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21.发明申请公开(公告)号：US20170038683A1
公开(公告)日：2017-02-09
申请号：US15195395
申请日：2016-06-28
IPC分类号： G03F7/039 , C08F220/68 , C08F216/16 , C08F216/10 , G03F7/038 , C07D327/08 , G03F7/20 , G03F7/38 , G03F7/32 , C07C309/12 , C07C321/30 , C08F224/00 , G03F7/16
CPC分类号： G03F7/039 , C07C309/12 , C07C2601/14 , C07C2602/42 , C07C2603/74 , C07D327/08 , C08F220/20 , C08F220/38 , C08F2220/1891 , C08F2220/283 , C08F2220/302 , C08F2220/303 , C08F2220/382 , G03F7/0045 , G03F7/0046 , G03F7/038 , G03F7/0397 , G03F7/11 , G03F7/168 , G03F7/2004 , G03F7/2041 , G03F7/322 , G03F7/38
摘要： The present invention provides a compound shown by the formula (1), wherein R1 represents a hydrogen atom, a fluorine atom, a methyl group, or a trifluoromethyl group; A represents a single bond or a linear divalent hydrocarbon group having 1 to 30 carbon atoms or a branched or cyclic divalent hydrocarbon group having 3 to 30 carbon atoms, in which the hydrocarbon group may contain a heteroatom, and a part or all of hydrogen atoms in the hydrocarbon group may be substituted with a group containing a heteroatom; “n” represents 0 or 1, provided that “n” is 0 when A is a single bond; and M+ represents a cation. This compound is suitable as a raw material of a polymer compound usable for a base resin of a resist composition that has high resolution and high sensitivity and is excellent in balance of lithography properties such as LWR and CDU.
摘要翻译： 其中R1表示氢原子，氟原子，甲基或三氟甲基; A表示单键或碳原子数为1〜30的直链二价烃基或碳原子数3〜30的支链状或环状的二价烃基，该烃基可含有杂原子，部分或全部为氢原子 在烃基中可以被含有杂原子的基团取代; “n”表示0或1，条件是当A为单键时“n”为0; M +表示阳离子。 该化合物适合作为抗蚀剂组合物的基础树脂的高分子化合物的原料，其具有高分辨率和高灵敏度，并且平版印刷性能如LWR和CDU之间的平衡优异。
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22.发明申请CONDUCTIVE POLYMER COMPOSITION, COATED ARTICLE, PATTERNING PROCESS AND SUBSTRATE 有权导电聚合物组合物，涂层制品，图案处理和基材公开(公告)号：US20160223909A1
公开(公告)日：2016-08-04
申请号：US14979781
申请日：2015-12-28
发明人： Takayuki NAGASAWA , Jun HATAKEYAMA
CPC分类号： G03F7/093 , C07C227/06 , C07C227/08 , C07C227/12 , C08F220/24 , C08G73/0266 , C08L2201/04 , C09D11/52 , C09D179/02 , G03C1/89 , G03F7/0382 , G03F7/039 , G03F7/0392 , G03F7/11 , G03F7/2059 , G03F7/322 , H01B1/128 , C08L33/16 , C08K5/09 , C08K5/19 , C08K5/42 , C08L25/18
摘要： The present invention provides a conductive polymer composition which contains (A) a polyaniline-based conductive polymer having a repeating unit represented by the general formula (1), (B) a polyanion, and (C) a betaine compound, wherein RA1 to RA4 independently represent a hydrogen atom, a halogen atom, or a linear, branched, or cyclic monovalent hydrocarbon group having 1 to 20 carbon atoms and optionally containing a heteroatom; and RA1 and RA2, or RA3 and RA4 may be bonded to each other to form a ring. There can be provided a conductive polymer composition that has excellent antistatic performance and applicability, does not adversely affect a resist, and can be suitably used in lithography using electron beam or the like.
摘要翻译： 本发明提供一种导电性聚合物组合物，其含有（A）具有由通式（1）表示的重复单元的聚苯胺系导电性聚合物，（B）聚阴离子和（C）甜菜碱化合物，其中RA1〜RA4 独立地表示氢原子，卤素原子或具有1-20个碳原子并且任选地含有杂原子的直链，支链或环状单价烃基; 并且RA1和RA2或RA3和RA4可以彼此键合形成环。 可以提供具有优异的抗静电性能和适用性的导电聚合物组合物，不会对抗蚀剂产生不利影响，并且可以适用于使用电子束等的光刻中。
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公开(公告)号：US20160075875A1
公开(公告)日：2016-03-17
申请号：US14831452
申请日：2015-08-20
发明人： Jun HATAKEYAMA , Takayuki NAGASAWA
CPC分类号： C08L81/02 , C08G2261/1424 , C08G2261/314 , C08G2261/3221 , C08G2261/3223 , C08G2261/3225 , C08G2261/3226 , C08G2261/512 , C08G2261/794 , C08L25/18 , C08L33/16 , C08L65/00 , C09D11/52 , H01B1/125 , H01L51/0037 , C08K5/03 , C08K5/09
摘要： A conductive polymer material includes a π-conjugated polymer, dopant polymer which contains a repeating unit having a sulfo group and has a weight-average molecular weight in the range of 1,000 to 500,000, and amphoteric ion compound represented by the following general formula (1), wherein RC1 and RC2 independently represent a linear, branched, or cyclic alkyl group having 1 to 10 carbon atoms, a linear, branched, or cyclic alkoxy group having 1 to 10 carbon atoms, an acyl group having 2 to 10 carbon atoms, an acyloxy group having 2 to 10 carbon atoms, an alkoxycarbonyl group having 2 to 10 carbon atoms, a hydroxyl group, a nitro group, a halogen atom; and “m” and “n” are each an integer of 0 to 4. A conductive polymer material with low acidity that suppresses the agglomeration of particles with overtime, with an excellent stability in a solution state can be provided.
摘要翻译： 导电性聚合物材料包括共轭聚合物，掺杂剂聚合物，其含有具有磺基的重复单元，重均分子量在1,000至500,000范围内，以及由以下通式表示的两性离子化合物 1），其中RC1和RC2独立地表示具有1至10个碳原子的直链，支链或环状烷基，具有1至10个碳原子的直链，支链或环状烷氧基，具有2至10个碳原子的酰基 碳原子数2〜10的酰氧基，碳原子数2〜10的烷氧基羰基，羟基，硝基，卤素原子， “m”和“n”各自为0〜4的整数。可以提供具有低浓度的抑制粒子随时间聚集，具有优异的溶液状态稳定性的酸性低的导电性高分子材料。
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公开(公告)号：US20150340118A1
公开(公告)日：2015-11-26
申请号：US14717323
申请日：2015-05-20
发明人： Takayuki NAGASAWA , Jun HATAKEYAMA , Koji HASEGAWA
CPC分类号： C09D165/00 , C08G73/0266 , C08G2261/1424 , C08G2261/3223 , C08G2261/44 , C08G2261/512 , C08G2261/794 , C08G2261/90 , C08J5/18 , C08J2341/00 , C08J2441/00 , C08L41/00 , C08L65/00 , C09D5/24 , C09D179/02 , H01B1/125 , H01B1/127 , H01B1/128 , H01L51/0037 , C08L33/16 , C08L25/14
摘要： A conductive polymer composite includes (A) a π-conjugated polymer and (B) a dopant polymer which contains a repeating unit “a” which is shown by the following general formula (1) having weight-average molecular weight thereof in the range of 1,000 to 500,000, wherein, R1 represents a hydrogen atom or a methyl group; R2 represents a single bond, an ester group, or a linear, branched, or cyclic hydrocarbon group having 1 to 12 carbon atoms which may optionally contain any one of an ether group and an ester group or both; Z represents a phenylene group, a naphthylene group, or an ester group; and “a” is in the range of 0
摘要翻译： 导电性聚合物复合体包括（A）共轭聚合物和（B）含有重复单元“a”的掺杂剂聚合物，其由以下通式（1）表示，其重均分子量在该范围内 为1000〜500,000，其中R1表示氢原子或甲基; R 2表示单键，酯基或具有1至12个碳原子的直链，支链或环状烃基，其可任选地含有醚基和酯基中的任一个或两者; Z表示亚苯基，亚萘基或酯基; 和“a”在0
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25.发明申请SULFONIUM SALT-CONTAINING POLYMER, RESIST COMPOSITION, PATTERNING PROCESS, AND SULFONIUM SALT MONOMER AND MAKING METHOD 审中-公开含硫酸钠聚合物，耐腐蚀组合物，花纹过程和硫酸钡单体及其制备方法公开(公告)号：US20140296561A1
公开(公告)日：2014-10-02
申请号：US14306523
申请日：2014-06-17
IPC分类号： C07C309/24 , C07C303/02 , C07C309/23
CPC分类号： C07C309/20 , C07C69/54 , C07C303/32 , C07C309/12 , C07C381/12 , C08F20/38 , C08F220/18 , C08F220/24 , C08F220/38 , C08F228/02 , G03F7/0045 , G03F7/0046 , G03F7/0392 , G03F7/0397 , G03F7/2041 , G03F7/38 , Y10S430/106 , Y10S430/111 , Y10S430/122
摘要： A sulfonium salt having a 4-fluorophenyl group is introduced as recurring units into a polymer comprising hydroxyphenyl(meth)acrylate units and acid labile group-containing (meth)acrylate units to form a polymer which is useful as a base resin in a resist composition. The resist composition has a high sensitivity, high resolution and minimized LER.
摘要翻译： 将具有4-氟苯基的锍盐作为重复单元引入到包含羟基苯基（甲基）丙烯酸酯单元和含酸不稳定基团的（甲基）丙烯酸酯单元的聚合物中，以形成可用作抗蚀剂组合物中的基础树脂的聚合物 。 抗蚀剂组合物具有高灵敏度，高分辨率和最小化的LER。
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公开(公告)号：US20140141377A1
公开(公告)日：2014-05-22
申请号：US14084910
申请日：2013-11-20
发明人： Jun HATAKEYAMA
CPC分类号： G03F7/32 , G03F7/0045 , G03F7/0397 , G03F7/168 , G03F7/2037 , G03F7/2059 , G03F7/2065 , G03F7/30 , G03F7/322 , Y10S430/143 , Y10S430/146
摘要： An aqueous solution containing 0.1-10 wt % of a guanidine is a useful developer for photosensitive resist materials. A resist pattern is formed by applying a chemically amplified positive resist composition onto a substrate to form a coating, baking, exposing the coating to high-energy radiation, and developing the exposed coating in a guanidine-containing aqueous solution.
摘要翻译： 含有0.1-10重量％的胍的水溶液是用于感光抗蚀剂材料的有用的显影剂。 通过将化学放大的正性抗蚀剂组合物施加到基底上以形成涂层，烘烤，使涂层暴露于高能量辐射，以及在含胍水溶液中显影曝光的涂层，形成抗蚀剂图案。
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公开(公告)号：US20240341654A1
公开(公告)日：2024-10-17
申请号：US18641734
申请日：2024-04-22
发明人： Jun HATAKEYAMA
IPC分类号： A61B5/268
CPC分类号： A61B5/268 , A61B2562/0209 , A61B2562/125
摘要： The present invention is a bio-electrode, including: a living-body contact layer; and a substrate, wherein the living-body contact layer has a micropillar having a diameter within a range of 0.01 to 500 μm and a height within a range of 0.1 to 1,000 μm, and has an ionic polymer (A) as a material, and the component (A) has a repeating unit-a of one or more selected from a fluorosulfonic acid, a fluorosulfonimide, and a fluorosulfonamide, and has a weight-average molecular weight within a range of 1,000 to 500,000. This provides: a bio-electrode that is a thin film and highly transparent, that has high sensitivity to a bio-signal, excellent bio-compatibility, and a lightweight property, that can be manufactured at a low cost, that does not considerably deteriorate the sensitivity to the bio-signal even when being wet, dried, or attached to skin for a long term, and that is comfortable and free from itching, red spots, rash, etc. of the skin; and a method for manufacturing a bio-electrode.
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公开(公告)号：US20240027903A1
公开(公告)日：2024-01-25
申请号：US18349633
申请日：2023-07-10
发明人： Jun HATAKEYAMA , Masahiro FUKUSHIMA
IPC分类号： G03F7/004 , G03F7/039 , G03F7/038 , C07C65/03 , C07C65/21 , C07C311/08 , C07C321/28 , C07C69/96 , G03F7/20
CPC分类号： G03F7/0045 , G03F7/0397 , G03F7/0382 , G03F7/0388 , C07C65/03 , C07C65/21 , C07C311/08 , C07C321/28 , C07C69/96 , G03F7/2037
摘要： Provided are: a resist material having high sensitivity and improved LWR (line width roughness) and CDU (critical dimension uniformity) for both of positive-type and negative-type resists; and a patterning process using this resist material: a resist material, including, as a quencher: a sulfonium salt of a substituted or unsubstituted hydroxy(trifluoromethoxy)benzoic acid; and/or a sulfonium salt of a substituted or unsubstituted hydroxy(trifluoromethylthio)benzoic acid.
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公开(公告)号：US20230159766A1
公开(公告)日：2023-05-25
申请号：US17916899
申请日：2021-03-24
发明人： Takayuki NAGASAWA , Jun HATAKEYAMA
IPC分类号： C09D5/24 , C08F220/38 , C08F212/14 , C08K5/17 , C09D7/20 , C09D7/63 , C09D7/45 , C09D133/16 , C09D125/18 , C09D11/52 , C09D11/38 , C09D11/107 , C09D11/033 , H10K85/10 , H10K71/13
CPC分类号： C09D5/24 , C08F220/382 , C08F212/30 , C08F212/24 , C08K5/175 , C09D7/20 , C09D7/63 , C09D7/45 , C09D133/16 , C09D125/18 , C09D11/52 , C09D11/38 , C09D11/107 , C09D11/033 , H10K85/151 , H10K85/141 , H10K85/113 , H10K71/135 , H10K50/17
摘要： A conductive polymer composition containing: a composite containing a π-conjugated polymer (A) and a polymer (B) shown by the following general formula (2); H2O (D) for dispersing the composite; and a water-soluble organic solvent (C). This provides a composition which has favorable filterability and film formability, and which is capable of relieving acidity and forming a conductive film with high transparency. Moreover, since the H2O dispersion of the conductive polymer compound is mixed with an organic solvent, the surface tension and the contact angle are so low that leveling property on a substrate is imparted. The composition is usable in droplet-coating methods. Since an organic solvent having a higher boiling point than H2O is used as the organic solvent, the composition can avoid solid content precipitation around a nozzle and solid content precipitation due to drying between ejecting the liquid material from a nozzle tip and landing on a substrate.
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公开(公告)号：US20220363966A1
公开(公告)日：2022-11-17
申请号：US17710166
申请日：2022-03-31
发明人： Jun HATAKEYAMA , Osamu WATANABE
IPC分类号： C09J183/10 , C08G77/442 , C08K3/04 , C08K3/08 , C09J9/02 , A61B5/265 , A61B5/268
摘要： A bio-electrode composition contains (A) a silicone bonded to an ionic polymer and having a structure containing a T unit shown by the following general formula (T1): (R0SiO3/2) (T1), the structure excluding a cage-like structure. In the formula, R0 represents a linking group to the ionic polymer. The ionic polymer is a polymer containing a repeating unit having a structure selected from the group consisting of salts of ammonium, lithium, sodium, potassium, and silver formed with any of fluorosulfonic acid, fluorosulfonimide, and N-carbonyl-fluorosulfonamide. Thus, the present invention provides a bio-electrode composition capable of forming a living body contact layer for a bio-electrode which is excellent in electric conductivity, biocompatibility, stretchability, and adhesion, soft, light-weight, and manufacturable at low cost, and which prevents significant reduction in the electric conductivity even when wetted with water or dried.
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