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    Polarization information acquisition unit, image pickup apparatus including the same, polarization information acquisition method, and non-transitory computer-readable storage medium
    21.
    发明授权
    Polarization information acquisition unit, image pickup apparatus including the same, polarization information acquisition method, and non-transitory computer-readable storage medium 有权
    极化信息获取单元，包括该偏振信息获取单元的偏振信息获取方法和非暂时计算机可读存储介质

    公开(公告)号：US09506806B2

    公开(公告)日：2016-11-29

    申请号：US14643926

    申请日：2015-03-10

    Applicant: CANON KABUSHIKI KAISHA

    Inventor： Daisuke Sano

    IPC: G01J4/00 ,  G01J4/04 ,  G02B5/30 ,  G01J4/02

    CPC classification number: G01J4/04 ,  G01J4/02 ,  G01J2004/002 ,  G02B5/3083

    Abstract: An polarization information acquisition unit includes a phase adjuster configured to adjust phases of two linearly polarized components of incident light, which oscillate in directions orthogonal to each other, a detector configured to transmit a polarized component oscillating in one direction and not to transmit a polarized component oscillating in a direction orthogonal to the one direction, the polarized components being included in light emitted from the phase adjuster, and a photoelectric convertor configured to photoelectrically convert a polarized component transmitted through the detector. The phase adjuster has at least three areas. The at least three areas include at least two areas having phase adjusting amounts different from each other, and at least two areas having an identical phase adjusting amounts and having slow axes whose directions are different from each other by 20 to 90 degrees inclusive.

    Abstract translation: 偏振信息获取单元包括：相位调整器，被配置为调节在彼此正交的方向上振荡的入射光的两个线偏振分量的相位;检测器，被配置为传输在一个方向上振荡的偏振分量，而不透射偏振分量 在与所述一个方向正交的方向上振荡，所述偏振分量包括在从所述相位调制器发出的光中，以及光电转换器，被配置为对透过所述检测器的偏振分量进行光电转换。 相位调节器至少有三个区域。 所述至少三个区域包括具有彼此不同的相位调整量的至少两个区域，以及具有相同相位调整量的至少两个区域，并且具有方向彼此相差20到90度的慢轴。

    POLARIZATION INFORMATION ACQUISITION UNIT, IMAGE PICKUP APPARATUS INCLUDING THE SAME, POLARIZATION INFORMATION ACQUISITION METHOD, AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM
    23.
    发明申请
    POLARIZATION INFORMATION ACQUISITION UNIT, IMAGE PICKUP APPARATUS INCLUDING THE SAME, POLARIZATION INFORMATION ACQUISITION METHOD, AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM 有权
    偏振信息获取单元，包括其的图像拾取装置，偏振信息获取方法和非中间计算机可读存储介质

    公开(公告)号：US20150253192A1

    公开(公告)日：2015-09-10

    申请号：US14643926

    申请日：2015-03-10

    Applicant: CANON KABUSHIKI KAISHA

    Inventor： Daisuke Sano

    IPC: G01J4/04 ,  G02B5/30

    CPC classification number: G01J4/04 ,  G01J4/02 ,  G01J2004/002 ,  G02B5/3083

    Abstract: An polarization information acquisition unit includes a phase adjuster configured to adjust phases of two linearly polarized components of incident light, which oscillate in directions orthogonal to each other, a detector configured to transmit a polarized component oscillating in one direction and not to transmit a polarized component oscillating in a direction orthogonal to the one direction, the polarized components being included in light emitted from the phase adjuster, and a photoelectric convertor configured to photoelectrically convert a polarized component transmitted through the detector. The phase adjuster has at least three areas. The at least three areas include at least two areas having phase adjusting amounts different from each other, and at least two areas having an identical phase adjusting amounts and having slow axes whose directions are different from each other by 20 to 90 degrees inclusive.

    Abstract translation: 偏振信息获取单元包括：相位调整器，被配置为调节在彼此正交的方向上振荡的入射光的两个线偏振分量的相位;检测器，被配置为传输在一个方向上振荡的偏振分量，而不透射偏振分量 在与所述一个方向正交的方向上振荡，所述偏振分量包括在从所述相位调制器发出的光中，以及光电转换器，被配置为对透过所述检测器的偏振分量进行光电转换。 相位调节器至少有三个区域。 所述至少三个区域包括具有彼此不同的相位调整量的至少两个区域，以及具有相同相位调整量的至少两个区域，并且具有方向彼此相差20到90度的慢轴。

    System for analyzing surface characteristics with self-calibrating capability
    24.
    发明授权
    System for analyzing surface characteristics with self-calibrating capability 有权
    用于分析具有自校准能力的表面特性的系统

    公开(公告)号：US06804003B1

    公开(公告)日：2004-10-12

    申请号：US09405716

    申请日：1999-09-24

    Applicant: Haiming Wang ,  Patrick M. Maxton ,  Kenneth C. Johnson ,  Mehrdad Nikoonahad

    Inventor： Haiming Wang ,  Patrick M. Maxton ,  Kenneth C. Johnson ,  Mehrdad Nikoonahad

    IPC: G01J400

    CPC classification number: G01J3/447 ,  G01B11/0641 ,  G01J4/02 ,  G01N21/21 ,  G01N21/211

    Abstract: Two phase modulators or polarizing elements are employed to modulate the polarization of an interrogating radiation beam before and after the beam has been modified by a sample to be measured. Radiation so modulated and modified by the sample is detected and up to 25 harmonics may be derived from the detected signal. The up to 25 harmonics may be used to derive ellipsometric and system parameters, such as parameters related to the angles of fixed polarizing elements, circular deattenuation, depolarization of the polarizing elements and retardances of phase modulators. A portion of the radiation may be diverted for detecting sample tilt or a change in sample height. A cylindrical objective may be used for focusing the beam onto the sample to illuminate a circular spot on the sample. The above-described self-calibrating ellipsometer may be combined with another optical measurement instrument such as a polarimeter, a spectroreflectometer or another ellipsometer to improve the accuracy of measurement and/or to provide calibration standards for the optical measurement instrument. The self-calibrating ellipsometer as well as the combined system may be used for measuring sample characteristics such as film thickness and depolarization of radiation caused by the sample.

    Abstract translation: 采用两相调制器或偏振元件来调制光束已被待测样品修改之前和之后的询问辐射束的极化。 检测由样本调制和修改的辐射，并且可以从检测到的信号导出多达25个谐波。 可以使用多达25个谐波来导出椭偏和系统参数，例如与固定偏振元件的角度相关的参数，圆形去衰减，偏振元件的去极化和相位调制器的延迟。 可以转移一部分辐射以检测样品倾斜或样品高度的变化。 可以使用圆柱形物镜将光束聚焦到样品上以照亮样品上的圆形斑点。 上述自校准椭偏仪可以与另一种光学测量仪器如偏振计，分光光度计或其他椭偏仪组合，以提高测量精度和/或为光学测量仪器提供校准标准。 自校准椭偏仪以及组合系统可用于测量样品特性，如样品的膜厚度和辐射的去极化。

    System for measuring polarimetric spectrum and other properties of a sample
    25.
    发明授权
    System for measuring polarimetric spectrum and other properties of a sample 有权

    公开(公告)号：US06611330B2

    公开(公告)日：2003-08-26

    申请号：US09778245

    申请日：2001-02-06

    Applicant: Shing Lee ,  Haiming Wang ,  Adam Norton ,  Mehrdad Nikoonahad

    Inventor： Shing Lee ,  Haiming Wang ,  Adam Norton ,  Mehrdad Nikoonahad

    IPC: G01N2121

    CPC classification number: G01J4/02 ,  G01J3/447 ,  G01N21/21

    Abstract: A polarized sample beam of broadband radiation is focused onto the surface of a sample and the radiation modified by the sample is collected by means of a mirror system in different planes of incidence. The sample beam focused to the sample has a multitude of polarization states. The modified radiation is analyzed with respect to a polarization plane to provide a polarimetric spectrum. Thickness and refractive information may then be derived from the spectrum. Preferably the polarization of the sample beam is altered only by the focusing and the sample, and the analyzing is done with respect to a fixed polarization plane. In the preferred embodiment, the focusing of the sample beam and the collection of the modified radiation are repeated employing two different apertures to detect the presence or absence of a birefringence axis in the sample. In another preferred embodiment, the above-described technique may be combined with ellipsometry for determining the thicknesses and refractive indices of thin films.

    System for measuring polarimetric spectrum and other properties of a sample
    26.
    发明申请
    System for measuring polarimetric spectrum and other properties of a sample 有权
    用于测量样品的偏振光谱和其他性质的系统

    公开(公告)号：US20020008874A1

    公开(公告)日：2002-01-24

    申请号：US09778245

    申请日：2001-02-06

    Inventor： Shing Lee ,  Haiming Wang ,  Adam Norton ,  Mehrdad Nikoonahad

    IPC: G01J004/00

    CPC classification number: G01J4/02 ,  G01J3/447 ,  G01N21/21

    Abstract: A polarized sample beam of broadband radiation is focused onto the surface of a sample and the radiation modified by the sample is collected by means of a mirror system in different planes of incidence. The sample beam focused to the sample has a multitude of polarization states. The modified radiation is analyzed with respect to a polarization plane to provide a polarimetric spectrum. Thickness and refractive information may then be derived from the spectrum. Preferably the polarization of the sample beam is altered only by the focusing and the sample, and the analyzing is done with respect to a fixed polarization plane. In the preferred embodiment, the focusing of the sample beam and the collection of the modified radiation are repeated employing two different apertures to detect the presence or absence of a birefringence axis in the sample. In another preferred embodiment, the above-described technique may be combined with ellipsometry for determining the thicknesses and refractive indices of thin films.

    Abstract translation: 将宽带辐射的极化样品束聚焦到样品的表面上，并且通过不同入射平面的反射镜系统收集由样品改性的辐射。 聚焦到样品的样品束具有许多极化状态。 相对于偏振平面分析修改的辐射以提供偏振光谱。 然后可以从光谱导出厚度和折射信息。 优选地，样品光束的偏振仅由聚焦和样品改变，并且相对于固定的偏振平面进行分析。 在优选实施例中，使用两个不同的孔来重复样品束的聚焦和修改的辐射的收集，以检测样品中双折射轴的存在或不存在。 在另一个优选实施例中，上述技术可以与用于确定薄膜的厚度和折射率的椭偏仪组合。

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