公开(公告)号：US09142415B2

公开(公告)日：2015-09-22

申请号：US14269175

申请日：2014-05-04

Applicant: Samsung Display Co., Ltd.

Inventor： Myung-Soo Huh ,  Suk-Won Jung ,  Sung-Chul Kim ,  Sang-Hyuk Hong ,  Choel-Min Jang

IPC: H01L21/285 ,  H01L21/02 ,  H01L51/56 ,  H01L51/00

CPC classification number: H01L21/28506 ,  C23C16/452 ,  C23C16/45565 ,  C23C16/45578 ,  C23C16/458 ,  C23C16/509 ,  H01J37/32357 ,  H01J37/3244 ,  H01L21/02274 ,  H01L51/001 ,  H01L51/56

Abstract: A deposition apparatus for performing a deposition process on a substrate includes: an injection unit including a plasma generating member which receives a raw material gas and converts the raw material gas to a deposition source material in a radical form; and a plasma processor disposed adjacent to the injection unit and facing a side of the injection unit, wherein the plasma processor performs a plasma process in a direction facing the substrate.

Abstract translation: 用于在基板上进行沉积处理的沉积装置包括：注入单元，其包括等离子体产生元件，该等离子体产生元件接纳原料气体，并将原料气体以基本形式转化为沉积源材料; 以及等离子体处理器，其与所述注入单元相邻并且面向所述注入单元的一侧，其中所述等离子体处理器在面向所述基板的方向上执行等离子体处理。

公开(公告)号：US20150031155A1

公开(公告)日：2015-01-29

申请号：US14148996

申请日：2014-01-07

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Chang-Woo Shim ,  Jae-Hyun Kim ,  Sung-Chul Kim

IPC: H01L51/56 ,  H01L51/00

CPC classification number: H01L51/56 ,  H01L51/0003

Abstract: A deposition apparatus includes a stage and a deposition module. The stage holds a substrate. The deposition module faces the substrate. The stage relatively moves in a direction relative to the deposition module. The deposition module includes a first feeding unit and a first light exposure unit. The first feeding unit sprays a first raw material toward the substrate. The first light exposure unit is disposed on at least one side of the first feeding unit and provides light to the at least one raw material sprayed on the substrate.

Abstract translation: 沉积装置包括载物台和沉积模块。 舞台上有一个衬底。 沉积模块面向基板。 该台相对于沉积模块相对移动。 沉积模块包括第一进料单元和第一曝光单元。 第一进料单元向基材喷射第一原料。 第一曝光单元设置在第一馈送单元的至少一侧，并且向喷射在基底上的至少一种原料提供光。

公开(公告)号：US20150027374A1

公开(公告)日：2015-01-29

申请号：US14302646

申请日：2014-06-12

Applicant: Samsung Display Co., Ltd.

Inventor： Jin-Kwang Kim ,  Seung-Yong Song ,  Myung-Soo Huh ,  Suk-Won Jung ,  Choel-Min Jang ,  Jae-Hyun Kim ,  Sung-Chul Kim

IPC: C23C16/44 ,  C23C16/455 ,  C23C16/50

CPC classification number: C23C16/4412 ,  C23C16/4402 ,  C23C16/45536 ,  C23C16/45551 ,  Y10T137/794

Abstract: A vapor deposition apparatus includes a first injection unit through which a first raw gas is injected in a first direction, and a first filter unit which is mounted in the first injection unit and includes a plurality of plates separated from one another in the first direction and disposed in parallel to one another, where holes are defined in each of the plurality of plates which is detachably coupled in the first filter unit.

Abstract translation: 一种气相沉积装置包括：第一注入单元，通过该第一注入单元沿第一方向注入第一原料气体;第一过滤器单元，其安装在第一注射单元中并且包括沿第一方向彼此分离的多个板; 彼此平行设置，其中，在可拆卸地联接在第一过滤器单元中的多个板中的每一个中限定有孔。

公开(公告)号：US20150021631A1

公开(公告)日：2015-01-22

申请号：US14162465

申请日：2014-01-23

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Myung-Soo Huh ,  Sung-Chul Kim ,  Suk-Won Jung

IPC: H01L27/12

CPC classification number: H01L27/1218 ,  H01L27/1266 ,  H01L29/78603 ,  H01L29/78684

Abstract: A method of manufacturing a flexible display apparatus includes: preparing a support substrate; forming a first graphene oxide layer having a first electrical charge on the support substrate; forming a second graphene oxide layer having a second electrical charge on the first graphene oxide layer; forming a flexible substrate on the second graphene oxide layer; forming a display unit on the flexible substrate; and separating the support substrate and the flexible substrate from each other.

Abstract translation: 柔性显示装置的制造方法包括：准备支撑基板; 在所述支撑基板上形成具有第一电荷的第一石墨烯氧化物层; 在所述第一石墨烯氧化物层上形成具有第二电荷的第二石墨烯氧化物层; 在第二石墨烯氧化物层上形成柔性基板; 在柔性基板上形成显示单元; 以及将所述支撑基板和所述柔性基板彼此分离。

公开(公告)号：US12065735B2

公开(公告)日：2024-08-20

申请号：US16774409

申请日：2020-01-28

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Choel-Min Jang ,  Jin-Kwang Kim ,  Sung-Chul Kim ,  Jae-Hyun Kim ,  Seung-Yong Song ,  Suk-Won Jung ,  Myung-Soo Huh

IPC: C23C16/44 ,  C23C16/455 ,  H01J37/32

CPC classification number: C23C16/4412 ,  C23C16/4402 ,  C23C16/45536 ,  H01J37/32357 ,  H01J37/32834

Abstract: Provided is a vapor deposition apparatus including a first injection unit injecting a first raw gas in a first direction and a first filter unit mounted on the first injection unit. The first filter unit includes a plurality of plates separated from one another in the first direction and disposed in parallel to one another, each of the plurality of plates having holes therein, being detachably coupled with the first filter unit, and having the holes with sizes of horizontal cross-sections gradually increasing in a direction in which the first raw gas moves. Accordingly, a process efficiency of the vapor deposition apparatus may be enhanced.

公开(公告)号：US20220380899A1

公开(公告)日：2022-12-01

申请号：US17882967

申请日：2022-08-08

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jin-Kwang Kim ,  Seung-Yong Song ,  Myung-Soo Huh ,  Suk-Won Jung ,  Choel-Min Jang ,  Jae-Hyun Kim ,  Sung-Chul Kim

IPC: C23C16/455

Abstract: A vapor deposition apparatus for providing a deposition film on a substrate, the vapor deposition apparatus includes a plurality of first nozzle parts which injects a first raw material toward the substrate; a plurality of second nozzle parts which is alternately disposed together with the plurality of first nozzle parts and injects a second raw material toward the substrate; a diffuser unit which distributes the second raw material to the plurality of second nozzle parts; and a supply unit which supplies the second raw material to the diffuser unit.

公开(公告)号：US11408072B2

公开(公告)日：2022-08-09

申请号：US16271189

申请日：2019-02-08

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jin-Kwang Kim ,  Seung-Yong Song ,  Myung-Soo Huh ,  Suk-Won Jung ,  Choel-Min Jang ,  Jae-Hyun Kim ,  Sung-Chul Kim

IPC: C23C16/455

Abstract: A vapor deposition apparatus for providing a deposition film on a substrate, the vapor deposition apparatus includes a plurality of first nozzle parts which injects a first raw material toward the substrate; a plurality of second nozzle parts which is alternately disposed together with the plurality of first nozzle parts and injects a second raw material toward the substrate; a diffuser unit which distributes the second raw material to the plurality of second nozzle parts; and a supply unit which supplies the second raw material to the diffuser unit.

公开(公告)号：US10446753B2

公开(公告)日：2019-10-15

申请号：US15205815

申请日：2016-07-08

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jin-Kwang Kim ,  Seung-Yong Song ,  Myung-Soo Huh ,  Suk-Won Jung ,  Choel-Min Jang ,  Jae-Hyun Kim ,  Sung-Chul Kim

IPC: C23C16/44 ,  H01L51/00 ,  H01B13/30 ,  C23C14/24 ,  C23C14/56 ,  C23C16/455 ,  C23C16/50 ,  H01L51/52 ,  H01L51/56 ,  H01L27/32

Abstract: A vapor deposition apparatus in which a deposition process is performed by moving a substrate, the vapor deposition apparatus including a supply unit that injects at least one raw material gas towards the substrate, and a blocking gas flow generation unit that is disposed corresponding to the supply unit and generates a gas-flow that blocks a flow of the raw material gas.

公开(公告)号：US09368759B2

公开(公告)日：2016-06-14

申请号：US13659081

申请日：2012-10-24

Applicant: Samsung Display Co., Ltd.

Inventor： Sung-Chul Kim ,  Jae-Myong Yoo ,  Ung-Sik Kim ,  Tae-Soo Kim

IPC: G06F3/041 ,  H01L51/52 ,  H01L27/32

CPC classification number: H01L51/5281 ,  H01L27/323

Abstract: A display device includes a display unit for displaying an image, a first retarder provided on the display panel, a first polarizing plate provided on the first retarder, a touch unit provided on the first polarizing plate, a second retarder provided on the touch unit, and a second polarizing plate provided on the second retarder. With this arrangement, external light entering into the display may either be transmitted or reflected off of the touch unit, and in either case, be absorbed by the second polarizing plate without leaving the display device.

Abstract translation: 显示装置包括显示图像的显示单元，设置在显示面板上的第一延迟器，设置在第一延迟器上的第一偏振片，设置在第一偏振板上的触摸单元，设置在触摸单元上的第二延迟器， 以及设置在所述第二延迟器上的第二偏振片。 利用这种布置，进入显示器的外部光可以从触摸单元传输或反射，并且在任一情况下，都可以被第二偏振片吸收，而不会离开显示装置。

公开(公告)号：US20150108435A1

公开(公告)日：2015-04-23

申请号：US14264234

申请日：2014-04-29

Applicant: Samsung Display Co., Ltd.

Inventor： Myung-Soo Huh ,  Sung-Chul Kim ,  Jae-Hyun Kim ,  Jin-Kwang Kim

IPC: H01L51/52

CPC classification number: H01L51/5256

Abstract: An organic light-emitting device includes a substrate, an organic light-emitting diode on the substrate and including a first electrode, a second electrode, and an intermediate layer between the first electrode and the second electrode, and an encapsulation layer covering the organic light-emitting diode. The encapsulation layer includes a first inorganic layer, a first stress control layer and a first organic layer which are sequentially stacked. A Young's modulus of the first stress control layer is greater than a Young's modulus of the first inorganic layer.

Abstract translation: 一种有机发光装置，在基板上具有基板，有机发光二极管，在第一电极和第二电极之间具有第一电极，第二电极和中间层，以及覆盖有机光的封装层 发光二极管。 封装层包括依次堆叠的第一无机层，第一应力控制层和第一有机层。 第一应力控制层的杨氏模量大于第一无机层的杨氏模量。