公开(公告)号：US4962313A

公开(公告)日：1990-10-09

申请号：US448270

申请日：1989-12-11

Applicant: Harald Rose

Inventor： Harald Rose

IPC: H01J37/153

CPC classification number: H01J37/153

Abstract: The invention relates to an imaging corrector of the Wien type which is especially suitable for use in an electron microscope. The corrector includes an arrangement of at least eight electrodes and at least eight magnetic poles and is mounted between two electron lenses. The corrector simultaneously corrects the chromatic and spherical aberrations especially of electron lenses of low-voltage electron microscopes. The corrector begins and ends at intermediate image planes and has an intermediate image plane in its center. The intermediate image plane at the center coacts with two symmetry planes located between the intermediate image planes for the desired imaging characteristics. All chromatic and spherical aberrations for electrons of any desired energy can be corrected with two of the correctors coacting with a thick telescopic round lens disposed therebetween.

Abstract translation: 本发明涉及一种特别适用于电子显微镜的维恩型成像校正器。 校正器包括至少八个电极和至少八个磁极的布置，并且安装在两个电子透镜之间。 校正器同时校正低电压电子显微镜的电子透镜的色差和球面像差。 校正器在中间像平面处开始和结束，并且在其中心具有中间像平面。 位于中间图像平面之间的中间图像平面与用于所需成像特征的两个对称面共同作用。 任何所需能量的电子的所有色差和球面像差都可以用两个校准器进行校正，这两个校正器与设置在它们之间的厚伸缩式圆形透镜共同作用。

公开(公告)号：US4740704A

公开(公告)日：1988-04-26

申请号：US907040

申请日：1986-09-12

Applicant: Harald Rose ,  Stefan Lanio

Inventor： Harald Rose ,  Stefan Lanio

IPC: H01J37/05 ,  H01J37/26 ,  H01J49/44 ,  H01J3/14 ,  G21K1/08

CPC classification number: H01J37/05

Abstract: The invention is directed to an image forming omega filter having pole pieces with straight edges which has good local resolution and very good energy resolution. The omega filter includes four deflection regions, with deflection angles greater than 90.degree..

Abstract translation: 本发明涉及一种具有直边的极片的图像形成ω滤波器，其具有良好的局部分辨率和非常好的能量分辨率。 ω滤波器包括四个偏转区域，偏转角大于90°。

公开(公告)号：US07902506B2

公开(公告)日：2011-03-08

申请号：US12070055

申请日：2008-02-14

Applicant: Rasmus Schröder ,  Bastian Barton ,  Gerd Benner ,  Harald Rose

Inventor： Rasmus Schröder ,  Bastian Barton ,  Gerd Benner ,  Harald Rose

IPC: G01N23/00

CPC classification number: H01J37/26 ,  H01J37/295 ,  H01J2237/041 ,  H01J2237/0453 ,  H01J2237/1534 ,  H01J2237/2455 ,  H01J2237/2614 ,  H01J2237/2802 ,  H01J2237/2809

Abstract: A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a article beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting element, components shadowing the particle beam are avoided, so that proper information content is achieved and in which the phase contrast is essentially spatial frequency-independent. The phase-shifting element may have at least one means for generating a non-homogeneous or anisotropic potential. The particle beam device according to the system described herein may be provided with the phase-shifting element.

Abstract translation: 描述了用于移动粒子束的至少一部分的相位的相移元件，以及具有这种类型的相移元件的物品束装置。 在具有相移元件的相移元件和粒子束装置中，避免了影响粒子束的分量，使得实现适当的信息内容，并且相位对比度基本上与空间频率无关。 相移元件可以具有至少一个用于产生非均匀或各向异性电位的装置。 根据本文所述的系统的粒子束装置可以设置有相移元件。

公开(公告)号：US07800076B2

公开(公告)日：2010-09-21

申请号：US12297306

申请日：2007-03-31

Applicant: Stephan Uhlemann ,  Harald Rose ,  Heiko Müller

Inventor： Stephan Uhlemann ,  Harald Rose ,  Heiko Müller

IPC: H01J37/153

CPC classification number: H01J37/153 ,  H01J2237/1534

Abstract: A particle-optical corrector for eliminating both the third-order aperture aberration and the third-order extra-axial coma, using circular lenses and hexapole fields, includes three coaxially arranged hexapole fields, at least one circular lens doublet being arranged between adjacent hexapole fields and adjusted so that the center hexapole field is imaged on the hexapole fields. Between the hexapole fields, an intermediate plane prevails and the intermediate planes are conjugated with one another. The three hexapole fields are identically oriented in the Larmor reference system with the intensities of the three fields being chosen so that the image aberration coefficient of the astigmatism with three-fold symmetry becomes 0. The corrective contains two hexapole fields, in which the fields of the hexapole field pair are excited anti-symmetrically to one another, and the pairs are in each case arranged around the two intermediate planes. The orientation of the hexapole field pairs is rotated with respect to the orientation defined by the hexapole fields by a sufficient angle so that the extra-axial third order coma is corrected.

Abstract translation: 一种使用圆形透镜和六极场消除三次孔径像差和三次超外差彗差的粒子光学校正器包括三个同轴布置的六极场，至少一个圆形透镜双曲线布置在相邻的六极场之间 并调整为使六边形中心六极场成像。 在六极场之间，以中间平面为准，中间平面彼此共轭。 三个六极场在拉莫尔参考系中相同取向，选择三个场的强度，使得具有三重对称性的像散的像差系数变为0.校正包含两个六极场，其中场 六极场对被彼此反对称地激励，并且在每种情况下这些对围绕两个中间平面布置。 六极场对的取向相对于由六极场确定的取向旋转足够的角度，以便校正异轴三阶彗差。

公开(公告)号：US07012262B2

公开(公告)日：2006-03-14

申请号：US10927119

申请日：2004-08-27

Applicant: Harald Rose

Inventor： Harald Rose

IPC: H01J1/50 ,  G01N23/00 ,  G21K7/00

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  H01J37/153 ,  H01J37/3174 ,  H01J2237/1534 ,  H01J2237/3175 ,  H01J2237/31754

Abstract: The invention is directed to a corrector for correcting energy-dependent first-order aberrations of the first degree as well as third-order spherical aberrations of electron-optical lens systems. The corrector includes at least one quadropole septuplet (S1) having seven quadrupoles (Q1 to Q7). The quadrupoles are mounted symmetrically to a center plane (ZS) so as to permit excitation along a linear axis. The corrector furthermore includes at least five octopoles (O1 to O7) which can be excited within the quadrupole septuplet. In an advantageous embodiment, two quadrupole septuplets are mounted in series one behind the other. The quadrupole fields of the two quadrupole septuplets are excited antisymmetrically to a center plane lying between the two quadrupole septuplets. With such a system, all geometric third-order aberrations and additional energy-dependent first-order aberrations of the third degree and geometric fifth-order aberrations of a lens system can be corrected in addition to the axial and off-axial first-order chromatic aberrations of the first degree.

公开(公告)号：US06888145B2

公开(公告)日：2005-05-03

申请号：US10478820

申请日：2002-12-03

Applicant: Heiko Müller ,  Harald Rose

Inventor： Heiko Müller ,  Harald Rose

IPC: G01Q30/00 ,  H01J37/153 ,  H01L21/027

CPC classification number: H01J37/153 ,  H01J2237/1534

Abstract: An optical particle corrector with a straight optical axis for eliminating color and aperture aberrations in optical particle lenses includes multipole elements in the form of electric and/or magnetic quadrupole and octupole elements. There are at least twelve quadrupole elements and ten octupole elements, in which three quadrupole elements and two octupole elements are assembled into a group. These groups are arranged successively along the straight optical axis, in which a first symmetrical plane is defined between the first and second groups, a second symmetrical plane is defined between the second and third groups and a third symmetrical plane is defined between the third and fourth groups. The multipole elements from one group to another correspond to each other in pairs, in which the multipole elements of the corresponding following group are positioned in reverse order along the straight optical axis in comparison with the corresponding multipole elements of the preceding group. The structure and refractive powers of the multipole elements that correspond to each other are mirror-symmetrically configured relative to the corresponding symmetrical plane between the groups. At least two of the quadrupole elements generate electric-magnetic quadrupole fields, in which the quadrupole element are, preferably, arranged in a mirror-symmetrical manner relative to the second, or to all, symmetrical planes. An additional octupole element is arranged in the first and third symmetrical planes. The corrector enables the transmission of extremely large image fields, while the optical quality remains the same due to the fact image aberrations outside the axis can be corrected.

Abstract translation: 具有用于消除光学粒子透镜中的颜色和孔径像差的具有直线光轴的光学粒子校正器包括电和/或四极和八极元件形式的多极元件。 有至少十二个四极元件和十个八极元件，其中三个四极元件和两个八极元件组装成一组。 这些组沿着直线光轴连续布置，其中在第一和第二组之间限定第一对称平面，在第二组和第三组之间限定第二对称平面，并且在第三和第四组之间限定第三对称平面 团体 从一组到另一组的多极元件成对地相对应，其中相应的后续组的多极元件与前一组的相应多极元件相比沿着直线光轴以相反的顺序定位。 对应于多个元件的多极元件的结构和折射能力相对于组之间的相应的对称平面被镜对称地构造。 四极元件中的至少两个产生电磁四极场，其中四极元件优选地相对于第二或全部对称平面以镜像对称的方式布置。 在第一和第三对称平面中设置一个额外的八极元件。 校正器使得能够传输极大的图像场，同时光学质量保持相同，这是由于可以校正轴外的图像像差。

公开(公告)号：US06855939B2

公开(公告)日：2005-02-15

申请号：US10644037

申请日：2003-08-20

Applicant: Harald Rose ,  Dirk Preikszas ,  Peter Hartel

Inventor： Harald Rose ,  Dirk Preikszas ,  Peter Hartel

IPC: H01J37/153 ,  H01J37/28 ,  G01J1/42 ,  G01N23/00 ,  G01T1/00 ,  G21K7/00 ,  H05H000/00

CPC classification number: H01J37/153

Abstract: The invention relates to a particle beam system comprising a particle source (1), a mirror corrector (9, 21 to 25), and an objective lens (16). The mirror corrector comprises an electrostatic mirror (9) and a magnetic beam deflector (21, 22, 23, 24, 25), which is arranged between the particle source (1) and the electrostatic mirror (9) as well as between the electrostatic mirror (9) and the objective lens (16). The magnetic beam deflector (21, 22, 23, 24, 25) is free from dispersion for each single pass. The magnetic beam deflector (21, 22, 23, 24, 25) also comprises quadrupoles and/or quadrupole components, which are provided in such a manner that a maximum of two planes, which are conjugated with regard to the diffraction plane (28) of the objective lens (16), occur on the entire path length between the first outlet from the magnetic beam deflector (21, 22, 23, 24, 25) and from the objective lens (16).

Abstract translation: 本发明涉及一种包括粒子源（1），镜面校正器（9,21至25）和物镜（16）的粒子束系统。 镜面校正器包括静电镜（9）和布置在颗粒源（1）和静电反射镜（9）之间以及静电反射镜（11,22,23,24,25）之间的磁性偏转器（21,22,23,24,25） 镜（9）和物镜（16）。 对于每一次通过，磁光束偏转器（21,22,23,24,25）没有分散。 磁光束偏转器（21,22,23,24,25）还包括四极和/或四极组件，其以这样一种方式被提供，使得相对于衍射平面（28）共轭的最多两个平面， 在物镜（16）的第一出口与物镜（16）之间的整个路径长度上出现物镜16。

公开(公告)号：US5448063A

公开(公告)日：1995-09-05

申请号：US246534

申请日：1994-05-20

Applicant: Alan F. De Jong ,  Johan G. Bakker ,  Harald Rose

Inventor： Alan F. De Jong ,  Johan G. Bakker ,  Harald Rose

IPC: G21K1/093 ,  H01J37/05 ,  H01J49/46 ,  H05H7/04

CPC classification number: H01J49/46 ,  H01J37/05

Abstract: An imaging symmetrical energy filter (of the .OMEGA.-type) comprising two pairs of sector magnets (1), (2), (3), (4) for an electron microscope. The second-order chromatic aberration is corrected by arranging the two pairs of sector magnets {(1),(4) and (2),(3)} further apart. This enables suitable arrangement of the coils to generate correction hexapole fields, so that the chromatic error is even completely eliminated. Moreover, correction of the third-order aperture aberration is also possible by constructing the hexapole coil (9) in the symmetry plane also as an octupole coil. Further correction of this third-order aberration is achieved by applying an octupole field (5) directly at the entrance of the first sector magnet (1) and an octupole field (13) directly at the exit of the fourth sector magnet (4).

Abstract translation: 包括用于电子显微镜的两对扇形磁体（1），（2），（3），（4）的成像对称能量过滤器（OMEGA型）。 通过将两对扇形磁铁{（1），（4）和（2），（3）}进一步分开来校正二阶色差。 这使得能够适当地布置线圈以产生校正六极场，使得色差甚至完全消除。 此外，通过在对称平面中也作为八极线圈构造六极线圈（9），也可以校正三次孔径像差。 通过直接在第一扇形磁体（1）的入口处施加八极场（5）并直接在第四扇形磁体（4）的出口处施加八极场（13）来实现对该三阶像差的进一步校正。

公开(公告)号：US5336885A

公开(公告)日：1994-08-09

申请号：US963647

申请日：1992-10-20

Applicant: Harald Rose ,  Ralf Degenhardt ,  Karel D. Van der Mast

Inventor： Harald Rose ,  Ralf Degenhardt ,  Karel D. Van der Mast

IPC: G01Q30/06 ,  H01J37/05 ,  H01J37/26 ,  H01J37/295

CPC classification number: H01J37/26 ,  H01J37/05

Abstract: An electron beam apparatus is provided with an energy selective device which enables spectrometric measurements together with imaging. The energy selective device has its main electron beam trajectory in a plane outside the optical axis of the electron beam apparatus, thereby substantially reducing the overall length of the apparatus. Preferably the energy selective device has double symmetry such that the energy dispersion has a maximum value in a central plane of symmetry where a selective slit can be introduced. Full symmetry facilitates full compensation of optical aberrations in the device. Adding quadruples in a second plane of symmetry enables imaging of spectra at a location outside the device.

Abstract translation: 电子束装置设置有能量选择装置，其能够与成像一起进行光谱测量。 能量选择装置的主电子束轨迹位于电子束装置的光轴外侧的平面上，从而大大减小了装置的整体长度。 优选地，能量选择装置具有双对称性，使得能量色散在可以引入选择性狭缝的中心对称平面中具有最大值。 全对称有助于对器件中的光学像差进行全面补偿。 在第二个对称平面中增加四倍，可以在设备外部的位置成像光谱。

公开(公告)号：US5319207A

公开(公告)日：1994-06-07

申请号：US940844

申请日：1992-09-04

Applicant: Harald Rose ,  Ralf Degenhardt ,  Dirk Preikszas

Inventor： Harald Rose ,  Ralf Degenhardt ,  Dirk Preikszas

IPC: H01J37/12 ,  G01Q30/06 ,  H01J37/04 ,  H01J37/153 ,  H01J37/26 ,  H01J37/29 ,  H01J37/147

CPC classification number: H01J37/153 ,  H01J37/04

Abstract: The invention relates to an imaging system for charged particles having a correction unit for correcting an objective lens. The correction unit essentially includes a beam deflector and a mirror which reflects the incoming particle beam. A first symmetry plane of the deflector is imaged in the mirror. The mirror images this first symmetry plane at an imaging scale of 1:1 in a second symmetry plane of the deflector. At the same time, the symmetry planes are either intermediate image planes or diffraction planes. With the high symmetry of the imaging system, the condition is achieved that the aberrations of the second order caused by a one-time passthrough through the deflector are cancelled after the second passthrough. The mirror can be so adjusted that its negative chromatic aberration compensates for the chromatic aberration of the objective lens and the other lenses. The spherical aberration can be compensated independently thereof with the aid of a hexapole which is centered in a diffraction plane.

Abstract translation: 本发明涉及一种具有用于校正物镜的校正单元的带电粒子成像系统。 校正单元基本上包括反射入射粒子束的光束偏转器和反射镜。 偏转器的第一对称平面被成像在镜子中。 镜像在偏转器的第二对称平面中以1:1的成像尺度对该第一对称平面进行成像。 同时，对称平面是中间图像平面或衍射平面。 利用成像系统的高对称性，实现了在第二次通过之后抵消通过偏转器的一次穿过引起的二次的像差的条件。 可以对镜子进行如此调整，使得其负色差补偿物镜和其它透镜的色像差。 借助于以衍射平面为中心的六极，可以独立地补偿球面像差。