公开(公告)号：US20220068609A1

公开(公告)日：2022-03-03

申请号：US17213017

申请日：2021-03-25

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Joohee Kim ,  Hyunjung Lee ,  Sungwook Jung ,  Sunho Kim ,  Sungjin Kim ,  Jungwook Kim ,  Hosun Yoo

IPC: H01J37/32

Abstract: A fastening automation apparatus for an upper electrode of an etching facility includes a ring, and a plurality of fastening modules movably secured to the ring and configured to be movable in a radial direction on the ring. Each fastening module includes a first frame that is movable in a radial direction on the ring, a driving source installed below the first frame, a driving shaft that transmits a driving force from the driving source, a power transmission unit connected to the driving shaft, and a fastening bit connected to the power transmission unit and configured to be rotated. The plurality of fastening modules are configured to operate simultaneously to install the upper electrode in the etching facility.

公开(公告)号：US12119210B2

公开(公告)日：2024-10-15

申请号：US17213017

申请日：2021-03-25

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Joohee Kim ,  Hyunjung Lee ,  Sungwook Jung ,  Sunho Kim ,  Sungjin Kim ,  Jungwook Kim ,  Hosun Yoo

IPC: H01J37/32

CPC classification number: H01J37/32532 ,  H01J37/32642

Abstract: A fastening automation apparatus for an upper electrode of an etching facility includes a ring, and a plurality of fastening modules movably secured to the ring and configured to be movable in a radial direction on the ring. Each fastening module includes a first frame that is movable in a radial direction on the ring, a driving source installed below the first frame, a driving shaft that transmits a driving force from the driving source, a power transmission unit connected to the driving shaft, and a fastening bit connected to the power transmission unit and configured to be rotated. The plurality of fastening modules are configured to operate simultaneously to install the upper electrode in the etching facility.