METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT, METHOD OF MANUFACTURING ELECTRONIC DEVICE, PIEZOELECTRIC ELEMENT, AND ELECTRONIC DEVICE

    公开(公告)号:US20210305492A1

    公开(公告)日:2021-09-30

    申请号:US17345259

    申请日:2021-06-11

    Abstract: A piezoelectric material having a large electromechanical coupling coefficient is provided. The material is manufactured by a method including the steps of: heating a piezoelectric material having a low-temperature side ferroelectric phase A and a high-temperature side ferroelectric phase B between which the phase of the piezoelectric material transitions according to a temperature change, from room temperature to a temperature range higher than T(B→A) at which temperature a change from the ferroelectric phase B to the ferroelectric phase A occurs in a temperature lowering process and lower than T(A→B) at which temperature a change from the ferroelectric phase A to the ferroelectric phase B occurs in a temperature rising process; starting application of an electric field to the piezoelectric material in a state where it is held within this temperature range; and continuing and finishing the electric field application at a temperature lower than T(A→B).

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