公开(公告)号：US20160322211A1

公开(公告)日：2016-11-03

申请号：US15207136

申请日：2016-07-11

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Matthew Derstine ,  Kenneth P. Gross ,  David W. Shortt ,  Wei Zhao ,  Anant Chimmalgi ,  Jincheng Wang

IPC: H01J65/04 ,  H05H1/24

CPC classification number: H01J65/042 ,  H01J61/28 ,  H01J61/523 ,  H01J65/00 ,  H05H1/24

Abstract: A system for controlling convective flow in a light-sustained plasma includes an illumination source configured to generate illumination, a plasma cell including a bulb for containing a volume of gas, a collector element arranged to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas contained within the bulb. Further, the plasma cell is disposed within a concave region of the collector element, where the collector element includes an opening for propagating a portion of a plume of the plasma to a region external to the concave region of the collect element.

Abstract translation: 用于控制光持久等离子体中的对流的系统包括被配置为产生照明的照明源，包括用于容纳一定体积的气体的灯泡的等离子体单元，被布置成将来自照明源的照明聚焦到气体体积中的集电器元件 以便在容纳在灯泡内的气体的体积内产生等离子体。 此外，等离子体单元设置在集电器元件的凹入区域内，其中集电器元件包括用于将等离子体的一部分羽流传播到收集元件的凹部区域外部的区域的开口。

公开(公告)号：US20160066402A1

公开(公告)日：2016-03-03

申请号：US14935774

申请日：2015-11-09

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Matthew Derstine

IPC: H05H1/24 ,  H01J65/04

CPC classification number: H05H1/24 ,  H01J61/30 ,  H01J65/04 ,  H05G2/003 ,  H05G2/008

Abstract: A plasma cell for controlling convection includes a transmission element configured to receive illumination from an illumination source in order to generate a plasma within a plasma generation region of the volume of gas. The transmission element of the plasma cell is at least partially transparent to at least a portion of the illumination generated by the illumination source and at least a portion of broadband radiation emitted by the plasma. The plasma cell also includes one or more gas return channels formed within the transmission element for transferring gas from a region above the plasma generation region to a region below the plasma generation region.

Abstract translation: 用于控制对流的等离子体单元包括被配置为从照明源接收照明的传输元件，以便在气体体积的等离子体产生区域内产生等离子体。 等离子体单元的透射元件对于照明源产生的照明的至少一部分和由等离子体发射的宽带辐射的至少一部分至少部分透明。 等离子体单元还包括形成在传输元件内的一个或多个气体返回通道，用于将气体从等离子体产生区域上方的区域传送到等离子体产生区域下方的区域。

公开(公告)号：US09263238B2

公开(公告)日：2016-02-16

申请号：US14670210

申请日：2015-03-26

Applicant: KLA-Tencor Corporation

Inventor： Lauren Wilson ,  Anant Chimmalgi ,  Ilya Bezel ,  Anatoly Shchemelinin ,  Matthew Derstine ,  Gildardo Delgado

IPC: H01G2/00 ,  H01J37/32

CPC classification number: H01J37/32339 ,  H01J37/32449 ,  H01J65/04

Abstract: An open plasma lamp includes a cavity section. A gas input and gas output of the cavity section are arranged to flow gas through the cavity section. The plasma lamp also includes a gas supply assembly fluidically coupled to the gas input of the cavity section and configured to supply gas to an internal volume of the cavity section. The plasma lamp also includes a nozzle assembly fluidically coupled to the gas output of the cavity section. The nozzle assembly and cavity section are arranged such that a volume of the gas receives pumping illumination from a pump source, where a sustained plasma emits broadband radiation. The nozzle assembly is configured to establish a convective gas flow from within the cavity section to a region external to the cavity section such that a portion of the sustained plasma is removed from the cavity section by the gas flow.

Abstract translation: 开放式等离子体灯包括空腔部分。 空腔部分的气体输入和气体输出被布置成使气体流过空腔部分。 等离子体灯还包括气体供应组件，其流体地耦合到空腔部分的气体输入并且被配置为将气体供应到空腔部分的内部容积。 等离子体灯还包括流体耦合到空腔部分的气体输出的喷嘴组件。 喷嘴组件和空腔部分布置成使得一定体积的气体从泵浦源接收泵送照明，其中持续等离子体发射宽带辐射。 喷嘴组件被配置成建立从空腔部分内的对流气体流到空腔部分外部的区域，使得通过气流将一部分持续等离子体从空腔部分移除。

公开(公告)号：US20150282288A1

公开(公告)日：2015-10-01

申请号：US14675322

申请日：2015-03-31

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Richard Solarz ,  Sebaek Oh ,  Matthew Derstine

IPC: H05G2/00

CPC classification number: H05G2/003 ,  H01J61/025 ,  H01J61/302 ,  H01J65/042 ,  H05G2/001 ,  H05G2/008

Abstract: A laser-sustained plasma light source for transverse plasma pumping includes a pump source configured to generate pumping illumination, one or more illumination optical elements and a gas containment structure configured to contain a volume of gas. The one or more illumination optical elements are configured to sustain a plasma within the volume of gas of the gas containment structure by directing pump illumination along a pump path to one or more focal spots within the volume of gas. The one or more collection optical elements are configured to collect broadband radiation emitted by the plasma along a collection path. Further, the illumination optical elements are configured to define the pump path such that pump illumination impinges the plasma along a direction transverse to a direction of propagation of the emitted broadband light of the collection path such that the pump illumination is substantially decoupled from the emitted broadband radiation.

Abstract translation: 用于横向等离子体泵浦的激光维持等离子体光源包括被配置为产生泵浦照明的泵浦源，一个或多个照明光学元件和被配置为容纳一定体积的气体的气体容纳结构。 一个或多个照明光学元件被配置为通过沿着泵路径将泵浦照明引导到气体体积内的一个或多个焦点，来维持气体容纳结构的气体体积内的等离子体。 一个或多个收集光学元件被配置为收集由等离子体沿着收集路径发射的宽带辐射。 此外，照明光学元件被配置为限定泵路径，使得泵照明沿着横向于收集路径的发射宽带光的传播方向的方向照射等离子体，使得泵浦照明基本上与发射的宽带 辐射。

公开(公告)号：US10976025B2

公开(公告)日：2021-04-13

申请号：US15895868

申请日：2018-02-13

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Eugene Shifrin ,  Matthew Panzer ,  Matthew Derstine ,  Jincheng Wang ,  Anant Chimmalgi ,  Rajeev Patil ,  Rudolf Brunner

IPC: H01J61/52 ,  H01J61/40 ,  F21V9/06 ,  H01J61/12 ,  H01J61/14 ,  H01J61/16 ,  H01J61/20 ,  H01J61/34 ,  H01J61/35 ,  H01J65/04

Abstract: A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma. The plasma bulb is transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.

公开(公告)号：US10887974B2

公开(公告)日：2021-01-05

申请号：US15187590

申请日：2016-06-20

Applicant: KLA-Tencor Corporation

Inventor： Matthew Derstine ,  Ilya Bezel ,  Anatoly Shchemelinin ,  Eugene Shifrin

IPC: H05G2/00 ,  H05H1/24

Abstract: A system for generating laser sustained broadband light includes a pump source configured to generate a pumping beam, a gas containment structure for containing a gas and a multi-pass optical assembly. The multi-pass optical assembly includes one or more optical elements configured to perform a plurality of passes of the pumping beam through a portion of the gas to sustain a broadband-light-emitting plasma. The one or more optical elements are arranged to collect an unabsorbed portion of the pumping beam transmitted through the plasma and direct the collected unabsorbed portion of the pumping beam back into the portion of the gas.

公开(公告)号：US09927094B2

公开(公告)日：2018-03-27

申请号：US13741566

申请日：2013-01-15

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Eugene Shifrin ,  Matthew Panzer ,  Matthew Derstine ,  Jincheng Wang ,  Anant Chimmalgi ,  Rajeev Patil ,  Rudolf Brunner

IPC: H01J65/04 ,  F21V9/06 ,  H01J61/52 ,  H01J61/12 ,  H01J61/14 ,  H01J61/16 ,  H01J61/20 ,  H01J61/34 ,  H01J61/35 ,  H01J61/40

CPC classification number: F21V9/06 ,  H01J61/125 ,  H01J61/14 ,  H01J61/16 ,  H01J61/20 ,  H01J61/34 ,  H01J61/35 ,  H01J61/40 ,  H01J61/523 ,  H01J65/04

Abstract: A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma, the plasma bulb being transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.

公开(公告)号：US09721761B2

公开(公告)日：2017-08-01

申请号：US15043804

申请日：2016-02-15

Applicant: KLA-Tencor Corporation

Inventor： Lauren Wilson ,  Anant Chimmalgi ,  Ilya Bezel ,  Anatoly Shchemelinin ,  Matthew Derstine ,  Gildardo Delgado

IPC: H01J37/00 ,  H01J37/32 ,  H01J65/04

CPC classification number: H01J37/32339 ,  H01J37/32449 ,  H01J65/04

Abstract: An open plasma lamp includes a cavity section. A gas input and gas output of the cavity section are arranged to flow gas through the cavity section. The plasma lamp also includes a gas supply assembly fluidically coupled to the gas input of the cavity section and configured to supply gas to an internal volume of the cavity section. The plasma lamp also includes a nozzle assembly fluidically coupled to the gas output of the cavity section. The nozzle assembly and cavity section are arranged such that a volume of the gas receives pumping illumination from a pump source, where a sustained plasma emits broadband radiation. The nozzle assembly is configured to establish a convective gas flow from within the cavity section to a region external to the cavity section such that a portion of the sustained plasma is removed from the cavity section by the gas flow.

公开(公告)号：US09558858B2

公开(公告)日：2017-01-31

申请号：US14459155

申请日：2014-08-13

Applicant: KLA-Tencor Corporation

Inventor： David W. Shortt ,  Steven R. Lange ,  Matthew Derstine ,  Kenneth P. Gross ,  Wei Zhao ,  Ilya Bezel ,  Anatoly Shchemelinin

IPC: G21K5/00 ,  H05H1/46

CPC classification number: G21K5/00

Abstract: The inspection of a sample with VUV light from a laser sustained plasma includes generating pumping illumination including a first selected wavelength, or range of wavelength, containing a volume of gas suitable for plasma generation, generating broadband radiation including a second selected wavelength, or range of wavelengths, by forming a plasma within the volume of gas by focusing the pumping illumination into the volume of gas, illuminating a surface of a sample with the broadband radiation emitted from the plasma via an illumination pathway, collecting illumination from a surface of the sample, focusing the collected illumination onto a detector via a collection pathway to form an image of at least a portion of the surface of the sample and purging the illumination pathway and/or the collection pathway with a selected purge gas.

Abstract translation: 使用来自激光持续等离子体的VUV光检测样品包括产生包括第一选定波长或波长范围的泵浦照明，其包含适于等离子体产生的气体体积，产生包括第二选定波长的宽度辐射或范围 通过将泵浦照明聚焦到气体体积中，通过将等离子体聚焦在气体体积中，利用从等离子体经由照明路径发射的宽带辐射来照射样品的表面，从样品的表面收集照明， 通过收集路径将收集的照明聚焦到检测器上，以形成样品表面的至少一部分的图像，并用所选择的吹扫气体吹扫照明路径和/或收集路径。

公开(公告)号：US20160381776A1

公开(公告)日：2016-12-29

申请号：US15187590

申请日：2016-06-20

Applicant: KLA-Tencor Corporation

Inventor： Matthew Derstine ,  Ilya Bezel ,  Anatoly Shchemelinin ,  Eugene Shifrin

IPC: H05H1/24

CPC classification number: H05G2/008

Abstract: A system for generating laser sustained broadband light includes a pump source configured to generate a pumping beam, a gas containment structure for containing a gas and a multi-pass optical assembly. The multi-pass optical assembly includes one or more optical elements configured to perform a plurality of passes of the pumping beam through a portion of the gas to sustain a broadband-light-emitting plasma. The one or more optical elements are arranged to collect an unabsorbed portion of the pumping beam transmitted through the plasma and direct the collected unabsorbed portion of the pumping beam back into the portion of the gas.

Abstract translation: 用于产生激光持续宽带光的系统包括被配置为产生泵浦光束的泵浦源，用于容纳气体的气体容纳结构和多遍光学组件。 多遍光学组件包括一个或多个光学元件，其被配置为执行泵浦光束通过气体的一部分的多次通过以维持宽带发光等离子体。 一个或多个光学元件被布置成收集透射通过等离子体的泵送光束的未吸收部分，并将所收集的未吸收的泵送光束部分引导回到气体的该部分中。