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公开(公告)号:US10170502B2
公开(公告)日:2019-01-01
申请号:US15380596
申请日:2016-12-15
Applicant: Samsung Display Co., Ltd.
Inventor: Yu-Gwang Jeong , Hyun Min Cho , Su Bin Bae , Shin Il Choi , Sang Gab Kim
IPC: H01L27/12 , H01L29/417 , H01L21/311 , G02F1/1368 , H01L27/32
Abstract: A transistor array panel is manufactured by a method that reduces or obviates the need for highly selective etching agents or complex processes requiring multiple photomasks to create contact holes. The panel includes: a substrate; a buffer layer positioned on the substrate; a semiconductor layer positioned on the buffer layer; an intermediate insulating layer positioned on the semiconductor layer; and an upper conductive layer positioned on the intermediate insulating layer, wherein the semiconductor layer includes a first contact hole, the intermediate insulating layer includes a second contact hole positioned in an overlapping relationship with the first contact hole, and the upper conductive layer is in contact with a side surface of the semiconductor layer in the first contact hole.
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公开(公告)号:US10096716B2
公开(公告)日:2018-10-09
申请号:US15271504
申请日:2016-09-21
Applicant: Samsung Display Co., Ltd.
Inventor: Yu-Gwang Jeong , Hyun Min Cho , Su Bin Bae , Shin Il Choi
IPC: H01L29/10 , H01L29/12 , H01L29/786 , H01L27/12
Abstract: A thin film transistor array panel includes a substrate; a data line disposed on the substrate; a buffer layer disposed on the substrate and spaced apart from the data line in a plan view; a thin film transistor disposed on the buffer layer, the thin film transistor including an oxide semiconductor layer; and a pixel electrode connected to the thin film transistor.
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公开(公告)号:US09704896B2
公开(公告)日:2017-07-11
申请号:US15004392
申请日:2016-01-22
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor: Duk-Sung Kim , Shin Il Choi , Su Bin Bae , Yu-Gwang Jeong
IPC: H01L27/12 , G02F1/1362 , G02F1/1335 , G02F1/1333 , G02F1/1343
CPC classification number: H01L27/1259 , G02F1/1333 , G02F1/133345 , G02F1/133516 , G02F1/134309 , G02F1/136227 , G02F1/136286 , G02F2001/134372 , G02F2001/136222 , H01L27/1237 , H01L27/124 , H01L27/1248 , H01L27/1262
Abstract: A manufacturing method includes forming a gate member and a common electrode line on a substrate. A gate insulating layer is formed on the gate member and the common electrode line. A semiconductor member and a data member are formed on the gate insulating layer. A first passivation layer is formed on the semiconductor member and the data member. A plurality of color filters is formed on the first passivation layer. A conductor layer and a second passivation layer are formed on the plurality of color filters. A first contact hole exposes a common electrode. A second contact hole exposes the drain electrode. The first and second contact holes are formed by a photolithography process. A pixel electrode connected to the drain electrode is formed through the first contact hole. A connecting member connected to the common electrode line and the common electrode is formed through the second contact hole.
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