公开(公告)号：US20110151279A1

公开(公告)日：2011-06-23

申请号：US12641251

申请日：2009-12-17

申请人： Donald G. Allen ,  Amanda Baer ,  Yingjian Chen ,  Andrew Chiu ,  Liubo Hong ,  Wen-Chien D. Hsiao ,  Edward H.P. Lee ,  Fenglin Liu ,  Aron Pentek ,  Katalin Pentek ,  Kyusik Shin ,  Yi Zheng ,  Qiping Zhong ,  Honglin Zhu

发明人： Donald G. Allen ,  Amanda Baer ,  Yingjian Chen ,  Andrew Chiu ,  Liubo Hong ,  Wen-Chien D. Hsiao ,  Edward H.P. Lee ,  Fenglin Liu ,  Aron Pentek ,  Katalin Pentek ,  Kyusik Shin ,  Yi Zheng ,  Qiping Zhong ,  Honglin Zhu

IPC分类号： G11B5/33

CPC分类号： G11B5/3163 ,  G11B5/112 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/314 ,  G11B5/3143 ,  G11B5/3146 ,  G11B5/315 ,  Y10T428/11 ,  Y10T428/1171

摘要： A magnetic write head having a tapered trailing edge and having a magnetic layer formed over a trailing edge of the write pole at a location recessed from the ABS, the magnetic layer being separated from the trailing edge of the write pole by a thin non-magnetic layer. The thin non-magnetic layer is preferably sufficiently thin that the magnetic layer can function as a portion of the write pole in a region removed from the ABS. A trailing magnetic shield is formed over the write pole and is separated from the write pole by a non-magnetic trailing gap layer. A non-magnetic spacer layer can be formed over the magnetic layer to provide additional separation between the magnetic layer and the trailing magnetic shield.

摘要翻译： 一种具有锥形后缘并具有磁性层的磁性写头，该磁性层形成在从ABS的凹陷处的写入极的后缘上，该磁性层通过薄的非磁性的方式与写入极的后缘分离 层。 薄的非磁性层优选地足够薄，使得磁性层可以在从ABS去除的区域中用作写入极的一部分。 尾磁屏蔽形成在写极上，并且通过非磁性拖尾间隙层与写极分离。 可以在磁性层之上形成非磁性间隔层，以在磁性层和尾部磁屏蔽之间提供额外的间隔。

公开(公告)号：US20110134567A1

公开(公告)日：2011-06-09

申请号：US12634456

申请日：2009-12-09

申请人： Yingjian Chen ,  Liubo Hong ,  Yimin Hsu ,  Edward Hin Pong Lee ,  Katalin Pentek

发明人： Yingjian Chen ,  Liubo Hong ,  Yimin Hsu ,  Edward Hin Pong Lee ,  Katalin Pentek

IPC分类号： G11B5/10

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315

摘要： A magnetic write head having a write pole with a tapered trailing edge. The write head has a non-magnetic step layer and a non-magnetic bump formed on the front edge of the magnetic step layer. A non-magnetic trailing gap layer is formed over the tapered trailing edge of the write pole and over the non-magnetic bump and over the non-magnetic step layer. A magnetic trailing shield is formed over at least a portion of the non-magnetic gap layer.

摘要翻译： 一种具有具有锥形后缘的写极的磁写头。 写头具有形成在磁性阶梯层的前边缘上的非磁性阶梯层和非磁性凸块。 非磁性拖尾间隙层形成在写磁极的锥形后缘和非磁性凸块之上以及非磁性阶梯层之上。 在非磁隙层的至少一部分上形成有磁性后屏蔽。

公开(公告)号：US07342752B1

公开(公告)日：2008-03-11

申请号：US10769239

申请日：2004-01-31

申请人： Wei Zhang ,  Yingjian Chen ,  Satoru Araki ,  Mohamad T Krounbi

发明人： Wei Zhang ,  Yingjian Chen ,  Satoru Araki ,  Mohamad T Krounbi

IPC分类号： G11B5/39

CPC分类号： G11B5/3909 ,  B82Y10/00 ,  B82Y25/00 ,  G11B5/3163 ,  G11B5/3932 ,  G11B2005/3996

摘要： A magnetoresistive read head includes a magnetoresistive sensor and a bias structure adjacent to the magnetoresistive sensor. The bias structure provides a magnetostatic bias field for the magnetoresistive sensor. The bias structure includes an underlayer, a bias layer over the underlayer, and at least one dusting layer directly below at least one of the underlayer or the bias layer.

摘要翻译： 磁阻读取头包括磁阻传感器和与磁阻传感器相邻的偏置结构。 偏置结构为磁阻传感器提供静磁偏置场。 偏置结构包括底层，底层上的偏置层，以及直接位于底层或偏置层中的至少一个的至少一个除尘层。

公开(公告)号：US07286329B1

公开(公告)日：2007-10-23

申请号：US10788656

申请日：2004-02-27

申请人： Yingjian Chen ,  Wei Zhang ,  Mohamad T. Krounbi ,  Satoru Araki ,  Jinqiu Zhang

发明人： Yingjian Chen ,  Wei Zhang ,  Mohamad T. Krounbi ,  Satoru Araki ,  Jinqiu Zhang

IPC分类号： G11B5/39

CPC分类号： G01R31/318357 ,  G11B5/3932

摘要： A magnetic sensor is disclosed having a shallow contiguous junction. Such a sensor is can greatly increase yield for mass-produced heads, especially for large wafers. The magnetic bias layers can be aligned with a free layer of the sensor, improving performance. Milling may be terminated prior to penetration of an antiferromagnetic layer, so that for example the antiferromagnetic layer may extend significantly beyond the free and pinned layers of the sensor.

摘要翻译： 公开了一种具有浅连续结的磁传感器。 这种传感器可以大大提高批量生产头部的产量，特别是对于大型晶片。 磁偏置层可以与传感器的自由层对准，从而提高性能。 铣削可以在穿透反铁磁层之前终止，使得例如反铁磁层可以显着地延伸超过传感器的自由和固定层。

公开(公告)号：US06873494B2

公开(公告)日：2005-03-29

申请号：US10134799

申请日：2002-04-29

申请人： Yingjian Chen ,  Xiaozhong Dang

发明人： Yingjian Chen ,  Xiaozhong Dang

IPC分类号： G11B5/31 ,  G11B5/39 ,  G11B5/40

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G11B5/3106 ,  G11B5/313 ,  G11B5/3133 ,  G11B5/3153 ,  G11B5/3163 ,  G11B5/40 ,  G11B2005/3996

摘要： An inductive write head structure incorporating a high moment film in conjunction with at least one pole (e.g., the bottom pole) for use with magnetic storage media and a process for producing the same in which a lift-off photoresist mask is used prior to the deposition of the high moment sputtered film. Following the lift-off process, the high moment film remains on the bottom pole (“P1”) pedestal (in the case of a PDZT type write head) or on the P1 itself (in the case of a Stitched Pole write head). The edge of the lift-off sputtered film is then covered by cured photoresist insulation which is placed at a distance away from the air bearing surface (“ABS”). The coverage of insulation at the edge of the sputtered film is desirable in order to avoid forming a topographic step which may have undesired consequences in the subsequent top pole formation processes.

摘要翻译： 结合至少一个极（例如，底极）与磁存储介质一起使用的高力矩膜的感应写头结构及其制造方法，其中在剥离光刻胶掩模之前使用剥离光致抗蚀剂掩模 沉积高速溅射膜。 在剥离过程之后，高力矩胶片保留在底极（“P1”）底座上（在PDZT型写入头的情况下）或P1本身（在缝合杆写入头的情况下）。 然后，剥离溅射膜的边缘被固定的光致抗蚀剂绝缘体覆盖，该固化的光致抗蚀剂绝缘体被放置在远离空气支承表面（“ABS”）的一定距离处。 在溅射膜的边缘处的绝缘层的覆盖是期望的，以避免形成在随后的顶极形成过程中可能具有不期望的后果的地形步骤。

公开(公告)号：US06724572B1

公开(公告)日：2004-04-20

申请号：US10086756

申请日：2002-02-28

申请人： Kroum Stoev ,  Yugang Wang ,  Francis Liu ,  Yingjian Chen ,  Xiaozhong Dang

发明人： Kroum Stoev ,  Yugang Wang ,  Francis Liu ,  Yingjian Chen ,  Xiaozhong Dang

IPC分类号： G11B5147

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G11B5/187 ,  G11B5/23 ,  G11B5/3103 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3146 ,  G11B5/332 ,  G11B5/3909 ,  G11B5/3967 ,  G11B2005/3996

摘要： In one aspect, an inductive transducer is disclosed having a leading pole layer and a leading pole tip, with the pole layer being further removed than the pole tip from a media-facing surface. In another aspect, an inductive transducer is disclosed having a magnetic pedestal disposed between a leading pole layer and a leading pole tip, with at least one of the pedestal and pole layer being further removed than the pole tip from a media-facing surface. In another aspect, a leading pole layer or pedestal may have a surface that slopes away from the media-facing surface with increasing distance forward from the leading pole tip.

摘要翻译： 在一个方面，公开了一种电感式换能器，其具有引导极层和引导极尖端，其中极层比面向介质的表面比极尖更进一步去除。 另一方面，公开了一种电感换能器，其具有设置在引导极层和前导极尖端之间的磁性基座，其中基座和极层中的至少一个比来自面向介质的表面的极尖更进一步地去除。 在另一方面，前导极层或基座可以具有远离所述面向介质的表面的表面，所述表面具有与所述引导极端部向前的距离增加的距离。

公开(公告)号：US06353511B1

公开(公告)日：2002-03-05

申请号：US09335155

申请日：1999-06-15

申请人： Zhupei Shi ,  Lien-Chang Wang ,  Bill Crue ,  Yingjian Chen ,  Syed Hossain

发明人： Zhupei Shi ,  Lien-Chang Wang ,  Bill Crue ,  Yingjian Chen ,  Syed Hossain

IPC分类号： G11B531

CPC分类号： G11B5/3967 ,  G11B5/3109 ,  G11B5/3113 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3153 ,  G11B5/3163 ,  G11B5/455

摘要： A preferred embodiment provides a thin film write head having upper and lower pole structures each having pedestal pole tips formed with CoNiFe. The pedestal pole tips may have from about 60% to about 70% Co and from about 10% to about 15% Ni. The upper pole structure of the preferred embodiment has a laminated yoke portion having upper and lower layers. The lower layer is stitched to the pedestal pole tip of the upper pole structure and comprises FeXN, where X is selected from the group consisting of Rh, Ta, Hf, Al, Zr, Ti, Ru, Si, Cr, V, Si, Sr, Nb, Mo, Ru, and Pd. The upper layer comprises NiFe preferably having from about 15% to about 55% of Fe. It is preferred to define the lower layer of the yoke by etching FeXN material using the upper layer as a hard mask. In a preferred method and embodiment, the top surfaces of the conductor coil and the upper pedestal pole tip are planarized with an inorganic capping layer formed thereover to insulate the conductor coil from the yoke and to provide a low apex angle to form the yoke over.

摘要翻译： 优选实施例提供一种具有上和下极结构的薄膜写头，每个具有由CoNiFe形成的基座极尖。 基座极尖可以具有约60％至约70％的Co和约10％至约15％的Ni。 优选实施例的上极结构具有具有上层和下层的层叠轭部分。 下层被缝合到上极结构的基座极端，并且包括FeXN，其中X选自Rh，Ta，Hf，Al，Zr，Ti，Ru，Si，Cr，V，Si， Sr，Nb，Mo，Ru和Pd。 上层包含优选具有约15％至约55％Fe的NiFe。 优选通过使用上层作为硬掩模蚀刻FeXN材料来限定轭的下层。 在优选的方法和实施例中，导体线圈和上基座极尖的顶表面与形成在其上的无机覆盖层平坦化，以使导体线圈与轭绝缘，并提供低顶角以形成轭。

公开(公告)号：US08801943B2

公开(公告)日：2014-08-12

申请号：US13193520

申请日：2011-07-28

申请人： Shiwen Huang ,  Fenglin Liu ,  Qiping Zhong ,  Kyusik Shin ,  Yingjian Chen

发明人： Shiwen Huang ,  Fenglin Liu ,  Qiping Zhong ,  Kyusik Shin ,  Yingjian Chen

IPC分类号： B44C1/22

CPC分类号： G11B5/3116 ,  G11B5/3163

摘要： The present disclosure describes a method for manufacturing a full wraparound shield damascene write head through the implementation of a three layered (tri-layered) hard mask. According to an embodiment of the invention, the various layers of hard mask are used for different purposes during the formation of a write head. The wraparound shield head of the present invention exhibits improved physical characteristics that further result in improved performance characteristics. Use of the hard mask layers according to the present invention allows for use of manufacturing processes that can be more closely controlled than those processes used in other processes. For example, smaller dimension lithographic techniques can be used. Also, reliance on certain CMP processes is not necessary where the use of CMP processes is not as well-controlled as deposition or lithographic techniques as is possible using the present invention.

摘要翻译： 本公开描述了通过实施三层（三层）硬掩模制造全封装屏蔽镶嵌写头的方法。 根据本发明的实施例，在形成写入头期间，各种硬掩模层用于不同的目的。 本发明的环绕式屏蔽头表现出改进的物理特性，进一步导致改善的性能特征。 根据本发明的硬掩模层的使用允许使用可以比其它工艺中使用的那些方法更加严格地控制的制造工艺。 例如，可以使用较小尺寸的光刻技术。 此外，在使用CMP工艺不如使用本发明可能的沉积或光刻技术那样不受控制的情况下，对某些CMP工艺的依赖是不必要的。

公开(公告)号：US08508886B2

公开(公告)日：2013-08-13

申请号：US13247883

申请日：2011-09-28

申请人： Yingjian Chen ,  Shiwen Huang ,  Edward Hin Pong Lee ,  Mun Hyoun Park ,  Kyusik Shin ,  Yuming Zhou

发明人： Yingjian Chen ,  Shiwen Huang ,  Edward Hin Pong Lee ,  Mun Hyoun Park ,  Kyusik Shin ,  Yuming Zhou

IPC分类号： G11B5/31

CPC分类号： G11B5/3116 ,  G11B5/315 ,  Y10T428/11 ,  Y10T428/1171

摘要： A write head for use in a magnetic disk drive and methods of manufacturing the same. When a non-magnetic reactive ion etching (RIE) stop layer is used in a damascene main pole fabrication process, the leading edge shield and the side shield have a magnetic separation. By replacing a non-magnetic RIE stop layer with a magnetic RIE stop layer, no removal of the RIE stop layer around the main pole is necessary. Additionally, the leading edge shield and the side shield will magnetically join together without extra processing as there will be no magnetic separation between the leading edge shield and the side shield.

摘要翻译： 用于磁盘驱动器的写入头及其制造方法。 当在非镶嵌主极制造工艺中使用非磁性反应离子蚀刻（RIE）停止层时，前缘屏蔽和侧面屏蔽层具有磁分离。 通过用磁RIE停止层代替非磁性RIE停止层，不需要在主极周围去除RIE停止层。 此外，前缘屏蔽和侧屏蔽将磁性地结合在一起而不需要额外的处理，因为前缘屏蔽和侧屏蔽之间将不会有磁性分离。

公开(公告)号：US08470186B2

公开(公告)日：2013-06-25

申请号：US12954458

申请日：2010-11-24

申请人： Yingjian Chen ,  Shiwen Huang ,  Fenglin Liu ,  Kyusik Shin

发明人： Yingjian Chen ,  Shiwen Huang ,  Fenglin Liu ,  Kyusik Shin

IPC分类号： B44C1/22

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/23 ,  G11B5/315 ,  G11B5/3163

摘要： A perpendicular write head having a wrap around shield and a conformal side gap. In fabricating the write head, the leading edge shield may be chemical mechanical polished down to a level that is substantially even with a chemical mechanical polishing stop layer. Because the leading edge shield and the chemical mechanical polishing stop layer are used as RIE stop for trench RIE, a fully conformal side shield may be formed with a LTE/LES.

摘要翻译： 垂直写头，其具有围绕屏蔽的保护层和保形侧间隙。 在制造写入头时，前缘屏蔽可以被化学机械抛光到基本上均匀的化学机械抛光停止层的水平。 由于前缘屏蔽和化学机械抛光停止层用作沟槽RIE的RIE停止，所以可以用LTE / LES形成完全共形的侧屏蔽。