公开(公告)号：US10854815B2

公开(公告)日：2020-12-01

申请号：US16427091

申请日：2019-05-30

Applicant: Samsung Display Co., Ltd.

Inventor： Sangjin Han ,  Junha Park ,  Eugene Kang ,  Dongwook Kim ,  Cheollae Roh ,  Jaewan Seol ,  Seongho Jeong ,  Myungsoo Huh ,  Mingyu Seo

IPC: H01L21/00 ,  H01L27/00 ,  H01L51/00 ,  C23C14/04 ,  C23C14/24 ,  C23C14/54 ,  H01L21/66 ,  H01L27/32 ,  H01L51/56 ,  H01L51/50

Abstract: An apparatus for manufacturing a display apparatus includes: a chamber; a plurality of source units outside the chamber, wherein the plurality of source units which accommodate a deposition material and transform the deposition material into gas; a nozzle unit in the chamber, wherein the nozzle unit is connected to the plurality of source units and injects, into the chamber, the deposition material supplied from one of the plurality of source units; and a regulating unit between each of the plurality of source units and the nozzle unit, wherein the regulating unit interrupts the deposition material supplied from each of the plurality of source units to the nozzle unit and selectively connects the plurality of source units with the nozzle unit.

公开(公告)号：US10041173B2

公开(公告)日：2018-08-07

申请号：US14793562

申请日：2015-07-07

Applicant: Samsung Display Co., Ltd.

Inventor： Myungsoo Huh ,  Dongkyun Ko ,  Choelmin Jang ,  Sungchul Kim ,  Inkyo Kim ,  Cheollae Roh

IPC: C23C16/50 ,  C23C16/54 ,  H01J37/32 ,  C23C16/455 ,  H01L51/52

Abstract: An apparatus and a method of manufacturing a display apparatus are disclosed. In one aspect, the apparatus includes a chamber and an inorganic layer forming nozzle unit formed in the chamber and configured to form at least one inorganic layer. The apparatus also includes an organic layer forming nozzle unit formed in the chamber and configured to form at least one organic layer, wherein the organic layer forming nozzle unit is arranged substantially in line with the inorganic layer forming nozzle unit. The apparatus further includes a separating nozzle unit formed between the inorganic layer forming nozzle unit and the organic layer forming nozzle unit and configured to spray an inert gas.

公开(公告)号：US09806291B2

公开(公告)日：2017-10-31

申请号：US15369663

申请日：2016-12-05

Applicant: Samsung Display Co., Ltd.

Inventor： Myungsoo Huh ,  Sungchul Kim ,  Choelmin Jang ,  Cheollae Roh ,  Jaihyuk Choi

IPC: H01L51/52 ,  H01L51/00 ,  H01L51/56 ,  H01L27/32

CPC classification number: H01L51/5253 ,  H01L27/3246 ,  H01L27/3262 ,  H01L51/0097 ,  H01L51/524 ,  H01L51/56

Abstract: Provided is a cover window includes a first layer including a polymer material, a second layer above a first surface of the first layer and including an oxide of a first metal, and an intermediate region between the first layer and the second layer, wherein the intermediate region includes the oxide of the first metal where the first metal binds to a dangling bond of oxygen of the polymer material, and the oxide of the first metal included in the second layer has a different composition ratio than the oxide of the first metal included in the intermediate region.

公开(公告)号：US20170309864A1

公开(公告)日：2017-10-26

申请号：US15640945

申请日：2017-07-03

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Myungsoo Huh ,  Sunghun Key ,  Sungchul Kim ,  Cheollae Roh ,  Sukwon Jung ,  Hyunwoo Joo ,  Jaihyuk Choi

IPC: H01L51/52 ,  H01J37/32 ,  C23C16/505 ,  C23C16/455 ,  C23C16/34 ,  C23C16/04

CPC classification number: H01L51/5256 ,  C23C16/042 ,  C23C16/345 ,  C23C16/45565 ,  C23C16/505 ,  H01J37/32091 ,  H01J37/3244

Abstract: A display device and an apparatus and method for manufacturing the same are disclosed. The display device includes: a substrate; a display unit formed on the substrate; and an inorganic layer formed on the display unit, wherein a water vapor transmission rate (WVTR) of the inorganic layer is 5×10−5 g/m2 day or less. The apparatus for manufacturing a display device includes: a chamber; a shower head for spraying a mixed gas into the chamber; a plasma generation unit for forming plasma from the mixed gas; a susceptor facing the shower head and on which a substrate is seated; and a power supply unit electrically connected to the plasma generation unit, wherein a frequency of a current supplied from the power supply unit to the plasma generation unit is between about 27 MHz and about 42 MHz.

公开(公告)号：US20170170429A1

公开(公告)日：2017-06-15

申请号：US15442095

申请日：2017-02-24

Applicant: Samsung Display Co., Ltd. ,  Research & Business Foundation Sungkyunkwan University

Inventor： Myungsoo Huh ,  Sungmin Cho ,  Dongkyun Ko ,  Sungchul Kim ,  Inkyo Kim ,  Cheollae Roh ,  Sangjoon Seo ,  Seungwoo Seo ,  Choelmin Jang

IPC: H01L51/52 ,  H01L51/56 ,  C23C16/455

CPC classification number: H01L51/5253 ,  C23C16/455 ,  C23C16/45525 ,  C23C16/45565 ,  H01L27/3244 ,  H01L51/5256 ,  H01L51/5259 ,  H01L51/56 ,  H01L2251/303

Abstract: A display apparatus and an apparatus for and method of manufacturing the display apparatus. The display apparatus includes: a substrate; a display unit formed on the substrate; and a thin film encapsulation layer formed on the display unit. The thin film encapsulation layer includes an inorganic layer, and the inorganic layer includes a first sub-inorganic layer including a compound oxide including at least two of aluminum (Al), zinc (Zn), zirconium (Zn), and hafnium (Hf).