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公开(公告)号：US10597780B2
公开(公告)日：2020-03-24
申请号：US15673159
申请日：2017-08-09
IPC分类号： C23C16/46 , H01L21/31 , H01L21/02 , H01L21/67 , H01L21/673
摘要： Described herein is a technique capable of reducing the time necessary for stabilizing the inner temperature of the processing furnace. A substrate processing apparatus may include: a wafer retainer configured to support a plurality of wafers; an upright cylindrical process vessel; a seal cap configured to cover an opening at a lower end of the process vessel; a first heater configured to heat an inside of the process vessel from a lateral side thereof; an insulating unit disposed between the seal cap and the wafer retainer; and a second heater facing at least one of the plurality of wafers and configured to heat the at least one of the plurality of wafers, the second heater including: a pillar penetrating centers of the seal cap and the insulating unit; an annular member connected to and concentric with the pillar; a pair of connecting parts connecting end portions of the annular member to the pillar; and a heating element disposed inside the annular member.
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公开(公告)号：US10587330B2
公开(公告)日：2020-03-10
申请号：US16486968
申请日：2018-02-21
发明人： Daiki Hoshi , Tatsuhiro Nakada , Kei Ito , Hiroki Kato
IPC分类号： H04B7/08 , H04B7/0413 , H04L1/00
摘要： A reception device including reception antennas is provided. In the reception device, a demodulation unit is configured to calculate, for each of a plurality of antenna combinations of the reception antennas, log likelihood ratios of coded bits of error correction code obtained from reception signals of the reception antennas. A mutual information amount calculation unit is configured to calculate an average mutual information amount based on the log likelihood ratios corresponding to each of the antenna combinations. An antenna combination selection unit is configured to output determination information for specifying one of the antenna combinations for which the average mutual information amount is the maximum. A signal selection unit is configured to select the log likelihood ratios corresponding to the specified antenna combination based on the determination information, and a decoding unit is configured to decodes the selected log likelihood ratios.
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33.发明授权公开(公告)号：US10573535B2
公开(公告)日：2020-02-25
申请号：US15659967
申请日：2017-07-26
发明人： Shuhei Saido , Mika Urushihara , Yusaku Okajima
IPC分类号： H01L21/443 , H01L21/67 , H01L21/677 , H01L21/8238
摘要： A technique capable of preventing by-products from adhering to a lower portion of a process vessel utilizes a substrate processing apparatus including: a process vessel having a process chamber; a lid configured to close a lower end opening of the process vessel; a substrate retainer; an insulating structure; a process gas supply mechanism configured to supply a process gas; a purge gas supply unit configured to supply a purge gas to a lower region of the process vessel via a gap between the insulating structure and the lid; and a restrictor disposed in the gap. The restrictor regulates flow of the purge gas such that the flow rate of the purge gas supplied to a first portion of the lower region of the process vessel is greater than a flow rate of the purge gas supplied to a second portion of the lower region of the process vessel.
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公开(公告)号：US20200043174A1
公开(公告)日：2020-02-06
申请号：US16490043
申请日：2017-04-28
发明人： Junichi TOGASHI , Wataru ITO
摘要： An abandoned item detection unit detects an abandoned item shown in an image taken by any of a plurality of imaging devices. A person identification unit specifies the image directly before or directly after the appearance of the abandoned item as an image of abandonment timing, and identifies at least one person shown in the image of abandonment timing as a target person. A person search unit searches for an image showing the target person from among the images respectively taken by any of the plurality of imaging devices. A result display unit outputs a display showing the movement of the target person on the screen of a user terminal on the basis of the imaging device that has taken each image showing the target person and the imaging time at which each image showing the target person was taken.
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公开(公告)号：US20200031373A1
公开(公告)日：2020-01-30
申请号：US16493371
申请日：2018-03-07
发明人： Kana OHKI
摘要： Provided is a technology for monitoring train doors which improves the accuracy of detection of trapping in vehicle doors. A server compares the difference between a static image (reference image 91), from each monitoring camera, of a normal state in which there is no trapping in vehicle doors, said static images being held in the server in advance, and a static image (an observation image 92) first acquired in a prescribed acquisition time. If a difference is present, the difference (difference image 94) between the reference image 91 and the observation image 92 acquired in the acquisition time is acquired. A quadrilateral F which covers the four sides of an object constituting the difference is subsequently rendered, the centre point of the quadrilateral is obtained, it is determined that trapping has occurred if movement of a centre coordinate C1, C2, . . . Cn, i.e. the difference between the centre coordinates C, is lower than a prescribed threshold value, and red frame rendering of video is indicated on a monitor.
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公开(公告)号：US10532401B2
公开(公告)日：2020-01-14
申请号：US15556307
申请日：2016-02-22
发明人： Satoru Ujiie , Takahiro Daikoku
摘要： In a method of manufacturing a liquid-cooling cold plate, cast molding is performed after embedding a metal pipe for supplying a cooling liquid inside a casting mold. Fixing brackets to be attached to the metal pipe is provided to maintain a positional relationship between a plurality of portions of the metal pipe embedded in the casting mold. The casting molding is performed by pouring molten metal into the casting mold while the fixing metal parts are attached to the metal pipe.
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公开(公告)号：US10531094B2
公开(公告)日：2020-01-07
申请号：US15205182
申请日：2016-07-08
IPC分类号： H04N19/14 , H04N19/172 , H04N19/46 , H04N19/117 , H04N19/132 , H04N19/59
摘要： Provided is an image processing device which performs scaling and applies super-resolution in accordance with the complexity of the image. On the compression side, a complexity calculation unit calculates the transmission image complexity, which indicates the complexity of the input image, multiplexes and outputs it to an encoded stream, and a control unit configures the cutoff frequency of a low pass filter and the scaling coefficient of an image reduction unit in accordance with the transmission image complexity. On the decompression side, a complexity calculation unit calculates the decoded image complexity indicating the complexity of a decoded and expanded image, a complexity comparison unit compares the transmission image complexity and the decoded image complexity and outputs the difference or ratio, and, on the basis of output, a parameter calculation unit optimizes and configures the scaling coefficient of an image enlargement unit and the folding frequency of a super-resolution processing unit.
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公开(公告)号：US10513774B2
公开(公告)日：2019-12-24
申请号：US15191151
申请日：2016-06-23
发明人： Masato Terasaki , Naonori Akae , Hideki Horita
IPC分类号： C23C16/44 , H01L21/02 , C23C16/455 , B08B3/00 , B08B3/04 , B08B3/02 , B08B5/00 , B08B5/02 , B08B9/02 , B08B9/00 , B08B9/023 , B08B9/027 , B08B9/04 , H01J37/32 , B08B7/00
摘要： A cleaning method includes (a) providing a process chamber after forming an oxide film on a substrate in the process chamber formed by a reaction tube and a manifold supporting the reaction tube by performing a cycle a predetermined number of times, the cycle including supplying a source gas to the substrate through a first nozzle in the manifold extending upward to an inside of the reaction tube, and supplying an oxidizing gas to the substrate through a second nozzle in the manifold extending upward to the inside of the reaction tube; and (b) cleaning an inside of the process chamber. The step (b) includes a first cleaning process of supplying a hydrogen fluoride gas into the reaction tube through the second nozzle; and a second cleaning process of supplying a hydrogen fluoride gas onto an inner wall surface of the manifold through a third nozzle disposed in the manifold.
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公开(公告)号：US20190372725A1
公开(公告)日：2019-12-05
申请号：US16485523
申请日：2018-02-13
发明人： NAOKI HONGO
摘要： A wireless communication system includes a transmitter that discretely inserts null subcarriers into an OFDM-demodulated signal in time and frequency domains, and a receiver that receive signals by a first and second antennas. The receiver calculates a complex coefficient wherein a result of multiplying a first reception vector for each of the null subcarriers received by the first antenna by the complex coefficient is equal to an amplitude of a second reception vector of the corresponding null subcarrier received by the second antenna and is opposite in phase thereto, calculates a fourth reception vector by multiplying a third reception vector of any data subcarrier received by the first antenna by a coefficient that is obtained by interpolating the complex coefficient, and adds the fourth reception vector to a fifth reception vector of the any data subcarrier received by the second antenna.
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公开(公告)号：US10480069B2
公开(公告)日：2019-11-19
申请号：US16008825
申请日：2018-06-14
发明人： Naoko Kitagawa , Yuichi Wada
IPC分类号： C23C16/00 , C23C16/448 , C23C16/44 , H01L21/31 , C23C16/52 , C23C14/12 , C23C14/54 , C23C16/455
摘要： A storage device includes: a sidewall formed in a cylindrical shape; a cover wall disposed at an upper end of the sidewall; a bottom wall connected to a lower end of the sidewall and comprising a mounting surface mountable on a weight detector; a storage chamber surrounded by the sidewall, the cover wall, and the bottom wall; a recess communicating with the storage chamber and provided at the bottom wall; a communication pipe having one end connected to a bottom portion of the recess in a direction of gravity and the other end extending in a direction different from the direction of gravity in the bottom wall, the communication pipe having a diameter smaller than that of the recess; a gas flow path provided at a wall other than the bottom wall; and a liquid discharge path connected to a downstream side of the communication pipe.
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