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公开(公告)号:US09543343B2
公开(公告)日:2017-01-10
申请号:US14093277
申请日:2013-11-29
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor: Volume Chien , Yun-Wei Cheng , Shiu-Ko Jangjian , Zhe-Ju Liu , Kuo-Cheng Lee , Chi-Cherng Jeng
IPC: H01L27/146 , H01L31/0232 , H01L31/0216
CPC classification number: H01L27/14623 , H01L27/1462 , H01L27/14621 , H01L27/14625 , H01L27/14627 , H01L27/14629 , H01L27/14645 , H01L27/14685 , H01L31/02164 , H01L31/0232
Abstract: Embodiments of mechanisms for forming an image sensor device are provided. The image sensor device includes a semiconductor substrate and a photodetector in the semiconductor substrate. The image sensor device also includes a dielectric layer over the semiconductor substrate, and the dielectric layer has a recess aligned with the photodetector. The image sensor device further includes a filter in the recess of the dielectric layer. In addition, the image sensor device includes a shielding layer between the dielectric layer and the semiconductor substrate and surrounding the filter.
Abstract translation: 提供了用于形成图像传感器装置的机构的实施例。 图像传感器装置包括半导体衬底和半导体衬底中的光电检测器。 图像传感器装置还包括半导体衬底上的电介质层,并且电介质层具有与光电检测器对准的凹陷。 图像传感器装置还包括在介电层的凹部中的过滤器。 此外,图像传感器装置包括介电层和半导体衬底之间并围绕过滤器的屏蔽层。
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公开(公告)号:US09431446B2
公开(公告)日:2016-08-30
申请号:US14135042
申请日:2013-12-19
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor: Volume Chien , Fu-Cheng Chang , Yi-Hsing Chu , Shiu-Ko Jangjian , Chi-Cherng Jeng
IPC: H01L27/14 , H01L27/146
CPC classification number: H01L27/1463 , H01L27/1464
Abstract: Embodiments of mechanisms for forming an image sensor device are provided. The image sensor device includes a semiconductor substrate and an isolation structure in the semiconductor substrate. The image sensor device also includes an active region in the semiconductor substrate and surrounded by the isolation structure. The active region includes a light sensing region and a doped region, and the doped region has a horizontal length and a vertical length. A ratio of the horizontal length to the vertical length is in a range from about 1 to about 4.
Abstract translation: 提供了用于形成图像传感器装置的机构的实施例。 图像传感器装置包括半导体衬底和半导体衬底中的隔离结构。 图像传感器装置还包括半导体衬底中的有源区并被隔离结构包围。 有源区包括光感测区和掺杂区,掺杂区具有水平长度和垂直长度。 水平长度与垂直长度的比率在约1至约4的范围内。
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公开(公告)号:US20140167197A1
公开(公告)日:2014-06-19
申请号:US13718688
申请日:2012-12-18
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor: Shiu-Ko JangJian , Chi-Cherng Jeng , Volume Chien , Ying-Lang Wang
IPC: H01L31/0216 , H01L31/18
CPC classification number: H01L27/14687 , H01L27/1462 , H01L27/14623 , H01L27/1463 , H01L27/1464 , H01L27/14643 , H01L27/14685 , H01L31/18
Abstract: A backside illumination image sensor structure comprises an image sensor formed adjacent to a first side of a semiconductor substrate, wherein an interconnect layer is formed over the first side of the semiconductor substrate, a backside illumination film formed over a second side of the semiconductor substrate, a metal shielding layer formed over the backside illumination film and a via embedded in the backside illumination film and coupled between the metal shielding layer and the semiconductor substrate.
Abstract translation: 背面照明图像传感器结构包括与半导体衬底的第一侧相邻形成的图像传感器,其中在所述半导体衬底的第一侧上形成有互连层,形成在所述半导体衬底的第二侧上的背面照明膜, 形成在背面照明膜上的金属屏蔽层和嵌入在背面照明膜中并且连接在金属屏蔽层和半导体基板之间的通孔。
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公开(公告)号:US09887225B2
公开(公告)日:2018-02-06
申请号:US15228071
申请日:2016-08-04
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor: Kuo-Hung Lee , Chia-Pin Cheng , Fu-Cheng Chang , Volume Chien , Ching-Hung Kao
IPC: H01L31/18 , H01L27/146
CPC classification number: H01L27/1463 , H01L27/14609 , H01L27/14614 , H01L27/1462 , H01L27/14636 , H01L27/14643 , H01L27/14689
Abstract: A semiconductor device is provided. The semiconductor device includes a semiconductor substrate. An isolation feature is disposed in the semiconductor substrate to define a pixel region and a periphery region of the semiconductor substrate. A transistor gate is formed on the semiconductor substrate in the pixel region, in which the transistor gate has a first sidewall and a second sidewall opposite to the first sidewall. A photodiode is disposed in the semiconductor substrate and adjacent to the second sidewall of the transistor gate. A patterned spacer layer is formed on the photodiode and on the transistor gate. The patterned spacer layer includes a first sidewall spacer on the first sidewall of the transistor gate, and a protective structure covering the photodiode and a top surface of the transistor gate.
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公开(公告)号:US09728511B2
公开(公告)日:2017-08-08
申请号:US14109162
申请日:2013-12-17
Applicant: Taiwan Semiconductor Manufacturing CO., LTD.
Inventor: Hsi-Jung Wu , Volume Chien , Ying-Lang Wang , Hsin-Chi Chen , Ying-Hao Chen , Hung-Ta Huang
IPC: H01L23/544 , H01L23/00 , H01L23/58 , H01L21/784
CPC classification number: H01L23/562 , H01L21/784 , H01L23/585 , H01L2924/0002 , H01L2924/14 , H01L2924/00
Abstract: A semiconductor wafer includes a substrate, an integrated circuit and a die seal ring structure. The substrate is with a die region, a die seal ring region surrounding the die region and a scribe line region surrounding the die seal ring region. The substrate includes a first surface and a second surface opposite to the first surface, and periodic recesses within the first surface of the die seal ring region, the scribe line region or both the die seal ring region and the scribe line region. The integrated circuit is located on the first surface and the second surface of the die region. The die seal ring structure is located on the second surface of the die seal ring region. A semiconductor die is also provided.
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公开(公告)号:US09324752B2
公开(公告)日:2016-04-26
申请号:US14192322
申请日:2014-02-27
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd
Inventor: Volume Chien , Kun-Huei Lin , Chia-Yu Wei , Allen Tseng , Chi-Cherng Jeng , Chuan-Pu Liu
IPC: H01L27/148 , H01L27/146
CPC classification number: H01L27/14623 , H01L27/14621 , H01L27/14627 , H01L27/1463 , H01L27/1464 , H01L27/14685
Abstract: The disclosure provides an image sensor device and a manufacturing method. The image sensor device includes a semiconductor substrate and a light sensing region in the semiconductor substrate. The image sensor device also includes a light blocking structure in the semiconductor substrate and adjacent to the light sensing region. A sidewall of the light blocking structure is a curved surface.
Abstract translation: 本公开提供了一种图像传感器装置和制造方法。 图像传感器装置包括半导体衬底和半导体衬底中的光感测区域。 图像传感器装置还包括在半导体衬底中并与光感测区相邻的遮光结构。 遮光结构的侧壁是曲面。
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公开(公告)号:US09247116B2
公开(公告)日:2016-01-26
申请号:US14211636
申请日:2014-03-14
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Volume Chien , Su-Hua Chang , Zen-Fong Huang , Chia-Yu Wei , Chi-Cherng Jeng , Hsin-Chi Chen
IPC: H04N3/14 , H04N5/335 , H04N9/04 , H04N5/225 , H01L31/062 , H01L31/113
CPC classification number: H04N5/2254 , H01L27/14607 , H01L27/14609 , H01L27/14621 , H01L27/14623 , H01L27/14627 , H01L27/14685
Abstract: An image sensor device and a manufacturing method for forming an image sensor device are provided. The image sensor device includes a semiconductor substrate having an array region and a periphery region. The image sensor device also includes a light sensing region in the array region of the semiconductor substrate. The image sensor device further includes a dielectric structure over the array region and the periphery region, and the dielectric structure has a substantially planar top surface. In addition, the image sensor device includes a recess in the dielectric structure and substantially aligned with the light sensing region. The image sensor device also includes a filter in the recess and a light blocking grid in the dielectric structure and surrounding a portion of the filter.
Abstract translation: 提供了一种用于形成图像传感器装置的图像传感器装置和制造方法。 图像传感器装置包括具有阵列区域和周边区域的半导体基板。 图像传感器装置还包括在半导体衬底的阵列区域中的光感测区域。 图像传感器装置还包括在阵列区域和外围区域上的电介质结构,并且电介质结构具有基本平坦的顶表面。 此外,图像传感器装置包括在电介质结构中的凹槽,并基本上与光感测区域对准。 图像传感器装置还包括位于凹槽中的滤光器和电介质结构中的遮光栅格并围绕滤光器的一部分。
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公开(公告)号:US20150170985A1
公开(公告)日:2015-06-18
申请号:US14109162
申请日:2013-12-17
Applicant: Taiwan Semiconductor Manufacturing CO., LTD.
Inventor: Hsi-Jung Wu , Volume Chien , Ying-Lang Wang , Hsin-Chi Chen , Ying-Hao Chen , Hung-Ta Huang
IPC: H01L23/10 , H01L23/544 , H01L23/00
CPC classification number: H01L23/562 , H01L21/784 , H01L23/585 , H01L2924/0002 , H01L2924/14 , H01L2924/00
Abstract: A semiconductor wafer includes a substrate, an integrated circuit and a die seal ring structure. The substrate is with a die region, a die seal ring region surrounding the die region and a scribe line region surrounding the die seal ring region. The substrate includes a first surface and a second surface opposite to the first surface, and periodic recesses within the first surface of the die seal ring region, the scribe line region or both the die seal ring region and the scribe line region. The integrated circuit is located on the first surface and the second surface of the die region. The die seal ring structure is located on the second surface of the die seal ring region. A semiconductor die is also provided.
Abstract translation: 半导体晶片包括基板,集成电路和模具密封环结构。 基板具有模具区域,围绕模具区域的模具密封环区域和围绕模具密封环区域的划线区域。 基板包括与第一表面相对的第一表面和第二表面,以及在模具密封环区域的第一表面,划线区域或模具密封环区域和划线区域内的周期性凹槽。 集成电路位于模具区域的第一表面和第二表面上。 模具密封环结构位于模具密封环区域的第二表面上。 还提供半导体管芯。
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公开(公告)号:US11335721B2
公开(公告)日:2022-05-17
申请号:US14073580
申请日:2013-11-06
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor: Volume Chien , Su-Hua Chang , Chia-Yu Wei , Zen-Fong Huang , Chi-Cherng Jeng
IPC: H01L27/146 , H01L31/0216
Abstract: A backside illuminated image sensor device with a shielding layer and a manufacturing method thereof are provided. In the backside illuminated image senor device, a patterned conductive shielding layer is formed on a dielectric layer on a backside surface of a semiconductor substrate and surrounding a pixel array on a front side surface of the semiconductor substrate.
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公开(公告)号:US11121166B2
公开(公告)日:2021-09-14
申请号:US16398133
申请日:2019-04-29
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor: Volume Chien , Yun-Wei Cheng , Zhe-Ju Liu , Kuo-Cheng Lee , Chi-Cherng Jeng , Chuan-Pu Liu
IPC: H01L27/146
Abstract: An image sensor device is provided. The image sensor device includes a semiconductor substrate including a front surface, a back surface opposite to the front surface, and a light-sensing region extending from the front surface into the semiconductor substrate. The image sensor device includes a light-blocking structure in the semiconductor substrate and surrounding the light-sensing region. The light-blocking structure includes a conductive light reflection structure and a light absorption structure, and the light absorption structure is between the conductive light reflection structure and the back surface. The image sensor device includes an insulating layer between the light-blocking structure and the semiconductor substrate.
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