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21.发明申请INTEGRATED ANODE AND ACTIVATED REACTIVE GAS SOURCE FOR USE IN A MAGNETRON SPUTTERING DEVICE 审中-公开用于MAGNETRON SPUTTERING设备的集成阳极和活性反应气体源公开(公告)号：US20170032946A1
公开(公告)日：2017-02-02
申请号：US15290901
申请日：2016-10-11
Applicant: VIAVI SOLUTIONS INC.
Inventor： Georg J. OCKENFUSS
CPC classification number: H01J37/3488 , C23C14/0063 , C23C14/35 , H01J37/3244 , H01J37/3405 , H01J37/3423 , H01J2237/006
Abstract: The invention relates to an integrated anode and activated reactive gas source for use in a magnetron sputtering device and a magnetron sputtering device incorporating the same. The integrated anode and activated reactive gas source comprises a vessel having an interior conductive surface, comprising the anode, and an insulated outer body isolated from the chamber walls of the coating chamber. The vessel has a single opening with a circumference smaller that that of the vessel in communication with the coating chamber. Sputtering gas and reactive gas are coupled through an input into the vessel and through the single opening into the coating chamber. A plasma is ignited by the high density of electrons coming from the cathode and returning to the power supply through the anode. A relatively low anode voltage is sufficient to maintain a plasma of activated reactive gas to form stoichiometric dielectric coatings.
Abstract translation: 本发明涉及一种用于磁控溅射装置的集成阳极和活化反应气体源，以及包含该阳极和活化气体的磁控溅射装置。 集成的阳极和活化的反应性气体源包括具有内部导电表面的容器，包括阳极和与涂覆室的室壁隔离的绝缘的外部主体。 容器具有单个开口，其周长小于与涂覆室连通的容器的周长。 溅射气体和反应性气体通过输入端连接到容器中并通过单个开口连接到涂覆室中。 等离子体被来自阴极的高密度电子点燃并通过阳极返回到电源。 相对较低的阳极电压足以维持活化的反应气体的等离子体形成化学计量的电介质涂层。
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公开(公告)号：US20240103210A1
公开(公告)日：2024-03-28
申请号：US18534780
申请日：2023-12-11
Applicant: VIAVI Solutions Inc.
Inventor： Georg J. OCKENFUSS
Abstract: An optical filter may include a substrate. The optical filter may include a first mirror and a second mirror. Each of the first mirror and the second mirror may include a plurality of quarterwave stacks. The plurality of quarterwave stacks may include a plurality of layers comprising a first material, a second material, and a third material. The optical filter may include a spacer disposed between the first mirror and the second mirror.
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公开(公告)号：US20230350116A1
公开(公告)日：2023-11-02
申请号：US18349404
申请日：2023-07-10
Applicant: VIAVI Solutions Inc.
Inventor： Georg J. OCKENFUSS , Tim GUSTAFSON , Jeffrey James KUNA , Markus BILGER , Richard A. BRADLEY, Jr.
IPC: G02B5/28 , H01L27/146 , G02B1/10
CPC classification number: G02B5/285 , G02B5/281 , G02B5/283 , H01L27/14621 , H01L27/14685 , G02B1/10
Abstract: An optical filter, a sensor device including the optical filter, and a method of fabricating the optical filter are provided. The optical filter includes one or more dielectric layers and one or more metal layers stacked in alternation. The metal layers are intrinsically protected by the dielectric layers. In particular, the metal layers have tapered edges that are protectively covered by one or more of the dielectric layers.
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公开(公告)号：US20230203636A1
公开(公告)日：2023-06-29
申请号：US18171058
申请日：2023-02-17
Applicant: VIAVI Solutions Inc.
Inventor： Georg J. OCKENFUSS
CPC classification number: C23C14/0036 , C23C14/0063 , C23C14/10 , C23C14/3407 , H01J37/34 , H01J37/3417 , H01J37/3464
Abstract: Reactive sputter deposition method and system are disclosed, in which a catalyst gas, such as water vapor, is used to increase the overall deposition rate substantially without compromising formation of a dielectric compound layer and its optical transmission. Addition to the sputtering or reactive gas of the catalyst gas can result in an increase of a deposition rate of the dielectric oxide film substantially without increasing an optical absorption of the film.
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公开(公告)号：US20230141377A1
公开(公告)日：2023-05-11
申请号：US18047065
申请日：2022-10-17
Applicant: VIAVI Solutions Inc.
Inventor： Georg J. OCKENFUSS , Scott ROWLANDS , Markus BILGER
CPC classification number: G02B5/281 , G01J1/0488 , G01J1/4228
Abstract: A sensor window may include a substrate and a set of layers disposed onto the substrate. The set of layers may include a first subset of layers of a first refractive index and a second set of layers of a second refractive index different from the first refractive index. The set of layers may be associated with a threshold transmissivity in a sensing spectral range. The set of layers may be configured to a particular color in a visible spectral range and may be associated with a threshold opacity in the visible spectral range.
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Patent Agency Ranking
公开(公告)号：US20210384242A1
公开(公告)日：2021-12-09
申请号：US17445623
申请日：2021-08-23
Applicant: VIAVI Solutions Inc.
Inventor： Georg J. OCKENFUSS
IPC: H01L27/146 , H01L31/0216 , G01J3/51 , G01J3/02 , G01J3/26 , G01J3/28 , G01J3/36 , G02B5/28 , H01L33/60 , H01L27/32 , H01L33/46 , H01L51/52
Abstract: A device may include a multispectral filter array disposed on the substrate. The multispectral filter array may include a first metal mirror disposed on the substrate. The multispectral filter may include a spacer disposed on the first metal mirror. The spacer may include a set of layers. The spacer may include a second metal mirror disposed on the spacer. The second metal mirror may be aligned with two or more sensor elements of a set of sensor elements.
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公开(公告)号：US20210333454A1
公开(公告)日：2021-10-28
申请号：US16948957
申请日：2020-10-07
Applicant: VIAVI Solutions Inc.
Inventor： Georg J. OCKENFUSS
IPC: G02B5/20
Abstract: An induced transmission filter may include a set of optical filter layers. The set of optical filter layers may include a first subset of optical filter layers comprising a first material with a first refractive index, the first material comprising at least silicon and hydrogen. The set of optical filter layers may include a second subset of optical filter layers comprising a second material with a second refractive index. The second material may be different from the first material and the second refractive index may be less than the first refractive index. The second material may include at least silver.
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公开(公告)号：US20210325583A1
公开(公告)日：2021-10-21
申请号：US17304396
申请日：2021-06-21
Applicant: VIAVI Solutions Inc.
Inventor： Georg J. OCKENFUSS
Abstract: An optical filter may include a substrate. An optical filter may include a set of optical filter layers disposed onto the substrate. The set of optical filter layers including a first subset of optical filter layers. The first subset of optical filter layers may include a silicon-germanium (SiGe) with a first refractive index. An optical filter may include a second subset of optical filter layers. The second subset of optical filter layers may include a material with a second refractive index. The second refractive index being less than the first refractive index.
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公开(公告)号：US20210124102A1
公开(公告)日：2021-04-29
申请号：US17248061
申请日：2021-01-07
Applicant: VIAVI Solutions Inc.
Inventor： James SWITZER, III , Georg J. OCKENFUSS
Abstract: A bandpass filter may include a set of layers. The set of layers may include a first subset of layers. The first subset of layers may include hydrogenated germanium (Ge:H) with a first refractive index. The set of layers may include a second subset of layers. The second subset of layers may include a material with a second refractive index. The second refractive index may be less than the first refractive index.
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公开(公告)号：US20190196072A1
公开(公告)日：2019-06-27
申请号：US16290612
申请日：2019-03-01
Applicant: VIAVI Solutions Inc.
Inventor： Karen Denise HENDRIX , Richard A. BRADLEY, JR. , Marius GRIGONIS , Georg J. OCKENFUSS
CPC classification number: G02B5/281 , G01J5/0862 , G02B1/11 , G02B1/115 , G02B5/207 , G02B5/285 , G06K9/00335 , H04N5/33 , H04N13/254
Abstract: An optical filter having a passband at least partially overlapping with a wavelength range of 800 nm to 1100 nm is provided. The optical filter includes a filter stack formed of hydrogenated silicon layers and lower-refractive index layers stacked in alternation. The hydrogenated silicon layers each have a refractive index of greater than 3 over the wavelength range of 800 nm to 1100 nm and an extinction coefficient of less than 0.0005 over the wavelength range of 800 nm to 1100 nm.
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