Invention Application
- Patent Title: SPUTTERING TARGET FOR MAGNETIC RECORDING FILM, AND PROCESS FOR PRODUCING SAME
- Patent Title (中): 用于磁记录膜的溅射靶及其制造方法
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Application No.: US13808172Application Date: 2011-02-02
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Publication No.: US20130098760A1Publication Date: 2013-04-25
- Inventor: Hideo Takami , Atsushi Nara , Shin-ichi Ogino
- Applicant: Hideo Takami , Atsushi Nara , Shin-ichi Ogino
- Applicant Address: JP Tokyo
- Assignee: JX NIPPON MINING & METALS CORPORATION
- Current Assignee: JX NIPPON MINING & METALS CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2010-171038 20100729; JP2010-283678 20101220
- International Application: PCT/JP2011/052125 WO 20110202
- Main IPC: C23C14/14
- IPC: C23C14/14

Abstract:
Provided is a sputtering target containing SiO2 for a magnetic recording film, wherein a ratio of the peak intensity of cristobalites, which are crystallized SiO2, to the background intensity (cristobalite peak intensity/background intensity) in an X-ray diffraction is 1.40 or less. The present invention aims to obtain a sputtering target for a magnetic recording film capable of inhibiting the formation of cristobalites in the target which cause the generation of particles during sputtering, and shortening the burn-in time.
Public/Granted literature
- US09567665B2 Sputtering target for magnetic recording film, and process for producing same Public/Granted day:2017-02-14
Information query
IPC分类: