公开(公告)号：US10854815B2

公开(公告)日：2020-12-01

申请号：US16427091

申请日：2019-05-30

Applicant: Samsung Display Co., Ltd.

Inventor： Sangjin Han ,  Junha Park ,  Eugene Kang ,  Dongwook Kim ,  Cheollae Roh ,  Jaewan Seol ,  Seongho Jeong ,  Myungsoo Huh ,  Mingyu Seo

IPC: H01L21/00 ,  H01L27/00 ,  H01L51/00 ,  C23C14/04 ,  C23C14/24 ,  C23C14/54 ,  H01L21/66 ,  H01L27/32 ,  H01L51/56 ,  H01L51/50

Abstract: An apparatus for manufacturing a display apparatus includes: a chamber; a plurality of source units outside the chamber, wherein the plurality of source units which accommodate a deposition material and transform the deposition material into gas; a nozzle unit in the chamber, wherein the nozzle unit is connected to the plurality of source units and injects, into the chamber, the deposition material supplied from one of the plurality of source units; and a regulating unit between each of the plurality of source units and the nozzle unit, wherein the regulating unit interrupts the deposition material supplied from each of the plurality of source units to the nozzle unit and selectively connects the plurality of source units with the nozzle unit.