media. The first parameter is used to distinguish modulation data from noise and is set on the basis of actual background noise data measured during the interferometric scan. The second parameter is used to separate actual contrast data from signals of relatively high modulation that satisfy the first parameter but do not in fact result from interference fringes. Data that satisfy both parameters are considered valid modulation data and the peak of each modulation envelope is then calculated using conventional means. The thickness of the film at each pixel is obtained by dividing the scanning distance corresponding to the two peaks by the group index of refraction of the film material.

摘要翻译： 使用两个阈值参数来识别与相邻介质的薄膜的两侧的界面相对应的强度调制峰值。 第一个参数用于区分调制数据和噪声，并根据干涉扫描期间测量的实际背景噪声数据设置。 第二个参数用于将实际的对比度数据与满足第一个参数的相对较高的调制信号进行分离，但实际上并不是由干扰条纹引起的。 满足这两个参数的数据被认为是有效的调制数据，然后使用常规方法计算每个调制包络的峰值。 通过将对应于两个峰的扫描距离除以膜材料的折射率折射率来获得每个像素处的膜的厚度。

公开(公告)号：US20050157306A1

公开(公告)日：2005-07-21

申请号：US10759686

申请日：2004-01-16

申请人： Joanna Schmit ,  Paul Unruh ,  Erik Novak

发明人： Joanna Schmit ,  Paul Unruh ,  Erik Novak

IPC分类号： G01B11/16 ,  G01B9/02

CPC分类号： G01B11/161

摘要： An interferometric profiler is used to measure object motion by modifying the motion of the scanner so that the phase variation at each scanning step is kept within the acceptable limits of the algorithm used to calculate phase changes. The scanner motion is so manipulated on the basis of prior knowledge about the nature of the object motion, or knowledge obtained by pre-calibration, or by real-time feedback based on current measurements. The object motion is recovered from the scanning information by subtracting the scanner position from the object position as it evolves during the scan.

摘要翻译： 干涉测量分析器用于通过修改扫描仪的运动来测量物体运动，使得每个扫描步骤的相位变化保持在用于计算相位变化的算法的可接受限度内。 基于关于物体运动的性质或通过预校准获得的知识的现有知识或基于当前测量的实时反馈，扫描器运动被如此操纵。 通过在扫描期间从对象位置减去扫描仪位置，从扫描信息中恢复物体运动。

公开(公告)号：US06493093B2

公开(公告)日：2002-12-10

申请号：US09833880

申请日：2001-04-12

申请人： Akiko Harasaki ,  Joanna Schmit

发明人： Akiko Harasaki ,  Joanna Schmit

IPC分类号： G01B1102

CPC分类号： G01B11/2441 ,  G01B9/02057 ,  G01B9/02078 ,  G01B9/02083 ,  G01B9/0209

摘要： Bat wings are removed at step discontinuities within the coherence length of the light source of a vertical-scanning interferometer. A first height profile is obtained from a correlogram using a coherence-sensing technique. A second height profile is obtained from phase measurements at the best-focus frame position of the scanner. The two profiles are compared, and phase ambiguities are removed in conventional manner. In addition, during unwrapping the differences in height between two adjacent pixels obtained both by coherence sensing and by phase measurements are compared to f&lgr;/4. Where the inter-pixel height difference calculated by coherence sensing is smaller and the inter-pixel height difference calculated by phase is larger than f&lgr;/4, the phase measurement is corrected by 2&pgr; increments until both coherence and phase inter-pixel height differences are within f&lgr;/4. This additional step removes bat-wing effects from profiles obtained by phase measurement.

摘要翻译： 在垂直扫描干涉仪的光源的相干长度内的步骤不连续处去除蝙蝠翅膀。 使用相干感测技术从相关图获得第一高度分布。 从扫描仪的最佳对焦帧位置的相位测量获得第二高度分布。 比较两个轮廓，并以常规方式去除相位模糊度。 另外，在展开期间，通过相干感测和相位测量获得的两个相邻像素之间的高度差与flambd / 4进行比较。 在通过相干感测计算的像素间高差比较小并且由相位计算出的像素间高差大于flambd / 4的情况下，相位测量被校正2pi增量，直到相干和相位之间的像素间高差都在 flambd / 4。 此附加步骤通过相位测量从剖面中删除蝙蝠翼效应。

公开(公告)号：US09372079B1

公开(公告)日：2016-06-21

申请号：US14582534

申请日：2014-12-24

申请人： Tay-Chang Wu ,  Jaime Duran ,  John Christopher Boney ,  Shawn David McDermed ,  Joanna Schmit ,  Son Hoang Bui ,  Matthew Jarrod Novak

发明人： Tay-Chang Wu ,  Jaime Duran ,  John Christopher Boney ,  Shawn David McDermed ,  Joanna Schmit ,  Son Hoang Bui ,  Matthew Jarrod Novak

IPC分类号： G01B5/008 ,  G01B21/04 ,  G01B11/00

CPC分类号： G01B21/042 ,  G01B3/30 ,  G01B11/005 ,  G01B11/2441

摘要： A coordinate measuring machine is calibrated by taking optical measurements of an optical flat that includes a grating placed on its surface. The arm of the CMM capable of multi-directional translation in relation to an object is fitted with a white-light interferometric objective and optical measurements are taken of the flat while translating the objective (or the flat) in the coordinate direction subject to calibration. The objective may serve also as the probe of the CMM.

摘要翻译： 通过对包括放置在其表面上的光栅的光学平面进行光学测量来校准坐标测量机。 能够相对于物体进行多向平移的CMM的臂装配有白光干涉物镜，并且在校准时沿坐标方向平移物镜（或平面）进行光学测量。 目标也可以作为CMM的探测器。