METHOD FOR PREDICTING DEFECT IN SEMICONDUCTOR DEVICE

    公开(公告)号:US20220268830A1

    公开(公告)日:2022-08-25

    申请号:US17495487

    申请日:2021-10-06

    Abstract: A method for predicting a defect in a semiconductor device includes: calculating a first probability that particles will be generated in a semiconductor element by radiation; calculating a second probability that damage will occur in the semiconductor element due to the particles; generating a training data set using input data and simulation data, the input data including damage data generated using the first probability and the second probability and including at least one of a position in which the damage will occur and an amount of the damage, impurity concentration of impurities doped in at least a portion of the semiconductor element, and structural data of the semiconductor element, and the simulation data including electrical characteristics of the semiconductor element obtained as a result of a simulation based on the input data; and training a machine learning model based on the training data set to generate a defect prediction model.

    FASTENING AUTOMATION APPARATUS FOR UPPER ELECTRODE

    公开(公告)号:US20220068609A1

    公开(公告)日:2022-03-03

    申请号:US17213017

    申请日:2021-03-25

    Abstract: A fastening automation apparatus for an upper electrode of an etching facility includes a ring, and a plurality of fastening modules movably secured to the ring and configured to be movable in a radial direction on the ring. Each fastening module includes a first frame that is movable in a radial direction on the ring, a driving source installed below the first frame, a driving shaft that transmits a driving force from the driving source, a power transmission unit connected to the driving shaft, and a fastening bit connected to the power transmission unit and configured to be rotated. The plurality of fastening modules are configured to operate simultaneously to install the upper electrode in the etching facility.

    STORAGE DEVICE, OPERATING METHOD OF STORAGE DEVICE, AND OPERATING METHOD OF STORAGE SYSTEM

    公开(公告)号:US20250117324A1

    公开(公告)日:2025-04-10

    申请号:US18901678

    申请日:2024-09-30

    Abstract: Provided is an operating method of a storage system including a host device and a storage device, the operating method including transmitting, from the host device to the storage device, a virtualization configuration acquisition command that indicates a request for a virtualization configuration list that is stored in the storage device, transmitting, by the storage device, the virtualization configuration list to the host device in response to the virtualization configuration acquisition command, transmitting, from the host device to the storage device, a virtualization configuration setting command, and performing, by the storage device, an initialization operation for a plurality of virtual functions of the storage device based on the virtualization configuration list in response to the virtualization configuration setting command.

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