公开(公告)号：US20250107424A1

公开(公告)日：2025-03-27

申请号：US18823514

申请日：2024-09-03

Applicant: Samsung Display Co., Ltd.

Inventor： Hyoungjun Ahn ,  Taehoon Park ,  Kyoungjin Seo ,  Jinwook Lee ,  Byunggyu Chae ,  Donghyuk Choi ,  Sangjin Han

IPC: H10K71/60 ,  H01L21/67 ,  H01L21/68 ,  H01L21/683 ,  H10K59/12

Abstract: Disclosed are an apparatus for and method of manufacturing a display device. The apparatus for manufacturing a display device includes a seating portion on which a substrate having a dummy layer thereon is seated, support portions on the seating portion to support the substrate, a measurement portion facing the seating portion, and configured to measure a thickness of the dummy layer, wherein the seating portion is configured to move linearly so that the measurement portion and the dummy layer are positioned at corresponding positions based on a result of detection by the measurement portion.

公开(公告)号：US11534790B2

公开(公告)日：2022-12-27

申请号：US15806609

申请日：2017-11-08

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Sangjin Han ,  Eugene Kang ,  Junha Park ,  Mingyu Seo ,  Youjong Lee ,  Jongbun Han ,  Euna Ko ,  Sungjong Park

IPC: B05B15/68 ,  B05B13/00 ,  B05D1/02 ,  C23C16/458 ,  C23C16/455 ,  C23C14/24 ,  C23C14/54 ,  C23C14/50 ,  C23C16/448 ,  C23C14/04 ,  C23C14/12 ,  C23C16/44 ,  C23C16/46 ,  H01L51/00

Abstract: An apparatus for manufacturing a display apparatus includes a deposition source, a nozzle head, a substrate fixer, and a deposition preventer. The deposition source is outside the chamber and vaporizes or sublimates a deposition material. The nozzle head is in the chamber, is connected to the at least one deposition source, and simultaneously sprays the deposition material onto an entire surface of a display substrate. The substrate fixer is connected to the chamber and moves linearly, with the display apparatus is mounted on the substrate fixer. The deposition preventer is in the chamber surrounding an edge portion of the nozzle head and an edge portion of the substrate fixer. The deposition preventer is heated during a deposition process.

公开(公告)号：US20200024724A1

公开(公告)日：2020-01-23

申请号：US16354006

申请日：2019-03-14

Applicant: Samsung Display Co., Ltd.

Inventor： Sangjin Han ,  Junha Park ,  Myungsoo Huh ,  Cheollae Roh ,  Seongho Jeong

IPC: C23C14/24 ,  C23C14/04

Abstract: An apparatus for manufacturing a display apparatus includes a chamber configured to accommodate a first display substrate and a second display substrate therein, a deposition source positioned in the chamber and comprising a plurality of crucibles configured to move and supply at least two deposition materials to the first display substrate or the second display substrate, a mask assembly arranged between the first display substrate or the second display substrate and the deposition source, and a shutter portion arranged between the mask assembly and the deposition source and configured to control an amount of the at least two deposition materials supplied from the plurality of crucibles.

公开(公告)号：US20240368750A1

公开(公告)日：2024-11-07

申请号：US18779088

申请日：2024-07-22

Applicant: Samsung Display Co., Ltd.

Inventor： Sangjin Han ,  Junha Park ,  Myungsoo Huh ,  Cheollae Roh ,  Seongho Jeong

IPC: C23C14/24 ,  C23C14/04

Abstract: An apparatus for manufacturing a display apparatus includes a chamber configured to accommodate a first display substrate and a second display substrate therein, a deposition source positioned in the chamber and comprising a plurality of crucibles configured to move and supply at least two deposition materials to the first display substrate or the second display substrate, a mask assembly arranged between the first display substrate or the second display substrate and the deposition source, and a shutter portion arranged between the mask assembly and the deposition source and configured to control an amount of the at least two deposition materials supplied from the plurality of crucibles.

公开(公告)号：US12077847B2

公开(公告)日：2024-09-03

申请号：US16354006

申请日：2019-03-14

Applicant: Samsung Display Co., Ltd.

Inventor： Sangjin Han ,  Junha Park ,  Myungsoo Huh ,  Cheollae Roh ,  Seongho Jeong

IPC: C23C14/00 ,  C23C14/04 ,  C23C14/24

CPC classification number: C23C14/243 ,  C23C14/042

Abstract: An apparatus for manufacturing a display apparatus includes a chamber configured to accommodate a first display substrate and a second display substrate therein, a deposition source positioned in the chamber and comprising a plurality of crucibles configured to move and supply at least two deposition materials to the first display substrate or the second display substrate, a mask assembly arranged between the first display substrate or the second display substrate and the deposition source, and a shutter portion arranged between the mask assembly and the deposition source and configured to control an amount of the at least two deposition materials supplied from the plurality of crucibles.

公开(公告)号：US10854815B2

公开(公告)日：2020-12-01

申请号：US16427091

申请日：2019-05-30

Applicant: Samsung Display Co., Ltd.

Inventor： Sangjin Han ,  Junha Park ,  Eugene Kang ,  Dongwook Kim ,  Cheollae Roh ,  Jaewan Seol ,  Seongho Jeong ,  Myungsoo Huh ,  Mingyu Seo

IPC: H01L21/00 ,  H01L27/00 ,  H01L51/00 ,  C23C14/04 ,  C23C14/24 ,  C23C14/54 ,  H01L21/66 ,  H01L27/32 ,  H01L51/56 ,  H01L51/50

Abstract: An apparatus for manufacturing a display apparatus includes: a chamber; a plurality of source units outside the chamber, wherein the plurality of source units which accommodate a deposition material and transform the deposition material into gas; a nozzle unit in the chamber, wherein the nozzle unit is connected to the plurality of source units and injects, into the chamber, the deposition material supplied from one of the plurality of source units; and a regulating unit between each of the plurality of source units and the nozzle unit, wherein the regulating unit interrupts the deposition material supplied from each of the plurality of source units to the nozzle unit and selectively connects the plurality of source units with the nozzle unit.