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    Exposure system, method of forming pattern using the same and method of manufacturing display substrate using the same
    21.
    发明授权
    Exposure system, method of forming pattern using the same and method of manufacturing display substrate using the same 有权
    曝光系统，使用其形成图案的方法以及使用其制造显示基板的方法

    公开(公告)号：US08982326B2

    公开(公告)日：2015-03-17

    申请号：US13652911

    申请日：2012-10-16

    Applicant: Samsung Display Co., Ltd.

    Inventor： Jong-Kwang Lee ,  Min Kang ,  Jin-Ho Ju ,  Bong-Yeon Kim

    IPC: G03B27/72 ,  G03F1/30 ,  G03F7/20

    CPC classification number: G03F7/70575 ,  G03F1/30 ,  G03F7/70283

    Abstract: An exposure system includes an exposure apparatus and a phase shift mask. The exposure apparatus emits a multi-wavelength light including a plurality of wavelengths different from each other. The phase shift mask includes a transparent substrate and a light blocking layer. The transparent substrate includes a first surface, and a second surface opposite to the first surface. The multi-wavelength light is incident into the first surface. The transparent substrate further includes a recess which extends from the second surface toward the first surface. The light blocking layer includes a first opening which exposes the second surface of the transparent substrate, and a second opening which is spaced apart from the first opening and exposes the recess of the transparent substrate.

    Abstract translation: 曝光系统包括曝光装置和相移掩模。 曝光装置发射包括彼此不同的多个波长的多波长光。 相移掩模包括透明基板和遮光层。 透明基板包括第一表面和与第一表面相对的第二表面。 多波长光入射到第一表面。 透明基板还包括从第二表面朝向第一表面延伸的凹槽。 遮光层包括暴露透明基板的第二表面的第一开口和与第一开口间隔开并暴露透明基板的凹部的第二开口。

    Display substrate and method of manufacturing the display substrate
    25.
    发明授权
    Display substrate and method of manufacturing the display substrate 有权
    显示基板和制造显示基板的方法

    公开(公告)号：US09576987B2

    公开(公告)日：2017-02-21

    申请号：US14322859

    申请日：2014-07-02

    Applicant: SAMSUNG DISPLAY CO., LTD.

    Inventor： Seung-Bo Shim ,  Jin-Ho Ju ,  Jun-Gi Kim ,  Yang-Ho Jung

    IPC: H01L27/12 ,  H01L29/786 ,  H01L29/66 ,  H01L27/32

    CPC classification number: H01L27/1248 ,  H01L27/124 ,  H01L27/1288

    Abstract: A display substrate includes a substrate having a first region and a second region, a conductive pattern is provided in the first region of the substrate and includes a first conductive pattern and a second conductive pattern, the first conductive pattern has a gate electrode and a source electrode, the second conductive pattern has a source electrode and a drain electrode, an insulation layer pattern is positioned on the conductive pattern and exposes an outer sidewall of the conductive pattern, an organic layer is provided in the first region and the second region of the substrate and covers the insulation layer pattern, and a pixel electrode is provided on the organic layer and is electrically connected to the drain electrode through a contact hole in the organic layer.

    Abstract translation: 显示基板包括具有第一区域和第二区域的基板，在基板的第一区域中设置导体图案，并且包括第一导电图案和第二导电图案，第一导电图案具有栅电极和源极 电极，第二导电图案具有源电极和漏电极，绝缘层图案位于导电图案上并且暴露导电图案的外侧壁，有机层设置在第一区域和第二区域中 基板并覆盖绝缘层图案，并且在有机层上设置像素电极，并且通过有机层中的接触孔与漏电极电连接。

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