公开(公告)号：US20130206593A1

公开(公告)日：2013-08-15

申请号：US13882233

申请日：2011-12-15

Applicant: Atsutoshi Arakawa ,  Yuki Ikeda

Inventor： Atsutoshi Arakawa ,  Yuki Ikeda

IPC: C23C14/34

CPC classification number: C23C14/3414 ,  G11B5/851 ,  H01F41/183

Abstract: Provided is a ferromagnetic material sputtering target comprising a metal having a composition that Cr is contained in an amount of 20 mol % or less, Ru is contained in an amount of 0.5 mol % or more and 30 mol % or less, and the remainder is Co, wherein the target has a structure including a base metal (A) and, within the base metal (A), a Co—Ru alloy phase (B) containing 35 mol % or more of Ru. The present invention provides a ferromagnetic material sputtering target that can improve leakage magnetic flux to allow stable discharge with a magnetron sputtering apparatus.

Abstract translation: 本发明提供一种含有金属含量为20摩尔％以下的组成的金属的铁磁材料溅射靶，其含量为0.5摩尔％以上且30摩尔％以下，余量为 Co，其中所述靶具有包括贱金属（A）和所述贱金属（A）内的包含35mol％或更多Ru的Co-Ru合金相（B）的结构。 本发明提供一种铁磁材料溅射靶，其能够提高泄漏磁通量，从而通过磁控管溅射装置进行稳定的放电。

公开(公告)号：US20130175166A1

公开(公告)日：2013-07-11

申请号：US13813737

申请日：2011-07-29

Applicant: Takanobu Miyashita ,  Yasuyuki Goto

Inventor： Takanobu Miyashita ,  Yasuyuki Goto

IPC: C23C14/34

CPC classification number: H01J37/3426 ,  B22F1/02 ,  B22F3/12 ,  C22C1/0433 ,  C22C19/05 ,  C22C19/07 ,  C22C32/0026 ,  C22C38/30 ,  C22C2202/02 ,  C23C14/3407 ,  C23C14/3414 ,  G11B5/851 ,  H01F41/183

Abstract: A magnetron sputtering target containing a ferromagnetic metal element includes a magnetic phase containing the ferromagnetic metal element; a plurality of non-magnetic phases containing the ferromagnetic metal element, the plurality of non-magnetic phases containing a different constituent element from each other or containing constituent elements at different ratios from each other; and an oxide phase. Regions of the magnetic phase and the plurality of non-magnetic phases are separated from each other by the oxide phase.

Abstract translation: 包含强磁性金属元素的磁控溅射靶包括含有铁磁金属元素的磁相; 包含铁磁性金属元素的多个非磁性相，所述多个非磁性相包含彼此不同的构成元素或包含彼此不同比例的构成元素; 和氧化物相。 磁相和多个非磁性相的区域通过氧化物相彼此分离。

公开(公告)号：US20130168240A1

公开(公告)日：2013-07-04

申请号：US13816043

申请日：2011-08-05

Applicant: Shin-ichi Ogino ,  Yuichiro Nakamura

Inventor： Shin-ichi Ogino ,  Yuichiro Nakamura

IPC: C23C14/34

CPC classification number: C23C14/3414 ,  C23C14/14 ,  G11B5/851 ,  H01F1/068 ,  H01F41/183 ,  H01J37/3405 ,  H01J37/3426 ,  H01J37/3429

Abstract: An Fe—Pt-based ferromagnetic material sputtering target comprising a metal and a metal oxide, wherein the metal has a composition in which Pt is contained in an amount of 5 mol % or more and 60 mol % or less and the remainder is Fe. An object of the present invention is to provide a ferromagnetic material sputtering target, which enables to form a magnetic recording layer composed of a magnetic phase such as an Fe—Pt alloy, and a non-magnetic phase to isolate the magnetic phase, and in which a metal oxide is used as one of the materials for the non-magnetic phase. Provided is a ferromagnetic material sputtering target wherein an inadvertent release of the metal oxide during sputtering and particle generation due to abnormal electrical discharge starting at a void inherently included in the target are suppressed, the adherence between the metal oxide and the matrix alloy is enhanced, and its density is increased.

Abstract translation: 包含金属和金属氧化物的Fe-Pt系铁磁材料溅射靶，其中，所述金属的含量为5摩尔％以上且60摩尔％以下且余量为Fe的组成。 本发明的目的是提供一种铁磁材料溅射靶，其能够形成由诸如Fe-Pt合金的磁相和非磁性相组成的磁记录层以隔离磁相，并且在 其中使用金属氧化物作为非磁性相的材料之一。 本发明提供一种强磁性材料溅射靶，其特征在于，抑制溅射时的金属氧化物的无意的释放以及由于靶内固有地形成的空穴而产生的异常放电而产生的粒子，从而提高了金属氧化物与基体合金之间的粘附性， 其密度增加。

公开(公告)号：US20130098760A1

公开(公告)日：2013-04-25

申请号：US13808172

申请日：2011-02-02

Applicant: Hideo Takami ,  Atsushi Nara ,  Shin-ichi Ogino

Inventor： Hideo Takami ,  Atsushi Nara ,  Shin-ichi Ogino

IPC: C23C14/14

CPC classification number: C23C14/14 ,  C23C14/0617 ,  C23C14/0688 ,  C23C14/083 ,  C23C14/3414 ,  G11B5/851 ,  H01J37/3426

Abstract: Provided is a sputtering target containing SiO2 for a magnetic recording film, wherein a ratio of the peak intensity of cristobalites, which are crystallized SiO2, to the background intensity (cristobalite peak intensity/background intensity) in an X-ray diffraction is 1.40 or less. The present invention aims to obtain a sputtering target for a magnetic recording film capable of inhibiting the formation of cristobalites in the target which cause the generation of particles during sputtering, and shortening the burn-in time.

Abstract translation: 提供了一种包含用于磁记录膜的SiO 2的溅射靶，其中结晶SiO 2的方石英的峰强度与X射线衍射中的背景强度（方石英峰强度/背景强度）的比率为1.40以下 。 本发明的目的在于获得能够抑制溅射中产生颗粒的靶中方英石形成的磁记录膜的溅射靶，并且缩短了老化时间。

公开(公告)号：US08406918B2

公开(公告)日：2013-03-26

申请号：US12643929

申请日：2009-12-21

Applicant: Yi Chun Tan ,  Huat Seng Khor ,  Eang Keong Tan ,  Chun Beng Ang ,  Chay Hoon Tang

Inventor： Yi Chun Tan ,  Huat Seng Khor ,  Eang Keong Tan ,  Chun Beng Ang ,  Chay Hoon Tang

IPC: G06F7/00 ,  G06F17/00 ,  G05B21/00 ,  G01C17/38 ,  G01B5/28 ,  G01P11/00

CPC classification number: G11B5/851 ,  G11B7/266 ,  G11B17/22

Abstract: A disk carrier for teaching disk positioning in a substrate changing system. The disk carrier composed of a panel having a disk opening configured to receive a disk and a plurality of beam sensors disposed around the disk opening to project beams parallel to a surface of the disk when secured within the disk opening. The plurality of beam sensors may be composed of at least one beam sensor on each of a front side and rear side of the panel.

Abstract translation: 用于在基板更换系统中教导盘定位的盘载体。 由具有构造成接收盘的盘开口的面板和围绕盘开口设置的多个光束传感器构成的盘载体，以在固定在盘开口内时平行于盘表面突出的光束。 多个光束传感器可以由面板的前侧和后侧中的每一个上的至少一个光束传感器构成。

公开(公告)号：US20130040167A1

公开(公告)日：2013-02-14

申请号：US13522261

申请日：2011-01-12

Applicant: Perumal Alagarsamy ,  Yukiko Takahashi ,  Kazuhiro Hono ,  Tomoko Seki

Inventor： Perumal Alagarsamy ,  Yukiko Takahashi ,  Kazuhiro Hono ,  Tomoko Seki

IPC: G11B5/738 ,  G11B5/851 ,  G11B5/667

CPC classification number: G11B5/851 ,  G11B5/653 ,  G11B5/7379

Abstract: It is aimed to provide a perpendicular magnetic recording medium capable of dealing with an ultra-higher recording density than before and its manufacturing method.The present invention concerns a perpendicular magnetic recording medium including at least a seed layer made of noncrystalline ceramic, a crystalline orientation control layer and a magnetic layer made of a material mainly containing a FePt alloy in this order on a substrate. This perpendicular magnetic recording medium is suitably manufactured by forming at least the seed layer, the orientation control layer and the magnetic layer made of the material mainly containing the FePt alloy in this order on the substrate by sputtering, wherein the magnetic layer is formed at a predetermined temperature of 500° C. or less.

Abstract translation: 旨在提供一种能够处理超过以前的超高记录密度的垂直磁记录介质及其制造方法。 本发明涉及一种垂直磁记录介质，其至少包括由非晶体陶瓷制成的晶种层，晶体取向控制层和由主要包含FePt合金的材料制成的磁性层，所述材料依次在基板上。 这种垂直磁记录介质通过溅射在基板上至少形成由主要含有FePt合金的材料制成的晶种层，取向控制层和磁性层，其中磁性层形成在 预定温度为500℃以下。

公开(公告)号：US20130001079A1

公开(公告)日：2013-01-03

申请号：US13613406

申请日：2012-09-13

Applicant: Atsushi Sato

Inventor： Atsushi Sato

IPC: C23C14/14

CPC classification number: G11B5/851 ,  C22C19/07 ,  C22C49/08 ,  C22C49/14 ,  C22C2202/02 ,  C23C14/3414 ,  H01F41/183

Abstract: A sputtering target of nonmagnetic-particle-dispersed ferromagnetic material is provided having a phase (A) such that nonmagnetic particles are dispersed in a ferromagnetic material formed from a Co—Cr alloy containing 5 at % or more and 20 at % or less of Cr and Co as the remainder thereof, and schistose textures (B) with a short side of 30 to 100 μm and a long side of 50 to 300 μm formed from a Co—Cr alloy phase in the phase (A); wherein each of the foregoing nonmagnetic particles has such a shape and size that the particle is smaller than all hypothetical circles with a radius of 1 μm around an arbitrary point within the nonmagnetic particle, or a shape and size with at least two contact points or intersection points between the respective hypothetical circles and the interface of the ferromagnetic material and the nonmagnetic material.

Abstract translation: 提供了非磁性粒子分散的铁磁材料的溅射靶，其具有相（A），使得非磁性粒子分散在由含有5原子％以上且20原子％以下的Co-Cr合金形成的铁磁材料中 和Co作为其余部分，并且在相（A）中由Co-Cr合金相形成的短边为30〜100μm，长边为50〜300μm的薄片纹理（B） 其中每个上述非磁性颗粒具有这样的形状和尺寸，即颗粒小于在非磁性颗粒内的任意点附近具有半径为1μm的所有假想圆，或具有至少两个接触点或交点的形状和尺寸 各个假想圆之间的点和铁磁材料和非磁性材料的界面。

公开(公告)号：US08208238B1

公开(公告)日：2012-06-26

申请号：US12053138

申请日：2008-03-21

Applicant: Paul Stephen Mcleod ,  Charles F. Brucker

Inventor： Paul Stephen Mcleod ,  Charles F. Brucker

IPC: H01H47/00

CPC classification number: G11B5/852 ,  G11B5/851

Abstract: An apparatus for reorienting the magnetic anisotropy of the soft underlay of a magnetic recording disc having a diameter less than that of the pallet, which operates by first heating the disc, then using a heat transfer plate to cool the disc in the presence of a magnetic field having a radial direction emanating from the center of the magnetic recording disc.

Abstract translation: 一种用于重新定向直径小于托盘的磁记录盘的软底层的磁各向异性的装置，其通过首先加热盘来操作，然后使用传热板在磁性存在下冷却盘 磁场具有从磁记录盘的中心发出的径向方向。

公开(公告)号：US08197891B2

公开(公告)日：2012-06-12

申请号：US12123809

申请日：2008-05-20

Applicant: Shunji Takenoiri ,  Yasushi Sakai

Inventor： Shunji Takenoiri ,  Yasushi Sakai

IPC: G11B5/84

CPC classification number: G11B5/851 ,  G11B5/64 ,  G11B5/65 ,  G11B5/656

Abstract: A perpendicular magnetic recording medium is disclosed in which each magnetic crystal grain in the magnetic recording layer has a multilayer structure and has a configuration like a truncated cone shape, in which the crystal grain of the final layer deposited in the film surface side at the final stage is smaller than the diameter of the crystal grain in the initial layer deposited on the substrate side at the initial stage. The invention improves S/N (signal output to noise ratio) by enhancing signal output and reducing noises. The medium is produced by a simple manufacturing method suitable for mass production, and provides a medium of high recording density by improving recording resolution.

Abstract translation: 公开了一种垂直磁记录介质，其中磁记录层中的每个磁晶粒具有多层结构，并具有类似截头圆锥形的结构，其中最终层的晶粒在最终的膜表面侧沉积 阶段小于在初始阶段沉积在基板侧的初始层中的晶粒的直径。 本发明通过增强信号输出和降低噪声来改善S / N（信号输出信噪比）。 该介质是通过适合批量生产的简单制造方法生产的，并通过提高记录分辨率提供高记录密度的介质。

公开(公告)号：US20120114976A1

公开(公告)日：2012-05-10

申请号：US13273420

申请日：2011-10-14

Applicant: Sheang-Hsien Rou ,  Wen-Tsang Liu ,  Shou-Hsien Lin

Inventor： Sheang-Hsien Rou ,  Wen-Tsang Liu ,  Shou-Hsien Lin

IPC: G11B5/64 ,  C23C14/08 ,  C23C14/34

CPC classification number: G11B5/851 ,  C23C14/185 ,  C23C14/3414 ,  G11B5/65

Abstract: The present invention provides a sputtering target essentially consisting of cobalt-platinum-copper oxide-oxide (CoPt—CuO-oxide), cobalt-chrome-platinum-copper oxide-oxide (CoCrPt—CuO-oxide), or cobalt-chrome-platinum-boron-copper oxide-oxide (CoCrPtB—CuO-oxide) with addition of CuO. The sputtering target is applied to a recording material of a magnetic recording medium. The thickness of the oxide grain boundary in the sputtering target is reduced, resulting from the decreased amount of oxide in the sputtering target, to allow a sputtering process utilizing the same to become more stable. Further, the volume of the magnetic grains per unit area is increased, whereby a better thermal stability and a high recording density are acquired.

Abstract translation: 本发明提供了一种溅射靶，其主要由钴 - 氧化铜 - 氧化铜（CoPt-CuO-氧化物），钴 - 铬 - 氧化铜 - 氧化铜（CoCrPt-CuO-氧化物）或钴 - 铬 - 铂 - 氧化硼 - 氧化铜（CoCrPtB-CuO-氧化物）。 将溅射靶施加到磁记录介质的记录材料上。 溅射靶中的氧化物晶界的厚度由于溅射靶中的氧化物量的减少而减少，从而允许利用溅射靶的溅射工艺变得更稳定。 此外，每单位面积的磁性颗粒的体积增加，从而获得更好的热稳定性和高记录密度。