公开(公告)号：US08592761B2

公开(公告)日：2013-11-26

申请号：US13551947

申请日：2012-07-18

Applicant: Weiming Ren ,  Zhongwei Chen

Inventor： Weiming Ren ,  Zhongwei Chen

IPC: G21K1/08 ,  H01J37/26 ,  H01J37/20

CPC classification number: H01J37/05 ,  H01J37/21 ,  H01J37/28 ,  H01J2237/057 ,  H01J2237/1508 ,  H01J2237/1532

Abstract: The monochromator for reducing energy spread of a primary charged particle beam in charged particle apparatus comprises a beam adjustment element, two Wien-filter type dispersion units and an energy-limit aperture. In the monochromator, a dual proportional-symmetry in deflection dispersion and fundamental trajectory along a straight optical axis is formed, which not only fundamentally avoids incurring off-axis aberrations that actually can not be compensated but also ensures the exit beam have a virtual crossover which is stigmatic, dispersion-free and inside the monochromator. The present invention also provides two ways to build a monochromator into a SEM, in which one is to locate a monochromator between the electron source and the condenser, and another is to locate a monochromator between the beam-limit aperture and the objective. The former provides an additional energy-angle depending filtering, and obtains a smaller effective energy spread.

Abstract translation: 用于减少带电粒子装置中的初级带电粒子束的能量扩散的单色仪包括光束调节元件，两个维恩滤波器型色散单元和能量限制孔径。 在单色仪中，形成了沿着直线光轴的偏转色散和基本轨迹中的双比例对称性，其不仅从根本上避免了实际上不能被补偿的偏轴像差，而且确保出射光束具有虚拟交叉， 是单色的，是无色的，不分​​散的。 本发明还提供了将单色仪构建到SEM中的两种方法，其中一种是在电子源和电容器之间定位单色器，另一种是在光束极限孔径和物镜之间定位单色仪。 前者提供额外的能量角取决于滤波，并获得较小的有效能量扩展。

公开(公告)号：US20130292568A1

公开(公告)日：2013-11-07

申请号：US13993829

申请日：2011-12-05

Applicant: Daisuke Bizen ,  Hiroshi Makino ,  Junichi Tanaka ,  Makoto Ezumi

Inventor： Daisuke Bizen ,  Hiroshi Makino ,  Junichi Tanaka ,  Makoto Ezumi

IPC: H01J37/05 ,  H01J37/10

CPC classification number: H01J37/05 ,  G01B15/00 ,  H01J37/10 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/04735 ,  H01J2237/24485

Abstract: This electron scanning microscope comprises an electron source (102), electron optical systems (109, 110, 111) for exposing a sample (113) to primary electron beams (138), an electron detector (127) for detecting signal electrons (139) emitted from the sample, and a deceleration electrical field-type energy filter (108). The deceleration electrical field-type energy filter has a conductor thin film (304) for distinguishing the energy of signal electrons. With this configuration, it is possible to realize a scanning electron microscope having a deceleration electrical field-type energy filter with which high energy resolution is obtained, even in a case where the scanning electron microscope has a retarding optical system.

Abstract translation: 该电子扫描显微镜包括用于将样品（113）暴露于一次电子束（138）的电子源（102），用于检测信号电子（139）的电子检测器（127）的电子光学系统（109,110,111） 从所述样品发射的减速电场型能量过滤器（108）。 减速电场型能量滤波器具有用于区分信号电子能量的导体薄膜（304）。 利用这种结构，即使在扫描电子显微镜具有延迟光学系统的情况下，也可以实现具有能够获得高能量分辨率的减速电场型能量过滤器的扫描电子显微镜。

公开(公告)号：US08563954B2

公开(公告)日：2013-10-22

申请号：US13336274

申请日：2011-12-23

Applicant: FHM-Faridur Rahman ,  Louis S. Farkas, III ,  John A. Notte, IV

Inventor： FHM-Faridur Rahman ,  Louis S. Farkas, III ,  John A. Notte, IV

IPC: H01J49/00

CPC classification number: H01J37/28 ,  H01J37/05 ,  H01J37/08 ,  H01J37/265 ,  H01J2237/057 ,  H01J2237/0807 ,  H01J2237/24514

Abstract: Ion microscope methods and systems are disclosed. In general, the systems and methods provide high ion beam stability.

Abstract translation: 公开了离子显微镜的方法和系统。 通常，这些系统和方法提供了高离子束稳定性。

公开(公告)号：US20130256530A1

公开(公告)日：2013-10-03

申请号：US13438543

申请日：2012-04-03

Applicant: Xinrong JIANG ,  Liqun HAN

Inventor： Xinrong JIANG ,  Liqun HAN

IPC: G01N23/00 ,  H01J1/50

CPC classification number: H01J37/153 ,  H01J37/05 ,  H01J37/28 ,  H01J2237/1534

Abstract: One embodiment relates to an apparatus for high-resolution electron beam imaging. The apparatus includes an energy filter configured to limit an energy spread of the electrons in the incident electron beam. The energy filter may be formed using a stigmatic Wien filter and a filter aperture. Another embodiment relates to a method of forming an incident electron beam for a high-resolution electron beam apparatus. Another embodiment relates to a stigmatic Wien filter that includes curved conductive electrodes. Another embodiment relates to a stigmatic Wien filter that includes a pair of magnetic yokes and a multipole deflector. Other embodiments, aspects and features are also disclosed.

Abstract translation: 一个实施例涉及用于高分辨率电子束成像的装置。 该装置包括被配置为限制入射电子束中的电子的能量扩散的能量过滤器。 能量滤波器可以使用固定的维恩滤波器和滤波器孔来形成。 另一实施例涉及形成用于高分辨率电子束装置的入射电子束的方法。 另一实施例涉及一种包括弯曲导电电极的标准维恩滤波器。 另一实施例涉及一种包括一对磁轭和多极偏转器的标准维恩滤波器。 还公开了其它实施例，方面和特征。

公开(公告)号：US08513597B2

公开(公告)日：2013-08-20

申请号：US11917663

申请日：2006-06-16

Applicant: Peter Panayi

Inventor： Peter Panayi

IPC: H01J49/00

CPC classification number: H01J37/05 ,  G01N2001/045 ,  H01J37/285 ,  H01J49/0004 ,  H01J49/405 ,  H01J2237/0535

Abstract: Aspects of the present invention are directed generally toward atom probe and three-dimensional atom probe microscopes. For example, certain aspects of the invention are directed -toward an atom probe or a three-dimensional atom probe that includes a sub-nanosecond laser to evaporate ions from a specimen under analysis and a reflectron for reflecting the ions. In further aspects of the invention, the reflectron can include a front electrode and a back electrode. At least one of the front and back electrodes can be capable of generating a curved electric field. Additionally, the front electrode and back electrodes can be configured to perform time focusing and resolve an image of a specimen.

Abstract translation: 本发明的方面通常涉及原子探针和三维原子探针显微镜。 例如，本发明的某些方面涉及原子探针或三维原子探针，该原子探针或三维原子探针包括用于蒸发分析中的样品的离子的亚纳秒激光和用于反射离子的反射器。 在本发明的其它方面中，反射器可以包括前电极和后电极。 前电极和后电极中的至少一个能够产生弯曲的电场。 此外，前电极和背电极可以被配置为执行时间聚焦并且解析样本的图像。

公开(公告)号：US20130206987A1

公开(公告)日：2013-08-15

申请号：US13757939

申请日：2013-02-04

Applicant: JEOL LTD.

Inventor： Kazuya Omoto

IPC: H01J37/10 ,  H01J37/153 ,  H01J37/05

CPC classification number: H01J37/10 ,  H01J37/04 ,  H01J37/05 ,  H01J37/153 ,  H01J37/26 ,  H01J2237/0492 ,  H01J2237/057 ,  H01J2237/1532

Abstract: A transmission electron microscope (100) includes an electron beam source (2), an illumination lens (10), an objective lens (20), an intermediate lens system (30), a pair of transfer lenses (40) located behind the intermediate lens system (30), and an energy filter (60) for separating the electrons of the beam L transmitted through the specimen (S) according to energy. The transfer lenses (40) transfer the first image to the entrance crossover plane (S1) of the energy filter (60) and to transfer the second image to the entrance image plane (A1) of the filter (60). An image plane (A3) is formed between the first transfer lens (40a) and the second transfer lens (40b).

Abstract translation: 透射电子显微镜（100）包括电子束源（2），照明透镜（10），物镜（20），中间透镜系统（30），位于中间的后面的一对转印透镜 透镜系统（30）和能量过滤器（60），用于根据能量分离透过样本（S）的光束L的电子。 传送透镜（40）将第一图像传送到能量过滤器（60）的入口交叉平面（S1），并将第二图像传送到过滤器（60）的入射图像平面（A1）。 在第一转印透镜（40a）和第二转印透镜（40b）之间形成像平面（A3）。

公开(公告)号：US08476602B2

公开(公告)日：2013-07-02

申请号：US12966545

申请日：2010-12-13

Applicant: Dan Nicolaescu ,  Masao Naito

Inventor： Dan Nicolaescu ,  Masao Naito

IPC: H01J37/143

CPC classification number: H01J37/05 ,  G21K1/093 ,  H01J2237/004 ,  H01J2237/028 ,  H01J2237/31701 ,  H05H7/04

Abstract: A magnet used in an ion beam irradiation apparatus includes a pair of magnetic poles arranged facing each other on an inner side of the magnet across an ion beam; a plurality of magnetic field concentrating members that are arranged on each of the opposing surfaces of the magnetic poles and that perform a function of trapping electrons between the magnetic poles; and a protective member that covers opposing surfaces of the magnetic field concentrating members.

Abstract translation: 在离子束照射装置中使用的磁体包括在离子束的磁体的内侧彼此面对的一对磁极; 多个磁场聚集构件，其布置在所述磁极的相对表面中的每一个上，并且执行在所述磁极之间捕获电子的功能; 以及覆盖磁场聚集构件的相对表面的保护构件。

公开(公告)号：US20130112889A1

公开(公告)日：2013-05-09

申请号：US13292455

申请日：2011-11-09

Applicant: Zhongwei Chen ,  Xuedong Liu ,  Weiming Ren

Inventor： Zhongwei Chen ,  Xuedong Liu ,  Weiming Ren

IPC: H01J3/26

CPC classification number: H01J37/05 ,  H01J49/288 ,  H01J2237/057

Abstract: This invention provides a multi-pole type Wien filter, which acts more purely approaching its fundamentally expected performance. A 12-electrode electric device acts as an electric deflector,or acts as an electric deflector and an electric stigmator together. A cylindrical 4-coil magnetic device with a magnetic core acts as a magnetic deflector. Both can produce a dipole field while only incurring a negligibly-small 3rd order field harmonic. The magnetic core enhances the strength and more preciously regulates the distribution of the magnetic field originally generated by the coils. Then two ways to construct a Wien filter are proposed. One way is based on both of the foregoing electric and magnetic devices, and the other way is based on the foregoing electric device and a conventional magnetic deflector. The astigmatism in each of such Wien filters can be compensated by the electric stigmator of the electric device.

Abstract translation: 本发明提供了一种多极型Wien滤波器，其更加纯粹地接近其根本预期的性能。 12电极电气装置用作电导向器，或者用作电导向器和电极连接器。 具有磁芯的圆柱形4线圈磁性装置用作磁导流器。 两者都可以产生偶极场，同时只产生一个可忽略的小三阶场谐波。 磁芯增强了强度，更加珍贵地调节了最初由线圈产生的磁场的分布。 然后提出构建维恩滤波器的两种方法。 一种方法是基于上述电气和磁性装置两者，另一种方法是基于前述的电气装置和常规的磁导向装置。 每个这样的维恩滤波器中的像散可以通过电气设备的电极来补偿。

公开(公告)号：US20130075623A1

公开(公告)日：2013-03-28

申请号：US13240951

申请日：2011-09-22

Applicant: Nai-Han CHENG ,  Chin-Hsiang LIN ,  Chi-Ming YANG ,  Chun-Lin CHANG ,  Chih-Hong HWANG

Inventor： Nai-Han CHENG ,  Chin-Hsiang LIN ,  Chi-Ming YANG ,  Chun-Lin CHANG ,  Chih-Hong HWANG

IPC: H01J3/14 ,  G21K5/10

CPC classification number: H01J37/3171 ,  G21K5/00 ,  H01J3/14 ,  H01J37/05 ,  H01J37/147

Abstract: An multi-ion beam implantation apparatus and method are disclosed. An exemplary apparatus includes an ion beam source that emits at least two ion beams; an ion beam analyzer; and a multi-ion beam angle incidence control system. The ion beam analyzer and the multi-ion beam angle incidence control system are configured to direct the emitted at least two ion beams to a wafer.

Abstract translation: 公开了一种多离子束注入装置和方法。 示例性装置包括发射至少两个离子束的离子束源; 离子束分析仪; 和多离子束角度入射控制系统。 离子束分析仪和多离子束角入射控制系统被配置为将发射的至少两个离子束引导到晶片。

公开(公告)号：US20120292497A1

公开(公告)日：2012-11-22

申请号：US13111634

申请日：2011-05-19

Applicant: James B. McGinn

Inventor： James B. McGinn

IPC: H01J49/30

CPC classification number: H01J37/05 ,  H01J37/15 ,  H01J49/288 ,  H01J2237/057 ,  H01J2237/31749

Abstract: An ExB Wien mass filter providing a method and structure for mechanically adjusting the magnetic field distributions at the mass filter entrance and exit end caps. The reluctance of the flux return path may be modified by configuring pluralities of magnetic shims within slots at the outer diameters of the entrance and exit end caps, and also by configuring pluralities of magnetic plug shims within circular flux dams surrounding the entrance and exit apertures. Advantages of purely mechanical adjustment for the magnetic fields of the present invention, compared with prior art electromagnet adjustment methods include greater reliability, simplicity, lower cost, and lack of power dissipation. The invention may employ either permanent magnets or electromagnets for generation of the mass-separation magnetic field.

Abstract translation: 提供了一种用于机械调节质量过滤器入口和出口端盖处的磁场分布的方法和结构的ExB维恩质量过滤器。 可以通过在入口和出口端盖的外径处的槽内配置多个磁性垫片，并且还可以通过在入口和出口孔周围的圆形焊剂坝内配置多个磁性塞子垫片来修改磁通返回路径的磁阻。 与现有技术的电磁调节方法相比，本发明的磁场纯机械调整的优点包括更高的可靠性，简便性，更低的成本和功耗的缺乏。 本发明可以采用永磁体或电磁体来产生质量分离磁场。